JPH1138597A - Structure for housing pellicle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the damage of a pellicle by the vibration and impact during transportation and the adhesion of dust by strong rubbing when the pellicle is housed in a case consisting of a tray and lid and is restrained by bringing the tray and the lid into contact with the pellicle and the pellicle is transported in this state. SOLUTION: This structure is constituted to house the pellicle A consisting of a frame 1, a pellicle film 2 adhered to the upper marginal surface of this frame 1, a tacky adhesive material 3 adhered to the bottom end face of the frame 1 and a protective film 4 adhered to the bottom surface of the frame 1 in order to protect the tacky adhesive material 3 into the case consisting of the tray 5 and the lid 6. Eight pieces of posts 8 are erected in the prescribed positions of the tray 5 near the outer or inner periphery of the frame 1 of the pellicle A housed in the case. The erecting surfaces of the posts 8 are projectingly provided with projecting parts 9. Recessed undercut parts 10 are formed between the rear surfaces of the projecting parts 9 and the front surface of the tray 5 and the peripheral edges of the protective film 4 are inserted into these undercut parts 10, by which the pellicle A is restrained with the tray 5.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a pellicle storage structure used to prevent foreign matter from adhering to a photomask or a reticle used in a lithography process for manufacturing an LSI or the like.

[0002]

2. Description of the Related Art Conventionally, in the production of semiconductor circuit patterns and the like, dust-proof means generally called a pellicle is used.
It has been practiced to prevent foreign matter from adhering to a photomask or a reticle (for example, Japanese Patent Publication No. 54-28718). The pellicle is a transparent polymer film (hereinafter referred to as pellicle) such as nitrocellulose or cellulose derivative having a thickness of about 10 μm or less, which is formed on the upper edge surface of a frame having a thickness conforming to the shape of a photomask or a reticle and having a thickness of about several millimeters. A film is stretched and adhered, an adhesive is applied to the lower edge surface of the frame, and a protective film is adhered on the adhesive with a predetermined adhesive force.

[0003] The adhesive is used to fix the pellicle to a photomask or a reticle, and the protective film is used to maintain the adhesive force of the adhesive until the adhesive is used. It protects the adhesive surface of the adhesive. In transporting this pellicle from the manufacturer to the user, in order to prevent foreign substances from adhering to the pellicle film or the like, or to prevent the pellicle from being damaged, the pellicle is stored in a case composed of a tray and a lid, Further, it is common to carry and store in a dustproof bag or the like.

Conventionally, housing of a pellicle case having the above-described structure has been performed as shown in FIGS.
That is, in the drawing, the pellicle film 52 is adhered to one upper edge surface of the frame body 51 in a stretched (tensed) state, and
The other surface (lower edge surface) is provided with an adhesive material 53 having an appropriate thickness, and a protective film 54 is provided on the lower surface of the adhesive material 53.
Are attached to form a pellicle. This pellicle is placed so that the protective film 54 is in contact with the flat installation surface 55 a of the tray 55.

[0005] The pellicle mounted on the installation surface 55 a of the tray 55 includes a protruding post 5 provided on the tray 55.
5b restricts the left and right movement, and the lid 56
Is covered from above, and the four corners of the lid 56 and the tray 55 are fixed by the clips 57 to be accommodated in the case. As a result, the pellicle was constrained and surrounded by the slope 56a of the lid 56, the post 55b, and the installation surface 55a, and was housed in the case.

[0006]

However, as described above, the pellicle is formed by the slope 56a of the case lid 56 and the post 55.
Although it is transported in a housed state constrained by b and the installation surface 55a, it was unavoidable to receive some vibration or impact during transportation. If there is a large gap between the pellicle and the slope 56a of the lid 56 of the case in a conventional pellicle restrained state in the case, the pellicle collides with the case lid 56 due to vibration and impact during transportation, and this part is In some cases, it was worn out due to strong rubbing and generated dust. In such a case, there has been a problem that the most important function of delivering the pellicle to the user in a state where there is no foreign matter is lost.

On the other hand, when the gap between the pellicle and the case is eliminated, that is, when the slope 56a is in contact with the frame 51 (or the end of the pellicle film 52) in advance, It has been known from experience that the inner surface of the slope 56a or the end of the pellicle film 52 is worn by the mutual contact pressure to generate foreign matter.

Therefore, the most preferable manner in such a pellicle storage structure is to provide a very small gap between the pellicle and the slope 56a of the lid 56 of the case. Specifically, when the pellicle is placed on the tray 55, the lid 56 is covered, and the lid 56 and the tray 55 are fixed to each other with the clip 57, the distance between the slope 56a and the upper end of the frame 1 is 0.1 to 0.1 mm. 0.3mm
This is a structure in which a gap of the order is provided.

[0009] Experiments by the inventor have confirmed that securing such a gap withstands a certain degree of vibration and impact. However, also in this case, there is a problem that dust is generated when a large impact is received. Further, it is necessary to provide a means for reducing the impact applied to the case or the pellicle by a packing method (for example, using a large amount of a soft foam material having a high impact effect), or to require a transportation means with less vibration and impact. In order to secure an appropriate gap between the lid 56 and the pellicle, the tray 55 and the lid 56 need to be formed with high accuracy. However, there has been a problem that it is extremely difficult to guarantee that many of these means do not generate dust at all in principle.

In order to fundamentally improve the above-mentioned conventional problems, the inventor temporarily attaches the pellicle protective film directly to the tray with a predetermined adhesive force, whereby the pellicle housed in the case is removed. We have already developed a completely new technology that has been confined in a case so that it can sufficiently withstand vibration and shock during transportation, and have applied for a patent. (Japanese Patent Application No. 9-182449).

The technique of temporarily temporarily attaching the pellicle to the tray with a predetermined adhesive force is a method of restraining the pellicle to the tray by using an adhesive or an adhesive.
The present invention provides a completely new pellicle storage technology that enables a pellicle to be restrained in a case with a mere mechanical restraining structure without using any of these adhesives or adhesives. It is.

According to the present invention, in particular, when the pellicle is stored in the case, mechanical restraining means for restraining the protective film of the pellicle is provided on a tray of the case in which the pellicle is stored, and the pellicle is fixed by using the restraining means. The present invention relates to a pellicle storage structure in which a pellicle is restrained from moving.

[0013]

The pellicle housing structure according to the present invention is a technique which fundamentally improves the above-mentioned conventional problems, and the gist of the first invention is a frame and a frame. A pellicle film adhered to the upper edge of the body; an adhesive applied to the lower edge of the frame; and a protective film adhered to the lower edge of the frame to protect the adhesive. In a structure in which a pellicle is housed in a case composed of a tray and a lid, a protective film of the pellicle is restrained at a predetermined position on a tray near the outer periphery or inner periphery of the pellicle frame housed in the case. A pellicle storage structure characterized in that it is provided with a means for obtaining the pellicle.

In the pellicle housing structure according to the first aspect of the present invention, the pellicle protection film is restrained on a tray near the outer periphery or inner periphery of the pellicle frame housed in the case. By using this restraining means, the pellicle in the case is mechanically directly restrained and fixed via the protective film, and when transporting the pellicle, it is possible to prevent the pellicle from moving and hitting the case strongly due to vibration or impact. This can prevent dust from being generated.

The gist of the second invention of the pellicle housing structure according to the present invention is that the restraining means of the protective film of the pellicle is provided with an undercut portion and a projection provided on an upright surface rising on the upper surface of the tray. Alternatively, there is provided a pellicle storage structure according to the first aspect of the present invention, which is an inclined surface.

According to the second aspect of the present invention, an undercut portion, a projection or an inclined surface is provided on an upright surface of a post or the like standing on a tray near an outer periphery or an inner periphery of a pellicle frame housed in a case. With such a configuration, the protective film of the pellicle can be easily and reliably restrained by these undercut portions, protrusions, or inclined surfaces, whereby the pellicle can be fixed in the case.

As in the above-described pellicle housing structure of the present invention, the pellicle can be mechanically fixed in the tray by restraining the protective film of the pellicle with a part of the tray. After the stored pellicle reaches the user, the user must be able to easily remove the pellicle from the case, so this point must be taken into account when fixing the pellicle to the tray. Must.

In other words, in fixing the pellicle to the tray, it is necessary to restrain the pellicle with a predetermined holding force that allows the user to easily take out the pellicle from the tray. Accordingly, the shape and size of the restraining means provided on the tray side, the angle of the restraining portion, etc., the flexibility (or steel) based on the material and thickness of the protective film on the pellicle side, the overhang length, etc. will be described later. As shown in a specific embodiment, it is necessary to design and determine in advance as appropriate.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the pellicle housing structure according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a plan view of the pellicle housing structure according to the first embodiment of the present invention, and FIG. FIG. 3 is an explanatory longitudinal sectional view of a main part of the storage structure of FIG. 1, and FIG.
FIG. 4 is an explanatory longitudinal sectional view of a main part of the pellicle storage structure of the embodiment, and FIG. 4 is an explanatory longitudinal sectional view of an essential part of the pellicle storage structure of the third embodiment.

A first embodiment of the pellicle housing structure according to the present invention will be described below with reference to FIGS. 1 and 2.
That is, as described in detail, the pellicle A includes a frame 1, a pellicle film 2 adhered to an upper edge surface of the frame 1, and an adhesive material 3 applied to a lower edge surface of the frame 1, It is composed of a protective film 4 adhered to the adhesive 3 to protect the adhesive 3. In the above-described embodiment, the adhesive 3 is applied to the lower edge surface of the frame 1. However, when the adhesive 3 formed in a layered form is used in advance, the lower surface of the frame 1 is simply used. It only needs to be laminated and attached to the edge surface (however, in this specification,
Including such a case, it is collectively referred to simply as “coating”).

Next, the pellicle constructed as described above is housed in a case B composed of a tray 5 and a lid 6. Clips 7 are attached to the corners of the tray 5 and the lid 6, and the clips 6 are fixed so that the lid 6 does not come off the tray 5.

Reference numeral 8 denotes an upright projection 8 provided on the upper surface of the tray 5.
These posts are arranged near the outer periphery of the pellicle A placed on the tray 5. Projections 9 are protruded from an upright surface inside the post 8 (the pellicle A side), and a gap having a predetermined height and depth is provided between the projections 9 and the tray 5. A concave undercut portion 10 is formed. The peripheral edge of the protective film 4 of the pellicle A can be inserted into the recessed undercut portion 10.

The tray 5 is usually formed by one injection molding. However, when the protruding portion 9 and the undercut portion 10 following the protruding portion 9 are formed on the upright surface of the post 8 as described above, a general method is adopted. It is difficult to perform molding by simple simple injection molding (that is, because the undercut portion 10 of the tray 5 is caught and the molded product cannot be removed from the mold). However, when there is such a protruding portion 9 and an undercut portion 10, molding can be easily performed by adopting a slide core system well known in the plastic molding industry.

Although the cost is slightly increased without employing the above-mentioned slide core system, the main part of the tray 5
Of course, it is also possible to form the post 8 having the protruding portion 9 and the undercut portion 10 separately, and to assemble them later.

The pellicle A is stored in the tray 5,
Alternatively, at the time of removal, the protective film 4 of the pellicle A and the protrusion 9 and the undercut portion 10 of the tray 5 slightly rub against each other, but when the above-described assembling method is adopted, the protrusion 9 of the post 8 is used. A resin (for example, a high-molecular-weight polyethylene resin or the like) of a material such that the restraining body composed of the undercut portion 10 and the restraining body does not damage the protective film 4 and the restraining body itself does not easily wear out is formed. It is also possible. On the other hand, the main part of the tray 5 can be formed by selecting a resin (for example, an ABS resin or the like) of a material having a sufficient dimensional accuracy and flatness at the time of molding and having sufficient structural rigidity.

A specific example of the first embodiment shown in FIGS. 1 and 2 is described as follows. That is, in the first embodiment, as shown in FIG.
Posts 8 were erected, two on each side, for a total of eight. Standing surfaces of these posts 8 ((frame 1 of pellicle A stored)
A protrusion corresponding to the outer peripheral surface of the tray), and a recess having a width of about 2 mm, a depth of about 0.2 mm, and a height of about 0.3 mm between the protrusion 9 and the upper surface of the tray 5. An undercut portion 10 having a shape of was formed.

On the other hand, as the protective film 4 of the pellicle A, a PET film having a thickness of about 100 μm was used, and the overhang length of the protective film 4 was set to about 1 mm.

Undercut portion 10 under the above conditions
The protective film 4 and the protective film 4 are combined, and the outer peripheral edge of the protective film 4 is inserted into the undercut portions 10 of the eight posts 8 and restrained.
It was about 0 g.

Since the weight of the pellicle A is about 15 g,
The holding force is a numerical value capable of holding the pellicle A up to a vertical acceleration of about 10 G. Therefore, if the vibration or shock during transportation is 10 G or less, there is no need to specially pack the case B containing the pellicle A. If necessary, a cushioning material or the like may be used around the case B so as to be 10 G or less. Further, the holding force 15
0 g is a value that does not cause any problem as the force when taking out the pellicle A from the tray 5.

In the first embodiment, an undercut portion 10 capable of restraining the protective film 4 of the pellicle A is provided outside the frame 1 of the pellicle A in which the undercut portion 10 is accommodated. To form an undercut on the female side (the width at the back is wider than the width at the entrance), but as in the second embodiment shown in FIG. The undercut on the male side can be formed on the inside of the eight frame body 1 and the corresponding undercut portions on both sides can be formed.

In the first embodiment, the pellicle A is mechanically restrained on the tray 5 by inserting the outer peripheral edge of the protective film 4 of the pellicle A into the undercut portion 10 of the post 8. In the case of the second embodiment, the pellicle A can be restrained by the tray 5 by inserting the inner peripheral edge of the protective film 4 into the undercut portion 10.

As described above, the undercut portion 1 is formed on the upright surface.
In forming the 0, not only its dimensions but also its shape (mainly the cross-sectional shape) are sufficiently considered so that the protective film 4 can be easily attached and detached and can be securely held with a predetermined holding force. Should be designed appropriately. In particular, it is a preferable example that the inlet portion is formed in a tapered shape with a slightly widened portion.

In the first and second embodiments, the undercut portion 10 having a relatively large depth and a concave shape substantially equal to the width of the post 8 is intentionally provided below the post 8. However, as shown in the third embodiment of FIG. 4, a small semicircular projection 11 is provided below the standing surface of the post 8, and a gap between the lower surface of the projection 11 and the upper surface of the tray 5 is provided. The pellicle A can be fixed to the tray 5 by inserting the protective film 4 of the pellicle A into the tray 5.

In the above embodiment, when the protective film 4 of Percle A is restrained, the undercut 1
Although the embodiment has been described in which the protrusions 11 or the protrusions 11 are provided on the upright surface of the post 8, the protection film 4 can be restrained by providing a predetermined inclined surface (taper surface) on the upright surface of the post 8. Further, the frame 1 of the stored pellicle A is provided without providing the plurality of posts 8 as described above.
It is also possible to form a planar upright frame in the vicinity of the outer or inner periphery of the device, and to provide the above-described undercut portion 10, the protruding portion 11, the tapered surface, and the like on the upright frame to constitute a restraining means for the protective film 4. is there.

[0035]

Since the pellicle housing structure according to the present invention has the above-described structure and operation, it has the following tremendous effects.

In the present invention, when the pellicle is housed in the case composed of the tray and the lid, the protective film of the pellicle is mechanically fixed to the tray by a predetermined restraining means. It is possible to prevent the pellicle from strongly contacting the case due to a shock or a shock.

Therefore, the pellicle is strongly colliding with the case and rubbed, and the pellicle itself is damaged, or small dust due to strong rubbing between the pellicle and the case is generated, and this dust adheres to the pellicle. Can be prevented. Further, in the present invention, since the pellicle is mechanically restrained to the tray with a predetermined restraining force, the pellicle can be easily taken out from the tray.

In restraining the protective film on the tray, an upright surface is provided near the outer or inner periphery of the frame of the stored pellicle, and an undercut that can restrain the peripheral edge of the protective film on the upright surface is provided. , A projection, an inclined surface, or the like, so that the entire structure is simple and can be implemented easily and inexpensively.

[Brief description of the drawings]

FIG. 1 is a plan view of a pellicle storage structure according to a first embodiment of the present invention.

FIG. 2 is an explanatory longitudinal sectional view of a main part of the storage structure of FIG. 1;

FIG. 3 is an explanatory longitudinal sectional view of a main part of a pellicle storage structure according to a second embodiment.

FIG. 4 is an explanatory longitudinal sectional view of a main part of a pellicle storage structure according to a third embodiment.

FIG. 5 is an explanatory longitudinal sectional view showing an example of accommodating a conventional pellicle.

FIG. 6 is an enlarged vertical cross-sectional explanatory view of a main part of FIG. 5 in an enlarged state.

FIG. 7 is an explanatory plan view of a main part showing a stored state of the pellicle of FIG. 5;

[Explanation of symbols]

A Pellicle B Case 1 Frame 2 Pellicle film 3 Adhesive material 4 Protective film 5 Tray 6 Lid 7 Clip 8 Post 9 Projection 10 Undercut 11 Protrusion 51 Frame 52 Pellicle film 53 Adhesive 54 Protective film 55 Tray 56 Lid 57 clips

Claims (2)

[Claims] 1. A frame, a pellicle film adhered to an upper edge surface of the frame, an adhesive applied to a lower edge of the frame, and an adhesive formed on the frame to protect the adhesive. In a structure in which a pellicle made of a protective film adhered to a lower edge surface is housed in a case made up of a tray and a lid, the outer periphery of the pellicle frame housed in the case or the tray near the inner periphery is closed. A pellicle storage structure, wherein a means for restraining a pellicle protective film is provided at a predetermined position. 2. A method according to claim 1, wherein said restraining means of said protective film of said pellicle is an undercut portion, a protruding portion or an inclined surface provided on an upright surface raised on an upper surface of said tray. Pellicle storage structure.