KR101268361B1 - pellicle container - Google Patents

Abstract

Provides a pellicle container that can safely and reliably separate the separator from the pellicle.

A protruding region having a plurality of through holes is provided on the outer circumference of the separator, and the separator is fixed to the ferrule container tray by inserting a fastener having a diameter larger than the through hole in the through hole.

Fixing the pellicle to the pellicle container tray by means other than the separator fixing means, wherein the other means includes pellicle storage by pins inserted into a plurality of non-penetrating holes formed on the side of the pellicle frame. Among the things fixed to the tray of the container, the fixture of the separator can be detachable from the ferry container, the fixture of the separator is fixed to the ferrule container by magnetic force, the separator of the separator to the container It is preferable that at least one place is provided within 50 mm from the corner of the ferrule frame, respectively.

Description

Pericle container {PELLICLE CONTAINER}

1 is an explanatory view showing one embodiment of a ferrule container according to the present invention, Figure 1 (a) is a schematic view of a plan view and side (AA section), Figure 1 (b) is an enlarged cross-sectional view of the separator fixing means 1 (c) is an enlarged cross-sectional view of the fixing means of the ferrule frame.

FIG.2 (a)-(d) are explanatory drawing which shows the process of peeling of the separator by this invention in order.

Fig. 3 is an explanatory view showing another embodiment of the separator attached to the ferrule according to the present invention. Fig. 3 (a) shows an example in which the separator tab portions are increased (6 in the example), and Fig. 3 (b) shows, An example of the separator tab portion provided around the entire circumference is shown.

4 (a) to 4 (d) are schematic explanatory diagrams showing the peeling of a separator according to the prior art in order.

5 is an explanatory view showing a pericle and a pericle storage container according to the prior art.

DESCRIPTION OF THE REFERENCE NUMERALS (S)

10: Pericle Frame 10a: Round Hole (Pericle Frame Fixing Hole)

11: pellicle film 12: mask adhesive layer

13: pellicle membrane adhesive layer 14: separator (liner)

14a: (Separator) Tap Part 14b: Through Hole (Separator Tab Part)

15a: (Separator) Fixture 15b: Seat

15c: Magnet 15d: Bolt

16: (for frame fixing) Pin 17: (pin support) block

18: (Pericle) storage container tray 19: O-ring

20: Pericle Frame 21: Mask Adhesive Layer

22: Separator (Liner) 23: (Separator) Fixture

24: Receiving sheet 25: Pericle container container tray

30: Pericle Frame 31: Separator (Liner)

32: (Separator) Tap Part 40: Pericle Frame

41: pellicle film 42: mask adhesive layer

43: separator (liner) 44: tweezers

50: Pericle Frame 51: Pericle Film

52: mask adhesive layer 53: film adhesive layer

54: separator (liner) 54a: (separator) tab part

55: adhesive tape 56: pellicle container tray

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a lithographic printing pellicle used as a trash shield when manufacturing a semiconductor device, a printed board or a liquid crystal display, and particularly a large pellicle container used for manufacturing a liquid crystal display.

If a pattern is produced by irradiating light onto a wafer or a glass plate for liquid crystal, but the garbage is attached to a photomask or reticle (hereinafter referred to simply as a photomask) used at this time, the garbage blocks, distorts or distorts the light. Because of this, there was a problem that the transferred pattern was damaged.

For this reason, these operations are usually performed in a clean room, but it is still difficult to keep a photomask clean at all times. Therefore, a method of adhering a pellicle as a waste film on the surface of the photomask is taken.

In this case, the foreign matter does not directly adhere on the surface of the photomask, but adheres to the pericle, so that if the focus is set on the pattern of the photomask during lithography, the foreign matter on the pericle is irrelevant to the transfer. This pellicle is a transparent pellicle film made of nitrocellulose, cellulose acetate or fluorine resin, which transmits light well, and a good solvent of pellicle film is placed on the upper surface of the pellicle frame made of aluminum, stainless steel, polyethylene, or the like. It is applied, air-dried, and bonded (see Patent Document 1), or bonded with an adhesive such as an epoxy resin (see Patent Documents 2 and 3) or an acrylic resin, and attached to a photomask at the lower end of the pericle frame. And a release layer (separator) for the purpose of protecting the pressure-sensitive adhesive layer, and a pressure-sensitive adhesive layer made of polybdenum resin, polyvinyl acetate resin, acrylic resin and the like.

In addition, in order to eliminate the space surrounded by the inside of the ferrule and the external air pressure difference in the state where the ferrule is attached to the photomask, a small hole for air pressure adjustment is opened in a part of the ferrule frame and moved through the small hole. In some cases, a filter may be provided to prevent foreign matter from entering the air.

When using a pellicle, the separator (liner) must be peeled off to expose the adhesive layer. In the case of a large-sized pellicle having a side length exceeding 300 mm, it is difficult to remove the pellicle while keeping the pellicle horizontal, so as shown in Figs. Much is done in

Usually, since a separator is made of resin films, such as PET of about 100-150 micrometers in thickness, and there is no rigidity, it shows very unstable behavior at the time of peeling. Therefore, as shown in FIG.4 (d), the peeling contacted and damaged the peeling foreign substance, or the foreign matter which adhered to it may contaminate the fertilizing membrane.

In order to prevent this, it is also conceivable to have a shape that covers the entire surface so as not to flutter during peeling, but since the area becomes very large, it becomes difficult to clean the entire surface cleanly. In addition, there is a problem of handling resulting from an increase in weight, looseness in the center part, or the like that the inspection of the pellicle film is not possible after the separator is attached and cannot be employed.

In the method of using a jig (for example, fixing the separator at several places), installation of the jig on the separator is expected to be very difficult, and there is also a problem in that the jig needs to be prepared for each of the pericle size.

As described above, there is no effective and convenient means for preventing the separator from coming into contact with the pellicle film or the foreign matter adhered to the pellicle film in the method of vertically peeling the separator. Therefore, although it is good to peel a separator in the state in which the fertilizer was level, as mentioned above, when trying to peel off where a ferrule is located, a separator will come under and cannot peel.

For this reason, it is necessary to hold the ferrule in a certain jig from the transverse direction and lift it high, and pull the separator downward in that state. Therefore, if this is to be realized by the device, a very large one is required and cannot be simply performed.

Usually, the pellicle is stored horizontally in the pellicle container. Extraction is performed by lifting upwards while keeping the pellicle loaded on the pellicle container tray almost horizontal. At this time, if the separator is fixed on the storage tray by any means, the separator will peel off and remain on the storage tray in accordance with this operation. If this method is feasible, the prevention of contact with the pellicle film during peeling of the desired separator can be achieved even if a special jig or device is not prepared.

By the way, as a well-known technique of fixing a separator to a ferry container container tray, the following are proposed, for example (patent document 4, patent document 5).

The method of Patent Document 4 differs from the present invention in that the object is not fixed to the separator but is used to prevent misalignment of the ferrule using a separator (protective film). The hole is inserted into the installed pin and fixed. Since this method has no restriction in the up-down direction, there is no function of fixing the separator to the storage container tray, and the separator cannot be peeled off when the ferrule is lifted up. In addition, there is a fear that the pellicle moves up and down in the pellicle container during transportation, and the pellicle membrane is contaminated by oscillation.

In the method of patent document 5, the pressure stick part which protruded to the separator (protective film) is fixed to the pellicle case by adhesive tape. Although the method of patent document 5 differs from the present invention similarly to the method of patent document 6, since a separator is fixed to the pellicle container tray, when a pellicle is pulled upward slowly, a separator may be peeled off. There is a possibility. However, there is a problem in that the separator is indirectly fixed to the pellicle container tray by the separator. The separator is peeled off from the mask adhesion layer with light peel force. Therefore, there is a possibility that the mask adhesive layer peels off from the separator, for example, when a strong impact or the storage container is reversed up and down, and the ferrule moves in the storage container and is damaged. Moreover, due to the nature of the adhesive tape, it is difficult to perform the adhesion and peeling work unless it is handled by hand. The manual work in the vicinity of the pellicle membrane is very problematic in terms of preventing foreign matter from adhering to the pellicle membrane.

For this reason, there has been no pellicle without contact of the separator to the pellicle film or foreign matter adhesion so far when the separator is peeled off.

[Patent Document 1] Japanese Patent Application Laid-Open No. 58-219023

[Patent Document 2] US Patent No. 4861402

[Patent Document 3] Japanese Patent Publication No. 63-27707

[Patent Document 4] Japanese Patent Publication No. 2004-361648

[Patent Document 5] Japanese Patent Publication No. 2004-361647

In view of the above circumstances, it is an object of the present invention to make it possible to safely and reliably separate the separator from the pellicle immediately before taking out the pellicle from the pellicle container.

According to an embodiment of the present invention, a periphery container includes a protruding region having a plurality of through holes at an outer circumference of the separator, and inserts a fastener having a portion having a diameter larger than that of the through holes to the periphery container tray. It is characterized by fixing a separator.

It is preferable to fix the separator to the pellicle container tray, and to fix the pellicle to the pellicle container tray by means different from the separator fixing means. The other means may be that the pellicle is fixed to the tray of the pellicle container by pins respectively inserted into a plurality of non-penetrating holes formed in the side surface of the pellicle frame.

Separator fasteners are detachable from the ferrule container, the separator fixtures are fixed to the ferrule container by magnetic force, and at least one of the fixtures of the separator to the It is preferable that it is provided within 50 mm from a corner part, respectively.

EMBODIMENT OF THE INVENTION Hereinafter, although embodiment of this invention is described also with reference to drawings, this invention is not limited to this.

1, one Embodiment of this invention is shown. Figure 1 (a) is a schematic view of the plan view and side (AA section), Figure 1 (b) is an enlarged cross-sectional view of the separator fixing means, Figure 1 (c) is an enlarged cross-sectional view of the fixing means of the pellicle frame.

In the separator 14 attached to the mask adhesive layer 12 on the end face of the ferrule frame 10, tab portions 14a having through holes are provided near four corners. The storage sheet 15b is fixed by the bolt 15d on the storage container tray 18 just below the separator tab portion 14a, and the magnet 15c is fixed inside the storage sheet 15b. .

In addition, in order to completely prevent intrusion of dust from the outside, a groove is formed around the bolt hole of the accommodating sheet 15b, and the O-ring 19 is attached. Then, the fastener 15a made of magnetic material is inserted into the through-hole 14b and the receiving sheet 15b of the separator tab portion 14a, and the tip of the fastener 15a is fixed to the magnet 15c, whereby the storage container is inserted. The separator 14 is fixed on the tray 18.

Here, since the fastener 15a may be a magnetic material having appropriate rigidity, carbon steel subjected to surface treatment such as plating or martensitic or ferritic stainless is preferable. The shape may be a diameter portion that is at least 1.2 times larger than the through-hole 14b formed in the separator tab portion 14a. Moreover, you may form a groove | channel for handling, a hole, etc. in order to be easy to hold by tweezers etc. at the time of desorption.

The magnet 15c is particularly preferably a so-called rare earth magnet such as a samarium-cobalt magnet or a neodymium-iron-boron magnet which has a small and strong magnetic force. However, the surface of the magnet 15c has a nickel plating on the surface. It is preferable to perform appropriate surface treatment, such as epoxy resin coating. In addition, the magnet 15c is fixed in the space as shown in FIG. 1 (b), and the magnetic force acts on the fastener 15a through the thin portion of the accommodating sheet 15b, or the accommodating sheet 15b. May be omitted and fixed directly in the hole of the accommodating sheet 15b with an adhesive with little gas generation.

By using the magnetic force, the attachment and detachment of the fastener is easy, and there is no aging deterioration of the fastening force, and high reliability can be obtained. Moreover, since there is no fear of volatilization of a chemical substance and the possibility of oscillation by rubbing, it is very preferable also at the point of maintaining the cleanliness in a storage container.

It is preferable that the clearance gap between the fastener 15a and the accommodating sheet 15b is as narrow as possible within the range in which the fastener 15a can be detachably attached. Here, there are no particular limitations on the shape of the holes of the through hole 14b, the fastener 15a, and the receiving sheet 15b, and even if the shape is other than a round hole, the object is achieved, but considering the ease of processing and oscillation when rubbing, , Round holes are preferred.

In addition, the size of the through hole formed in the separator tab portion 14a is preferably at least 1 mm, especially about 5 mm, larger than the thickness of the insertion portion of the fastener 15a. Positioning at the time of inserting the fastener 15a becomes easy, and when separating the ferrule from the storage container tray 18, the separator moves upward by the clearance between the fastener 15a and the tab portion 14a through-hole. It is pulled out inclined with respect to the mask adhesion layer 12, and peeling becomes easy.

It is a more preferable embodiment to use not only the fixing of the separator but also the fixing of the pellicle itself to the pellicle container tray.

As the fixing of the pellicle to the pellicle container tray, it is preferable that the pellicle is performed by the following configuration.

Four non-penetrating round holes 10a are formed in the outer surface of the ferrule frame 10, and the pin 16 which can be detachably inserted is inserted therein. Each pin 16 is structured to be held in a block 17 fixed on the storage container tray by a method such as bonding (not shown). It is fixed on the storage tray 18. In terms of dimensional accuracy and cost, the pin and the block are preferably produced by injection molding a resin such as PPS or ABS. Moreover, it is also preferable to attach a rubber component to the tip of a pin as a prevention of the oscillation by friction of a ferrule frame and a pin.

Separate means for securing the pellicle to the pellicle container tray and means for securing the separator to the pellicle container prevents the pellicle from being secured to the pellicle container through unstable separators. There is no fear of moving, damaging and damaging. Then, the releasing of the pellicle holding means removes the pellicle from the pellicle container, leaving only the separator on the pellicle container tray, which can be peeled off automatically.

In addition, since the pellicle is reliably held on the container tray, there is a small possibility of dusting during transportation, and since the work can be indirectly performed with tweezers or the like even when releasing the fixation, There is an advantage that there is no fear of foreign matter adhesion since the ferrule is not approached.

In addition, by allowing the fasteners of the separator to be detachable from the ferry container, by releasing the fixing means of the separator together with the fixing means of the ferrule, the ferrule can be taken out of the ferry container without detaching the separator. It is especially advantageous when only inspection is carried out and it returns to a storage container.

Fig.2 (a)-(d) shows schematic of the scene which lifts a pellicle from a pellicle container tray. The pin (not shown) inserted in the ferrule frame 20 is taken out, and then the pericle frame 20 is lifted upwards almost in parallel with the pericle storage container tray 25. Then, as shown in FIG. 2 (b), the separator is pulled out by the gap between the round holes (not shown) formed in the fastener 23 and the separator 22 as the ferrule frame 20 rises. It is caught by the fixture 23 and lowered in the downward inclination direction. In addition, when the ferrule frame 20 is lifted upward, peeling of the separator 22 starts from a corner part like FIG.2 (b), and passes through the process as shown in FIG.2 (c), and finally, FIG. Peeling is completed as 2 (d).

At this time, since the fastener has a larger diameter portion than the through hole of the separator, if the fastener inserted and fixed in the through hole is maintained at a sufficient fastening force, the separator is not likely to slip out of the fastener or slip.

3A and 3B show another embodiment of the present invention. FIG. 3 (a) is to increase the number of tab portions 32 drilled in the separator 31 on the long side of the ferry, and to make the separator 31 more closely fixed to the storage container tray (not shown). Of course, in this case, fixing means other than the receiving sheet and the fastener is required at a place corresponding to the tab portion 32 which also has a perforated container container side (not shown). The increase in the separator fixing point has the effect of improving the stability at the time of peeling the separator with respect to a particularly large-sized ferrule whose long side exceeds 1 m.

Fig. 3 (b) is formed over the entire circumference of the separator without making the perforated tab portion protrude only. Since the shape of a separator outer peripheral part is only a straight line except a corner part, manufacture is easy. However, there is a negative factor that increases the area of an unnecessary separator. Thus, it is good to determine the shape of a separator tab part and the number of separator fixing parts from a viewpoint which can peel a separator stably and aims at a simple shape as possible.

It is also in a preferred embodiment that at least one of the tab portions formed in the separator is provided within 50 mm from the corner portion of the ferrule frame. In this case, the peeling of the separator is detached from the storage container of the pericle, and the peeling is started from the corner vicinity, but this condition is surely satisfied. Since peeling starts from the corner part vicinity, peeling from an adhesion layer becomes smooth and peeling force becomes small, and since a big force and a sudden behavior are not applied to a separator, there is little concern of oscillation.

Hereinafter, although the Example of this invention is described, this invention is not limited to this.

[Example]

An aluminum alloy pellicle frame 10 having a shape as shown in Fig. 1 (a) was produced by machining. The shape of this ferrule frame 10 was made into outer dimension 1136x783mm, inner dimension 1114x763mm, and height 6mm. Moreover, the frame fixing hole 10a was arrange | positioned at the position of 36 mm each from the corner part of a long side side, and the shape was made into the round hole of 2.5 mm diameter and 2.5 mm depth in the side surface. After the last sandblasting of the surface, black anodized treatment was performed.

After washing and drying this pericle frame with neutral detergent and pure water, it is a silicone adhesive as a liquid adhesive layer 13 on one end surface, and a silicone adhesive as a mask adhesive layer 12 on the other end surface (brand name KR120, Shin-Etsu). Kagaku Kogyo Co., Ltd. product was diluted with toluene, and apply | coated, and it hardened | cured by heating. And the separator 14 was stuck to the mask adhesion layer end surface for the adhesion layer protection. The separator is based on a 125-micrometer-thick PET film, and is coated with a fluorine-modified silicone releasing agent (trade name: X-70-201, manufactured by Shin-Etsu Chemical Co., Ltd.). In addition, the separator 14 was provided with a tab portion 14a having a through hole having a diameter of 10 mm at four corner portions.

In addition, a fluorine-based polymer (trade name Cytop, manufactured by Asahi Glass Co., Ltd.) was deposited on a 850 × 1200 × 10 mm thick quartz substrate by spin coating, and after drying the solvent, a frame having the same shape as the outer surface of the substrate. A pellicle film having a thickness of about 4 µm obtained by adhering and peeling to a sieve was attached to this pellicle frame. And the unnecessary film | membrane around a pellicle frame was cut out by the cutter, and it was set as pellicle.

In addition, an ABS resin container having a cross-sectional shape as shown in FIG. 1 (a) is produced by a vacuum molding method, and the pin 16 for fixing is positioned at a position corresponding to the fixing hole 10a on the side of the ferrule frame 10. The position of the block 17 was adjusted so that () was inserted, and it fixed by the adhesive agent and the bolt fastening (not shown in figure) on the storage container tray 18. As shown in FIG.

Moreover, the accommodating sheet | seat 15b was fastened and fixed by the bolt 15d in the position corresponding to the through-hole formed in the said separator tab part 14a. In the space inside the accommodating sheet 15b, a nickel plated one was inserted into a neodymium-iron-boron magnet having a diameter of 6 mm and a height of 6 mm. In addition, an O-ring 19 was disposed around the bolt hole. As the fastener 15a, carbon steel S45C was fitted to the accommodating sheet 15b by machining, and machined into a round bar shape having a step having a large diameter portion having a diameter of 16 mm, and then nickel-plated. The hole diameter of the accommodating sheet 15b was 6 mm, and the outer diameter of the tip cylindrical portion of the fastener 15a was 5.8 mm, so that insertion and removal were possible smoothly. Finally, all of these members were washed with neutral detergent and pure water and dried well.

After the foreign matter inspection is carried out with a halogen lamp having a light quantity of 300,000 lux in a dark room, the ferrule completed by the above method is carefully loaded on the tray 18 of the container, and the pin 16 is placed in a ferric frame ( 10) It inserted into the round hole 10a of the side surface. Next, the fastener 15a was inserted into the through-hole of the separator tab part 14a and the accommodating sheet 15b, and it fixedly fixed to the magnet 15c.

Thereafter, the four corners are held by two workers to hold the ferry container tray 18 vertically, and the upper and lower sides are shaken up and down five times while still upside down (speed: about 30 cm / s). Up and down stroke: about 30 cm) Although the behavior of the fixed pellicle frame 10 was confirmed, the positional shift of both the pellicle frame 10 and the separator 14 was not seen at all. In addition, the pin 16 was pulled out of the pericle frame 10 using tweezers.

Next, the peeling state of the separator 14 was confirmed as follows by pulling up the pericle frame 10 upwards.

Two workers wore gloves made of nitrile rubber, and then washed and dried well with pure water. Next, it grasped the outer side of a pericle frame and the vicinity of four corner parts, and pulled it upward slowly, maintaining substantially horizontal. The separator began to peel from the place where it pulled up about 5 mm, and the separator 14 fell completely from the mask adhesion layer 12 at the place where it pulled up about 5 cm.

Thereafter, the ferrule frame 10 was installed in a dedicated holder (not shown), and 300,000 lux halogen lamps were irradiated in the dark room to observe the surface of the ferrule film 11. As a result, neither the damage nor foreign matter adhered to the pellicle membrane surface 11.

And although the same test was repeated 10 times, there was no contact of the separator to the pellicle membrane surface and foreign material adhesion. In addition, all the above operations except frame machining are performed in a class 1 clean room.

[Comparative Example 1]

Pericle was produced by the method similar to the said Example. However, the separator used was assumed to have omitted the tab portion.

In addition, an ABS resin pellicle container having a cross-sectional shape as shown in FIG. 1 is manufactured by a vacuum molding method, and the block is inserted such that the fixing pin 16 is inserted at a position corresponding to the fixing hole on the side of the pellicle frame. The position of (17) was adjusted and it fixed to the storage container tray 18 by the adhesive agent and the bolt fastening (not shown). Then, this storage container was wash | cleaned with neutral detergent and pure water, and it dried well.

After the aliquots were carried out on the pellicle film in the dark room with a halogen lamp of 300,000 lux in light, the pellicle completed as described above was carefully loaded on the storage container tray 18, and the pin 16 was loaded. It inserted into the hole 10a of the side surface of the ferrule frame 10.

Thereafter, in the same manner as in the above embodiment, by two workers, the pellicle container tray 18 is placed vertically, upside down, and shaken up and down five times while still upside down (speed: about 30 cm). / s, up and down stroke: about 30 cm), and the behavior of the pellicle frame 10 was confirmed, but the positional shift of the pellicle frame 10 was not seen at all.

Next, after two workers put on gloves made of nitrile rubber, they were washed and dried well with pure water, and the ferry frame 10 was held near the four corners and held almost horizontal, As shown in FIG.4 (d) with a jig | tool (not shown in figure), it took out slowly from the claw storage container tray 18, and held | maintained the ferrule vertically. Then, as shown to Fig.4 (a)-(c), the tab part (not shown) of the separator 43 was grasped | pulled with the tweezers 44, it peeled while pulling downward, and the behavior was confirmed.

As a result of repeating this test 10 times, in 2 out of 10 times, peeling advances abruptly in the middle of peeling a separator, and the separator 43 moves a pellicle film | membrane by the behavior shown in FIG.4 (d). In contact with (41), the pellicle membrane was damaged.

In addition, in FIG. 4, 40 is a pericle frame and 42 is a mask adhesion layer.

[Comparative Example 2]

As shown in FIG. 5, the cross section ABS resin pellicle container was produced by the vacuum molding method. In this container, the pins and blocks (16 and 17 in Fig. 1) for fixing the pericle frame in the above-mentioned Example and Comparative Example 1 are omitted. The pericle container was washed with a neutral detergent and pure water and dried well. Next, a pellicle was produced by the method similar to the said Example. As shown in Fig. 5, the used separator 54 had four tab portions 54a in the same manner as in the above embodiment, but the through holes of the tab portions were omitted. Subsequently, foreign materials on the surface of the ferrule were inspected with a halogen lamp having a light quantity of 300,000 lux in the dark room, and placed on the storage container tray 56 carefully. Thereafter, the tab portion 54a was pasted onto the storage container tray 56 with an adhesive tape 55 (Alma Co., Ltd. product name: Almark tape) having a width of 1/2 inch and fixed.

Subsequently, in the same manner as in the above-described Example and Comparative Example 1, by two workers, the ferry container container 56 is placed vertically, upside down, and shaken up and down five times while still being upside down (speed : About 30 cm / s, upper and lower strokes: about 30 cm), and the behavior of the pericle frame 50 was confirmed. As a result, when shaking up and down, the mask adhesion layer 52 peeled from the separator 54, and the pellicle frame 50 fell out.

The present invention can contribute to the IT manufacturing industry by providing a safer and more reliable ferrule storage container for the storage and movement of increasingly large pellicles and separation of separators.

According to the present invention, the separator is peeled off from the mask adhesive layer with the takeout of the pellicle from the pellicle container. Since the separator is fixed to the pellicle container tray until the end of peeling, the contact with the pellicle membrane is prevented, and the risk of foreign matter adhesion is small.

Claims (9)

In a pellicle container for storing pellicles whose side length exceeds 300mm, Protruding regions having a plurality of through holes are provided on the outer circumference of the separator, A separator having a portion having a diameter larger than that of the through hole through the through hole is sucked and fixed by a magnetic force with the receiving sheet disposed at a position corresponding to the through hole on the ferry container tray. Fix the The fastener container is characterized in that the removable. 2. A pellicle container according to claim 1, wherein the separator is fixed to the pellicle container tray and the pellicle is fixed to the pellicle container tray by means different from the separator fixing means. The ferry container according to claim 1, wherein the separator is fixed to the tray of the pellicle container, and the pin of the pellicle is fixed to the tray of the container of the pellicle by pins respectively inserted into the plurality of non-penetrating holes formed on the side of the pellicle frame. Pericle storage container characterized in that. delete delete The pellicle container according to any one of claims 1 to 3, wherein at least one of the fasteners of the separator to the pellicle container is provided within 50 mm from a corner of the pellicle frame. . delete delete delete

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