CN103086071A - Dustproof film assembly receiving container - Google Patents
Dustproof film assembly receiving container Download PDFInfo
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- CN103086071A CN103086071A CN2012104211163A CN201210421116A CN103086071A CN 103086071 A CN103086071 A CN 103086071A CN 2012104211163 A CN2012104211163 A CN 2012104211163A CN 201210421116 A CN201210421116 A CN 201210421116A CN 103086071 A CN103086071 A CN 103086071A
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- Prior art keywords
- pin
- dustproof film
- film component
- vessel
- lid
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
A dustproof film assembly receiving container is provided. A dustproof assembly is fixed at a specific position of a container body and is covered by a cover for preventing alien objects adsorbing on the assembly, and can be firmly maintained during transportation in a fixed state or can be simply removed in the fixed state. The dustproof film assembly receiving container consists of the container body on which the dustproof film assembly (16) is loaded and the cover (14), and is provided with multiple dustproof film assembly fixing portions (18), Each fixing portion (18) comprises a recess (26) of a dustproof film assembly framework (16a), a needle (28) which has a front end portion (28a) that may rotate in an inserted state, a needle mounting portion (32) which is disposed in the container body (12) and may install the needle (28) by extracting the front end portion (28a) from the recess (26) of the dustproof film assembly framework (16a), an opening portion (14a) of the cover (14) which may rotate the needle (28) in the needle mounting portion (32) from an outer side of the cover body (14a) that is installed in the container body (12), and a blocking plate (40) of the opening portion (14a). The needle mounting portion (32) has a protrusion portion (30) and a notch portion (32b) that when the mounted needle (28) rotates in a specific angle the needle (28) is maintained.
Description
Technical field
The present invention relates to will be at semiconductor device, uses in the manufacturing of printed base plate or liquid crystal indicator etc., and the dustproof film component that dustproof film is attached at the dustproof film component framework is accommodated in Pellicle container kit.
Background technology
The quartz conductor manufacturing of LSI and super LSI etc. or be in the manufacturing of liquid crystal indicator etc. will carry out semiconductor die list or liquid crystal are used up with raw sheet the photoetching of the making of shining to carry out pattern.At this moment, if photomask or reticle mask have dust to adhere to, described dust absorbs light, makes bendingof light, will make thus the pattern deformation of transfer printing, and the edge is uneven, and the phenomenon of substrate blackening etc. occurs.Described operation is carried out in dust free room usually, even so, also is difficult to photomask is always kept clean, so, the dustproof film component that uses transparent dustproof film to attach on the dustproof film component framework.So, described dustproof film component loads on photomask and exposes, and foreign matter does not directly adhere on the surface of photomask, but adhere on dustproof film, so during photoetching, need only the pattern of photomask in focus, the foreign matter on dustproof film has just had nothing to do with transfer printing.
Described dustproof film component such as itself have foreign matter to adhere to will feed through to photomask, so demanding detergency.Thus, in described keeping and when transporting, use Pellicle container kit.As the accommodation method of described Pellicle container kit or dustproof film component, can exemplify lower described patent documentation 1,2, the thing described in 3.specifically, in patent documentation 1, put down in writing a kind of dustproof film component container, it is the inner bottom part at the vessel of hard resin system, mounting is connected airtight in a side of dustproof film component framework, it vertically sets up a plurality of supports by the inner bottom part at vessel, support from the dustproof film component framework that on every side inner bottom part is loaded thus, further, be coated with on vessel and open and close the lid of hard resin system freely, and have to have at described lid at described inner face and closing when covering, the contacted section that contacts in a described side with the dustproof film component framework that loads on inner bottom part.
[patent documentation]
The real fair 6-45965 communique of [patent documentation 1] Japan
[patent documentation 2] TOHKEMY 2004-361647 communique
No. 4391435 communique of [patent documentation 3] Japan special permission
The described dustproof film component container of patent documentation 1 is ejection formation, and the few advantage of parts is arranged, and uses with taking in of dustproof film component as quartz conductor.But described dustproof film component container, lid and vessel all want high precision to be shaped, and can not be used for the length of side and be liquid crystal taking in dustproof film component large and that 500mm is such.Form well because so large-scale container is difficult to carry out in a vacuum precision, the rigidity of container itself also is difficult to guarantee in addition.Thus, easily cause distortion of vessel when the processing of container and during conveyance, thereby container rubs mutually with the dustproof film component framework, dust occurs, thereby make quality variation.
The accommodating container that surpasses such large-scale dustproof film component of 500mm as the described length of side; as described in patent documentation 2; make one of lining of protection photomask adhesive coating projection laterally; be fixed in vessel with the adhesion bar; perhaps as described in patent documentation 3; insert a needle in the recess of dustproof film component framework lateral surface setting; fixing on vessel, the method that dustproof film component is positively fixed on vessel has also been proposed in existing document.
But; patent documentation 2 like that; with one one of the outer peripheral edges of the protective film of dustproof film component or it is attached the occasion of fixing for all being projected on the flanging surplus that the outside forms with the adhesion bar on vessel; described operation has to be difficult to be fixed on dish under peace and quiet state with manually carrying out.Further, peel off when taking out at the bar of adhering, staff is close near the dustproof film component framework, the danger that has foreign matter to adhere to.
On the other hand, as patent documentation 3, carry out pin in the hole of dustproof film component framework lateral surface and insert to extract and make dustproof film component to the occasion of vessel loading and unloading, during the loading and unloading of dustproof film component, staff is not too near dustproof film component, and foreign matter adheres to few.
But, when the Pellicle container kit that will take in dustproof film component transports, be necessary that the insertion position of the pin that inserts in the hole to dustproof film component framework lateral surface continues to keep.For this reason, can consider to use the anchor fitting that pin further is fixed with other the combining device of screw etc., perhaps make pin form some and resemble cone and chimeric, the anchor fitting that is fixed with described friction force.But, with the occasion that pin is fixing such as the combining device of screw etc., pin can be really with being fixed, but the danger of dust generation be arranged.In addition, pin is made rough cone, the occasion with friction force is fixed is adjusted to suitable size with friction force and has any problem, and trustworthiness is poor.
For described problem is solved, the invention provides a kind of Pellicle container kit, it both covered to prevent with lid that foreign matter from adhering at the dustproof film component that the assigned position of vessel is in stationary state, in transporting, described stationary state is carried out certain keeping again, and under the state of lid sealing, after described stationary state is removed, open lid, with the taking-up of dustproof film component.
Summary of the invention
Described purpose of the present invention is reached by following technical proposal:
1. Pellicle container kit comprises and will be pasted with the vessel of the dustproof film component mounting on the dustproof film component framework of dustproof film; Will be with described vessel in the chimeric engaging of circumference, the lid with described dustproof film component covers is characterized in that:
Take in accommodating container at described dustproof film component, a plurality of dustproof film component fixed parts are set, and this dustproof film component fixed part comprises: rotary pin under the state of the recess of the lateral surface of the described dustproof film component framework of the described vessel mounting of leading section insertion; Be installed on described vessel, the leading section of described pin can be installed the pin installing department of described pin from the recess of described dustproof film component framework with extracting; The peristome that forms on described lid thus, can from being contained in the outside of the described lid on described vessel, rotate the described pin of described pin installing department; The inaccessible parts of described peristome, be provided with the pin holding device that described pin is kept, thus, be arranged on described pin installing department, after the described pin as prescribed angular turn of the recess of the described dustproof film component framework of leading section insertion, the leading section of described pin can not be extracted or come off from described recess.
2. the described Pellicle container kit of technical scheme 1, it is characterized in that: described pin holding device comprises, the jut that forms on described pin; Form at described pin installing department, described pin carry out predetermined angular rotate after can with the notch of described jut engaging.
3. the described Pellicle container kit of technical scheme 1, it is characterized in that: on the described inaccessible parts of the opening port blocking that will be contained in the described lid on described vessel, be provided with and prevent that the rotation of rotation of described pin of recess that leading section inserts the described dustproof film component framework of described vessel mounting from preventing section.
4. the described Pellicle container kit of technical scheme 3 is characterized in that: the described rotation section of preventing comprises, the cylindrical portion that arranges at the inaccessible plate upper process with the opening port blocking of described lid; The leading section of described cylindrical portion that arrange with joint portion that the rearward end of described pin is combined; The inaccessible plate maintaining part that the described inaccessible plate of the described peristome that described cylindrical portion is inserted keeps is set on described lid.
5. the described Pellicle container kit of technical scheme 2 is characterized in that: described pin carries out after the 30-180 degree rotates, the notch engaging of the jut of described pin and described pin installing department.
6. the described Pellicle container kit of any one in technical scheme 1-5 is characterized in that: be provided with the elastic body of the buffer unit when contacting with described dustproof film component framework at the leading section of described pin.
7. the described Pellicle container kit of any one in technical scheme 1-6, is characterized in that: at the aft end face of described pin, be provided with the instrument recess of the instrument insertion of the rotation use that makes described pin.
The effect of invention
Pellicle container kit of the present invention, has simple structure, simultaneously can carry out certain maintenance to the pin of the body that dustproof film component is fixed on container, thus, can prevent in transporting due to pin the coming off of the dustproof film component that causes such as come off, and the danger that the dustproof film component of taking in does not have breakage and foreign matter to adhere to, credible high.In addition, when from Pellicle container kit, dustproof film component being taken out, filling state on vessel at lid, inaccessible parts are removed, utilize the peristome of lid, pin is carried out the rotation of predetermined angular, it is unloaded from the pin installing department, the stationary state of dustproof film component is disengaged thus.Thus, can be simply with static solution except dustproof film component take out from the Pellicle container kit body.So, with easy operation, just can from Pellicle container kit, dustproof film component be taken out, the danger that the foreign matter of the dustproof film component of simultaneous taking-up operation adheres to is also few.
Description of drawings
The front elevation of one example of [Fig. 1] Pellicle container kit of the present invention.
The cross sectional drawing of the X-X face of the Pellicle container kit that [Fig. 2] Fig. 1 represents.
The enlarged section drawing of the dustproof film component fixed part 18 that comprises Pellicle container kit 10 that [Fig. 3] Fig. 2 represents.
The oblique drawing of the pin 28 in [Fig. 4] Fig. 3.
[Fig. 5] Fig. 3 represents the oblique drawing of pin installing department 32.
The oblique drawing of the inaccessible plate 40 of the inaccessible plate member of the conduct that [Fig. 6] Fig. 3 represents.
The oblique drawing of the inaccessible plate maintaining part 42 that [Fig. 7] Fig. 3 represents.
[Fig. 8] is the explanation oblique drawing of appearance of 28 installing on installing department 32 of expression pin in instruction diagram 4.
The pin installing department 32 that [Fig. 9] pin 28 is mounted, the explanation oblique drawing of the interrelation of inaccessible plate maintaining part 42 and lid 14.
The explanation oblique drawing of the installing state of inaccessible plate 40 on the inaccessible plate maintaining part 42 of the lid 14 that [Figure 10] Fig. 9 represents.
The explanation oblique drawing of the state that [Figure 11] extracts from the interior pin 28 of Pellicle container kit 10.
The oblique drawing of the comparative example that the pin that [Figure 12] utilizes the friction force of installation hole that the pin installing department is installed keeps.
The specific embodiment
Below, this specific embodiment is elaborated, but scope of the present invention is not subjected to their restriction.
In the present invention, an example of Pellicle container kit represents with Fig. 1.The Pellicle container kit 10 that Fig. 1 represents is made of OBL vessel 12 and lid 14.The central portion of the vessel 12 of described Pellicle container kit 10, as cross sectional drawing Fig. 2 of the X-X face of Fig. 1 represented, dustproof film component 16 was contained.Dustproof film component 16 is for what form at the OBL dustproof film 16b that attaches transparent fluorocarbon resin etc. on the metal dustproof film component framework 16a of aluminium etc.Vessel 12 with dustproof film component 16 mountings as Fig. 2 represents, in the bottom of vessel 12, has projection 12a, and 12a forms and reinforcement.Described vessel 12 and lid 14 are the things with the synthetic resin vacuum forming of ABS resin (acrylonitrile-butadiene-styrene resin) and acrylic acid etc.Vacuum forming method is, the resin sheet with heating on mould covers, and only carries out just molding large container easily of vacuum attraction.At the ejection forming method of the opening of one or several places high speed resin by injection in the mould, the distance that flows of resin is long, the inconvenient tendency of the manufacturing of tun.
Described vessel 12 and lid 14, as Fig. 2 represents, thereby the chimeric engaging of described circumference is integrated.In described Pellicle container kit 10, as Fig. 3 represents, between lining 22 and photomask adhesive coating 24, be contained at the dustproof film component 16 of the central portion of vessel 12 mounting.Described dustproof film component 16, as Fig. 1 represented, 4 places of closely being close in the bight of the long side of Pellicle container kit 10 were provided with dustproof film component fixed part 18, thereby are fixed.Dustproof film component fixed part 18 as Fig. 3 represents, comprising: pin 28; The pin installing department 32 of configuration closely is close in the bight of the tabular surface 20 that forms along the long side of vessel 12; Peristome 14a in lid 14 formation; As the inaccessible plate 40 with the inaccessible parts of peristome 14a obturation; The inaccessible plate maintaining part 42 that inaccessible plate 40 is kept.
Described pin 28 is inserted in its leading section under the state of the recess 26 that the side of dustproof film component framework 16a of the assigned position mounting of vessel 12 forms and can rotates.Described pin 28, installing on pin installing department 32, its leading section can be extracted from the recess 26 of dustproof film component framework 16a.So at the pin 28 of pin installing department 32 installings, can extract via the peristome 14a of lid 14.Described peristome 14a, the inaccessible plate 40 that the inaccessible plate maintaining part 42 by installing on lid 14 keeps and by inaccessible.Thus, just can prevent the Pellicle container kit 10 interior dusts that enter via peristome 14a etc.A side of described inaccessible plate 40 as Fig. 3 represents, prevents section as the rotation of the rotation of the pin 28 that prevents pin installing department 32 installing, and the column 44 that has with the engaging portion of the concavo-convex engaging in end of the rear end of pin 28 at front end is arranged by projection.
Described pin 28 is that by resin ejection formed, the one-body molded of transfer molding etc. made.As material, can use epoxy resin, ABS resin (acrylonitrile butadiene styrene resin), the PPS resin, PE resin (poly-vinyl resin), PEEK resin (polyether-ether-ketone resin) etc., according to necessity, preferably sneak into the filler etc. of glass fibre etc. and improve intensity.
As Fig. 3 represents, rotate the pin 28 of installing possibly at described pin installing department 32, the concavo-convex engaging of leading section of the cylindrical portion 44 that arranges of the protuberance 28d of the end of end 28c and a side extending projection at inaccessible plate 40, prevent the rotation of pin 28 thus thereafter.The leading section of described cylindrical portion 44 as Fig. 6 represents, forms the otch 44a that mouthful word removes the perpendicular shape in the left side one.Described notch 44a as Fig. 3 represents, carries out concavo-convex engaging with the protuberance 28d of pin 28.The notch 44a of preferred described cylindrical portion 44 and protuberance 28d when the rotation of pin 28 is held by pin installing department 32, adjust as Fig. 3 represents, make notch 44a and the concavo-convex engaging of protuberance 28d that is rough horizontality.
The inaccessible plate 40 that Fig. 6 represents, the inaccessible plate maintaining part 42 that is represented as Fig. 7 keeps.Inaccessible plate maintaining part 42 structures are, are arranged on the mounting hole 42d of the lateral surface of lid 14 in insertion, and on the board 42a of the connecting devices such as the bolt in 42d, chase 42b forms.The bottom surface of described chase 42b is with peristome 14a(Fig. 3 of lid 14) the through hole 42c that is communicated with forms.Described chase 42b is that the inaccessible plate 40 that Fig. 6 represents is inserted into, and at this moment, inserts through hole 42c in the cylindrical portion 44 that occlusor 40 upper process arrange.
The inaccessible plate 40 of the cylindrical portion 44 projection settings that Fig. 6 represents and the inaccessible plate maintaining part 42 that Fig. 7 represents, can use corrosion-resistant steel, the making such as aluminum alloy, but from prevent that dust from occuring and with the viewpoint of the adherence of lid 14, preferably use ABS resin (acrylonitrile butadiene styrene resin), PPS resin, POM resin (polyoxymethylene resin), the ejection formation of PA resin (amilan) etc., transfer molding or machine up and make.In addition, preferred inaccessible plate maintaining part 42 is used bolt on lid 14, the coupling screwing machine structure of nut etc., the bonding or both and be used for fixing.Particularly, preferably first connect with bolt, then with gap dissolution with solvents between inaccessible plate maintaining part 42 and lid 14, perhaps with the solid filling, it is encapsulated fully.
The pin 28 of the state that Fig. 8 represents is for leading section 28a can extract from the recess 26 of dustproof film component framework 16a.Thus, the direction of the arrow that represents by Fig. 8 is rotated pin 28, with jut 30, as Fig. 9 represents, with the internal face engaging of notch 32b.By described engaging, pin 28 is kept by pin installing department 32, becomes and can not extract or come off, and as Fig. 3 represented, dustproof film component 16 was fixing on the assigned position of Pellicle container kit 10.
On the other hand, when the engaging of jut 30 and notch 32b is disengaged, pin 28 is as rotating by the arrow opposite sense that Fig. 8 represents, and the engaging of jut 30 and notch 32b just can be disengaged, and the leading section 28a of pin 28 can be extracted from the recess 26 of dustproof film component framework 16a.In order to make described jut 30 and notch 32b engaging or releasing, the pivot angle of pin 28 is preferably the 30-180 degree, particularly the scope of preferred 45-90 degree from the viewpoint of the certainty of operability and engaging etc.The rotation of described pin 28 can be carried out with inserting hex spanner in recess 36 by the instrument to the aft end face of pin 28.
As Fig. 8 represented, after pin installing department 32 kept pin 28, vessel 12 was loaded onto lid 14 and is covered.Described lid 14, as Fig. 9 represents, by bolt etc. being inserted the mounting hole 42d of the board 42a that consists of inaccessible plate maintaining part 42,42d and being connected.The through hole 42c that forms in the bottom surface of the chase 42b of board 42a and peristome 14a(Fig. 3 of lid 14) be communicated with.Described through hole 42c and peristome 14a as Figure 10 represents, insert the inaccessible plate 40 that Fig. 6 represents and obturation by the chase 42b in inaccessible plate maintaining part 42.Obturation by described through hole 42c and peristome 14a is in air-tight state in Pellicle container kit 10.When described inaccessible plate 40 inserted to chase 42b, in the cylindrical portion 44 that occlusor 40 projections arrange, by the peristome 14a of through hole 42c and lid 14, as Figure 10 represented, the notch 44a of described leading section and the protuberance 28d of pin 28 carried out concavo-convex engaging.By described concavo-convex engaging, pin 28 in 32 installings of pin installing department becomes and can not rotate, dustproof film component 16 is contained fixing Pellicle container kit 10 when transporting etc., and pin 28 rotates, and the danger that the static solution of dustproof film component 16 removes will be eliminated.The inaccessible plate 40 that inserts in the chase 42b that represents to Figure 10, the attaching by adhesion bar 48 can positively be prevented from coming off of chase 42b.
The Pellicle container kit 10 that represents according to Fig. 1-Figure 10, with the pin installing department 32 of installing on vessel 12, leading section 28a is inserted the recess 26 of the dustproof film component framework 16a of vessel 12 mountings, after pin 28 installings, by the rotation of pin 28, dustproof film component 16 is fixed in vessel 12 really.Then, after the lid 14 that inaccessible plate maintaining part 42 is housed is contained in vessel 12, the peristome 14a of lid 14 and the through hole 42c of inaccessible plate maintaining part 42 are by inaccessible plate 40 obturations, make in Pellicle container kit 10 and be in air-tight state, simultaneously, the protuberance 28d of the notch 44a of the leading section of the cylindrical portion 44 of inaccessible plate 40 upper process settings and the rearward end 28c of pin 28 carries out concavo-convex engaging, thereby the rotation of pin 28 is prevented.Thus, even the Pellicle container kit 10 that dustproof film component 16 is taken in transports, because vibration in transit etc. causes the rotation of pin 28 just can be prevented, the secure detached of transporting thus the dustproof film component 16 that middle pin 28 causes for coming off etc. just can obtain certain preventing.Described Pellicle container kit 10, the breakage of the dustproof film component 16 that air-tight state is taken in and the danger that foreign matter adheres to just can prevent, and be credible high.
In addition, when from Pellicle container kit 10, dustproof film component 16 being taken out, the bar 48 of adhering is at first peeled off, and the chase 42b of inaccessible plate 40 from inaccessible plate maintaining part 42 unloaded.At this moment, the cylindrical portion 44 of inaccessible plate 40 upper process settings is also extracted from the through hole 42c of inaccessible plate maintaining part 42 and the peristome 14a of lid 14, and through hole 42c and peristome 14a are liberated.Then, from through hole 42c and the peristome 14a of liberation, hex spanner 46 is inserted, the instrument of the aft end face by will insert pin 28 carries out the predetermined angular rotation with the hex spanner 46 of recess 36, and the stationary state of dustproof film component 16 is disengaged.Thus, as Figure 11 represents, be contained at lid 14 under the state of vessel 12, pin 28 is unloaded from pin installing department 32.Further, open lid 14, dustproof film component 16 is taken out from vessel 12.Thus, from Pellicle container kit 10 during with the taking-up of dustproof film component 16, the danger that the breakage of dustproof film component 16 and foreign matter adhere to will be disappeared by solution, thereby dustproof film component 16 simply can be taken out.
The Pellicle container kit 10 that Fig. 1-Fig. 6 represents, by closely be close to 4 dustproof film component fixed parts 18 of configuration in each bight on described long limit, the dustproof film component 16 of taking in is fixed, still, also can configures the dustproof film component fixed part 18 more than 4.In addition, the configuration of dustproof film component fixed part 18 also can be configured along the minor face of Pellicle container kit 10, is configured also passable along each limit of growing limit and minor face.In addition, as the inaccessible plate 40 that Fig. 6 represents, can use leading section to have the cylindrical portion 44 of notch 44a by the thing of projection setting.But, when the Pellicle container kit 10 that dustproof film component 16 is taken in carries out conveyance etc. in the workshop, because this conveyance is careful, can use the inaccessible plate 40 that cylindrical portion 44 is not set.
[embodiment 1]
Below, embodiments of the invention are elaborated, but scope of the present invention is not subjected to the restriction of these embodiment.
(embodiment 1)
With the sheet material that prevents charged ABS resin system, vessel 12 and the lid 14 of the shape that represents with vacuum forming construction drawing 1.Vessel 12 and lid 14 in the chimeric engaging of described circumference, form the Pellicle container kit 10 that Fig. 1 represents.4 places of closely being close in the bight of each length direction of described lid 14 form peristome 14a.The size of described Pellicle container kit 10 containers is, profile 1005 * 937mm, high 70mm.The sheet material that be shaped to use is, as the thing of the transparent 5mm of lid 14 use, and the thing of the 5mm of vessel 12 use black
Further, use ejection formation, use ABS resin, the pin installing department 32 that Fig. 5 is represented and use the PPS resin prepares pin 28 shown in Figure 4.Pin 28 is by leading section 28a, pars intermedia 28b, and rearward end 28c forms, and between pars intermedia 28b and rearward end 28c, is formed as the jut 30 of the holding device that consists of pin 28.Jut 30 forms the dip plane of tapered at leading section.The rearward end 28c of pin 28 has the operation operating portion that pin 28 is rotated etc., and is thicker than leading section 28a and pars intermedia 28b.The end face of this rearward end 28c has instrument that the leading section with the hex spanner of the rotation use of pin 28 inserts with recess 36.Described pin 28 pars intermedia 28b are thicker than leading section 28a, on the leading section 28a of pin 28 and the boundary of pars intermedia 28b, ladder 28e arranged.Described ladder 28e is equipped with the elastic body 34 of ring-type of the viton system of thickness 0.5mm.
In addition, pin installing department 32 is tetrahedron, and the end of the U-shaped ditch 32a that the jut 30 of pin 28 and rearward end 28c insert is at a tetrahedral lateral opening.The other end of described U-shaped ditch 32a, described notch 32b is left in a side of the internal face of the notch 32b of the square shape that tetrahedral central portion closely is close to, the jut 30 of itself and pin 28 consists of holding devices, and the pars intermedia 28b of pin 28 and the jut 30 between rearward end 28c are inserted rotationally.Further, at the internal face of notch 32b, i.e. the another side corresponding with the side of the opening of U-shaped ditch 32a, the leading section 28a and the pars intermedia 28b that form pin 28 insert logical hole 32c.The following side of described pin installing department 32 is provided with 4, brazen insertion nut (not shown).
Inaccessible plate maintaining part 42 use that the inaccessible plate 40 that Fig. 6 represents and Fig. 7 represent prevent charged POM resin machinery processing and fabricating.Inaccessible plate 40 has leading section to form the cylindrical portion 44 projection settings of notch 44a.In addition, inaccessible plate maintaining part 42 is utilized the mounting hole 42d of board 42a, and the perforating (not shown) that 42d and lid 14 wear in machine up carries out stop with bolt and hexagonal (hexagon)nut (not shown).Described nut arranges in the inboard of lid 14, covers with ABS resin outside nut.After nut stop, the nut periphery improves and prevents from fluffing for leak tightness, with organic solvent (MEK) dissolving then.Further, and the phase-contact surface of the contacted board 42a in the outside of lid 14 and the gap between lid 14 with solid (trade name; MOS8, Konishi Co., Ltd.) carry out filling, to guarantee leak tightness.When on like this lid 14, inaccessible plate maintaining part 42 being installed, the through hole 42c that the bottom surface of the chase 42b of inaccessible plate maintaining part 42 is formed with machine up and the peristome 14a of lid 14 adjust, and make them consistent.The vessel 12 and the lid 14 that so form are moved into the dust free room of 10 grades, with interfacial agent and pure water carry out good clean after, all dry.
Outside the manufacturing of described Pellicle container kit 10, in dust free room, make outside dimension 910 * 750mm separately, interior cun 902 * 740mm, the dustproof film component 16 of high 7.0mm.At the described dustproof film component 16 dustproof film component framework 16a(thickness 5.8mm that is carbon steel S45C system, the plating of surface black chromium) a end face, the dustproof film 16b that consists of with fluorocarbon resin of thickness 3 μ m is attached with the silicone sticker, and the other end of dustproof film component framework 16a forms photomask adhesive coating 24.In addition, each of dustproof film component framework 16a long limit, with between 860mm every the recess 26 that 2 diameter 2.5mm * degree of depth 1.8mm are set.
After light harvesting lamp during described dustproof film component 16 is in the darkroom is carried out inspection of foreign substance, load in the central portion of vessel 12, such pin 28 that Fig. 8 represents is installed at pin installing department 32, in the recess 26 of the dustproof film component framework 16a that the leading section 28a insertion of pin 28 is corresponding.Further, pin 28 is rotated, the notch 32b engaging of the jut 30 of pin 28 and pin installing department 32 is fixed on pin installing department 32 with pin 28.Then, after on such vessel 12 that Fig. 9 is represented, lid 14 being installed, the chase 42b of the inaccessible plate maintaining part 42 that inaccessible plate 40 insertion Figure 10 that Fig. 6 is represented represent.At this moment, the cylindrical portion 44 that occlusor 40 upper process arrange, by the peristome 14a of through hole 42c and lid 14, as Figure 10 represents, the concavo-convex engaging of protuberance 28d of the notch 44a of the leading section of cylindrical portion 44 and pin 28.Described inaccessible plate 40 use P VC adhesion bars 48 are fixed on inaccessible plate maintaining part 42.
Further, the circumference of the Pellicle container kit 10 that dustproof film component 16 is taken in the P VC system adhesion bar (not shown) of wide 35mm attach fixing after, with 2 the local installations of poly-urethane clip processed (not shown) on each long limit.Then, last, the charged PE of the preventing bag of internal washing is carried out 2 heavy packings, it is accommodated in the reinforcement corrugated paperbox (not shown) that inside is combined with padded coaming.
With the reinforcement corrugated paperbox of Pellicle container kit like this 10 packings, carried out the reciprocal test (crowd horse Ken Tokyo truck, aircraft is used between Fukuoka in Tokyo) of transporting from the group horse to Fukuoka.Pellicle container kit 10 after transporting is moved into dust free room, under the state that vessel 12 is covered by lid 14, the inside of Pellicle container kit 10 is confirmed.Pin 28 is positively kept by installing department 32, and also under the state of the recess 26 that inserts dustproof film component framework 16a, dustproof film component 16 positively is fixed in vessel 12 described leading section 28a.Under described state, the light harvesting light irradiation is confirmed the dust situation occurred on vessel 12, does not find foreign matter near dustproof film component fixed part 18 and on vessel 12.
Further, the bar 48 of adhering is peeled off, and when inaccessible plate 40 is unloaded from the chase 42b of inaccessible plate maintaining part 42, cylindrical portion 44 is extracted from the peristome 14a of the through hole 42c of inaccessible plate maintaining part 42 and lid 14.Then, from through hole 42c and the lid 14 of liberation, hex spanner 46 is inserted, rotate with in recess 36, leading section being inserted at the instrument of the aft end face of pin 28, remove the engaging of the notch 32b of the jut 30 of pin 28 and pin installing department 32.Further, after the through hole 42c that represents from Figure 11 and lid 14 are extracted pin 28, from vessel 12, lid 14 is taken away, dustproof film component 16 is taken out in Kaifeng.The dustproof film component 16 that takes out is put into the darkroom, come effects on surface whether to be attached with foreign matter inspection with the light harvesting lamp.As a result, do not find foreign matter fully on dustproof film component 16, kept the state of utmost point cleaning.
(comparative example 1)
Make the dustproof film component fixed part 100 that Figure 12 represents.The pin 102 of the dustproof film component fixed part 100 that formation Figure 12 represents is formed by the resinous columnar component of PPS, and by leading section 102a, pars intermedia 102b and rearward end 102c consist of.Thickness is, the order of leading section 102a＜pars intermedia 102b＜rearward end 102c, and the boundary of leading section 102a and pars intermedia 102b has ladder to form, and the elastic body 106 of the ring-type of viton system is housed.On described pin 102, not as Fig. 5 represents, be formed on the jut 30 that forms on pin 28.The pin installing department 104 that described pin 102 is installed is to be formed by the ABS resin ejection formation.Pin installing department 104 is, one one of the leading section 102a of pin 28 and pars intermedia 102b can be passed through, the through hole 108 that the remainder of pars intermedia 102b and rearward end 102c insert and forming.Described pin installing department 104, the pin installing department 32 that does not have to represent as Fig. 5, form U-shaped ditch 32a and notch 32b.Thus, in pin installing department 104, the internal diameter of through hole 108 diminishes gradually along the direction of insertion of pin 102, inserts thus the pin 102 of through hole 108, and the friction force of the internal face by its outside wall surface and through hole 108 is fixing with pin 28.The dustproof film component fixed part 100 that Figure 12 like this represents, in the through hole 108 of pin installing department 104, with friction force, that pin 102 is fixing.
The dustproof film component fixed part 100 that Figure 12 represents is as same in embodiment 1, be installed on vessel 12.Then, the recess 26 to the dustproof film component framework 16a of the dustproof film component 16 of vessel 12 mounting inserts the leading section 102a that consists of the pin 102 of dustproof film component fixed part 100, and dustproof film component 16 is fixing on vessel 12.Further, on vessel 12, lid 14 is covered, thus, form the Pellicle container kit 10 that dustproof film component 16 is taken in.After this, as same in embodiment 1, with Pellicle container kit 10 packings, transport experiment.
Pellicle container kit 10 after transporting is moved into dust free room, carries out inside confirmation.Dustproof film component 16 also on vessel 12, still, in the dustproof film component fixed part 100 in 4 places, has the pin 102 in 1 place will deviate from from pin installing department 104.In addition, described leading section 102a also deviates from from the recess 26 of dustproof film component framework 16a, and the outside of leading section 102a and dustproof film component framework 16a rubs, and is attached with the foreign matter dozens of of the tens of μ m of diameter.In addition, under this state, the light harvesting light irradiation is confirmed the dust situation occurred on vessel 12, and result is also seen adhering to of foreign matter around the dustproof film component fixed part 100 on dustproof film component fixed part 100 opposites that to be ready extracting.Further, pin 102 is put on the hand that gathers butyronitrile gloves processed, and pin installing department 104 is carefully extracted, and dustproof film component 16 is moved in the darkroom, carries out the inspection of the foreign matter of surface attachment with the light harvesting lamp.As a result, be attached with 12 of the foreign matters of diameter 10-20 μ m degree on dustproof film 16b.In addition, among them, approximately half is distributed in the periphery of dustproof film component fixed part 100.
[utilizing on industry possibility]
Pellicle container kit of the present invention can be used as the Pellicle container kit use that semiconductor device is used, the Pellicle container kit that the large liquid crystal of dustproof film component that also can be used for using than semiconductor device is used.
[explanation of symbol]
10 is Pellicle container kit, 12 is vessel, 12a is projection, 14 is lid, 14a is peristome, 16 is dustproof film component, 16a is the dustproof film component framework, 16b is dustproof film, 18, 100 is the dustproof film component fixed part, 20 is tabular surface, 22 is lining, 24 is the photomask adhesive coating, 26 is recess, 28, 102 is pin, 28a, 102a is leading section, 28b, 102b is pars intermedia, 28c, 102c is rearward end, 28d is protuberance, 28e is ladder, 30 is jut, 32, 104 is the pin installing department, 32a is the U-shaped ditch, 32b is notch, 32c is the hole, 34, 106 is elastic body, 36 are the instrument recess, 40 is inaccessible plate, 42 is inaccessible plate maintaining part, 42a is board, 42b is chase, 42c is through hole, 42d is mounting hole, 44 is cylindrical portion, 44a is notch, 46 is hex spanner, 48 are the adhesion bar, 108 is through hole.
Claims (7)
1. Pellicle container kit comprises and will be pasted with the vessel of the dustproof film component mounting on the dustproof film component framework of dustproof film; Will be with described vessel in the chimeric engaging of circumference, the lid with described dustproof film component covers is characterized in that:
At described Pellicle container kit, a plurality of dustproof film component fixed parts are set, and this dustproof film component fixed part comprises: rotary pin under the state of the recess of the lateral surface of the described dustproof film component framework of the described vessel mounting of leading section insertion; Be installed on described vessel, the leading section of described pin can be installed the pin installing department of described pin from the recess of described dustproof film component framework with extracting; The peristome that forms on described lid thus, can from being contained in the outside of the described lid on described vessel, rotate the described pin of described pin installing department; The inaccessible parts of described peristome, be provided with the pin holding device that described pin is kept, thus, be arranged on described pin installing department, after the described pin as prescribed angular turn of the recess of the described dustproof film component framework of leading section insertion, the leading section of described pin can not be extracted from described recess.
2. Pellicle container kit according to claim 1, it is characterized in that: described pin holding device comprises, the jut that forms on described pin; Form at described pin installing department, described pin carry out predetermined angular rotate after can with the notch of described jut engaging.
3. Pellicle container kit according to claim 1, it is characterized in that: on the described inaccessible parts of the opening port blocking that will be contained in the described lid on described vessel, be provided with and prevent that the rotation of rotation of described pin of recess that leading section inserts the described dustproof film component framework of described vessel mounting from preventing section.
4. Pellicle container kit according to claim 3 is characterized in that: the described rotation section of preventing comprises, the cylindrical portion that arranges at the inaccessible plate upper process with the opening port blocking of described lid; The leading section of described cylindrical portion that arrange with joint portion that the rearward end of described pin is combined; The inaccessible plate maintaining part that the described inaccessible plate of the described peristome that described cylindrical portion is inserted keeps is set on described lid.
5. Pellicle container kit according to claim 2 is characterized in that: described pin carries out after the 30-180 degree rotates, the notch engaging of the jut of described pin and described pin installing department.
6. the described Pellicle container kit of any one according to claim 1-5 is characterized in that: be provided with the elastic body of the buffer unit when contacting with described dustproof film component framework at the leading section of described pin.
7. the described Pellicle container kit of any one according to claim 1-6 is characterized in that: at the aft end face of described pin, be provided with the instrument recess that the instrument of the rotation use that makes described pin inserts.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-237397 | 2011-10-28 | ||
| JP2011237397A JP5586560B2 (en) | 2011-10-28 | 2011-10-28 | Pellicle container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103086071A true CN103086071A (en) | 2013-05-08 |
| CN103086071B CN103086071B (en) | 2014-11-26 |
Family
ID=48199292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210421116.3A Active CN103086071B (en) | 2011-10-28 | 2012-10-29 | Dustproof film assembly receiving container |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5586560B2 (en) |
| KR (1) | KR101864169B1 (en) |
| CN (1) | CN103086071B (en) |
| HK (1) | HK1179934A1 (en) |
| TW (1) | TWI474956B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI588598B (en) * | 2015-07-13 | 2017-06-21 | 信越化學工業股份有限公司 | Take-up of the pellicle assembly container and pellicle unit Out of the way |
| CN111439468A (en) * | 2019-01-17 | 2020-07-24 | 全球株式会社 | Storage box for photomask |
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- 2012-10-26 TW TW101139765A patent/TWI474956B/en active
- 2012-10-29 CN CN201210421116.3A patent/CN103086071B/en active Active
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2013
- 2013-06-24 HK HK13107337.2A patent/HK1179934A1/en not_active IP Right Cessation
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| JPH09204039A (en) * | 1996-01-25 | 1997-08-05 | Shin Etsu Chem Co Ltd | Pellicle frame holder |
| JP2000173887A (en) * | 1998-12-02 | 2000-06-23 | Asahi Kasei Denshi Kk | Pellicle housing case |
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| CN111439468A (en) * | 2019-01-17 | 2020-07-24 | 全球株式会社 | Storage box for photomask |
| CN111439468B (en) * | 2019-01-17 | 2021-08-13 | 全球株式会社 | Storage box for photomask |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101864169B1 (en) | 2018-06-04 |
| JP2013097047A (en) | 2013-05-20 |
| JP5586560B2 (en) | 2014-09-10 |
| KR20130047563A (en) | 2013-05-08 |
| TWI474956B (en) | 2015-03-01 |
| TW201345805A (en) | 2013-11-16 |
| CN103086071B (en) | 2014-11-26 |
| HK1179934A1 (en) | 2013-10-11 |
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