JPS61200383U - - Google Patents
Info
- Publication number
- JPS61200383U JPS61200383U JP1985085024U JP8502485U JPS61200383U JP S61200383 U JPS61200383 U JP S61200383U JP 1985085024 U JP1985085024 U JP 1985085024U JP 8502485 U JP8502485 U JP 8502485U JP S61200383 U JPS61200383 U JP S61200383U
- Authority
- JP
- Japan
- Prior art keywords
- flexible sheet
- board
- pellicle
- support frame
- storage container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
Description
第１図は本考案のペリクル収納容器の一実施例
を示す略示断面図であり、第２図及び第３図は従
来のペリクル収納容器を示す略示断面図である。
１…密封外袋、２…プラスチツクカバー、３…
ペリクル、４…ペリクル支持枠、５…基板、６…
粘着剤、７…可撓性シート。
FIG. 1 is a schematic sectional view showing one embodiment of the pellicle storage container of the present invention, and FIGS. 2 and 3 are schematic sectional views showing a conventional pellicle storage container. 1...Sealed outer bag, 2...Plastic cover, 3...
Pellicle, 4... Pellicle support frame, 5... Substrate, 6...
Adhesive, 7...Flexible sheet.
Claims (1)
スチツクカバー、及びそれらを組み立てた状態で
収納し密封する袋からなるペリクル収納容器にお
いて、基板上面に可撓性シートを載置し、更に可
撓性シート上面に支持枠及びカバーを載置すると
共に、可撓性シートの端部を基板端面を迂回して
基板下面に到達させ、シート端部と基板下面、可
撓性シートと支持枠はそれぞれ粘着剤で着脱可能
なように接着されていることを特徴とするペリク
ル収納容器。 In a pellicle storage container consisting of a pellicle with a support frame, a pellicle mounting substrate, a plastic cover, and a bag for storing and sealing these in an assembled state, a flexible sheet is placed on the top surface of the substrate, and a flexible sheet is placed on the top surface of the flexible sheet. At the same time, place the support frame and cover on the board, and let the end of the flexible sheet bypass the end surface of the board to reach the bottom surface of the board, and apply adhesive to the end of the sheet and the bottom surface of the board, and the flexible sheet and support frame, respectively. A pellicle storage container characterized by being removably bonded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985085024U JPH0542073Y2 (en) | 1985-06-05 | 1985-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985085024U JPH0542073Y2 (en) | 1985-06-05 | 1985-06-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61200383U true JPS61200383U (en) | 1986-12-15 |
| JPH0542073Y2 JPH0542073Y2 (en) | 1993-10-22 |
Family
ID=30635041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985085024U Expired - Lifetime JPH0542073Y2 (en) | 1985-06-05 | 1985-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542073Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63178973A (en) * | 1986-12-27 | 1988-07-23 | 株式会社ジャパンエナジー | Packaging vessel |
| JP2004361647A (en) * | 2003-06-04 | 2004-12-24 | Asahi Kasei Electronics Co Ltd | Method for housing large-size pellicle |
| JPWO2006059388A1 (en) * | 2004-12-02 | 2008-08-07 | 旭化成エレクトロニクス株式会社 | Storage method for large pellicle |
-
1985
- 1985-06-05 JP JP1985085024U patent/JPH0542073Y2/ja not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63178973A (en) * | 1986-12-27 | 1988-07-23 | 株式会社ジャパンエナジー | Packaging vessel |
| JP2004361647A (en) * | 2003-06-04 | 2004-12-24 | Asahi Kasei Electronics Co Ltd | Method for housing large-size pellicle |
| JP4497845B2 (en) * | 2003-06-04 | 2010-07-07 | 旭化成イーマテリアルズ株式会社 | Large pellicle storage method |
| JPWO2006059388A1 (en) * | 2004-12-02 | 2008-08-07 | 旭化成エレクトロニクス株式会社 | Storage method for large pellicle |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542073Y2 (en) | 1993-10-22 |
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