JP5041917B2 - Method for manufacturing carrier tape and apparatus for manufacturing the same - Google Patents

Method for manufacturing carrier tape and apparatus for manufacturing the same Download PDF

Info

Publication number
JP5041917B2
JP5041917B2 JP2007214304A JP2007214304A JP5041917B2 JP 5041917 B2 JP5041917 B2 JP 5041917B2 JP 2007214304 A JP2007214304 A JP 2007214304A JP 2007214304 A JP2007214304 A JP 2007214304A JP 5041917 B2 JP5041917 B2 JP 5041917B2
Authority
JP
Japan
Prior art keywords
adhesive
stored
article
adhesive layer
pocket hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007214304A
Other languages
Japanese (ja)
Other versions
JP2008273620A (en
Inventor
清文 田中
則義 細野
敦 谷口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Polymer Co Ltd
Original Assignee
Shin Etsu Polymer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Polymer Co Ltd filed Critical Shin Etsu Polymer Co Ltd
Priority to JP2007214304A priority Critical patent/JP5041917B2/en
Publication of JP2008273620A publication Critical patent/JP2008273620A/en
Application granted granted Critical
Publication of JP5041917B2 publication Critical patent/JP5041917B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Packages (AREA)
  • Packaging Frangible Articles (AREA)

Description

本発明は、半導体チップや電子部品の収納、搬送、保管等に使用されるキャリアテープの製造方法及びその製造装置に関するものである。 The present invention relates to a method for manufacturing a carrier tape used for storing, transporting, storing, and the like of semiconductor chips and electronic components, and a manufacturing apparatus therefor.

半導体チップの収納、搬送、保管等には様々な包装材料が使用されているが、その一つとしてキャリアテープがあげられる。この種のキャリアテープは、図示しないリールに巻回されるテープ本体と、このテープ本体に並べて形成され、ダイシングされたシャープエッジの半導体チップを収納する複数のポケット穴と、テープ本体に剥離可能に粘着されて複数のポケット穴を覆うカバーテープとを備えて形成されている(特許文献1、2、3、4参照)。   Various packaging materials are used for storing, transporting, and storing semiconductor chips, one of which is a carrier tape. This type of carrier tape can be peeled off from the tape body wound around a reel (not shown), a plurality of pocket holes formed side by side on the tape body for storing diced sharp-edged semiconductor chips, and the tape body. A cover tape that is adhered and covers a plurality of pocket holes is formed (see Patent Documents 1, 2, 3, and 4).

ところで、キャリアテープのポケット穴にはシャープエッジの半導体チップが収納されるが、半導体チップの単なる収納では、搬送や輸送時の振動、衝撃でシャープエッジの半導体チップが上下前後左右に動き回り、ポケット穴の周壁やカバーテープに衝突したり、擦れてしまい、異物の発生や半導体チップの欠け、割れを招くという問題が生じる。そこで従来においては、上記問題を解消するため、リブ構造を設けたり、ポケット穴に半導体チップを粘着材により収納する方法が提案されている。
特開2005−170511号公報 実開平5−77075号公報 特開平5−21510号公報 特開2005−320037号公報
By the way, a sharp edge semiconductor chip is stored in the pocket hole of the carrier tape. However, when the semiconductor chip is simply stored, the sharp edge semiconductor chip moves up and down, front, back, left and right due to vibration and shock during transportation and transportation. This causes a problem that it collides with or rubs against the peripheral wall and the cover tape, resulting in generation of foreign matters, chipping and cracking of the semiconductor chip. Therefore, conventionally, in order to solve the above problems, a method of providing a rib structure or storing a semiconductor chip in a pocket hole with an adhesive material has been proposed.
JP-A-2005-170511 Japanese Utility Model Publication No. 5-77075 JP-A-5-21510 JP 2005-320037 A

しかしながら、リブ構造を設ける方法では、リブ構造にシャープエッジの半導体チップが衝突したり、擦れて切削し、異物の発生や半導体チップの欠け、割れを招くおそれがある。また、ポケット穴に半導体チップを粘着材により収納する方法では、異物の発生や半導体チップの欠け、割れ等を排除することができるものの、半導体チップに粘着材が転写・付着してしまい、後の工程に支障を来たすという問題が新たに生じることとなる。
本発明は上記に鑑みなされたもので、異物の発生や被収納物品の損傷を防止し、被収納物品に粘着材が転写・付着するおそれを低減することのできるキャリアテープの製造方法及びその製造装置を提供することを目的としている。
However, in the method of providing the rib structure, there is a possibility that a sharp-edged semiconductor chip collides with the rib structure or is cut by rubbing to generate foreign matter, chipping or cracking of the semiconductor chip. In addition, the method of storing the semiconductor chip with the adhesive material in the pocket hole can eliminate the generation of foreign matter, chipping or cracking of the semiconductor chip, but the adhesive material is transferred / adhered to the semiconductor chip. There will be a new problem of disturbing the process.
The present invention has been made in view of the above, and a carrier tape manufacturing method capable of preventing the occurrence of foreign matters and damage to stored articles, and reducing the risk of adhesive material being transferred and adhered to the stored articles, and the manufacture thereof. The object is to provide a device .

本発明においては上記課題を解決するため、小型の被収納物品を収納するテープ本体のポケット穴に、被収納物品を着脱自在に粘着する粘着層を形成し、この粘着層を、被収納物品の粘着時に被収納物品から食み出さない大きさとし、粘着層の厚さと被収納物品の厚さとの合計値をポケット穴の深さ以下の値とするものの製造方法であって、
テープ本体のポケット穴に粘着剤を供給し、この粘着剤に凸型をシリンダの駆動により上方から接触させることにより、被収納物品を略水平に安定して粘着可能な形に粘着層を形成することを特徴としている。
なお、粘着剤を紫外線硬化型とするとともに、凸型に透明性を付与し、粘着剤に凸型を接触させる際に粘着剤に紫外線を照射して硬化させると良い。
In the present invention, in order to solve the above-mentioned problems, an adhesive layer for removably adhering the article to be stored is formed in the pocket hole of the tape main body for storing the small article to be stored, and this adhesive layer is attached to the article to be stored. It is a size that does not protrude from the article to be stored at the time of adhesion, and is a manufacturing method of the sum of the thickness of the adhesive layer and the thickness of the article to be stored, which is a value equal to or less than the depth of the pocket hole,
An adhesive is supplied to the pocket hole of the tape body, and a convex layer is brought into contact with the adhesive from above by driving a cylinder, thereby forming an adhesive layer in a shape that allows the article to be stored to be stably and stably adhered. It is characterized by that.
Incidentally, with the adhesive and ultraviolet curing, to impart transparency to the convex, it may be irradiated with ultraviolet rays to cure the adhesive when contacting the convex pressure-sensitive adhesive.

また、本発明においては上記課題を解決するため、小型の被収納物品を収納するテープ本体のポケット穴に、被収納物品を着脱自在に粘着する粘着層を形成し、この粘着層を、被収納物品の粘着時に被収納物品から食み出さない大きさとし、粘着層の厚さと被収納物品の厚さとの合計値をポケット穴の深さ以下の値とするものであって、
テープ本体のポケット穴に粘着剤を供給する供給装置と、ポケット穴に供給された粘着剤にシリンダの駆動により上方から接触し、粘着剤を粘着層に形成する凸型とを含み、この凸型の接触により、被収納物品を略水平に安定して粘着可能な形に粘着層を形成するようにしたことを特徴としている。
In the present invention, in order to solve the above-mentioned problem, an adhesive layer for detachably adhering the article to be stored is formed in the pocket hole of the tape main body for storing the small article to be stored. A size that does not protrude from the stored article when the article is adhered, and the total value of the thickness of the adhesive layer and the thickness of the stored article is set to a value equal to or less than the depth of the pocket hole,
This convex type includes a supply device for supplying an adhesive to the pocket hole of the tape body, and a convex type that contacts the adhesive supplied to the pocket hole from above by driving the cylinder and forms the adhesive in the adhesive layer. The adhesive layer is formed in such a manner that the article to be stored can be stably and stably adhered substantially horizontally by this contact.

なお、粘着剤を紫外線硬化型とするとともに、凸型に透明性を付与することができる。
また、粘着剤に凸型が接触する際、粘着剤に紫外線を照射して硬化させる紫外線照射装置を含むことができる。
In addition, while making an adhesive into an ultraviolet curable type , transparency can be provided to a convex type .
Moreover, when a convex mold | type contacts an adhesive, the ultraviolet irradiation device which irradiates and cures an ultraviolet-ray to an adhesive can be included.

ここで、特許請求の範囲におけるポケット穴は、平面矩形、多角形、円形、楕円形等いずれの形状でも良く、単数複数を特に問うものではない。このポケット穴は、紫外線照射される場合には、透明でも半透明でも良い。また、小型の被収納物品には、少なくとも半導体チップ、半導体パッケージ(BGA、QFP、SOJ等)、各種の電子部品(コンデンサやトランジスタ等)、表面実装用部品等が含まれる。 Here, the pocket hole in the claims may have any shape such as a plane rectangle, a polygon, a circle, and an ellipse, and there is no particular requirement for a plurality. This pocket hole may be transparent or translucent when irradiated with ultraviolet rays. The small articles to be stored include at least a semiconductor chip, a semiconductor package (BGA, QFP, SOJ, etc.), various electronic components (capacitor, transistor, etc.), surface mounting components, and the like.

粘着層は、平面矩形、多角形、円形、楕円形等いずれの形状でも良く、単数複数を問わない。この粘着層は、被収納物品との粘着時に弱粘着するものであれば良く、被収納物品との非粘着時には強粘着性を有していても良い。粘着層は、被収納物品を略水平に安定して粘着可能な形に形成されることがあるが、この場合には、例えば断面略M字形、略台形、略柱形、略ドーナツ等に形成される。 The adhesive layer may have any shape such as a planar rectangle, a polygon, a circle, and an ellipse, and a single or a plurality of adhesive layers may be used. The pressure-sensitive adhesive layer is not particularly limited as long as it adheres weakly when sticking to the article to be stored, and may have strong adhesiveness when not sticking to the article to be stored. Adhesive layer is sometimes formed in a substantially horizontally and stably adhesive can form an object to be stored articles, formed in this case, for example, a substantially M-shaped, trapezoidal, Ryakubashirakatachi, substantially donut like Is done.

本発明によれば、粘着層を備えたキャリアテープを製造する場合には、先ず、キャリアテープの任意のポケット穴に供給装置が粘着剤を供給し、粘着剤が球状又は略半球状となる。供給装置が粘着剤を供給したら、キャリアテープが所定のピッチ繰り出されて粘着剤の供給されたポケット穴を凸型に対向させ、ポケット穴の粘着剤に凸型が上方から接触し、粘着剤が粘着層に、すなわち小型の被収納物品を略水平に安定して粘着可能な形に形成される。この粘着剤に凸型が接触する際、粘着剤が紫外線硬化型の場合には、少なくとも粘着剤に紫外線照射装置が紫外線を照射し、この紫外線の照射により、粘着層が硬化する。 According to the present invention, when manufacturing a carrier tape having an adhesive layer, first, the supply device supplies the adhesive to an arbitrary pocket hole of the carrier tape, and the adhesive becomes spherical or substantially hemispherical. When the supply device supplies an adhesive, to face the pocket holes carrier tape is supplied in a predetermined pitch unwound with adhesive on the convex, convex contacts from above adhesive pocket holes, adhesive The adhesive layer, that is, a small article to be stored is formed in a shape that can be stably and stably adhered substantially horizontally. When the convex mold is in contact with the pressure-sensitive adhesive, if the pressure-sensitive adhesive is of an ultraviolet curable type, at least the pressure-sensitive adhesive is irradiated with ultraviolet rays by the ultraviolet irradiation device, and the pressure-sensitive adhesive layer is cured by the ultraviolet irradiation.

本発明によれば、異物の発生や被収納物品の損傷を防止し、しかも、被収納物品に粘着材が転写・付着するおそれを低減することができるという効果がある。 ADVANTAGE OF THE INVENTION According to this invention, there exists an effect that generation | occurrence | production of a foreign material and damage to a to-be-stored article can be prevented, and also the possibility that an adhesive material may be transferred and adhered to the to-be-stored article .

また、被収納物品を略水平に安定して粘着可能な形に粘着層を形成するので、半導体チップ等からなる被収納物品が上下前後左右に傾いたり、後から粘着されるポケット穴用の被覆テープ等に触れることが少ない。さらに、粘着剤を紫外線硬化型とすれば、粘着速度、安全性、可使寿命(pot life)が長くなり、しかも、省スペースや省コスト等をも実現することができる。In addition, the adhesive layer is formed in a shape that allows the article to be stored to be stably and stably adhered substantially horizontally, so that the article to be stored made of a semiconductor chip or the like is tilted up, down, front, back, left, or right, or is covered with a pocket hole that is adhered later. There is little touch to tapes. Furthermore, if the pressure sensitive adhesive is of an ultraviolet curable type, the speed of adhesion, safety and pot life can be increased, and space saving and cost saving can be realized.

以下、図面を参照して本発明に係る収納体の好ましい実施形態を説明すると、本実施形態における収納体は、図1ないし図3に示すように、可撓性のテープ本体1と、このテープ本体1に配列形成され、ダイシングにより個片化されたシャープエッジの半導体チップ10を収納する複数のポケット穴20と、テープ本体1に粘着されて複数のポケット穴20を覆うカバーテープ30とを備えたキャリアテープであり、各ポケット穴20に、半導体チップ10用の小型の粘着層40を設けるようにしている。   Hereinafter, a preferred embodiment of a storage body according to the present invention will be described with reference to the drawings. The storage body in this embodiment includes a flexible tape body 1 and the tape as shown in FIGS. A plurality of pocket holes 20 that accommodate the sharp-edged semiconductor chips 10 arrayed on the main body 1 and separated by dicing, and a cover tape 30 that adheres to the tape main body 1 and covers the plurality of pocket holes 20 are provided. A small adhesive layer 40 for the semiconductor chip 10 is provided in each pocket hole 20.

テープ本体1は、例えばPS、PC、PET、PVC製のシートの押出成形や真空成形により厚さ0.3mm程度の細長い長尺の帯形に形成され、長手方向の一側部には、供給用の係止孔2が所定のピッチで配列して穿孔形成されており、各ポケット穴20にベアチップと呼ばれる小さな半導体チップ10が収納されるとともに、複数のポケット穴20がカバーテープ30に被覆された後、図示しないリールに巻回される。このテープ本体1の成形材料には、静電気に伴う塵埃付着等の不都合を回避するため、帯電防止剤が適宜添加される。   The tape body 1 is formed into an elongated strip having a thickness of about 0.3 mm by, for example, extrusion molding or vacuum forming of a sheet made of PS, PC, PET, or PVC, and is supplied to one side of the longitudinal direction. For example, a small semiconductor chip 10 called a bare chip is accommodated in each pocket hole 20, and a plurality of pocket holes 20 are covered with a cover tape 30. After that, it is wound around a reel (not shown). An antistatic agent is appropriately added to the molding material of the tape body 1 in order to avoid inconveniences such as dust adhesion due to static electricity.

複数のポケット穴20は、テープ本体1の長手方向に間隔をおき一列に並べて凹み形成され、各ポケット穴20が底の浅い平面矩形、断面略ハット形に形成されており、このポケット穴20にシャープエッジの半導体チップ10が上方から嵌入して収納される。   The plurality of pocket holes 20 are formed in a recess in a line in the longitudinal direction of the tape body 1, and each pocket hole 20 is formed in a shallow flat rectangular shape with a bottom and a substantially hat-shaped cross section. A sharp-edged semiconductor chip 10 is inserted and stored from above.

カバーテープ30は、例えばテープ本体1に対応する細長い透明の帯形に形成され、テープ本体1の表面に剥離可能に粘着されており、複数のポケット穴20を被覆してその中の半導体チップ10を保護するよう機能する(図2参照)。   The cover tape 30 is formed in, for example, an elongated transparent strip shape corresponding to the tape body 1 and is detachably adhered to the surface of the tape body 1. The cover tape 30 covers the plurality of pocket holes 20 and covers the semiconductor chip 10 therein. Functions to protect (see FIG. 2).

粘着層40は、例えば滴下される略球形あるいは略半球形でアクリル系の粘着剤等からなり、半導体チップ10のシャープな周縁部等に粘着材が転写・付着することのないよう、半導体チップ10の周縁部から食み出さない大きさに形成されており、各ポケット穴20の底面に部分的に粘着されて半導体チップ10を着脱自在に粘着する。   The adhesive layer 40 is made of, for example, a substantially spherical or hemispherical acrylic adhesive that is dropped, and the semiconductor chip 10 prevents the adhesive material from being transferred or adhered to the sharp peripheral edge or the like of the semiconductor chip 10. The semiconductor chip 10 is detachably adhered to the bottom surface of each pocket hole 20 by being partially adhered to the bottom surface of each pocket hole 20.

粘着層40の厚さと半導体チップ10の厚さとの合計値Sは、半導体チップ10の適切な保護を図るため、ポケット穴20の深さD以下の値とされる(図3参照)。また、粘着層40の粘着力は、強粘着性ではなく、半導体チップ10の真空吸着や取り出しが容易になるよう当初から弱粘着性の0.1MPa未満とされる。   The total value S of the thickness of the adhesive layer 40 and the thickness of the semiconductor chip 10 is set to a value equal to or smaller than the depth D of the pocket hole 20 in order to appropriately protect the semiconductor chip 10 (see FIG. 3). In addition, the adhesive force of the adhesive layer 40 is not strong adhesive and is initially less than 0.1 MPa, which is weak adhesive, so that the vacuum suction and removal of the semiconductor chip 10 can be facilitated.

上記によれば、テープ本体1のポケット穴20に半導体チップ10を直接収納するのではなく、粘着層40を介して粘着収納するので、搬送や輸送時の振動、衝撃でシャープエッジの半導体チップ10が上下前後左右に動き回り、ポケット穴20の周壁やカバーテープ30に衝突したり、擦れてしまうことがない。したがって、異物の発生や半導体チップ10の欠け、割れを招くことがない。   According to the above, since the semiconductor chip 10 is not directly stored in the pocket hole 20 of the tape body 1 but is adhesively stored through the adhesive layer 40, the semiconductor chip 10 having a sharp edge due to vibration and impact during transportation and transportation. Does not collide with or rub against the peripheral wall of the pocket hole 20 or the cover tape 30. Therefore, the generation of foreign matter and chipping or cracking of the semiconductor chip 10 are not caused.

また、半導体チップ10の面積よりも略半球形の粘着層40の面積が小さく、半導体チップ10から粘着層40が食み出すことがないので、半導体チップ10のシャープエッジに粘着剤が転写・付着したり、後の工程に支障を来たすことを防ぐことができる。また、粘着層40の粘着力が弱粘着性の0.1MPa未満であるから、ポケット穴20の半導体チップ10の真空吸着に何ら支障を来たすことがない。さらに、粘着層40の厚さと半導体チップ10の厚さとの合計値Sがポケット穴20の深さD以下の値なので、カバーテープ30の粘着面に半導体チップ10が粘着する不都合を容易に回避することができる。   Moreover, since the area of the substantially hemispherical adhesive layer 40 is smaller than the area of the semiconductor chip 10 and the adhesive layer 40 does not protrude from the semiconductor chip 10, the adhesive is transferred and adhered to the sharp edge of the semiconductor chip 10. Or hindering subsequent processes. In addition, since the adhesive force of the adhesive layer 40 is less than 0.1 MPa, which is weak adhesive, there is no hindrance to the vacuum suction of the semiconductor chip 10 in the pocket hole 20. Furthermore, since the total value S of the thickness of the adhesive layer 40 and the thickness of the semiconductor chip 10 is a value equal to or smaller than the depth D of the pocket hole 20, the inconvenience of the semiconductor chip 10 sticking to the adhesive surface of the cover tape 30 can be easily avoided. be able to.

次に、図4は本発明の第2の実施形態を示すもので、この場合には、テープ本体1や複数のポケット穴20を透明に形成し、このポケット穴20の底面に粘着層40Aを部分的に粘着するとともに、この粘着層40Aの粘着力を当初からの弱粘着性ではなく、紫外線50の照射により低減するようにしている。   Next, FIG. 4 shows a second embodiment of the present invention. In this case, the tape body 1 and a plurality of pocket holes 20 are formed transparently, and an adhesive layer 40A is formed on the bottom surface of the pocket holes 20. While being partially adhered, the adhesive force of the adhesive layer 40A is not weakly adhesive from the beginning, but is reduced by irradiation with ultraviolet rays 50.

テープ本体1や複数のポケット穴20は透明とされるが、ここでいう透明には、紫外線50の透過に支障を来たさない限り、半透明が含まれる。また、粘着層40Aは、例えばアクリルコポリマー粘着剤と紫外線硬化ウレタンアクリレートオリゴマーとのブレンド品で、紫外線照射装置からの紫外線50の下方からの照射により弾性率が向上して粘着性を低下させ、剥離が容易になるタイプがあげられる。その他の部分については、上記実施形態と同様であるので説明を省略する。   The tape body 1 and the plurality of pocket holes 20 are transparent, but the term “transparency” as used herein includes translucency as long as transmission of the ultraviolet ray 50 is not hindered. The adhesive layer 40A is, for example, a blend product of an acrylic copolymer adhesive and an ultraviolet curable urethane acrylate oligomer, and the elastic modulus is improved by irradiation from below the ultraviolet ray 50 from the ultraviolet irradiation device, thereby reducing the adhesiveness and peeling. The type that makes it easy. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

本実施形態においても上記実施形態と同様の作用効果が期待でき、しかも、当初から弱粘着性の粘着層40を使用できない場合にきわめて有意義なのは明らかである。   In this embodiment, the same effects as those of the above embodiment can be expected, and it is obvious that the weakly adhesive layer 40 cannot be used from the beginning.

次に、本発明の第2、第3の発明の好ましい実施形態を説明すると、本実施形態におけるキャリアテープの製造装置60は、図5ないし図10に示すように、半導体チップ10を収納するキャリアテープのポケット穴20に、半導体チップ10を着脱自在に粘着する粘着層40を形成し、この粘着層40を、半導体チップ10の粘着時に半導体チップ10から食み出さない大きさとし、粘着層40の厚さと半導体チップ10の厚さとの合計値をポケット穴20の深さ以下の値とする製造装置であって、昇降可能な位置決め装置68、供給装置74、昇降可能な成形型である凸型75、及び紫外線照射装置76を備えるようにしている。   Next, preferred embodiments of the second and third inventions of the present invention will be described. The carrier tape manufacturing apparatus 60 in this embodiment is a carrier for housing a semiconductor chip 10 as shown in FIGS. An adhesive layer 40 for detachably adhering the semiconductor chip 10 is formed in the pocket hole 20 of the tape. The adhesive layer 40 is sized so as not to protrude from the semiconductor chip 10 when the semiconductor chip 10 is adhered. A manufacturing apparatus in which the total value of the thickness and the thickness of the semiconductor chip 10 is equal to or less than the depth of the pocket hole 20, and includes a positioning device 68 that can be moved up and down, a supply device 74, and a convex mold 75 that is a mold that can be moved up and down. , And an ultraviolet irradiation device 76.

キャリアテープは、図5ないし図8に示すように、可撓性を有する細長い帯形のテープ本体1を備え、このテープ本体1の長手方向に浅く凹んだ複数のポケット穴20が配列成形されており、各ポケット穴20の四隅部には、半導体チップ10との干渉を回避する平面略半円形の面取り溝21がそれぞれ外方向に向け選択的に膨出形成される。このキャリアテープのテープ本体1は、間隔をおいて相対向する一対のリール間に巻架され、この一対のリールが製造装置60を構成する架台61の上流側(図5や図9の左側)立面と下流側(図5や図9の右側)立面とにそれぞれ回転可能に軸支される。   As shown in FIGS. 5 to 8, the carrier tape includes an elongated strip-shaped tape body 1 having flexibility, and a plurality of pocket holes 20 that are shallowly recessed in the longitudinal direction of the tape body 1 are arrayed. In addition, at the four corners of each pocket hole 20, a planar semi-circular chamfer groove 21 that avoids interference with the semiconductor chip 10 is selectively bulged outwardly. The tape main body 1 of this carrier tape is wound around a pair of reels facing each other at an interval, and the pair of reels is upstream of a pedestal 61 constituting the manufacturing apparatus 60 (left side in FIGS. 5 and 9). The shaft is rotatably supported by the vertical surface and the vertical surface (right side in FIGS. 5 and 9).

このようなキャリアテープのテープ本体1は、係る一対のリールが製造装置60の架台61に軸支され、架台61の下流側のピンロール駆動ユニット62と上流側のテンションロールユニット64の回転可能な複数のロール63・65にそれぞれ挟持されるとともに、張力を一定に保持する複数のダンサー66やロール67に巻きかけられることにより、架台61の上流側と下流側との間に張架され、かつ架台61の中流部で水平に繰り出される(図5、図9参照)。   In such a tape body 1 of the carrier tape, the pair of reels are pivotally supported on the gantry 61 of the manufacturing apparatus 60, and a plurality of rotatable pin roll drive units 62 on the downstream side of the gantry 61 and a tension roll unit 64 on the upstream side are rotatable. Are stretched between the upstream side and the downstream side of the gantry 61 by being wound around a plurality of dancers 66 and rolls 67 that are respectively held by the rolls 63 and 65 and maintain a constant tension. It is fed out horizontally at the midstream portion of 61 (see FIGS. 5 and 9).

位置決め装置68は、図5、図9、図10に示すように、テープ本体1の複数のポケット穴20に下方から嵌合する位置決めユニット69を備え、この位置決めユニット69がシリンダ70の昇降するピストンの先端部に水平に接続されており、このシリンダ70が架台61の中流部、すなわち略中央部下方に取付ブラケットを介し起立した状態で設置される。   As shown in FIGS. 5, 9, and 10, the positioning device 68 includes a positioning unit 69 that fits into the plurality of pocket holes 20 of the tape body 1 from below, and the positioning unit 69 is a piston that moves up and down the cylinder 70. The cylinder 70 is installed in a state where it is erected via a mounting bracket in the middle stream portion of the gantry 61, that is, substantially below the center portion.

位置決めユニット69は、表面にポケット穴20の形に対応する凹部71が複数並べて形成され、内部には、冷却水用の流通路72と複数の排気路73とがそれぞれ穿孔されるとともに、この複数の排気路73が製造装置60の外部のバキューム装置に接続されており、このバキューム装置の駆動により、複数の凹部71にポケット穴20がそれぞれ真空吸着して位置決め固定される。また、シリンダ70としては、特に限定されるものではないが、例えばクリーンなエアシリンダや高信頼性の油圧シリンダが適宜用いられる。   The positioning unit 69 has a plurality of concave portions 71 corresponding to the shape of the pocket hole 20 formed on the surface, and a cooling water flow passage 72 and a plurality of exhaust passages 73 are bored therein, respectively. The exhaust passage 73 is connected to a vacuum device outside the manufacturing device 60, and the pocket device 20 is vacuum-adsorbed and fixed to the plurality of recesses 71 by driving the vacuum device. The cylinder 70 is not particularly limited, and for example, a clean air cylinder or a highly reliable hydraulic cylinder is appropriately used.

供給装置74は、図5や図9に示すように、例えばディスペンサ装置からなり、架台61の中流部、すなわち略中央部上方に設置されて下方の位置決め装置68に上方から対向しており、位置決め装置68に位置決めされた複数のポケット穴20の略中央部に紫外線硬化型の粘着剤41を上方から順次滴下するよう機能する。紫外線硬化型の粘着剤41は、アクリレート系、チオール系、エポキシ系、シリコーン系等を特に問うものではない。   As shown in FIG. 5 and FIG. 9, the supply device 74 is composed of, for example, a dispenser device, and is installed on the middle flow portion of the gantry 61, that is, substantially above the center portion, and faces the lower positioning device 68 from above. The ultraviolet curable pressure-sensitive adhesive 41 functions in such a manner as to be sequentially dropped from above at a substantially central portion of the plurality of pocket holes 20 positioned in the device 68. The ultraviolet curable adhesive 41 is not particularly limited to acrylate, thiol, epoxy, silicone, and the like.

凸型75は、図5や図9に示すように、例えば透明性、耐久性、耐衝撃性に優れる軽量のPMMA等の材料を使用して透明に形成され、例えばシリンダの昇降するピストンの先端部に水平に接続されており、このシリンダが架台61の中流部、すなわち略中央部上方に昇降可能に設置されて下方の位置決め装置68に成形型として上方から対向する。このような凸型75は、供給装置74の下流に隣接して位置し、ポケット穴20の略中央部に滴下された粘着剤41に上方から圧接し、この粘着剤41を粘着層40に成形するよう機能する。   As shown in FIG. 5 and FIG. 9, the convex mold 75 is transparently formed using a material such as lightweight PMMA that is excellent in transparency, durability, and impact resistance. The cylinder is horizontally connected to the middle portion of the pedestal 61, that is, substantially vertically above the center portion, and is opposed to the lower positioning device 68 as a molding die from above. Such a convex mold 75 is located adjacent to the downstream of the supply device 74, presses the adhesive 41 dripped at the substantially central portion of the pocket hole 20 from above, and forms the adhesive 41 into the adhesive layer 40. To function.

シリンダとしては、例えばクリーンなエアシリンダや高信頼性の油圧シリンダが適宜使用される。また、粘着剤41は、凸型75の圧接により、滴下された球状あるいは略半球状の状態から半導体チップ10を略水平に安定して粘着可能な略M字形に成形される。   As the cylinder, for example, a clean air cylinder or a highly reliable hydraulic cylinder is appropriately used. Further, the pressure-sensitive adhesive 41 is formed into a substantially M-shape by which the semiconductor chip 10 can be stably adhered in a substantially horizontal manner from a dropped spherical or substantially hemispherical state by pressing the convex mold 75.

紫外線照射装置76は、図5に示すように、架台61の中流部、すなわち略中央部に設置されて凸型75の上方に位置し、粘着剤41に凸型75が圧接する際、すなわち、粘着剤41に凸型75が圧接した時、あるいは粘着剤41に凸型75が圧接した後に粘着剤41に紫外線50を水銀キセノンランプや光ファイバ等を用いて照射・硬化させる。   As shown in FIG. 5, the ultraviolet irradiation device 76 is installed in the middle portion of the gantry 61, that is, approximately at the center and is positioned above the convex mold 75, and when the convex mold 75 is in pressure contact with the adhesive 41, When the convex mold 75 comes into pressure contact with the adhesive 41 or after the convex mold 75 comes into pressure contact with the adhesive 41, the adhesive 41 is irradiated and cured with ultraviolet rays 50 using a mercury xenon lamp or an optical fiber.

上記において、粘着層40を備えたキャリアテープを製造する場合には、上流側のリールから下流側のリールに緊張したキャリアテープを連続して順次繰り出せば良い。すると、位置決め装置68の位置決めユニット69が基準位置からガイドに案内されつつ上昇してテープ本体1の複数のポケット穴20に下方から嵌合・位置決めし、この位置決めされた複数のポケット穴20中、上流のポケット穴20に対向する供給装置74が粘着剤41を上方から滴下し、粘着剤41がその表面張力により球状あるいは略半球状を呈する。   In the above, when manufacturing the carrier tape provided with the adhesive layer 40, the tensioned carrier tape may be continuously fed out sequentially from the upstream reel to the downstream reel. Then, the positioning unit 69 of the positioning device 68 rises while being guided by the guide from the reference position, and is fitted and positioned in the plurality of pocket holes 20 of the tape body 1 from below. In the plurality of pocket holes 20 positioned, The supply device 74 facing the upstream pocket hole 20 drops the adhesive 41 from above, and the adhesive 41 exhibits a spherical shape or a substantially hemispherical shape due to its surface tension.

こうして供給装置74が粘着剤41を滴下したら、位置決め装置68の位置決めユニット69が元の基準位置にガイドに案内されつつ下降してテープ本体1の繰り出しを許容し、停止していたテープ本体1が所定ピッチ繰り出されて粘着剤41の滴下されたポケット穴20を凸型75に対向させ、位置決めユニット69が再度上昇してテープ本体1の複数のポケット穴20を下方から嵌合・位置決めする。   When the supply device 74 drops the adhesive 41 in this manner, the positioning unit 69 of the positioning device 68 descends while being guided to the original reference position by the guide, and allows the tape body 1 to be fed out. The pocket hole 20 fed out by a predetermined pitch and dropped with the adhesive 41 is made to face the convex mold 75, and the positioning unit 69 is raised again to fit and position the plurality of pocket holes 20 of the tape body 1 from below.

そして、位置決めされたポケット穴10の粘着剤41に凸型75が下降して圧接し、粘着剤41が粘着層40に、すなわち半導体チップ10を略水平に安定して粘着可能な平面略ドーナツ形、略M字形に成形され、その後、粘着層40の平坦な表面に半導体チップ10が略水平に安定して粘着され、テープ本体1の複数のポケット穴20がカバーテープ30に被覆される。   Then, the convex mold 75 descends and comes into pressure contact with the adhesive 41 in the positioned pocket hole 10 so that the adhesive 41 can adhere to the adhesive layer 40, that is, the semiconductor chip 10 in a substantially horizontal and stable manner. Then, the semiconductor chip 10 is adhered to the flat surface of the adhesive layer 40 in a substantially horizontal and stable manner, and the plurality of pocket holes 20 of the tape body 1 are covered with the cover tape 30.

係る粘着剤41に凸型75が圧接する際、粘着剤41や凸型75に紫外線照射装置76が200〜400nmの波長域の紫外線50を照射し、粘着層40が短時間で三次元架橋、硬化する。その他の部分については、上記第1の発明の実施形態と同様であるので説明を省略する。   When the convex mold 75 is pressed against the pressure-sensitive adhesive 41, the ultraviolet irradiation device 76 irradiates the ultraviolet light 50 in the wavelength range of 200 to 400 nm to the pressure-sensitive adhesive 41 or the convex mold 75, and the pressure-sensitive adhesive layer 40 is three-dimensionally crosslinked in a short time. Harden. Other parts are the same as those in the first embodiment of the present invention and will not be described.

上記構成によれば、粘着層40の丸まった表面に半導体チップ10が不安定に搭載支持されるのではなく、半導体チップ10を略水平に安定して粘着可能な表面の粘着層40に半導体チップ10が線接触状態で搭載支持されるので、半導体チップ10が上下前後左右に傾いたり、後から粘着されるカバーテープ30に触れることがない。したがって、搬送や輸送時の振動、衝撃でシャープエッジの半導体チップ10が上下前後左右に動き回り、ポケット穴20の周壁やカバーテープ30に衝突したり、擦れてしまうことがなく、異物の発生や半導体チップ10の欠け、割れを抑制防止することができる。   According to the above configuration, the semiconductor chip 10 is not unstablely mounted and supported on the round surface of the adhesive layer 40, but the semiconductor chip 10 is attached to the adhesive layer 40 on the surface capable of stably adhering the semiconductor chip 10 substantially horizontally. Since 10 is mounted and supported in a line contact state, the semiconductor chip 10 is not tilted up and down, front and rear, and left and right, and does not touch the cover tape 30 to be adhered later. Accordingly, the sharp-edged semiconductor chip 10 moves up, down, front, back, left and right due to vibration and impact during transportation and transportation, and does not collide with or rub against the peripheral wall of the pocket hole 20 or the cover tape 30. Chipping and cracking of the chip 10 can be suppressed and prevented.

また、半導体チップ10の面積よりも粘着層40の面積が小さく、半導体チップ10から粘着層40が食み出すことがないので、半導体チップ10のシャープエッジに粘着剤41が転写・付着したり、後の工程に支障を来たすことを防ぐことができる。また、粘着層40の粘着力が弱粘着性の0.1MPa未満であるから、ポケット穴20の半導体チップ10の真空吸着に何ら支障を来たすことがない。さらに、粘着層40の厚さと半導体チップ10の厚さとの合計値Sがポケット穴20の深さD以下の値なので、カバーテープ30の粘着面に半導体チップ10が粘着する不都合を容易に回避することが可能になる。   Further, since the area of the adhesive layer 40 is smaller than the area of the semiconductor chip 10 and the adhesive layer 40 does not protrude from the semiconductor chip 10, the adhesive 41 is transferred and adhered to the sharp edge of the semiconductor chip 10, It is possible to prevent the subsequent process from being hindered. In addition, since the adhesive force of the adhesive layer 40 is less than 0.1 MPa, which is weak adhesive, there is no hindrance to the vacuum suction of the semiconductor chip 10 in the pocket hole 20. Furthermore, since the total value S of the thickness of the adhesive layer 40 and the thickness of the semiconductor chip 10 is a value equal to or smaller than the depth D of the pocket hole 20, the inconvenience of the semiconductor chip 10 sticking to the adhesive surface of the cover tape 30 can be easily avoided. It becomes possible.

なお、本発明に係る収納体は、上記実施形態に何ら限定されるものではない。例えば、上記実施形態ではテープ本体1の長手方向一側部に複数の係止孔2を所定のピッチで配列したが、テープ本体1の長手方向両側部に供給用の係止孔2を所定のピッチでそれぞれ配列形成しても良い。また、ポケット穴20の面取り溝21は省略しても良い。また、不透明のカバーテープ30を使用しても良い。   In addition, the storage body which concerns on this invention is not limited to the said embodiment at all. For example, in the above embodiment, the plurality of locking holes 2 are arranged at a predetermined pitch on one side in the longitudinal direction of the tape body 1, but the supply locking holes 2 are provided on both sides in the longitudinal direction of the tape body 1 with a predetermined length. Each may be formed with a pitch. Further, the chamfer groove 21 of the pocket hole 20 may be omitted. An opaque cover tape 30 may be used.

また、半導体チップ10から食み出さない大きさであれば、各ポケット穴20に単一の粘着層40・40Aを設けても良いし、複数の粘着層40・40Aを設けても良い。また、キャリアテープではなく、トレイの複数のポケット穴に半導体チップ10用の小型の粘着層40・40Aをそれぞれ粘着することも可能である。また、紫外線50を透過するのであれば、キャリアテープの製造装置60の凸型75を透明の他、半透明に形成することも可能である。さらに、凸型75の直上に紫外線照射装置76を一体的に配備しても良いが、斜め上方に配備したり、別々に配備することも可能である。   Moreover, if it is the magnitude | size which does not protrude from the semiconductor chip 10, you may provide the single adhesion layer 40 * 40A in each pocket hole 20, and may provide the some adhesion layer 40 * 40A. Further, instead of the carrier tape, the small adhesive layers 40 and 40A for the semiconductor chip 10 can be adhered to a plurality of pocket holes in the tray. In addition, if the ultraviolet ray 50 is transmitted, the convex mold 75 of the carrier tape manufacturing apparatus 60 can be formed to be translucent as well as transparent. Furthermore, although the ultraviolet irradiation device 76 may be integrally provided immediately above the convex mold 75, it may be provided obliquely upward or separately.

本発明に係る収納体の実施形態を模式的に示す斜視説明図である。It is a perspective explanatory view showing an embodiment of a storage object concerning the present invention typically. 本発明に係る収納体の実施形態におけるカバーテープの一部剥離状態を模式的に示す斜視説明図である。It is a perspective explanatory view showing typically the partial peeling state of a cover tape in an embodiment of a storage object concerning the present invention. 本発明に係る収納体の実施形態を模式的に示す要部断面説明図である。It is principal part sectional explanatory drawing which shows typically embodiment of the storage body which concerns on this invention. 本発明に係る収納体の第2の実施形態を模式的に示す要部断面説明図である。It is principal part cross-sectional explanatory drawing which shows typically 2nd Embodiment of the storage body which concerns on this invention. 本発明に係るキャリアテープの製造方法及びその製造装置の実施形態を模式的に示す要部説明図である。It is principal part explanatory drawing which shows typically the manufacturing method of the carrier tape which concerns on this invention, and embodiment of the manufacturing apparatus. 本発明に係るキャリアテープの製造方法及びその製造装置の実施形態におけるキャリアテープを模式的に示す断面説明図である。It is sectional explanatory drawing which shows typically the carrier tape in embodiment of the manufacturing method of the carrier tape which concerns on this invention, and its manufacturing apparatus. 本発明に係るキャリアテープの製造方法及びその製造装置の実施形態におけるキャリアテープを模式的に示す平面説明図である。It is plane explanatory drawing which shows typically the carrier tape in embodiment of the manufacturing method of the carrier tape which concerns on this invention, and its manufacturing apparatus. 本発明に係るキャリアテープの製造方法及びその製造装置の実施形態におけるキャリアテープを模式的に示す断面説明図である。It is sectional explanatory drawing which shows typically the carrier tape in embodiment of the manufacturing method of the carrier tape which concerns on this invention, and its manufacturing apparatus. 本発明に係るキャリアテープの製造装置の実施形態を模式的に示す正面説明図である。It is front explanatory drawing which shows typically embodiment of the manufacturing apparatus of the carrier tape which concerns on this invention. 本発明に係るキャリアテープの製造装置の実施形態を模式的に示す側面説明図である。It is side explanatory drawing which shows typically embodiment of the manufacturing apparatus of the carrier tape which concerns on this invention.

符号の説明Explanation of symbols

1 テープ本体
10 半導体チップ(被収納物品)
20 ポケット穴
30 カバーテープ
40 粘着層
40A 粘着層
41 粘着剤
50 紫外線
60 製造装置
61 架台
62 ピンロール駆動ユニット
64 テンションロールユニット
68 位置決め装置
69 位置決めユニット
74 供給装置
75 凸型
76 紫外線照射装置
D ポケット穴の深さ
S 粘着層の厚さと半導体チップの厚さとの合計値
1 Tape body 10 Semiconductor chip (object to be stored)
20 Pocket hole 30 Cover tape 40 Adhesive layer 40A Adhesive layer 41 Adhesive 50 UV 60 Production device 61 Mounting base 62 Pin roll drive unit 64 Tension roll unit 68 Positioning device 69 Positioning unit 74 Supply device 75 Convex 76 Ultraviolet irradiation device D Pocket hole Depth S Total value of adhesive layer thickness and semiconductor chip thickness

Claims (5)

小型の被収納物品を収納するテープ本体のポケット穴に、被収納物品を着脱自在に粘着する粘着層を形成し、この粘着層を、被収納物品の粘着時に被収納物品から食み出さない大きさとし、粘着層の厚さと被収納物品の厚さとの合計値をポケット穴の深さ以下の値とするキャリアテープの製造方法であって、
テープ本体のポケット穴に粘着剤を供給し、この粘着剤に凸型をシリンダの駆動により上方から接触させることにより、被収納物品を略水平に安定して粘着可能な形に粘着層を形成することを特徴とするキャリアテープの製造方法。
An adhesive layer is formed in the pocket hole of the tape main body that stores a small article to be stored so that the article to be stored is detachably attached, and this adhesive layer does not protrude from the article to be stored when the article to be stored is adhered. And a method for producing a carrier tape in which the total value of the thickness of the adhesive layer and the thickness of the article to be stored is equal to or less than the depth of the pocket hole,
An adhesive is supplied to the pocket hole of the tape body, and a convex layer is brought into contact with the adhesive from above by driving a cylinder, thereby forming an adhesive layer in a shape that allows the article to be stored to be stably and stably adhered. A method for producing a carrier tape.
粘着剤を紫外線硬化型とするとともに、凸型に透明性を付与し、粘着剤に凸型を接触させる際に粘着剤に紫外線を照射して硬化させる請求項1記載のキャリアテープの製造方法。 The method for producing a carrier tape according to claim 1, wherein the pressure-sensitive adhesive is made of an ultraviolet curable type , the transparency is imparted to the convex type, and the pressure-sensitive adhesive is cured by irradiating the pressure-sensitive adhesive with ultraviolet rays. 小型の被収納物品を収納するテープ本体のポケット穴に、被収納物品を着脱自在に粘着する粘着層を形成し、この粘着層を、被収納物品の粘着時に被収納物品から食み出さない大きさとし、粘着層の厚さと被収納物品の厚さとの合計値をポケット穴の深さ以下の値とするキャリアテープの製造装置であって、
テープ本体のポケット穴に粘着剤を供給する供給装置と、ポケット穴に供給された粘着剤にシリンダの駆動により上方から接触し、粘着剤を粘着層に形成する凸型とを含み、この凸型の接触により、被収納物品を略水平に安定して粘着可能な形に粘着層を形成するようにしたことを特徴とするキャリアテープの製造装置。
An adhesive layer is formed in the pocket hole of the tape main body that stores a small article to be stored so that the article to be stored is detachably attached, and this adhesive layer does not protrude from the article to be stored when the article to be stored is adhered. And a carrier tape manufacturing apparatus in which the total value of the thickness of the adhesive layer and the thickness of the article to be stored is a value equal to or less than the depth of the pocket hole,
This convex type includes a supply device for supplying an adhesive to the pocket hole of the tape body, and a convex type that contacts the adhesive supplied to the pocket hole from above by driving the cylinder and forms the adhesive in the adhesive layer. The carrier tape manufacturing apparatus is characterized in that the adhesive layer is formed in such a manner that the article to be stored can be stably adhered substantially horizontally by the contact.
粘着剤を紫外線硬化型とするとともに、凸型に透明性を付与した請求項3記載のキャリアテープの製造装置。 4. The carrier tape manufacturing apparatus according to claim 3, wherein the pressure-sensitive adhesive is an ultraviolet curable type, and the convex shape is imparted with transparency. 粘着剤に凸型が接触する際、粘着剤に紫外線を照射して硬化させる紫外線照射装置を含んでなる請求項4記載のキャリアテープの製造装置。 The carrier tape manufacturing apparatus according to claim 4, further comprising an ultraviolet irradiation device that cures the adhesive by irradiating the adhesive with ultraviolet rays when the convex mold contacts the adhesive.
JP2007214304A 2007-03-30 2007-08-21 Method for manufacturing carrier tape and apparatus for manufacturing the same Active JP5041917B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007214304A JP5041917B2 (en) 2007-03-30 2007-08-21 Method for manufacturing carrier tape and apparatus for manufacturing the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007090237 2007-03-30
JP2007090237 2007-03-30
JP2007214304A JP5041917B2 (en) 2007-03-30 2007-08-21 Method for manufacturing carrier tape and apparatus for manufacturing the same

Publications (2)

Publication Number Publication Date
JP2008273620A JP2008273620A (en) 2008-11-13
JP5041917B2 true JP5041917B2 (en) 2012-10-03

Family

ID=40052126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007214304A Active JP5041917B2 (en) 2007-03-30 2007-08-21 Method for manufacturing carrier tape and apparatus for manufacturing the same

Country Status (1)

Country Link
JP (1) JP5041917B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013163525A (en) * 2012-02-09 2013-08-22 Shin Etsu Polymer Co Ltd Embossed carrier tape, and component storage body
JP5965154B2 (en) * 2012-02-09 2016-08-03 信越ポリマー株式会社 Embossed carrier tape and parts container
JP5927042B2 (en) * 2012-05-30 2016-05-25 信越ポリマー株式会社 Embossed carrier tape and parts container
KR20150050551A (en) * 2012-07-20 2015-05-08 쓰리엠 이노베이티브 프로퍼티즈 컴파니 Component carrier tape with uv radiation curable adhesive

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06127583A (en) * 1992-10-21 1994-05-10 Mitsubishi Electric Corp Transfer tool for semiconductor device
JP2000103496A (en) * 1998-09-29 2000-04-11 Denki Kagaku Kogyo Kk Electronic component carrier

Also Published As

Publication number Publication date
JP2008273620A (en) 2008-11-13

Similar Documents

Publication Publication Date Title
JP5041917B2 (en) Method for manufacturing carrier tape and apparatus for manufacturing the same
US7690905B2 (en) Apparatus for manufacturing semiconductor device
US20140174668A1 (en) Film adhering mechanism
JP2009200465A (en) Method for manufacturing electronic device
TW200707819A (en) Drive film, drive package for organic light emitting diode display, method of manufacturing thereof, and organic light emitting diode display including the same
KR20230088663A (en) Pellicle storage container
JP2010222021A (en) Adhesive holding tray
JP2008216846A (en) Pellicle storage container
CN112744453A (en) Carrier tape system for semiconductor device
US7749866B2 (en) Method for sawing a wafer and method for manufacturing a semiconductor package by using a multiple-type tape
JP5566581B2 (en) Surface light emitter and manufacturing method thereof
JP5497534B2 (en) Tape sticking device
JP4497845B2 (en) Large pellicle storage method
CN110164302B (en) Flexible display device and manufacturing method thereof
JP2007334069A (en) Pellicle storage container
US11372328B2 (en) Mold, imprinting apparatus, and method for manufacturing article
JP3212491U (en) Panel cover sheet
JP5189925B2 (en) Lens member manufacturing method
JP2002037227A (en) Method for sticking label on plate body and method for sticking label on battery pack
JPH10139089A (en) Transporting container for square chip part
JP5219721B2 (en) Mold for dicing frame
JP2006032018A (en) Battery pack
JPH1138597A (en) Structure for housing pellicle
JP6340122B2 (en) Seat mounting apparatus and seat mounting method
KR101049168B1 (en) Tape Cutting Equipment for Semiconductor Package Process

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100208

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120403

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120525

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120619

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120621

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120710

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120710

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 5041917

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150720

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250