KR102018069B1 - Pellicle container - Google Patents

Abstract

(Problem) Provided is a light and highly rigid pellicle storage container in which a minimum reinforcing body is attached to a container body made of resin that changes with time.
(Solution means) The container main body 14 is provided with a container body 14 made of a rectangular resin for loading the pellicle 12, and a resin cover 16 made of resin, which is locked to fit at the circumferential edge thereof to cover the pellicle 12. The projecting surface 18a of the convex rib 18 formed along the outer circumferential edge of 14 is a pellicle container 10 formed on the loading surface of the pellicle 12, which is an outer bottom surface of the container body 14, Moreover, the resizable body attached between the outer periphery and the convex rib 18 includes the adjustable frame-like body or the container main body 14 including a straight rod 26a fixed along each side of the outer periphery. Each corner portion of the L-shaped body is fixed independently of each other.

Description

Pellicle storage container {PELLICLE CONTAINER}

The present invention relates to a pellicle container.

In the manufacture of semiconductors such as LSI and ultra-LSI, or the production of liquid crystal displays, a lithography operation is performed in which light is irradiated onto a semiconductor wafer or a liquid crystal display plate to form a pattern. At this time, if dust adheres to the photomask or reticle, the transferred pattern may be deformed or the edges may not be smooth. In addition, there may be a phenomenon such as that the lower surface is contaminated black. This is because dust absorbs light or distorts it. Although this operation is usually performed in a clean room, it is difficult to keep the photomask clean all the time, and a pellicle having a transparent pellicle film adhered to the pellicle frame is used. For example, during lithography, the pellicle can be transferred onto the photomask to prevent the adhesion of the foreign material to the photomask while the focal point is exposed on the pattern of the photomask to expose the pellicle without being affected by the foreign matter attached to the pellicle film. .

On the other hand, when the pellicle is attached to itself, the pellicle is also connected to the foreign material attached to the photomask, and high cleanliness is required. When storing or transporting a pellicle, a pellicle container is used. The pellicle container is generally made of a resin molded by injection molding or vacuum molding. It is because the pellicle container made from resin is smooth in surface and there is little possibility of oscillation.

In order to keep the inside containing the pellicle clean, the pellicle container is required to have rigidity that is hard to deform even when external force is applied during transportation or the like. However, since the rigidity is limited in a pellicle container made of resin, as described in Patent Documents 1 and 2 below, a reinforcement such as an aluminum alloy rod or a square pipe is placed on the outer surface of the container body. Or it attaches in a "目" shape and ensures rigidity is performed.

Japanese Patent Publication No. 2005-170507 Japanese Patent No. 4391435

As described in Patent Literature 1 and Patent Literature 2, when a plurality of reinforcing bodies are attached to the outer surface of the container body in order to provide sufficient rigidity to the pellicle storage container made of resin, the weight and manufacturing cost of the pellicle storage container increase. . For this reason, the reinforcement body which adheres to a pellicle container is calculated | required to acquire the minimum sufficient reinforcement effect.

Since the pellicle container made of resin is molded by injection molding or vacuum molding as described above, the molding stress gradually opens after molding, and the shape and dimensions change with time. The change over time increases as the pellicle container becomes large. When attaching a reinforcement to the container main body of the pellicle container which changed with time, the position shift occurs in the apparatus hole previously formed in the container main body, and a situation where reinforcement cannot be installed is also caused.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and provides a lightweight and highly rigid pellicle container that can easily attach the minimum reinforcement required to a resin container body that has changed over time. The purpose.

The pellicle container according to claim 1 of the claims made in order to achieve the above object is a rectangular resin container body for loading a pellicle, and a resin cover covering the pellicle by fitting locking at the peripheral edge thereof. A pellicle storage container having a sieve and having a protruding surface of a convex rib formed along an outer circumferential edge of the container body formed on a loading surface of the pellicle, which is an outer bottom surface of the container body and whose outer circumferential edge and the convex shape. The reinforcement attached between the ribs is an adjustable frame shape including a rod-shaped body fixed along each side of the outer circumferential edge, or an L-shaped body independently fixed to each corner of the container body. It is characterized by.

The pellicle container according to claim 2 is described in claim 1, wherein the frame-shaped body is composed of the straight rod-shaped body and an L-shaped body disposed at a corner of the container body, and the size of the frame-shaped body can be adjusted. The position where the rod-shaped body and the L-shaped body are attached can be changed.

The pellicle container according to claim 3 is described in claim 1 or 2, wherein the L-shaped member is formed such that its corner portion is flat or curved.

The pellicle container according to claim 4 is described in any one of claims 1 to 3, and the pellicle has a length of at least one side of 500 mm or more.

The pellicle container according to claim 5 is described in any one of claims 1 to 4, and the bottom face of the reinforcement and the outer bottom face of the container body are faces of the same height.

The pellicle container according to claim 6 is described in any one of claims 1 to 5, and both ends thereof are formed on two convex ribs that form the corner portions at each corner of the bottom region of the container body surrounded by the convex ribs. The corner rib to be connected is formed.

The pellicle container according to claim 7 is described in any one of claims 1 to 6, and a holding means used for conveyance of the pellicle container is provided on the reinforcing body attached to opposite sides of the container body. It is characterized by that.

The pellicle container according to claim 8 is described in any one of claims 1 to 7, and a plate body that covers the entire outer bottom of the container body is mounted.

(Effects of the Invention)

According to the present invention, the minimum required reinforcement can be easily attached to a pellicle container made of resin in which changes in time or the like have occurred, and a light and highly rigid pellicle container can be provided.

1 is a longitudinal sectional view and a partially enlarged cross-sectional view showing an example of a pellicle container according to the present invention.
FIG. 2 is a front view of the container body 14 shown in FIG. 1.
FIG. 3 is a cross-sectional view taken along arrow AA of the container body 14 shown in FIG. 2.
4 is a front view illustrating an example of use as a reinforcement body of the container body 14 shown in FIG. 1.
FIG. 5: is a perspective view of L-shaped bodies 26c and 26d which form the corner part of the reinforcement body shown in FIG.
6 is a front view and an enlarged view showing another example of use as the reinforcement of the container body 14.
It is a longitudinal cross-sectional view which shows the other example of the pellicle container which concerns on this invention.

An example of the pellicle container which concerns on this invention is shown in FIG. FIG. 1: is a longitudinal cross-sectional view of the pellicle container 10, Comprising: The rectangular resin container main body 14 and resin lid 16 on which the pellicle 12 was mounted are fitted and locked by the circumferential edge part. The container body 14 and the lid 16 may be subjected to injection molding or vacuum molding using thermoplastic resins such as acrylic resin (PMMA resin), acrylic-butadiene-styrene resin (ABS resin), and polycarbonate resin (PC resin). It can manufacture. In particular, it is preferable that the container main body 14 and the lid | cover body 16 for the large size pellicle 12 whose side length exceeds 500 mm are manufactured by vacuum molding. It is preferable to make the container main body 14 black for a foreign material inspection, and it is preferable that the cover body 16 is transparent or translucent so that an inside can be visually recognized. It is preferable that the container main body 14 and the lid 16 are subjected to an antistatic treatment from the viewpoint of preventing foreign matter adhesion.

The pellicle 12 loaded on the container main body 14 and covered with the lid 16 is made of aluminum, stainless steel, polyethylene or the like as shown in a partial enlarged view of the pellicle storage container 10 shown in FIG. A transparent pellicle film 12b such as nitrocellulose, cellulose acetate or fluororesin is attached or adhered to the upper surface of the frame 12a. In addition, the lower surface of the pellicle frame 12a has a composite layer made of a pressure-sensitive adhesive layer made of polybutene resin, polyvinyl acetate resin, acrylic resin, etc. for mounting on a photomask, and a release layer (separator) protecting the pressure-sensitive adhesive layer ( 12c) is formed.

The pellicle 12 is in the vicinity of the outer peripheral edge of the container main body 14, and is mounted in the protruding surface 18a of the convex rib 18 formed along the outer peripheral edge. The convex rib 18 and the protrusion surface 18a are rectangular as shown in FIG. 2 which is the top view of the container main body 14. As shown in FIG. The protruding surface 18a is formed with the width | variety of a long side direction wider than the width of a short side direction. As shown in FIG. 3 which is sectional drawing in the arrow A-A surface shown in FIG. 2, the some holding member 24 is provided in the protruding surface 18a of a long side direction. The holding member 24 detachably holds the pellicle 12 mounted on the protruding surface 18a, and is formed with a recess (not shown in the drawing) formed on the side of the pellicle frame 12a mounted on the protruding surface 18a. ) And a pin support 24b to be inserted / removably inserted into the pin 24a. According to the pin support 24b, the pellicle 12 mounted on the protruding surface 18a of the convex rib 18 inserts the pin 24a of the holding member 24 into the side recess of the pellicle frame 12a. The pellicle 12 can be released by pulling out the pin 24a from the pin support 24b on the other hand.

Between the convex rib 18 and the outer peripheral edge of the container main body 14, as shown in FIG. 1, the recessed part 22 formed by folding the outer peripheral part of the container main body 14 along the convex rib 18 is shown. Formed. By folding back, the rigidity of the peripheral edge part of the container main body 14, especially the rigidity with respect to the bending deformation to the long side direction and the short side direction of the container main body 14 can be improved. Moreover, when the outer peripheral edge of the lid | cover 16 is fitted and locked to the recessed part 22, the joining strength with the lid | cover 16 is improved, and the intensity | strength of the whole pellicle container 10 can be improved.

In the bottom area | region enclosed by the convex rib 18 of the container main body 14, as shown in FIGS. 1-3, the rhombic rib 20a is formed in the center part, and the two convex rib 18 orthogonally crosses, Corner portions 20b are formed at the corner portions of 18 so that both ends thereof are connected to the convex ribs 18 and 18. Since the lozenge rib 20a and the corner rib 20b cross the diagonal X of the container main body 14, the torsional deformation of the container main body 14 can be prevented effectively. Since the lozenge rib 20a and the corner rib 20b do not cross each other, the side surfaces of the lozenge rib 20a and the corner rib 20b are not cut off and the connection portion does not become a starting point of deformation, thereby providing a great reinforcement effect. Can be obtained.

The rectangular frame-shaped body 26 shown in FIG. 4 is attached to the outer bottom face of the container main body 14 reinforced with ribs etc. in this way, and the container main body 14 with ribs etc. reinforce and rigidity It is raising. The frame body 26 is lighter than the conventional "day" or "目" shape reinforcement body. The straight rod 26a forming the long side of the frame 26 and the straight rod 26b forming the short side are connected by plate-shaped L-shaped bodies 26c and 26d. The straight rods 26a and 26b are solid bodies that are made of a material that is hard to corrode, such as aluminum alloy, and are lightweight and have high rigidity, and have a rectangular cross-sectional shape. The L-shaped bodies 26c and 26d can preferably be made of steel or stainless steel, and can be made of aluminum alloy if a thick one can be employed. The L-shaped body 26c is provided outside the frame-shaped body 26, and the L-shaped body 26d is provided inside the frame-shaped body 26. As shown in FIG. The straight rods 26a and 26b and the L-shaped bodies 26c and 26d are fastened by the fastening bolts 30 and 30. Since the long holes 32 and 32 are formed in the L-shaped bodies 26c and 26d, the attachment positions of the L-shaped bodies 26c and 26d and the straight rods 26a and 26b are shown. Can be adjusted.

Installation of the frame body 26 to the container main body 14 is carried out to the screw holes 34 and 34 of the rod-shaped bodies 26a and 26b which contacted the outer bottom face of the recessed part 22 of the container main body 14, As shown in FIG. 1 and FIG. 3, it is made by twisting the attachment bolt 28 inserted from the inside of the recessed part 22. FIG. It is preferable that the attachment bolt 28 is metal from a viewpoint of strength, and it is especially preferable to provide a flange in the fastening surface. The exposed portion of the attachment bolt 28 into the container body 14 is coated with a resin, and the boundary portion of the attachment bolt 28 with the container body 14 is dissolved in an organic solvent or the like to dissolve and loosen the dust from the gap. It is desirable to prevent this.

The L-shape 26c, 26d which comprises the corner part of the frame-shaped body 26 is not provided with the attachment means to the container main body 14, The L-shape is loosened by loosening the fastening bolts 30 and 30. The positions 26c and 26d can be adjusted along the long holes 32 and 32. For this reason, even if the dimension of the container main body 14 is changed by the nonuniformity at the time of manufacture, or the change with time, the fastening bolts 30 and 30 are loosened, the L-shaped bodies 26c and 26d are moved, and a straight rod shape body ( The positional relationship with 26a, 26b can be adjusted easily, and the frame-shaped body 26 can be attached to the outer bottom face of the recessed part 22 of the deformed container main body 14. Thus, in the frame body 26 attached to the bottom face side of the recessed part 22 of the container main body 14, as for the bottom face of the rod-shaped bodies 26a and 26b, as shown to FIG. 1 and FIG. Since it is a surface having the same height as the outer bottom surface of the), even when the frame shaped body 26 comes into contact with another article during transportation of the pellicle storage container, the other shaped article is not damaged, and the frame shaped body 26 is shaved. Oscillation can also be prevented.

As shown in FIG. 4, the U-shaped handles 37 and 37 as gripping means are attached to the rod-shaped bodies 26b and 26b which form the short side of the frame-shaped body 26, and oppose each other. The handles 37 and 37 are fastened by bolts (not shown) to stainless rods 26b and 26b. By carrying out the conveyance of a pellicle container by holding the handles 37 and 37, the generation | occurrence | production of deformation | transformation, etc. by holding the container main body 14 and / or the lid | cover 16 can be suppressed, and the pellicle 12 accommodated was received. The possibility of adhering the foreign material to) can be greatly reduced. The handles 37 and 37 may be plate-shaped protrusions or may be attached to other places of the frame-shaped body 26.

The L-shaped bodies 26c and 26d forming the corner portions of the frame 26 are preferably processed into chamfers or curved surfaces whose corner portions are cut out in a plane. For example, as shown in FIG. 5, when the container main body 14 deforms in the torsion direction by forming the corner portions of the L-shaped bodies 26c and 26d in the planes 36 and 36, the planes 36 and 36 are deformed. Since it becomes a resistance surface, it is preferable to form the surface 36 so that height and length may be made as long as possible. Specifically, it is preferable to form the surface 36 having a height of 20 to 50 mm and a length of 40 to 100 mm.

The frame body 26 as a reinforcement body shown in FIG. 4 has a container body (even if a change occurs with time or the like in the container body 14 made of a large resin in which a large pellicle 12 having one side is 500 mm or more). 14) can be attached. This is because the positional relationship with the straight rods 26a and 26b can be adjusted by moving the L-shaped bodies 26c and 26d of the frame 26 and the size of the frame 26 can be adjusted. In addition, the frame body 26 as a reinforcement body is lighter than the conventional "day" or "目" shape reinforcement body, and has a pellicle container provided with the container main body 14 with the frame shape body 26 attached. Numeral 10 is light and high rigidity.

Moreover, as another embodiment, as shown in FIG. 6 which is the back view of the container main body 14, the plate-shaped L-shaped body 38 fixed to each corner part of the container main body 14 independently from each other is reinforced. Can be used as The L-shaped body 38 is also fixed to the bottom face side of the recess 22 by an attachment bolt 28 from the inside of the recess 22. The container body 14 whose corner part is reinforced by the L-shaped body 38 can fully oppose the deformation | transformation of a torsion direction. In particular, as in the L-shaped body 38 shown in Fig. 6 (b), the plane 38a has a resistance surface against the stress that deforms the container body 14 in the torsion direction by forming the corner portion in the plane 38a. Is preferred. In addition, since the L-shaped body 38 is attached to the container main body 14 independently of the other L-shaped body 38, even if a dimension shift of the container main body 14 occurs due to a change over time, etc. It can be attached simply. In addition, each L-shaped body 38 is provided with a U-shaped handle 37, and can be handled without applying a load to the container body 14 when conveying the pellicle container.

In the outer bottom face of the container main body 14 shown to FIGS. 1-6, the recessed part by the convex rib 18, the lozenge rib 20a, the corner rib 20b, etc. open, and the pellicle container 10 Roller conveyance was not employable. It is because there exists a possibility that the container main body 14 may deform | transform by the impact by the engagement of a recess and a roller. As illustrated in FIG. 7, the outer bottom surface of the container body 14 is smoothed by attaching the plate body 40 to the frame body 26 or the L-shaped body 38 on the front surface of the outer bottom surface of the container body 14. The roller conveyance of the pellicle container 10 can be employ | adopted. Moreover, vacuum adsorption can be used when making the pellicle container 10 incline by making the outer bottom face of the container main body 14 a smooth surface. The plate body 40 may not be a reinforcing material of the container main body 10, and can use the resin thing of thickness 2-8 mm. As the resin, it is possible to use an acrylic resin (PMMA resin), an acryl-butadiene-styrene resin (ABS resin), a polycarbonate resin (PC resin), and a polyvinyl chloride resin (PVC resin). The plate body 40 can be attached to the frame body 26 or the L-shaped body 38 using a bolt, a double-sided tape, or an adhesive. In addition, when there exists curvature, a float, etc. in the center part and the vicinity of the container main body 14, it is preferable to join the part and the board | substrate 40 using a double-sided tape or an adhesive agent.

EXAMPLE

Hereinafter, although the Example of this invention is described in detail, the scope of the present invention is not limited to these Examples.

A rectangular container body 14 shown in Fig. 1 and a circumferential edge thereof are fitted by a vacuum molding method using a sheet material having a thickness of 5 mm made of acrylic-butadiene-styrene resin (ABS resin) subjected to antistatic treatment. The lid 16 to be locked was produced. As a sheet material, the black thing was used for the container main body 14, and the transparent thing was used for the cover body 16. As shown to FIG. As for the container main body 14, the rectangular convex rib 18 is formed along the outer peripheral edge in the vicinity of the outer peripheral edge. The protruding surface 18a of this convex rib 18 is a mounting surface of the pellicle 12. The width | variety of the long side direction of the protrusion surface 18a is formed wider than the width | variety of the short side direction, and the holding member 24 of the pellicle 12 is provided. Further, between the convex ribs 18 and the outer circumferential edge, a recess 22 formed by bending the outer circumference of the container body 14 is formed along the convex ribs 18. In the bottom area surrounded by the convex ribs 18, a rhombic rib 20a is formed at the center portion, and ribs 18 and 18 having both ends are convex portions at the corners of two orthogonal convex ribs 18 and 18. The corner rib 20b connected to) is formed. The lozenge rib 20a and the corner rib 20b have crossed the diagonal line X of the container main body 14. As shown in FIG. The pellicle container 10 in which the outer peripheral edge of the lid 16 was locked to the recess 22 of the container main body 14 had an external shape of 1350 mm x 1550 mm and a height of 120 mm.

The straight rod-shaped bodies 26a and 26b and L-shaped bodies 26c and 26d which form the frame-shaped body 26 shown in FIG. 4 used as the reinforcement body of the produced container main body 14 were produced. The straight rods 26a and 26b use a flat bar (cross section 10 mm x 30 mm) made of an aluminum alloy (A6061), and have a screw hole to which the screw hole 34 and the L-shaped bodies 26c and 26d are attached. Side surfaces of the straight rods 26a and 26b were formed by machining. Further, a U-shaped handle 37 made of stainless steel (SUS304) was attached to the outer side surface of the straight rod 26b on the short side. The L-shaped bodies 26c and 26d are formed by bending a cold rolled plate (3 mm thick) made of stainless steel (SUS304), forming a corner portion in the plane 36 and forming a long hole 32 as a screw hole. did. In addition, as the attachment bolt 28 which attaches the rod-shaped bodies 26a and 26b to the container main body 14, the flange with a hexagon formed by insert-molding the bolt with the hexagonal hole made of stainless steel (SUS304) in ABS resin I used bolts.

When attaching the produced rod-shaped bodies 26a and 26b and the L-shaped bodies 26c and 26d to the container main body 14, the screw is attached to the outer bottom surface of the straight portion of the concave portion 22 of the container main body 14. The sticking rods 26a and 26b which contacted the hole 34 and the bottom screw hole of the recessed part 22 corresponded, and the attachment bolt 28 was inserted from the inside of the recessed part 22, and was attached. After the attachment, the dissolution treatment was performed such that the gap outside the flange outer edge portion of the attachment bolt 28 in contact with the container body 14 was eliminated by the solvent MEK. Subsequently, the L-shape 26c, 26d shown in FIG. 5 is moved and adjusted so that the screw hole formed in the side surface of the elongate hole 32 and the straight bar 26a, 26b may be matched, and the straight bar 26a, 26b) was connected to the fastening bolt 30, and it was set as the frame body 26. The bottom face of the frame-shaped body 26 attached to the container main body 14 was the same height as the outer bottom face of the container main body 14. Moreover, although the dimension shift of +5 mm in the long side direction and +3 mm in the short side direction was produced in the produced container main body 14, the size of the frame-shaped body 26 was adjusted without a problem, and the container main body ( 14).

The container body 14 and the lid 16 reinforced with the frame body 26 were brought into a Class 10 clean room, washed well with a surfactant and pure water, and dried thoroughly. Subsequently, the pellicle 12 which performed the foreign material test | inspection by the condensing lamp in advance in the dark room was mounted in the protrusion surface 18a of the convex rib 18 of the container main body 14, and was fixed by the holding member 24. . The pellicle 12 is 1392 mm x 1146 mm in external dimension, 1370 mm x 1124 mm in internal dimension, and 5 mm in height, and is thick in the pellicle frame 12a (thickness 3.8 mm, surface black aluminum treatment) made from aluminum alloy (A5052). The pellicle film 12b made of a fluorine resin of about 3 mu m is bonded with a silicone resin which is a mask adhesive and a pellicle film adhesive. Thus, the lid 16 was carefully fitted to the container main body 14 which mounted and fixed the pellicle 12, and the pellicle container 10 in which the pellicle 12 was accommodated was obtained.

In addition, the circumferential edge of the pellicle storage container 10 is fixed by adhesive tape made of polyvinyl chloride (PVC) having a width of 40 mm, and double packed into an antistatic polyethylene bag that is cleanly cleaned inside. It was accommodated in the reinforcement cardboard packing box which arrange | positioned the cushioning material inside. In this state of packing, a transport test was conducted to and from Gunma to Fukuoka (tracks in Gunmaken and Tokyo, and aircraft between Tokyo and Fukuoka). After the transport test, the pellicle storage container 10 was unpacked and taken out into the clean room, and the inside was checked. As a result, foreign matter was not seen at all on the pellicle 12, and a very clean state was maintained.

The pellicle container according to the present invention can be used as a storage container and storage container for a pellicle for a semiconductor device, and can be used as a storage container and storage container for a pellicle for a liquid crystal larger than the pellicle for a semiconductor device.

10 pellicle container 12 pellicle
12a: pellicle frame 12b: pellicle film
12c: composite layer 14: container body
16: cover body 18: convex rib
18a: protrusion surface 20a: rhombic rib
20b: Corner rib 22: Concave portion
24: holding member 24a: pin
24b: pin support 26: frame shape
26a, 26b: straight rod 26c, 26d, 38: L shaped body
28: mounting bolt 30: fastening bolt
32: long hole 34: screw hole
36, 38a: flat 37: handle
40: plate X: diagonal

Claims (8)

A container body made of a rectangular resin for loading a pellicle, and a resin cover body fitted and locked at the peripheral edge thereof to cover the pellicle,
A pellicle storage container in which a projecting surface of a convex rib formed along an outer circumferential edge of the container body is formed on a loading surface of the pellicle:
The reinforcement attached to the outer bottom of the container body and between the outer circumferential edge and the convex ribs is a straight rod attached to each side of the outer circumferential edge and an L-shaped body disposed at a corner of the container body. A pellicle container according to claim 1, wherein the attachment position of the straight rod-shaped body and the L-shaped body is changeable so that the size of the frame-shaped body can be adjusted. The method of claim 1,
The L-shaped body is a pellicle container, characterized in that the corner portion is formed so as to be flat or curved. The method according to claim 1 or 2,
The said pellicle is a pellicle container, characterized in that the length of at least one side is 500mm or more. The method according to claim 1 or 2,
A pellicle container, characterized in that the bottom face of the reinforcement and the bottom face of the outer side of the container body are faces of the same height. The method according to claim 1 or 2,
A corner rib having both ends connected to two convex ribs forming the corner portion at each corner of the bottom region of the container body surrounded by the convex ribs is formed. The method according to claim 1 or 2,
A pellicle storage container, characterized in that a holding means for conveying said pellicle storage container is provided in said reinforcement body attached to opposite sides of said container body. The method according to claim 1 or 2,
A pellicle container, characterized in that the plate body that covers the entire outer bottom of the container body is mounted. delete

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