CN111439468A - Storage box for photomask - Google Patents
Storage box for photomask Download PDFInfo
- Publication number
- CN111439468A CN111439468A CN201911070920.XA CN201911070920A CN111439468A CN 111439468 A CN111439468 A CN 111439468A CN 201911070920 A CN201911070920 A CN 201911070920A CN 111439468 A CN111439468 A CN 111439468A
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- CN
- China
- Prior art keywords
- photomask
- bolt
- lower frame
- storage box
- coupled
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/02—Internal fittings
- B65D25/10—Devices to locate articles in containers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
- B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Abstract
The present invention relates to a photomask storage box, and more particularly, to a photomask storage box, which includes: a lower frame having a supporting portion for placing a photomask therein; an upper frame connected with the lower frame; and a fixing part disposed at an inner edge of the lower frame and used for fixing the photomask placed on the supporting part of the lower frame; the fixing part moves the rotating cover part back and forth on the body by the bolt part, the pressing fixing part pressed into the rotating cover part moves forwards in a state of not rotating, so as to prevent the generation of the particles of the photomask, and the curved surface part is formed in the front of the pressing fixing part, so as to prevent the particles of the photomask from being generated by the surface of the pressing fixing part.
Description
Technical Field
The present invention relates to a photomask storage box, and more particularly, to a photomask storage box, which includes: a lower frame having a supporting portion for placing a photomask therein; an upper frame connected with the lower frame; and a fixing part disposed at an inner edge of the lower frame and used for fixing the photomask placed on the supporting part of the lower frame; the fixing part moves the rotating cover part back and forth on the body by the bolt part, the pressing fixing part pressed into the rotating cover part moves forwards in a state of not rotating, so as to prevent the generation of the particles of the photomask, and the curved surface part is formed in the front of the pressing fixing part, so as to prevent the particles of the photomask from being generated by the surface of the pressing fixing part.
Background
The photomask used for the preparation of the L CD display is generally made of glass and therefore may be easily damaged during transportation and storage, and a box conforming to the size of the photomask is used during transportation or storage of a photomask having strong brittleness and weak strength.
The structure of a typical photomask storage box is described below.
A commonly used photomask storage box includes: a lower frame which is a regular hexahedron with one open surface, is provided with a plurality of hooks at intervals along the outer periphery, is provided with a first reinforcing part for reinforcing the strength at the outer periphery except the hooks, and is provided with a plurality of support tables for placing a photomask at the inner edge and the corner; an upper frame which is a regular hexahedron with one open surface, in which a hanging piece corresponding to the hook of the lower frame is formed along the outer periphery, a second reinforcing part corresponding to the first reinforcing part of the lower frame is formed on the outer periphery except the hanging piece, and a conveying part for conveying the storage box from the ground is arranged on the lower surface of the upper frame; and a sealing member sandwiched between the lower frame and the upper frame; a grip portion is formed in a part of the first reinforcing portion and/or the second reinforcing portion.
The photomask storage box as described above is configured such that a photomask is placed in a space formed between the lower frame and the upper frame, and after a sealing member is interposed between the upper and lower frames, the hook and the hanging piece formed outside the frames are coupled to each other, and then the photomask storage box is transported or stored.
However, in the conventional photomask storage box, the support table formed inside the lower frame cannot support the photomask safely and move the photomask, and the photomask has defects in its outer shape.
To solve these problems, the structure of the photomask cassette of Korean registered patent No. 10-1121176, the photomask cassette of Japanese laid-open patent publication No. 2010-72420, and the like are disclosed.
As shown in fig. 1 and 2, the structure of the photomask case includes: a lower frame 1, on each outer side surface of which two hooks (forming a loop with a body) 11 are formed at intervals, a first reinforcing part 12 for reinforcing the strength of the box is formed on the remaining outer side surface where the hooks 11 are not formed, and a guide part 13 is formed by extending and protruding from the outer edge thereof; an upper frame 2, on each outer side surface of which two hanging pieces 21 for hanging the hooks 11 of the lower frame 1 are respectively installed, and a second reinforcing part 22 for reinforcing the strength of the box is formed corresponding to the first reinforcing part 12 of the lower frame 1; a sealing member attached to the guide portion 13 of the lower frame 1 and interposed between the lower frame 1 and the upper frame 2; and a carrying part 4 which is a wheel formed on the lower surface of the lower frame 1 and the upper frame 2; the bottom surface of the lower frame 1 is formed with a partition member, i.e., a frame F for reinforcing the strength of the case, two upper corner portions and two side surfaces in the lower frame 1 are provided with first and second support portions 111 provided with clamping members 111a of a bolt structure, and the upper surface and the bottom surface in the lower frame 1 are formed with three and four third and fourth support portions 112, respectively, and the first and second support portions 111 are movable up and down or left and right to support the upper surface and the side surfaces of the photomask securely when the photomask is placed.
However, since such a conventional photomask case is configured to be fixed by sliding press-fitting, a local pressure is generated, and there is a risk of damage to the photomask.
As shown in fig. 3, the photomask case is a photomask case for supporting a photomask, and includes an outer container 2 covering the periphery of the photomask, a support rod insertion hole in the outer container, and a support rod 3 inserted into the support rod insertion hole and supporting a side surface of the photomask 1, and a support member 4 having elasticity is provided at a tip of the support rod on a side contacting the side surface of the photomask.
However, in the case of the conventional photomask, the fixing force of the support rod is relatively reduced, and it is difficult to adjust the elastic force, so that there is a risk of damage to the photomask.
Disclosure of Invention
An object of the technical problem to be achieved by the present invention is to provide a storage box for a photomask, including: a lower frame having a supporting portion for placing a photomask therein; an upper frame connected with the lower frame; and a fixing part disposed at an inner edge of the lower frame and used for fixing the photomask placed on the lower frame support part; the fixing part moves the rotating cover part back and forth on the body by the bolt part, the pressing fixing part pressed into the rotating cover part moves forwards in a state of not rotating, thereby preventing the photomask from generating particles, and a curved surface part is formed on the front surface of the pressing fixing part, thereby preventing the photomask from generating particles due to the surface of the pressing fixing part.
Another object of the present invention is to provide a storage box for a photomask, in which a space is formed in a body of a fixing portion, and a silicone cover made of an elastic material is coupled to an inlet of the space in a state where a sponge containing oil is accommodated in the space, so that fine debris generated when a bolt member made of a metal material and a nut member made of a metal material inserted into the body rub against each other is blocked from flowing out from the inside to the outside by the sponge and the silicone cover.
To achieve the above object, the present invention provides a photomask storage box, comprising: a lower frame having a supporting portion for placing a photomask therein; an upper frame connected with the lower frame; and a fixing part disposed at an inner edge of the lower frame and used for fixing the photomask placed on the lower frame support part; wherein, above-mentioned fixed part includes: a body formed in a regular hexahedron shape by a synthetic resin material, having a bolt moving space part at an upper end thereof, and having a bolt guide hole at an upper end thereof; a bolt member having a handle coupled to a central portion thereof, a nut coupled to a rear portion thereof for fixing the handle, a bolt bushing coupled to a front portion thereof and horizontally connected to the bolt guide hole, and a bolt moving space portion of the body moved forward and backward by rotation of the handle; a rotating cover member which is bolted to the front surface of the bolt member and which rotates together with the bolt member and moves forward and backward when the handle is rotated; and a pressure fixing member which is formed in a cylindrical shape from a teflon material, is press-fitted to the rotating cover member, and is fixed to the photomask without rotating the rotating cover member and applying pressure to the photomask.
Here, the body is a plate-shaped body cover that is separately coupled to the bolt member, and has a bush through hole for passing through a bolt bush of the bolt member at a position corresponding to the bolt guide hole on a front surface thereof.
In this case, the body cover is coupled to the cover bushing made of a synthetic resin material in the bushing through hole.
Here, the body has a coil insert so that the bolt member is coupled to the inside of the bolt guide hole.
In addition, the body is formed with a chip storage space part in front and rear of the bolt guide hole so as to block fine chips generated when the coil insert rubs against the bolt member from flowing out by using the sponge and the silica gel cover; a locking table is formed at the inlet and outlet side of the chip storage space part, and a silica gel cover which is made of elastic material and is provided with a bolt through hole is combined on the locking table; the crumb storing space portion contains a sponge impregnated with oil.
Here, the rotating cover member has a cut-out portion formed on the outer side of the edge and a hanging stand formed on the inner side of the edge so as to press-fit and couple the pressing and fixing member.
Here, the pressing and fixing member has a boss formed on an outer side surface thereof so as to be coupled to the hanging table.
Here, the pressure fixing member has a curved surface formed on a front surface thereof so as to be in contact with the photomask point, thereby preventing generation of particles in the photomask.
Effects of the invention
The present invention relates to a photomask storage box, which comprises: a lower frame having a supporting portion for placing a photomask therein; an upper frame connected with the lower frame; and a fixing part disposed at an inner edge of the lower frame and used for fixing the photomask placed on the supporting part of the lower frame; the fixing part moves the rotating cover part back and forth on the body by the bolt part, the pressing fixing part pressed into the rotating cover part moves forwards in a state of not rotating, so as to prevent the generation of the particles of the photomask, and the curved surface part is formed in the front of the pressing fixing part, so as to prevent the particles of the photomask from being generated by the surface of the pressing fixing part.
Further, according to the storage box for a photomask of the present invention, a space portion is formed in the body of the fixing portion, and a silicone cover made of an elastic material is coupled to an inlet of the space portion in a state where a sponge containing oil is accommodated in the space portion, so that fine debris generated when a bolt member made of a metal material and a nut member made of a metal material inserted into the body rub against each other is blocked from flowing out from the inside to the outside by the sponge and the silicone cover, thereby preventing foreign substances from adhering to the photomask.
Drawings
Fig. 1 to 3 are schematic views of conventional photomask cases.
Fig. 4 is a schematic perspective view of the photomask storage box according to the present invention.
Fig. 5 is a schematic plan view of the structure of the lower frame in the photomask storage box according to the present invention.
Fig. 6 is a schematic perspective view of a fixing portion of a photomask storage box according to the present invention.
Fig. 7 is an exploded perspective view of fig. 6.
Fig. 8 is a side sectional view of fig. 6.
Fig. 9 is an operation explanatory diagram for explaining the operation of the support portion in the photomask storage box according to the present invention.
Description of the reference numerals
210: lower frame 220: upper frame
300: fixing part 310: body
320: the bolt member 330: rotating cover member
340: pressure fixing member R: curved surface part
Detailed Description
A most preferred embodiment of the photomask storage box according to the present invention is a photomask storage box including: a lower frame having a supporting portion for placing a photomask therein; an upper frame connected with the lower frame; and a fixing part disposed at an inner edge of the lower frame and used for fixing the photomask placed on the supporting part of the lower frame; wherein, above-mentioned fixed part includes: a body formed in a regular hexahedron shape by a synthetic resin material, having a bolt moving space part at an upper end thereof, and having a bolt guide hole at an upper end thereof; a bolt member having a handle coupled to a central portion thereof, a nut coupled to a rear portion thereof for fixing the handle, a bolt bushing coupled to a front portion thereof and horizontally connected to the bolt guide hole, and a bolt moving space portion of the body moved forward and backward by rotation of the handle; a rotating cover member made of a synthetic resin material, the bolt of which is coupled to the front surface of the bolt member, and which rotates together with the bolt member and moves forward and backward when the handle is rotated; and a pressure fixing member which is formed in a cylindrical shape from a teflon material, is press-fitted to the rotating cover member, and is fixed to the photomask without rotating the rotating cover member and applying pressure to the photomask.
The structure of the photomask storage box according to the present invention will be described in detail below with reference to the drawings.
In the following description of the present invention, detailed descriptions of related well-known functions or configurations will be omitted when it is determined that the gist of the present invention is unnecessarily obscured. The term to be described later is defined in consideration of the performance of the present invention, and may be different depending on the intention of the user or the operator, the convention, and the like. Therefore, the definitions thereof should be determined based on the entire contents of the present specification.
Fig. 4 is a schematic perspective view showing a structure of a photomask storage box according to the present invention, fig. 5 is a schematic plan view showing a structure of a lower frame in the photomask storage box according to the present invention, fig. 6 is a schematic perspective view showing a structure of a fixing portion in the photomask storage box according to the present invention, fig. 7 is an exploded perspective view of fig. 6, and fig. 8 is a side sectional view of fig. 6.
Referring to fig. 4 to 8, a photomask storage box 200 according to the present invention includes: a lower frame 210, an upper frame 220, and a fixing portion 300.
First, the lower frame 210 has a general structure, and includes a support portion 211 on which a photomask (not shown) is placed. At this time, the supporting portion 211 can slide back and forth, and the interval is adjusted according to the size of the photomask.
The upper frame 220 has a general structure and is connected to the lower frame 210.
Further, as shown in fig. 6 to 8, the fixing part 300 includes: a body 310, a bolt member 320, a rotating cover member 330, and a pressing and fixing member 340.
The body 310 is formed of a synthetic resin material in a regular hexahedral shape, and has a bolt transfer space S1 at the upper end thereof, and a bolt guide hole 311 at the upper end of the bolt transfer space S1. At this time, the body 310 is preferably fixed to the lower frame 210 by bolting the bottom and rear surfaces thereof.
The body 310 is formed by separately coupling a plate-shaped body cover 312 to the bolt member 320, and has a bushing through hole 312a for passing a bolt bushing 325 of the bolt member 320 at a position corresponding to the bolt guide hole 311 on the front surface. At this time, the cover body 312 has cover bushings 313 made of synthetic resin coupled to the bushing through holes 312 a.
In addition, the body 310 has a coil insert 314 so that a bolt member 320 is coupled inside the bolt guide hole 311; the body 310 is formed with a chip storage space portion S2 in front and rear of the bolt guide hole 311 so as to block fine chips generated when the coil insert 314 and the bolt member 320 rub from flowing out; a locking stand 315 is formed on the entrance side of the debris storage space S2, and a silicone cover 316 made of an elastic material and having a bolt through hole 316a is coupled to the locking stand 315; the debris storage space S2 accommodates the sponge 317 impregnated with oil.
Then, the bolt member 320 is made of metal, the handle 321 is coupled to the central portion thereof, the nut 323 for fixing the handle 321 is coupled to the rear portion thereof, the bolt bushing 325 is coupled to the front portion thereof, and is horizontally coupled to the coil insert 314 provided in the bolt guide hole 311, and the bolt moving space S1 of the body 310 is moved forward and backward by the rotation of the handle 321.
Then, the rotating cover member 330 is made of a synthetic resin material, and is bolted to the front surface of the bolt member 320, and rotates together with the bolt member 320 and moves forward and backward when the handle 321 is rotated. In this case, the rotating cover member 330 has a cut-out 331 formed on the outer side of the edge and a hanging stand 333 formed on the inner side of the edge so as to press-fit and couple the pressure fixing member 340.
On the other hand, the pressure fixing member 340 is formed in a cylindrical shape from a teflon material, is press-fitted into the rotating cover member 330, and is fixed by applying pressure to the photomask without rotating the rotating cover member 330. At this time, the pressing and fixing member 340 has a boss 341 formed on the outer side surface so as to be coupled to the hanging base 333.
The pressing and fixing member 340 has a curved surface R formed on the front surface thereof so as to be in contact with the photomask point, thereby preventing generation of particles on the photomask.
The operation of the photomask storage box according to the present invention will be described in detail below with reference to the drawings.
Fig. 9 is an operation explanatory diagram for explaining the operation of the support portion in the photomask storage box according to the present invention.
First, the handle 321 of the bolt member 320 of the fixing portion 300 is rotated in one direction, and the pressing and fixing member 340 is retracted to a position where it does not interfere with the supporting portion 211 of the lower frame 210 by moving the bolt member 320 backward.
In this state, the photomask P is placed on the supporting portion 211 of the lower frame 210.
When the handle 321 provided in the bolt member 320 of the fixing unit 300 is rotated in the other direction, the bolt member 320 advances while rotating in the coil insert 314 provided in the bolt guide hole 311 of the body 310.
Accordingly, the rotating cover member 330 coupled in front of the bolt member 320 advances.
When the pressure fixing member 340 moves forward together with the advance of the rotating cover member 330, the curved surface portion R formed on the front surface of the pressure fixing member 340 comes into point contact with the photomask P.
At this time, the pressure fixing member 340 is held in an unconstrained state by the rotating cover member 330, and even if the bolt member 320 and the rotating cover member 330 rotate while advancing, the pressure fixing member 340 advances without rotating in a state of being in contact with the photomask P, thereby pressing the photomask P.
Therefore, the pressure fixing member 340 moves forward without rotating in a state of being in point contact with the photomask P, and does not rub against the photomask P, thereby blocking generation of particles.
When the metal coil insert 314 is inserted into the body 310 when the bolt member 320 is rotated, the synthetic resin is prevented from being abraded by friction between the synthetic resin and the metal material, and when fine metal debris is generated by friction between the bolt member 320 and the coil insert 314, the fine debris is prevented from being discharged from the inside of the lower frame 210 and adhering to the photomask P by the debris storage space S2 formed in the front and rear of the bolt guide hole 311, the silicone cover 316 coupled to the locking base 315 provided on the entrance side of the debris storage space S2, and the oil-impregnated sponge 317 in the debris storage space S2.
While the invention is susceptible of modification in various forms, specific embodiments thereof have been shown and described in detail above. However, the present invention should not be construed as being limited to the particular embodiments set forth in the detailed description, and all modifications, equivalents, and alternatives falling within the spirit and scope of the present invention as defined by the claims are intended to be embraced therein.
Claims (8)
1. A photomask storage box, comprising: a lower frame having a supporting portion for placing a photomask therein; an upper frame connected with the lower frame; and a fixing part disposed at an inner edge of the lower frame and used for fixing the photomask placed on the lower frame support part;
wherein, the fixed part includes:
a body formed in a regular hexahedron shape by a synthetic resin material, having a bolt moving space portion at an upper end thereof, and having a bolt guide hole formed at an upper end thereof;
a bolt member having a handle coupled to a central portion thereof, a nut coupled to a rear portion thereof for fixing the handle, a bolt bushing coupled to a front portion thereof and horizontally connected to the bolt guide hole, and a bolt moving space portion of the body moved forward and backward by rotation of the handle;
a rotating cover member made of synthetic resin, a bolt coupled to a front surface of the bolt member, and configured to rotate together with the bolt member and move forward and backward when the handle is rotated; and
and a pressure fixing member which is formed in a cylindrical shape by a Teflon material, is press-coupled to the rotating cover member, and is fixed to the photomask without rotating the rotating cover member and applying pressure to the photomask.
2. The photomask storage box according to claim 1, wherein the body is a plate-like body cover that is separately coupled to the bolt member, and a bushing through hole for passing a bolt bushing of the bolt member is provided at a position corresponding to the bolt guide hole on the front surface of the body cover.
3. The photomask storage box of claim 2, wherein the body cover is configured such that a cover bushing made of a synthetic resin material is coupled to the bushing through hole.
4. The photomask's safe deposit box of claim 1, wherein the body has a coil insert so that the bolt member is attached inside the bolt guide hole.
5. The cabinet for storing a photomask according to claim 4, wherein the body is formed with chip storage space portions in front and rear of the bolt guide hole so as to block fine chips generated when the coil insert and the bolt member rub against each other from flowing out by using the sponge and the silica gel cover; a locking table is formed at the inlet and outlet side of the scrap storage space part, and a silica gel cover which is made of elastic materials and is provided with a bolt through hole is combined on the locking table; the debris storage space portion contains a sponge impregnated with oil.
6. The photomask storage box of claim 1, wherein the rotating cover member has a cut-out portion formed on an outer side of the edge and a hanging stand formed on an inner side of the edge so as to press-fit the pressure fixing member.
7. The photomask storage box of claim 6, wherein the pressing and fixing member has a projection formed on an outer side surface thereof so as to be coupled to the mount.
8. A storage box for a photomask according to claim 1, wherein the pressing and fixing member has a curved surface formed on a front surface thereof so as to be in contact with the photomask point to prevent generation of particles in the photomask.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020190006335A KR101987741B1 (en) | 2019-01-17 | 2019-01-17 | Photo mask keeping box |
| KR10-2019-0006335 | 2019-01-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111439468A true CN111439468A (en) | 2020-07-24 |
| CN111439468B CN111439468B (en) | 2021-08-13 |
Family
ID=66845897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911070920.XA Active CN111439468B (en) | 2019-01-17 | 2019-11-05 | Storage box for photomask |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7138275B2 (en) |
| KR (1) | KR101987741B1 (en) |
| CN (1) | CN111439468B (en) |
| WO (1) | WO2020149466A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101987741B1 (en) * | 2019-01-17 | 2019-06-12 | 피엠씨글로벌 주식회사 | Photo mask keeping box |
| CN113002957B (en) * | 2021-04-16 | 2022-08-30 | 彩虹（合肥）液晶玻璃有限公司 | Glass substrate packing and transporting device |
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- 2019-01-17 KR KR1020190006335A patent/KR101987741B1/en active IP Right Grant
- 2019-06-14 JP JP2019554657A patent/JP7138275B2/en active Active
- 2019-06-14 WO PCT/KR2019/007203 patent/WO2020149466A1/en active Application Filing
- 2019-11-05 CN CN201911070920.XA patent/CN111439468B/en active Active
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| CN101321674A (en) * | 2005-09-27 | 2008-12-10 | 诚实公司 | Reticle pod |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN111439468B (en) | 2021-08-13 |
| WO2020149466A1 (en) | 2020-07-23 |
| JP2021521469A (en) | 2021-08-26 |
| KR101987741B1 (en) | 2019-06-12 |
| JP7138275B2 (en) | 2022-09-16 |
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