HK1180658A1 - Storage container for a dust-proof film assembly - Google Patents

Storage container for a dust-proof film assembly

Info

Publication number
HK1180658A1
HK1180658A1 HK13107847.5A HK13107847A HK1180658A1 HK 1180658 A1 HK1180658 A1 HK 1180658A1 HK 13107847 A HK13107847 A HK 13107847A HK 1180658 A1 HK1180658 A1 HK 1180658A1
Authority
HK
Hong Kong
Prior art keywords
dust
storage container
film assembly
proof film
proof
Prior art date
Application number
HK13107847.5A
Other languages
Chinese (zh)
Inventor
關原敏
Original Assignee
信越化學工業株式會社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 信越化學工業株式會社 filed Critical 信越化學工業株式會社
Publication of HK1180658A1 publication Critical patent/HK1180658A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
HK13107847.5A 2011-10-28 2013-07-04 Storage container for a dust-proof film assembly HK1180658A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011237389A JP5586559B2 (en) 2011-10-28 2011-10-28 Pellicle container

Publications (1)

Publication Number Publication Date
HK1180658A1 true HK1180658A1 (en) 2013-10-25

Family

ID=48199272

Family Applications (1)

Application Number Title Priority Date Filing Date
HK13107847.5A HK1180658A1 (en) 2011-10-28 2013-07-04 Storage container for a dust-proof film assembly

Country Status (5)

Country Link
JP (1) JP5586559B2 (en)
KR (1) KR101938158B1 (en)
CN (1) CN103086050B (en)
HK (1) HK1180658A1 (en)
TW (1) TWI474957B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6351178B2 (en) * 2015-07-13 2018-07-04 信越化学工業株式会社 Pellicle storage container and pellicle removal method
JP6706575B2 (en) * 2016-12-22 2020-06-10 信越化学工業株式会社 Pellicle frame and pellicle using the same

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2607193B2 (en) * 1991-09-30 1997-05-07 株式会社写真化学 Manufacturing method of exposure mask
JP3231206B2 (en) * 1995-02-08 2001-11-19 アルプス電気株式会社 Rotating connector
JPH09204039A (en) * 1996-01-25 1997-08-05 Shin Etsu Chem Co Ltd Pellicle frame holder
JP2000173887A (en) * 1998-12-02 2000-06-23 Asahi Kasei Denshi Kk Pellicle housing case
JP2000194122A (en) * 1998-12-28 2000-07-14 Nec Corp Pellicle
JP2000302395A (en) * 1999-04-16 2000-10-31 Komatsu Forklift Co Ltd Fork fixing device of forklift
JP4497845B2 (en) * 2003-06-04 2010-07-07 旭化成イーマテリアルズ株式会社 Large pellicle storage method
JP4354789B2 (en) * 2003-12-05 2009-10-28 松下精機株式会社 Pellicle sticking device for FPD mask
TWM249914U (en) * 2003-12-17 2004-11-11 Exon Science Inc Fast opening/closing gate for biochemical facility
JP2005326634A (en) * 2004-05-14 2005-11-24 Mitsui Chemicals Inc Method for housing pellicle
JP4391435B2 (en) * 2005-03-22 2009-12-24 信越化学工業株式会社 Pellicle storage container
JP2007039110A (en) * 2005-08-04 2007-02-15 Kyokuhei Glass Kako Kk Glass carrying pallet
JP4649363B2 (en) * 2006-04-19 2011-03-09 信越化学工業株式会社 Pellicle storage container
JP4855885B2 (en) * 2006-09-29 2012-01-18 Ｈｏｙａ株式会社 Mask case, mask cassette, pattern transfer method, and display device manufacturing method
JP5052106B2 (en) * 2006-11-22 2012-10-17 旭化成イーマテリアルズ株式会社 How to store the pellicle
JP4850679B2 (en) * 2006-12-15 2012-01-11 信越ポリマー株式会社 Substrate storage container
JP2010149885A (en) * 2008-12-24 2010-07-08 Asahi Glass Co Ltd Pallet
JP2011007827A (en) * 2009-06-23 2011-01-13 Shin Etsu Polymer Co Ltd Storage container for large precision member
JP2011034020A (en) * 2009-08-06 2011-02-17 Shin-Etsu Chemical Co Ltd Pellicle storage container

Also Published As

Publication number Publication date
KR101938158B1 (en) 2019-01-14
CN103086050B (en) 2014-12-24
CN103086050A (en) 2013-05-08
KR20130047562A (en) 2013-05-08
JP2013097046A (en) 2013-05-20
TWI474957B (en) 2015-03-01
TW201345806A (en) 2013-11-16
JP5586559B2 (en) 2014-09-10

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20221101