JP5586559B2 - Pellicle container - Google Patents

Description

  The present invention relates to a pellicle storage container for storing a pellicle having a pellicle film attached to a pellicle frame, which is used for manufacturing a semiconductor device, a printed circuit board, a liquid crystal device display, or the like.

  In the manufacture of semiconductors such as LSI and VLSI, or in the manufacture of liquid crystal displays and the like, a lithography operation is performed in which a pattern is formed by irradiating a semiconductor wafer or a liquid crystal original plate with light. At this time, if dust adheres to the photomask or the reticle, the dust absorbs light or bends the light, so that the transferred pattern is deformed or the edge is rough, Phenomena such as a black background may occur. Such work is usually performed in a clean room. However, since it is still difficult to keep the photomask clean, a pellicle in which a transparent pellicle film is attached to a pellicle frame is used. When this pellicle is placed on the photomask and exposed, foreign matter does not adhere directly to the surface of the photomask, but adheres to the pellicle film. Therefore, during lithography, the focal point is placed on the pattern of the photomask. Accordingly, the foreign matter on the pellicle film is irrelevant to the transfer.

  Such a pellicle is required to have high cleanliness because foreign matter adhering to itself also leads to foreign matter adhering to the photomask. For this reason, a pellicle storage container is used for storage and transportation. Examples of such a pellicle storage container or pellicle storage method are described in Patent Documents 1, 2, and 3 below. Specifically, in Patent Document 1, the other side surface of the pellicle frame is closely placed on the inner bottom portion of the container body made of hard resin, and is placed on the inner bottom portion of the container body. In addition, a plurality of supports that hold the pellicle frame from the periphery are scattered and installed, and the container body is covered with a hard resin lid so that the lid can be opened and closed. A pellicle container having an abutting portion that abuts against the one side surface of the pellicle frame placed on the inner surface is described.

  Patent Document 2 discloses a frame, a pellicle film bonded to the upper edge surface of the frame, an adhesive material applied to the lower edge surface of the frame, and a frame body for protecting the adhesive material. In a method of storing a large pellicle made of a protective film adhered to the lower surface in a case made of a tray and a lid, a part or all of the outer peripheral edge of the protective film of the large pellicle is protruded outward to allow a presser foot allowance. And a large pellicle is accommodated in the case by fixing the presser foot to the tray via an adhesive tape.

  Patent Document 3 discloses a container body on which a pellicle is placed, a lid body that covers the pellicle and is fitted and locked at the periphery of the container body, a metal component joined to the container body, and a pellicle frame. A pellicle comprising the same number of frame holding pins respectively inserted into a total of three or more holes provided on at least one outer surface of a pair of sides parallel to each other, and a positioning component for positioning the frame holding pins In the storage container, a pellicle storage container is described in which the positioning component is mechanically fixed to the metal component.

Japanese Utility Model Publication No. 6-45965 JP 2004-361647 A Japanese Patent No. 4391435

  The pellicle container described in Patent Document 1 has the advantage that it can be formed by injection molding and has a small number of parts, and can be used for housing a semiconductor pellicle. However, this pellicle container is not used for storing a liquid crystal pellicle having a side length exceeding 500 mm because both the lid and the container body need to be formed with high accuracy. In addition to being unable to form such a large container with high precision by vacuum molding, it is difficult to ensure the rigidity of the container itself.

  For this reason, deformation of the container is caused at the time of handling and transporting the container, and the container and the pellicle frame are rubbed to generate dust and easily deteriorate quality. As a container for a large pellicle having a side length exceeding 500 mm, as described in Patent Document 2, a part of the liner that protects the mask adhesive layer protrudes outward, and the container body is formed by an adhesive tape. There is a method that can securely fix the pellicle to the container body by inserting a pin into a recess provided on the outer surface of the pellicle frame and fixing it to the container body as described in Patent Document 3. Proposed.

  However, as in Patent Document 2, in the case where the presser allowance in which a part or all of the outer peripheral edge of the protective film of the pellicle is protruded to the outside is stuck and fixed to the container body with an adhesive tape, the work must be performed manually. It is difficult to fix on the tray in a clean state. Further, when the adhesive tape is peeled off and taken out, there is a concern that a human hand approaches the vicinity of the pellicle frame and adheres to foreign matter.

  On the other hand, as in Patent Document 3, when a pin is inserted into and removed from the hole on the outer surface of the pellicle frame and the pellicle is attached to and detached from the container body, when the pellicle is detached, human hands do not approach the pellicle so much that foreign matter does not adhere. .

  However, when the pellicle storage container storing the pellicle is transported, it is necessary to keep the insertion position of the pin inserted into the hole on the outer surface of the pellicle frame. In order to maintain the insertion position of the pin in this way, a fixing means for fixing the pin with another fastening means such as a screw, or a fixing means for fitting the pin by forming it in a slightly tapered shape and fixing it by its frictional force. Can be considered. However, when the pin is fixed by a fastening means such as a screw, it is certain that the pin is fixed, but there is a risk of dust generation. Further, when the pin is formed in a slightly tapered shape and fixed with a frictional force, it is difficult to adjust the frictional force to an appropriate magnitude, and there is a lack of reliability.

  The present invention has been made to solve the above-described problems. The pellicle fixed in a predetermined position on the container body is covered with a lid to prevent the adhesion of foreign matters, and the fixed state is maintained even during transportation. It is an object of the present invention to provide a pellicle storage container that can be reliably maintained and can be easily released from the fixed state and removed when the lid is opened.

  The pellicle storage container according to claim 1, which has been made to achieve the above object, includes a container body on which a pellicle having a pellicle film attached to a pellicle frame is placed, and the pellicle A pellicle storage container configured to be fitted and locked at the peripheral edge of the container body so as to cover the container body, and formed on the outer surface of the pellicle frame placed on the container body A plurality of pellicle fixing parts each having a pin that is rotatable in a state in which a tip part is inserted and a pin mounting part that allows the pin to be pulled out from the recess are installed in the recessed part, and the pellicle fixing part Each of the pins mounted on the pin mounting portion and the tip end portion of the pin inserted into the recess of the pellicle frame is rotated by a predetermined angle so that the tip end portion of the pin does not come out of the recess. Sea urchin, wherein the holding means for holding said pin is provided.

  The pellicle container according to claim 2 is the container according to claim 1, wherein the holding means is formed on the protrusion formed on the pin and the pin mounting portion, and the pin Is formed of a notch portion that rotates by a predetermined angle and engages with the projection portion.

  The pellicle container according to claim 3 is the container according to claim 2, wherein the inner wall surface of the lid body covering the pellicle placed on the container body is the rotation of the pin. In order to prevent this, it is characterized in that it is in contact with a part of the protrusion formed on the pin.

  The pellicle storage container according to claim 4 is the one described in claim 2 or claim 3, wherein when the pin is rotated 30 to 180 degrees, the protruding portion of the pin and the pin mounting portion The notch part of this is latched.

  The pellicle container according to claim 5 is the container according to any one of claims 1 to 4, wherein the pellicle storage container is used as a buffer member for contact with the pellicle frame at the tip of the pin. An elastic body is provided.

  The pellicle storage container described in claim 6 is the one described in any one of claims 1 to 5, wherein a tool for rotating the pin is inserted into a rear end surface of the pin. A concave portion is formed.

  The pellicle storage container according to the present invention can reliably hold the pin that fixes the pellicle to the container body while having a simple structure, and the pellicle does not come off due to the pin falling off during transportation, In addition, the pellicle accommodated is highly reliable with no fear of damage or foreign matter adhesion. Further, when the pellicle placed on the container body is taken out by opening the lid, the pellicle can be taken out from the container body simply by rotating the pin by a predetermined angle and removing it from the pin mounting portion. Thus, it becomes possible to take out the pellicle from the pellicle storage container with an extremely simple operation, and there is little risk of foreign matter adhering to the pellicle during the taking-out operation.

It is a front view which shows an example of the pellicle storage container which concerns on this invention. It is a front view of the state which removed the cover body 14 of the pellicle storage container 10 shown in FIG. It is a cross-sectional view in the XX plane of the pellicle storage container 10 shown in FIG. FIG. 4 is an enlarged partial cross-sectional view of a portion including a pellicle fixing part 18 of the pellicle storage container 10 shown in FIG. 3. It is a perspective view of the pin 28 shown in FIG. FIG. 5 is a perspective view for explaining a state in which the pin shown in FIG. It is a perspective view which shows the comparative example which hold | maintains the pin with which the pin mounting part was mounted | worn using the frictional force of a mounting hole.

  Hereinafter, although the form for implementing this invention is demonstrated in detail, the scope of the present invention is not limited to these forms.

  An example of a pellicle container according to the present invention is shown in FIG. A pellicle container 10 shown in FIG. 1 includes a rectangular container body 12 and a lid 14. A state in which the lid 14 is removed is shown in FIG. The pellicle 16 placed at the center of the container main body 12 is fixed to four pellicles arranged in the vicinity of each corner of the pellicle 16 on flat surfaces 20 and 20 formed along the long side of the container main body 12. It is fixed by the part 18.

  In this pellicle 16, a pellicle film 16b made of a transparent fluororesin or the like is attached to a pellicle frame 16a made of metal such as rectangular aluminum. The container main body 12 on which the pellicle 16 and the pellicle fixing part 18 are placed has ribs 12a and 12a on the bottom of the container main body 12, as shown in FIG. Formed and reinforced. The container body 12 and the lid body 14 are made by vacuum molding a synthetic resin sheet such as ABS or acrylic. This is because the vacuum molding method can easily mold a large container simply by placing a heated resin sheet on a mold and vacuuming. On the other hand, in the injection molding method in which the resin is injected at a high speed into the mold from one or several gates, the resin flow distance is too long, and thus it tends to be difficult to manufacture a large container.

  As shown in FIG. 4, a pellicle 16 is placed on the container body 12 via a liner 22 and a mask adhesive layer 24. The pellicle 16 is placed at a predetermined position by four pellicle fixing portions 18 (FIG. 3). It is fixed to. As shown in FIG. 3, the pellicle 16 is covered with a lid body 14 and accommodated in the pericylyl container 10. The container main body 12 and the lid body 14 are fitted and locked at the peripheral edge thereof. Further, as shown in FIG. 4, the pellicle fixing portion 18 can be rotated in a state where the distal end portion 28 a is inserted into the concave portion 26 opened on the side surface of the pellicle frame 16 a placed at a predetermined position of the container body 12. The pin 28 and a pin mounting portion 32 for mounting the pin 28 so as to be removable from the recess 26 are provided. As shown in FIG. 5, the pin 28 is formed of a front end portion 28a, an intermediate portion 28b, and a rear end portion 28c, and constitutes a holding means for the pin 28 between the intermediate portion 28b and the rear end portion 28c. A protrusion 30 is formed. The protrusion 30 is formed with an inclined surface with a tapered tip. The rear end portion 28c of the pin 28 is an operation portion that rotates the pin 28 and is formed thicker than the front end portion 28a and the intermediate portion 28b. A tool recess 36 into which a tool for turning the pin 28 is inserted is formed on the end face of the rear end portion 28c.

  The tool recess 36 of the pin 28 shown in FIG. 5 is formed in a hexagon so that the tip of a hexagon wrench can be inserted. Further, the intermediate portion 28b of the pin 28 is formed to be thicker than the tip portion 28a, and a step 28e is formed at the boundary between the tip portion 28a and the intermediate portion 28b of the pin 28. The step 28e contacts the side surface of the pellicle frame 16a. A ring-shaped elastic body 34 is attached to the step 28e as a buffer member that relaxes the contact between the step 28e and the side surface of the pellicle frame 16a. As the elastic body 34, rubbers such as nitrile rubber, ethylene propylene rubber, silicone rubber, and fluorine rubber can be used.

  As shown in FIG. 4, the pin mounting portion 32 to which the pin 28 is detachably mounted is attached to the flat surface 20 of the container body 12 by a fastening means (not shown) such as a screw. As shown in FIG. 6A, the pin mounting portion 32 is a tetrahedron, and one end of the U-shaped groove 32a into which the protrusion 30 and the rear end portion 28c formed in the pin 28 are inserted is a tetrahedron. Is open on one side. The other end of the U-shaped groove 32a is opened on one surface side of the inner wall surface of a rectangular notch 32b formed near the center of the tetrahedron. The notch 32b constitutes a protrusion 30 and a holding means, and the protrusion 30 formed between the intermediate portion 28b and the rear end 28c of the pin 28 is rotatably inserted. Furthermore, a part of the tip portion 28a and the intermediate portion 28b of the pin 28 is inserted into the inner wall surface of the cutout portion 32b and the other surface side corresponding to the one surface side where the other end of the U-shaped groove 32a is opened. A hole 32c is opened.

  As shown in FIG. 6A, the pin mounting portion 32 is mounted with a pin 28 having an elastic body 34 inserted into the step 28e. The pin 28 inserts the protruding portion 30 of the pin 28 into the notch 32b from the U-shaped groove 32a while inserting the tip portion 28a and the intermediate portion 28b of the pin 28 into the hole 32c of the pin mounting portion 32, and the rear end portion. 28c is inserted into the U-shaped groove 32a. When the pin 28 is mounted on the pin mounting portion 32, as shown in FIG. 6B, the tip portion 28 a and part of the intermediate portion 28 b of the pin 28 protrude from the pin mounting portion 32. The pin 28 in the state shown in FIG. 6B can be pulled out from the U-shaped groove 32 a and the notch 32 b of the pin mounting portion 32. For this reason, the pin 28 is rotated in the direction of the arrow shown in FIG. By the rotation of the pin 28, the protrusion 30 is also rotated, and the protrusion 30 and the inner wall surface of the notch 32b are locked as shown in FIG. Due to the locking of the protrusion 30 and the notch 32b, the pin 28 is held by the pin mounting portion 32 and cannot be pulled out.

  On the other hand, when the locking of the protrusion 30 and the notch 32b shown in FIG. 6C is released, the pin 28 is rotated in the direction opposite to the arrow shown in FIG. As shown in (b), the locking between the protrusion 30 and the inner wall surface of the notch 32 b can be released, and the pin 28 can be easily pulled out from the pin mounting portion 32. The rotation angle of the pin 28 for locking or releasing the protrusion 30 and the notch 32b is in the range of 30 to 180 degrees, particularly 45 to 90 degrees from the viewpoint of operability and locking reliability. It is preferable that The rotation of the pin 28 is preferably performed by inserting the tip of a hexagon wrench into the tool recess 36 formed on the end face of the rear end 28c of the pin 28.

  As shown in FIG. 6C, the pin mounting portion 32 holding the pin 28 is formed along the long side of the container body 12 as the pellicle fixing portion 18 that fixes the pellicle 16 placed on the container body 12. It attaches to the predetermined location of the flat surface 20 made. At this time, the pellicle fixing portion 18 is set so that the tip 28a of the pin 28 is inserted into the recess 26 of the pellicle frame 16a as shown in FIG. Such attachment is performed by fastening means such as screws. As this fastening means, it is possible to provide a female screw part with a metal insert part or the like in the pin mounting part 32 and to fix the bolt from the outside of the container body 12, so that a part such as a screw is exposed in the pellicle housing container 10. It is preferable from the viewpoint of maintaining cleanliness. Further, the bolt is preferably fixed through a resin washer or the like. In particular, after the pin mounting portion 32 is fixed to the container body 12, the tangent portion between the resin parts is further dissolved and bonded with an organic solvent or the like. It is preferable from the viewpoint of dust generation prevention.

  By the way, as shown in FIG. 6C, the pin 28 rotates due to vibration during transportation and the like when the pellicle fixing portion 18 is in a state where the protrusion 30 and the notch 32b are locked. There is a possibility that the lock between the notch 30 and the notch 32b is released. As shown in FIG. 4, the rotation of the pin 28 is performed by covering the pellicle 16 so that the inner wall surface of the lid body 14 comes into contact with a part of the projection 30 that is locked to the notch 32b. Can be prevented. Even in this case, the pin 28 can be rotated so that the engagement between the notch 32b and the protrusion 30 can be released by removing the lid 14.

  The pin 28 shown in FIGS. 1 to 6 can be manufactured by integral molding of resin by injection molding, transfer molding, or the like. As a material, epoxy resin, ABS resin (acrylonitrile butadiene styrene resin), PPS resin (polyphenylene sulfide resin), PE resin (polyethylene resin), PEEK resin (polyether ether ketone resin), etc. can be used. It is also preferable to improve the strength by mixing a filler such as glass fiber. The pin mounting portion 32 for mounting the pin 28 can be manufactured by integral molding of resin by injection molding, transfer molding, or the like. As the material, epoxy resin, ABS resin (acrylonitrile butadiene styrene resin), PPS resin (polyphenylene sulfide resin), PE resin (polyethylene resin), PEEK resin (polyether ether ketone resin) and the like can be used.

  According to the pellicle storage container 10 shown in FIGS. 1 to 6, the tip end portion 28 a of the pin 28 attached to the pin attachment portion 32 constituting the pellicle fixing portion 18 is used as the recess 26 of the pellicle frame 16 a placed on the container body 12. After the insertion, the pellicle 16 can be securely held on the container body 12 by rotating the pin 28. Furthermore, since a part of the protrusion 30 of the pin 28 that is locked to the pin mounting portion 32 is in contact with the inner wall surface of the lid 14 that is attached to the container body 12, the pin is caused by vibration during transportation. 28 can be prevented from rotating, and the pin 28 can be reliably prevented from being unfastened due to dropping of the pin 28 during transportation. The pellicle storage container 10 is highly reliable without causing damage or foreign matter adhesion to the stored pellicle 16. Further, when the lid 14 is opened and the pellicle 16 placed on the container main body 12 is taken out, the pellicle 16 is taken out from the container main body 12 simply by rotating the pin 28 by a predetermined angle and pulling it out from the pin mounting portion 32. be able to. For this reason, the pellicle storage container 10 can be easily taken out of the pellicle 16.

  In the pellicle storage container 10 shown in FIGS. 1 to 6, the pellicle 16 is arranged on four flat surfaces 20 and 20 formed along the long side of the container body 12, and arranged in the vicinity of each corner of the pellicle 16. Although fixed by the pellicle fixing unit 18, four or more pellicle fixing units 18 may be provided. Further, the pellicle fixing portion 18 may be disposed along the short side of the container body 12 or may be disposed along each of the long side and the short side.

  Examples of the present invention will be described in detail below, but the scope of the present invention is not limited to these examples.

Example 1
Using a sheet material made of an antistatic ABS resin, the container main body 12 and the lid body 14 having the shapes shown in FIGS. 1 and 2 were manufactured by vacuum forming. The container main body 12 and the lid body 14 are fitted and locked at the periphery thereof to form the pellicle storage container 10 shown in FIG. The pellicle container 10 has an outer shape of 890 × 690 mm and a height of 70 mm. The sheet material used for the molding is a transparent 3 mm material for the lid body 14 and a black 5 mm material for the container body 12.

  Furthermore, the pin mounting part 32 shown in FIG. 6 using ABS resin and the pin 28 shown in FIG. 5 using PPS resin were manufactured by injection molding. The pin 28 is formed of a front end portion 28a, an intermediate portion 28b, and a rear end portion 28c, and a protrusion 30 constituting a holding means for the pin 28 is formed between the intermediate portion 28b and the rear end portion 28c. . The protrusion 30 is formed with an inclined surface with a tapered tip. The rear end portion 28c of the pin 28 is an operation portion that rotates the pin 28 and is formed thicker than the front end portion 28a and the intermediate portion 28b. On the end face of the rear end portion 28c, a tool recess 36 into which a tip end portion of a rotating hexagon wrench for the pin 28 is inserted is formed. In the pin 28, the intermediate part 28b is formed thicker than the tip part 28a, and a step 28e is formed at the boundary between the tip part 28a and the intermediate part 28b of the pin 28.

  The pin mounting portion 32 is a tetrahedron, and one end of the U-shaped groove 32a into which the protrusion 30 and the rear end portion 28c of the pin 28 are inserted is opened on one surface side of the tetrahedron. The other end of the U-shaped groove 32a is opened on one surface side of the inner wall surface of a rectangular notch 32b formed near the center of the tetrahedron. The notch 32b forms a holding means with the protrusion 30 of the pin 28, and the protrusion 30 formed between the intermediate portion 28b and the rear end 28c of the pin 28 is rotatably inserted. Further, on the inner wall surface of the cutout portion 32b and on the other surface side corresponding to the one surface side where the other end of the U-shaped groove 32a is opened, a hole 32c into which the tip portion 28a and the intermediate portion 28b of the pin 28 are inserted. Is open. Four pin insertion nuts (not shown) made of copper are provided on the lower surface side of the pin mounting portion 32.

  Next, as shown in FIG. 6A, the pin 28 is inserted into the pin mounting portion 32, and as shown in FIG. 6B, the protruding portion 30 of the pin 28 is inserted into the notch 32b of the pin mounting portion 32. did. Further, the rear end portion 28c of the pin 28 is rotated 45 degrees to the right, and the projection 30 and the inner wall surface of the notch 32b are locked as shown in FIG. At this time, the inclined surface of the protrusion 30 was made horizontal. Further, a pellicle fixing portion 18 is formed by attaching a ring-shaped elastic body 34 made of fluoro rubber having a thickness of 0.5 mm to a step 28 e at the boundary between the tip portion 28 a and the intermediate portion 28 b protruding from the pin mounting portion 32. . The pellicle fixing part 18 was placed at a predetermined location on the flat surface 20 of the container body 12 and attached to a position where the tip 28a of the pin 28 was inserted into the recess 26 of the pellicle frame 16a as shown in FIG. This attachment was performed from the outside of the container body 12 using a stainless steel hexagon socket head cap screw (not shown). At that time, a POM resin plate (thickness: 1.5 mm) was sandwiched to improve the sealing performance. The pellicle container 10 thus formed was carried into a Class 10 clean room, thoroughly washed with a surfactant and pure water, and then completely dried. As shown in FIG. 6C, the protrusion 30 of the pin 28 is an inclined surface that becomes horizontal when the pin 28 is rotated to lock the protrusion 30 and the inner wall surface of the notch 32b. When the lid 14 was attached to the container main body 12, the lid 14 contacted the inner wall surface of the lid 14.

  In this clean room, a pellicle 16 having an outer dimension of 797 mm × 474 mm, an inner dimension of 789 mm × 456 mm, and a height of 5.9 mm was manufactured separately from the pellicle container 10. For this pellicle 16, a pellicle frame 16a (thickness: 4.8 mm) made of aluminum alloy, a silicone pressure-sensitive adhesive as a mask pressure-sensitive adhesive and a pellicle film adhesive, and a fluororesin having a thickness of 3 μm as a pellicle film 16b were used. Each of the long sides of the pellicle frame 16a has two recesses 26 with a diameter of 2.5 mm and a depth of 1.8 mm at intervals of 710 mm, and each short side has a width of 1.5 mm and a depth of 2. A 3 mm groove (not shown) was provided. The pellicle 16 was stored in the pellicle storage container 10 after a foreign matter inspection with a condenser lamp in a dark room. At this time, after the tip of the pin 28 of the pellicle fixing portion 18 provided in the container body 12 is inserted into the recess 26 of the pellicle frame 16a, the pin 28 is rotated as shown in FIG. Was fixed to the container body 12 and the lid 14 was attached. Furthermore, after attaching the peripheral part of the cover body 14 and the container main body 12 with a 35-mm-wide PVC adhesive tape (not shown), two urethane clips (not shown) are provided on each long side. Attached. Finally, it was double-packed in an antistatic PE bag with a clean interior and stored in a reinforced cardboard packaging box (not shown) with a cushioning material inside.

  A reinforced corrugated cardboard packaging box in which the pellicle storage container 10 was packed in this way was transported from Gunma to Fukuoka (a truck between Gunma Prefecture and Tokyo and an aircraft between Tokyo and Fukuoka). The transported pellicle container 10 was carried into a clean room and the inside was checked. The pin 28 was securely held by the pin mounting portion 32, and the pellicle 16 was securely fixed to the container body 12 while the tip end portion 28a was also inserted into the recess 26 of the pellicle frame 16a. In the state as it is, the state of dust generation on the container body 12 was confirmed by irradiating a condenser lamp, but no foreign matter was found near the pellicle fixing part 18 and on the container body 10. Further, a hexagon wrench was inserted into the tool recess 36 of the pin 28, and the pin 28 was rotated to release the locking between the protrusion 30 and the notch 32b. Next, the pellicle 16 was taken out from the container body 12 and transported into the dark room, and foreign matter adhering to the surface of the pellicle 16 was inspected by a condenser lamp. As a result, no foreign matter was attached to the pellicle 16, and a very clean state was maintained.

(Comparative Example 1)
A pellicle fixing part 100 shown in FIG. 7 was manufactured. A pin 102 constituting the pellicle fixing part 100 shown in FIG. 7 is formed of a cylindrical member made of PPS resin, and includes a front end part 102a, an intermediate part 102b, and a rear end part 102c. The thickness is the order of the front end portion 102a <intermediate portion 102b <rear end portion 102c. A step is formed at the boundary between the front end portion 102a and the intermediate portion 102b, and the ring-shaped elastic body 106 made of fluororubber It is installed. Such a pin 102 does not have the protrusion 30 formed on the pin 28 shown in FIG. The pin mounting portion 104 to which the pin 102 is mounted was formed by injection molding using ABS resin. The pin mounting portion 104 is formed with a through-hole 108 through which a part of the front end portion 102a and the intermediate portion 102b of the pin 28 can pass and into which the remaining portion of the intermediate portion 102b and the rear end portion 102c are inserted. The pin mounting portion 104 is not formed with the U-shaped groove 32a and the cutout portion 32b unlike the pin mounting portion 32 shown in FIG. Therefore, in the pin mounting portion 104, the inner diameter of the through hole 108 is such that the pin 102 inserted into the through hole 108 is fixed by the frictional force between the outer wall surface and the inner wall surface of the through hole 108. The diameter is gradually reduced in the insertion direction of 102. 7, the pin 102 is fixed to the through hole 108 of the pin mounting portion 104 by frictional force.

  The pellicle fixing part 100 shown in FIG. 7 was attached to the container body 12 in the same manner as in Example 1. Next, the tip end portion 102 a of the pin 102 constituting the pellicle fixing unit 100 was inserted into the concave portion 26 of the pellicle frame 16 a of the pellicle 16 placed on the container main body 12, and the pellicle 16 was fixed to the container main body 12. Further, the lid body 14 was attached to the container body 12 to form the pellicle storage container 10 in which the pellicle 16 was stored. Thereafter, in the same manner as in Example 1, the pellicle container 10 was packed and a transportation test was performed.

  The transported pellicle container 10 was carried into a clean room and the inside was checked. Then, although the pellicle 16 remained on the container main body 12, it was confirmed that the pin 102 had come off from the pin mounting portion 104 at one location among the four pellicle fixing portions 100. Further, the tip end portion 104a is also removed from the recess 26 of the pellicle frame 16a, and the tip end portion 104a is rubbed against the outer surface of the pellicle frame 16a, and several tens of foreign matters having a diameter of several tens of μm are attached. Further, when the dust generation state on the container body 12 was confirmed by irradiating the condenser lamp in the state as it was, adhesion of foreign matter was also observed in the vicinity of the pellicle fixing part 100 facing the pellicle fixing part 100 that had been detached. It was. Further, the pin 102 was carefully pulled out from the pin mounting portion 104 with a hand wearing a nitrile glove, the pellicle 16 was transported into the dark room, and the foreign matter adhering to the surface was inspected with a condenser lamp. As a result, twelve foreign matters having a diameter of about 10 to 20 μm were adhered on the pellicle film 16b. Further, about half of them were distributed around the pellicle fixing part 100.

  The pellicle container according to the present invention can be used as a container for a pellicle for a semiconductor device, and can be used as a container for a liquid crystal pellicle that is larger than the pellicle for a semiconductor device.

  10 is a pellicle container, 12 is a container body, 12a is a rib, 14 is a lid, 16 is a pellicle, 16a is a pellicle frame, 16b is a pellicle film, 18 and 100 are pellicle fixing parts, 20 is a flat surface, and 22 is a liner. , 24 is a mask adhesive layer, 26 is a recess, 28 and 102 are pins, 28a and 102a are front end portions, 28b and 102b are intermediate portions, 28c and 102c are rear end portions, 28e is a step, 30 is a projection portion, 32, 104 is a pin mounting part, 32a is a U-shaped groove, 32b is a notch part, 32c is a hole, 34 and 106 are elastic bodies, 36 is a tool recess, and 108 is a through hole.

Claims (6)

A pellicle storage container comprising a container main body on which a pellicle having a pellicle film attached to a pellicle frame is placed, and a lid that is fitted and locked at the periphery of the container main body so as to cover the pellicle Because
The container body is mounted with a pin that can be rotated in a state in which a tip portion is inserted into a recess formed on the outer surface of the mounted pellicle frame, and a pin that is mounted so that the pin can be removed from the recess. A plurality of pellicle fixing parts provided with a
Each pin of the pellicle fixing portion is attached to the pin mounting portion, and the tip portion of the pin inserted into the recess of the pellicle frame is rotated by a predetermined angle so that the tip portion of the pin does not come out of the recess. As described above, the pellicle container is provided with a holding means for holding the pin.   The holding means includes a protrusion formed on the pin and a notch formed on the pin mounting portion, the pin being rotated by a predetermined angle to be engaged with the protrusion. The pellicle storage container according to claim 1.   The inner wall surface of the lid that covers the pellicle placed on the container body is in contact with a part of the protrusion formed on the pin so as to prevent the pin from rotating. The pellicle storage container according to claim 2.   4. The pellicle container according to claim 2, wherein when the pin is rotated 30 to 180 degrees, the protruding portion of the pin and the notch portion of the pin mounting portion are locked. 5.   The pellicle storage container according to any one of claims 1 to 4, wherein an elastic body as a buffer member for contact with the pellicle frame is provided at a tip portion of the pin. The pellicle storage container according to any one of claims 1 to 5, wherein a tool recess into which a tool for rotating the pin is inserted is formed on a rear end surface of the pin.

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