JP2007286483A - Pellicle storage container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pellicle storage container that can safely and reliably separate a separator from a pellicle. <P>SOLUTION: A separator is fixed to a pellicle storage container tray by providing a protruding region having a plurality of through holes on the outer periphery of the separator and inserting a fixing tool having a portion with a larger diameter than the through hole into the through hole. It is preferable respectively that: a pellicle is fixed to the pellicle storage container tray by other means than the above separator fixing means; by the other means, the pellicle is fixed to the pellicle storage container tray by pins inserted to a plurality of non-penetrating holes provided in the side face of a pellicle frame; the fixing tool of the separator to the pellicle storage container can be attached and detached; the fixing tool of the separator is sucked and fixed to the pellicle storage container by magnetic force; at least one part in the fixing tool of the separator to the pellicle storage container is provided within 50 mm distance from a corner of the pellicle frame. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a pellicle for lithography, particularly a large pellicle storage container used for manufacturing a liquid crystal display, which is used as a dust prevention when manufacturing a semiconductor device, a printed circuit board, a liquid crystal display or the like.

A pattern is produced by irradiating light to a wafer or a liquid crystal glass original plate. If dust adheres to a photomask or reticle (hereinafter simply referred to as a photomask) used at this time, the dust blocks light. There is a problem that the transferred pattern is damaged due to bending.
For this reason, these operations are usually performed in a clean room, but it is still difficult to keep the photomask clean. Therefore, a method of sticking a pellicle as a dust guard on the photomask surface is taken.

  In this case, the foreign matter does not adhere directly to the surface of the photomask but adheres to the pellicle. Therefore, if the focus is set on the pattern of the photomask during lithography, the foreign matter on the pellicle becomes irrelevant to the transfer. This pellicle usually has a transparent pellicle film made of nitrocellulose, cellulose acetate, fluorine resin or the like that transmits light well, and a pellicle film good solvent is applied to the upper end surface of a pellicle frame made of aluminum, stainless steel, polyethylene, etc. Adhere by air-drying (refer to Patent Document 1) or adhere with an adhesive such as epoxy resin (refer to Patent Document 2 or Patent Document 3) or acrylic resin, and attach to a photomask at the lower end of the pellicle frame In order to protect the adhesive layer, a pressure-sensitive adhesive layer made of polybutene resin, polyvinyl acetate resin, acrylic resin or the like is provided.

In addition, when the pellicle is attached to the photomask, a small hole for adjusting the atmospheric pressure is formed in a part of the pellicle frame in order to eliminate the pressure difference between the space enclosed inside the pellicle and the outside. A filter may be installed to prevent intrusion of foreign matter from the air moving through.
When using a pellicle, the separator (liner) must be peeled to expose the adhesive layer. In the case of a large pellicle having a side length exceeding 300 mm, it is difficult to peel the pellicle while keeping the pellicle horizontal, so that the pellicle is in an upright position as shown in FIGS. Often done.

Usually, since the separator is made of a resin film such as PET having a thickness of about 100 to 150 μm and has no rigidity, it exhibits extremely unstable behavior at the time of peeling. For this reason, as shown in FIG. 4D, the pellicle film may be damaged by contact with the pellicle film at the time of peeling, or the adhered foreign matter may be scattered to contaminate the pellicle film.
In order to prevent this, it may be possible to form a shape that covers the entire surface so that it does not flutter during peeling, but since the area becomes extremely large, it becomes difficult to clean the entire surface. Further, there are problems in handling due to an increase in weight, slackness in the central portion, and the like, and a problem that the pellicle film cannot be inspected after the separator is pasted.

In a method using a jig (for example, fixing a separator at several points), it is expected that the jig is attached to the separator, and there is a problem that the jig needs to be prepared for each pellicle size.
As described above, there is no effective and simple means for preventing the contact of the separator with the pellicle film and the adhesion of foreign matter to the pellicle film in the method of peeling the separator while standing the pellicle vertically. Therefore, it is preferable to peel the separator in a state where the pellicle is horizontal. However, as described above, when the pellicle is placed on something and peeled, the separator comes to the lower side and cannot be peeled off.

Therefore, it is necessary to hold the pellicle from a lateral direction with some jig and lift it high, and pull the separator downward in that state. For this reason, if this is to be realized by an apparatus, a considerably large one is required and cannot be easily implemented.
Usually, the pellicle is horizontally stored in the pellicle storage container. The removal is performed by lifting the pellicle placed on the pellicle storage container tray upward while keeping it substantially horizontal. At this time, if the separator is fixed on the storage container tray by any method, the separator should be peeled off and remain on the storage container tray in accordance with this operation. If this method can be realized, it is possible to prevent contact with the pellicle film when the separator is peeled off without preparing a special jig or apparatus.

As a known technique for fixing the separator to the pellicle storage container tray, for example, the following techniques have been proposed (see Patent Document 4 and Patent Document 5).
The method of Patent Document 4 has a purpose different from that of the present invention, is to prevent the displacement of the pellicle using the separator (protective film) instead of fixing the separator, and provides a hole in the presser allowance protruding from the separator. The hole is inserted and fixed to a pin installed on the tray. In this method, since there is no restriction in the vertical direction, there is no function of fixing the separator to the storage container tray, and the separator cannot be peeled when the pellicle is lifted. Further, there is a concern that the pellicle moves up and down in the pellicle storage container during transportation, and the pellicle film is contaminated by dust generation.

In the method of Patent Document 5, the presser allowance protruding from the separator (protective film) is fixed to the pellicle case with an adhesive tape. The method of Patent Document 5 is different from the present invention in the same manner as the method of Patent Document 6, but the separator is fixed to the pellicle storage container tray with a tape. There is a possibility that can be peeled off. However, there is a problem in that the pellicle is indirectly fixed to the pellicle storage container tray by the separator. The separator peels off from the mask adhesive layer with a light peeling force. For this reason, the mask adhesive layer may be peeled off from the separator when the impact is strong or the storage container is turned upside down, and the pellicle may move and be damaged in the storage container. In addition, due to the nature of the adhesive tape, it is difficult to perform the pasting / peeling work unless it is handled directly by hand. The fact that manual work must be performed near the pellicle film is very problematic in terms of preventing foreign matter from adhering to the pellicle film.
From the above, there has been no pellicle with no separator contact or foreign matter adhesion to the pellicle film when the separator is peeled.

JP 58-219033 US Pat. No. 4,861,402 Japanese Patent Publication No. 63-27707 JP 2004-361648 A JP 2004-361647 A

  In view of the above circumstances, an object of the present invention is to make it possible to safely and reliably separate a pellicle from a pellicle when the pellicle is taken out from the pellicle storage container.

In the pellicle storage container of the present invention, a protruding region having a plurality of through holes is provided on the outer periphery of the separator, and a fixing tool having a larger diameter than the through hole is inserted into the through hole, and the pellicle storage container is placed in the pellicle storage container tray. The separator is fixed.
It is preferable that the separator is fixed to the pellicle storage container tray and the pellicle is fixed to the pellicle storage container tray by means different from the separator fixing means. The other means may be that the pellicle is fixed to the tray of the pellicle storage container by pins respectively inserted into a plurality of non-through holes provided on the side surface of the pellicle frame.
At least one of the separator fixing tool to the pellicle storage container, the separator fixing tool to the pellicle storage container being removable, the separator fixing tool being attracted and fixed to the pellicle storage container by magnetic force Each of the locations is preferably provided within 50 mm from the corner of the pellicle frame.

  According to the present invention, the separator is peeled off from the mask adhesive layer as the pellicle is taken out from the pellicle storage container. Since the separator remains fixed to the pellicle storage container tray until the end of peeling, contact with the pellicle film is prevented and there is little risk of foreign matter adhering.

Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited thereto.
FIG. 1 shows an embodiment of the present invention. FIG. 1A is a plan view and a schematic view of a side surface (AA cross section), FIG. 1B is an enlarged sectional view of a separator fixing means, and FIG. 1C is an enlarged sectional view of a fixing means for a pellicle frame.
In the separator 14 attached to the mask adhesive layer 12 on the end surface of the pellicle frame 10, tab portions 14a having through holes are provided in the vicinity of the four corners. A receiving seat 15b is fixed by bolts 15d on the storage container tray 18 just below the separator tab portion 14a, and a magnet 15c is fixed inside the receiving seat 15b.

Further, in order to completely prevent dust from entering from the outside, a groove is provided around the bolt hole of the receiving seat 15b, and an O-ring 19 is attached. Then, a fixture 15a made of a magnetic material is inserted into the through hole 14b and the receiving seat 15b of the separator tab portion 14a, and the tip of the fixture 15a is attracted and fixed to the magnet 15c. The separator 14 is fixed.
Here, since the fixing tool 15a may be a magnetic body having moderate rigidity, carbon steel subjected to surface treatment such as plating, martensitic or ferritic stainless steel is preferable. As a shape, it is sufficient that there is a large-diameter portion at least 1.2 times larger than the through-hole 14b provided in the separator tab portion 14a. Further, a handling groove or hole may be provided so as to be easily grasped with tweezers or the like at the time of detachment.

The magnet 15c is particularly preferably a so-called rare earth magnet such as a samarium-cobalt magnet or a neodymium-iron-boron magnet that is small and can provide a strong magnetic force, but from the viewpoint of preventing dust generation from the magnet surface and preventing rust. It is desirable to apply an appropriate surface treatment such as nickel plating or epoxy resin coating. The magnet 15c is fixed in a space as shown in FIG. 1 (b) so that a magnetic force acts on the fixture 15a through the thin portion of the receiving seat 15b, or the thin portion of the receiving seat 15b is fixed. It may be omitted and fixed directly in the hole of the receiving seat 15b with an adhesive that generates less gas.
By utilizing the magnetic force, the fixing tool can be easily attached and detached, and the fixing force does not deteriorate with time and high reliability can be obtained. Further, since there is no fear of volatilization of chemical substances or generation of dust due to rubbing, it is extremely suitable from the viewpoint of maintaining cleanliness in the storage container.

It is desirable that the gap between the fixture 15a and the receiving seat 15b be as narrow as possible as long as the fixture 15a can be smoothly attached and detached. Here, there are no particular restrictions on the hole shapes of the through hole 14b, the fixture 15a, and the receiving seat 15b, and the object can be achieved with shapes other than the round holes, but considering the ease of processing and dust generation when rubbed. For example, a round hole is preferable.
Further, it is desirable that the size of the through hole provided in the separator tab portion 14a is at least 1 mm, particularly about 5 mm, larger than the thickness of the insertion portion of the fixture 15a. In addition to facilitating the positioning when inserting the fixture 15a, when the pellicle is pulled away from the storage container tray 18, the amount of play between the fixture 15a and the tab portion 14a, the separator moves upward, and the mask It will be pulled with respect to the adhesion layer 12, and peeling will become easy.

In addition to fixing the separator, a combination of fixing the pellicle itself to the pellicle storage container tray is also a more preferable embodiment.
The fixing of the pellicle to the pellicle storage container tray is preferably performed by the following configuration.
Four non-penetrating round holes 10a are provided on the outer surface of the pellicle frame 10, and pins 16 that can be inserted and removed are inserted therein. Each pin 16 is structured to be held by a block 17 fixed on the storage container tray by a method such as adhesion (not shown). By inserting the pin 16, the pellicle frame 10 is placed on the storage container tray 18. Fixed. The pins and blocks are preferably manufactured by injection molding a resin such as PPS or ABS from the viewpoint of dimensional accuracy and cost. It is also preferable to attach a rubber part to the tip of the pin to prevent dust generation due to rubbing between the pellicle frame and the pin.
By separating the means for fixing the pellicle to the pellicle storage container tray and the means for fixing the separator to the pellicle storage container, the pellicle is not fixed to the pellicle storage container via an unstable separator. There is no danger of moving and generating dust or damage. When the pellicle is pulled away from the pellicle storage container after the pellicle fixing means is released, only the separator is left on the pellicle storage container tray, and can be automatically peeled off.
In addition to holding the pellicle securely on the storage container tray, there is very little risk of dust generation during transportation, and in addition, it is possible to work indirectly with tweezers when releasing the fixation of the pellicle Therefore, there is an advantage that it is not necessary for a human hand to approach the pellicle, and the possibility of foreign matter adhesion is small.
Further, by making the separator fixture to the pellicle storage container detachable, if the separator fixing means is released together with the pellicle fixing means, the pellicle can be taken out from the pellicle storage container without peeling off the separator. This is particularly useful when, for example, only inspection is performed and the container is returned to the storage container.

2A to 2D are schematic views of a scene where the pellicle is lifted from the pellicle storage container tray. A pin (not shown) inserted in the pellicle frame 20 is removed, and then the pellicle frame 20 is lifted upward substantially parallel to the pellicle storage container tray 25. Then, as shown in FIG. 2B, as the pellicle frame 20 is raised, the separator is pulled by the gap between the fixture 23 and the round hole (not shown) provided in the separator 22, and then the fixture 23 It is caught and pulled down in the diagonal direction. When the pellicle frame 20 is further lifted upward, the separator 22 begins to peel from the corner as shown in FIG. 2B, and the process shown in FIG. 2C is followed. The peeling is completed as shown in FIG.
At this time, since the fixing tool has a larger diameter portion than the through hole of the separator, if the fixing tool inserted and fixed in the through hole is held with a sufficient fixing force, the separator is removed from the fixing tool. There is no fear of sliding.

  3 (a) and 3 (b) show another embodiment of the present invention. FIG. 3A shows a structure in which the number of perforated tab portions 32 is increased in the separator 31 along the long side of the pellicle so that the separator 31 is more closely fixed to a storage container tray (not shown). Of course, at this time, the pellicle storage container tray side also requires a receiving seat, a fixture, and other fixing means at a location corresponding to the perforated tab portion 32 (not shown). The increase in the number of separator fixing points has an effect of improving the stability at the time of separating the separator for a particularly large pellicle having a side length exceeding 1 m.

In FIG. 3B, the perforated tab portion is provided not over the entire circumference of the separator, but as a part of the protrusion. Since the shape of the outer peripheral part of the separator is only a straight line except for the corner part, the manufacturing is easy. However, there is a negative factor that the area of the unnecessary separator increases. As described above, the shape of the separator tab portion and the number of separator fixing portions are preferably determined from the viewpoint of stably separating the separator and aiming for a simple shape as much as possible.
It is also a preferred embodiment that at least one tab portion formed on the separator is provided within 50 mm from the corner portion of the pellicle frame. In such a case, as a condition in which the separation of the separator is automatically performed along with the separation of the pellicle from the storage container, the separation is started from the vicinity of the corner, but this condition is surely satisfied. Since the peeling from the adhesive layer becomes smooth by starting peeling from the vicinity of the corner portion and the peeling force is small, the separator is not subjected to a large force or abrupt behavior, and therefore, the risk of dust generation is small.

Examples of the present invention will be described below, but the present invention is not limited thereto.
[Example]
An aluminum alloy pellicle frame 10 having a shape as shown in FIG. 1A was manufactured by machining. The pellicle frame 10 had an outer size of 1136 × 783 mm, an inner size of 1114 × 763 mm, and a height of 6 mm. Further, four frame fixing holes 10a are arranged on the side surface at positions of 36 mm each from the corner portion of the long side surface, and the shape thereof is a round hole having a diameter of 2.5 mm and a depth of 2.5 mm. Finally, the surface was sandblasted and then black anodized.

  This pellicle frame is washed with a neutral detergent and pure water and dried, and then, one end face is a silicone adhesive as the pellicle film adhesive layer 13 and the other end face is a silicone adhesive (trade name KR120, Shin-Etsu Chemical Co., Ltd.). (Made by Co., Ltd.) was diluted with toluene, applied, and cured by heating. And the separator 14 was affixed on the mask adhesive layer end surface for the adhesion layer protection. The separator is made of a PET film having a thickness of 125 μm, and a fluorine-modified silicone release agent (trade name: X-70-201, manufactured by Shin-Etsu Chemical Co., Ltd.) is applied to the surface. The separator 14 was provided with tab portions 14a having through holes with a diameter of 10 mm at four corner portions.

Further, a fluorine-based polymer (trade name Cytop, manufactured by Asahi Glass Co., Ltd.) is formed on a rectangular quartz substrate of 850 × 1200 × 10 mm in thickness by spin coating, dried with a solvent, and then a frame having the same shape as the outer shape of the substrate. A pellicle film having a thickness of about 4 μm obtained by adhering to and peeling from the body was attached to this pellicle frame. Then, an unnecessary film around the pellicle frame was cut and removed with a cutter to obtain a pellicle.
Further, an ABS resin container having a cross-sectional shape as shown in FIG. 1A is manufactured by a vacuum forming method, and the fixing pin 16 is inserted in a position corresponding to the fixing hole 10a on the side surface of the pellicle frame 10. The position of 17 was adjusted and fixed on the storage container tray 18 with an adhesive and bolt fastening (not shown).

  Furthermore, the receiving seat 15b was fastened and fixed by a bolt 15d at a position corresponding to the through hole provided in the separator tab portion 14a. A nickel-plated neodymium-iron-boron magnet having a diameter of 6 mm and a height of 6 mm was inserted into the space inside the receiving seat 15b. Further, an O-ring 19 is disposed around the bolt hole. Further, as a fixture 15a, carbon steel S45C was fitted into a receiving seat 15b by machining, and machined into a stepped round bar shape having a large diameter portion with a diameter of 16 mm, followed by nickel plating. The hole diameter of the receiving seat 15b was 6 mm, and the outer diameter of the tip cylindrical portion of the fixture 15a was 5.8 mm so that it could be smoothly inserted and removed. Finally, all these members were washed with a neutral detergent and pure water and dried well.

The pellicle completed by the above method was subjected to foreign matter inspection with a halogen lamp having a light quantity of 300,000 lux in a dark room, and then carefully placed on the storage container tray 18, and the pin 16 was inserted into the round hole 10a on the side surface of the pellicle frame 10. Inserted into. Next, the fixture 15a was inserted into the through hole of the separator tab portion 14a and the receiving seat 15b, and was fixed to the magnet 15c by suction.
After that, the two workers hold the pellicle storage container tray 18 vertically with four corners, turn it upside down, and shake it up and down 5 times (speed: about 30 cm / s, up and down stroke) (About 30 cm) Although the behavior of the fixed pellicle frame 10 was confirmed, there was no positional deviation between the pellicle frame 10 and the separator 14 at all. Further, the pins 16 were extracted from the pellicle frame 10 using tweezers.

Next, the pellicle frame 10 was pulled upward, and the peeling state of the separator 14 was confirmed as follows.
After two workers put on gloves made of nitrile rubber, they were thoroughly washed with pure water and dried. Next, the pellicle frame was pulled up slowly while maintaining almost horizontal with the four corners near the outside. The separator began to peel off when it was lifted by about 5 mm, and when it was lifted by about 5 cm, the separator 14 was completely removed from the mask adhesive layer 12.
Thereafter, the pellicle frame 10 was attached to a dedicated holder (not shown), and the surface of the pellicle film 11 was observed by irradiating a 300,000 lux halogen lamp in a dark room. As a result, neither damage nor adhesion of foreign matter was observed on the pellicle film surface 11.
The same test was repeated 10 times, but there was no contact of the separator with the pellicle film surface and no foreign matter adhered. All the above work except frame machining is performed in a Class 1 clean room.

[Comparative Example 1]
A pellicle was produced in the same manner as in the above example. However, the separator used was a tab portion omitted in one place.
Further, an ABS resin pellicle storage container having a cross-sectional shape as shown in FIG. 1 is manufactured by a vacuum forming method, and the fixing pin 16 is inserted into a position corresponding to the fixing hole on the side surface of the pellicle frame. The position was adjusted and fixed to the storage container tray 18 with an adhesive and bolt fastening (not shown). Thereafter, the storage container was washed with a neutral detergent and pure water and dried well.

The pellicle completed as described above was inspected for foreign matter on the pellicle film with a halogen lamp having a light quantity of 300,000 lux in the dark room, and then carefully placed on the storage container tray 18, and the pin 16 was placed on the side surface of the pellicle frame 10 Was inserted into the hole 10a.
Thereafter, in exactly the same manner as in the above embodiment, the pellicle storage container tray 18 was vertically set up by two workers, turned upside down, and further shaken up and down 5 times (speed: about 30 cm / s, (Vertical stroke: about 30 cm) The behavior of the pellicle frame 10 was confirmed, but no displacement of the pellicle frame 10 was observed.

Next, after two workers put on gloves made of nitrile rubber, they are thoroughly washed and dried with pure water, and the pellicle is kept almost horizontal with the outside of the pellicle frame 10 and the vicinity of the four corners. The pellicle was slowly removed from the storage container tray 18 and held vertically with a jig (not shown) as shown in FIG. Thereafter, as shown in FIGS. 4A to 4C, a tab portion (not shown) of the separator 43 was grasped with tweezers 44 and peeled while being pulled downward, and the behavior was confirmed.
When this test was repeated 10 times, in 2 out of 10 times, peeling progressed abruptly while the separator was being peeled off, and the separator 43 formed on the pellicle film 41 with the behavior shown in FIG. Contact and damaged the pellicle membrane.
In FIG. 4, 40 is a pellicle frame, and 42 is a mask adhesive layer.

[Comparative Example 2]
An ABS resin pellicle storage container having a cross-sectional shape as shown in FIG. 5 was manufactured by a vacuum forming method. In this container, pins and blocks (16 and 17 in FIG. 1) for fixing the pellicle frame in the above-described embodiment and comparative example 1 are omitted. The pellicle storage container was washed with a neutral detergent and pure water and dried well.
Next, a pellicle was produced in the same manner as in the above example. As shown in FIG. 5, the separator 54 used has four tab portions 54 a as in the above embodiment, but the through holes in the tab portions are omitted. The completed pellicle was inspected for foreign matter on the pellicle film surface with a halogen lamp having a light intensity of 300,000 lux in a dark room and carefully placed on the storage container tray 56. Then, the tab part 54a was affixed and fixed on the storage container tray 56 with the adhesive tape 55 (Alama brand name: Almark tape) of 1/2 inch width.

  Thereafter, in exactly the same manner as in the above-described example and comparative example 1, the two pellicle storage container trays 56 were vertically set up by two workers, turned upside down, and further shaken up and down 5 times while maintaining upside down (speed: about 30 cm / s, vertical stroke: about 30 cm), the behavior of the pellicle frame 50 was confirmed. As a result, when rocked upside down, the mask adhesive layer 52 peeled off from the separator 54, and the pellicle frame 50 dropped off.

  The present invention provides a pellicle storage container that is extremely safe and reliable for storing and moving pellicles that are becoming larger and separating separators, and is a great contribution to the IT manufacturing industry.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory view showing an embodiment of a pellicle storage container according to the present invention, in which FIG. 1 (a) is a plan view and a schematic view of a side surface (AA cross section), FIG. 1 (c) is an enlarged sectional view of a fixing means for the pellicle frame. FIGS. 2A to 2D are explanatory views sequentially showing the separator peeling process according to the present invention. FIG. 3A is an explanatory view showing another embodiment of a separator attached to a pellicle according to the present invention. FIG. 3A is an example in which separator tabs are increased (six in the illustrated example), and FIG. An example in which separator tab portions are provided on the entire periphery of the pellicle is shown. 4 (a) to 4 (d) are schematic explanatory views sequentially showing separation of a separator according to a conventional technique. It is explanatory drawing which shows the pellicle and pellicle storage container by a prior art.

Explanation of symbols

10: Pellicle frame 10a: Round hole (Pellicle frame fixing hole)
11: Pellicle film 12: Mask adhesive layer 13: Pellicle film adhesive layer 14: Separator (liner)
14a: (Separator) tab portion 14b: Through-hole 15a (Separator tab portion) 15a: (Separator) fixture 15b: Receiving seat 15c: Magnet 15d: Bolt 16: (For frame fixing) Pin 17: (Pin support) block 18 : (Pellicle) Storage container tray 19: O-ring

20: Pellicle frame 21: Mask adhesive layer 22: Separator (liner)
23: (Separator) Fixing tool 24: Receiving seat 25: Pellicle storage container tray

30: Pellicle frame 31: Separator (liner)
32: (Separator) Tab part

40: Pellicle frame 41: Pellicle film 42: Mask adhesive layer 43: Separator (liner)
44: Tweezers

50: Pellicle frame 51: Pellicle film 52: Mask adhesive layer 53: Film adhesive layer 54: Separator (liner)
54a: (Separator) Tab portion 55: Adhesive tape 56: Pellicle storage container tray

Claims (6)

Providing a protruding region having a plurality of through holes on the outer periphery of the separator, and inserting a fixing tool having a larger diameter than the through hole into the through hole to fix the separator to the pellicle storage container tray. Pellicle storage container. 2. The pellicle storage container according to claim 1, wherein the separator is fixed to the pellicle storage container tray, and the pellicle is fixed to the pellicle storage container tray by means different from the separator fixing means. 2. The separator according to claim 1, wherein the separator is fixed to the pellicle storage container tray, and the pellicle is fixed to the pellicle storage container tray by pins respectively inserted into a plurality of non-through holes provided on the side surface of the pellicle frame. Pellicle storage container. The pellicle and the pellicle storage container according to any one of claims 1 to 3, wherein a fixing tool for the separator to the pellicle storage container is detachable. 5. The pellicle storage container according to claim 1, wherein the fixing tool for the separator is adsorbed and fixed to the pellicle storage container by a magnetic force. The pellicle storage container according to any one of claims 1 to 5, wherein at least one of the fixtures of the separator to the pellicle storage container is provided within 50 mm from the corner portion of the pellicle frame.

Images