WO2006059388A1

WO2006059388A1 - Method of housing large pellicle

Info

Publication number: WO2006059388A1
Application number: PCT/JP2004/017953
Authority: WO
Inventors: Hozuma Kuriyama; Ichiro Wakimoto
Original assignee: Asahi Kasei Emd Corporation
Priority date: 2004-12-02
Filing date: 2004-12-02
Publication date: 2006-06-08
Also published as: CN101073033A; JPWO2006059388A1

Abstract

A method of housing a large pellicle, including housing in a case composed of a tray and a lid a large pellicle of ≥ 1000 cm2 area composed of a frame, a pellicle film bonded to an upper edge surface of the frame, an adhesive material applied to a lower edge surface of the frame and a protective film stuck to the lower surface of the frame so as to protect the adhesive material, characterized in that part or the whole of the peripheral edge of the protective film of the large pellicle is protruded outward so as to provide a hold margin, and that the hold margin is fixed to the tray by means of adhesive tape to thereby accomplish housing of the large pellicle in the case.

Description

Large pellicle storage method

Background art

[0001] In the present invention, foreign matter adheres to a photomask or a reticle used in a lithography process when manufacturing a thin film transistor (TFT), a power filter (CF), or the like constituting an LSI or a liquid crystal display (LCD). Large pellicle storage method and storage structure capable of stably storing a large pellicle with an area of a pellicle membrane of 1 000 cm ² or more used for preventing the pellicle in a case composed of a tray and a lid It is about. Conventional technology

Conventionally, in the manufacture of semiconductor circuit patterns and the like! As described in Patent Document 1 to be described later, foreign matter adheres to a photomask or reticle using a dust-proof means generally called a pellicle. It is done to prevent it. The pellicle is a transparent polymer such as -trocellulose or cellulose derivative or fluoropolymer with a thickness of 10 m or less on the upper edge surface of a frame of several millimeters thick that has a shape that matches the shape of a photomask or reticle. film

(Hereinafter referred to as a pellicle film) is spread and adhered, and an adhesive is applied to the lower edge surface of the frame, and a protective film is adhered to the adhesive with a predetermined adhesive force. is there. The pressure-sensitive adhesive material is for fixing the pellicle to a photomask or a reticle, and the protective film is used to maintain the adhesive strength of the pressure-sensitive adhesive material until the pressure-sensitive adhesive material is used for that purpose. It protects the adhesive surface. When transporting this pellicle to the manufacturer or user, in order to prevent foreign matter from adhering to the pellicle film or the like or to prevent the pellicle from being damaged, the pellicle is stored in a case consisting of a tray and a lid. In addition, it is generally stored in a dust-proof bag.

[0003] A case composed of a tray and a lid for storing a large pellicle having an area of 1000 cm ² or more, which is an object of the present invention, is usually formed by a vacuum forming method, and the large pellicle is installed in the tray. It was stored in the case by covering the lid later. In manufacturing the case described above, the system is designed and manufactured so that the distance between the frame of the large pellicle housed in the case and the lid is within the range of Omm to less than lmm. This suppresses the large pellicle and prevents the large pellicle from moving and rubbing inside the case due to vibration during transportation and so on to prevent dust generation.

[0004] However, a large case that accommodates a pellicle with an area of 1000 cm ² or more has the following problems. In other words, in a large case, there are problems such as pericole and case clearance, or difficulty in meeting the flatness requirement of the case. Therefore, it has been difficult to manufacture a large case while maintaining molding accuracy that satisfies the conventional design philosophy.

Therefore, when a large pellicle is stored in a large case manufactured according to the conventional design concept, when the distance between the large pellicle and the lid is Omm and the lid is in contact with the large pellicle, the lid is the frame of the large pellicle. As the large pellicle is pressed, there is a problem in that, for example, when the large pellicle is transported, rubbing occurs between the two to generate dust and foreign matter adheres to the large pellicle.

In addition, if the distance between the large pellicle and the lid becomes 1 mm or more, the large pellicle cannot be stabilized by being pushed by the lid, and the large pellicle moves or vibrates in the case during transportation. There was a problem in that dust was generated due to rubbing between the two and foreign particles attached to the large pellicle.

[0005] The present patent applicant, who solves many of the problems described above, has already completed the invention exemplified in Patent Document 2, Patent Document 3 or Patent Document 4 described later, and filed a patent application! / Speak. In the technique described in Patent Document 2 described later, a protruding portion is erected on the tray surface of the pellicle storage case, and an undercut portion is provided on a side surface of the protruding portion, and the pellicle is placed in the under force portion. This is a technology for holding and fixing a pellicle placed on a tray by inserting a protective film. In addition, the technique described in Patent Document 3 applies an adhesive material having a predetermined adhesive force to the lower surface of the protective film of the pellicle, and when the pellicle is mounted on the tray, the protective film is placed on the tray. It is a technology that holds and fixes the pellicle to the tray by sticking. Further, the technique described in Patent Document 4 protects the pellicle mounted on the tray when the rod-shaped pressing body is suspended from the ceiling surface of the case lid and the lid is covered on the tray. This is a technique in which the film is pressed and pressed with the pressing body to hold and fix the pellicle to the tray. [0006] Patent Document 1: Japanese Patent Publication No. 54-28718

Patent Document 2: Japanese Patent Laid-Open No. 11-38597

Patent Document 3: Japanese Patent Laid-Open No. 11-24238

Patent Document 4: Japanese Patent Laid-Open No. 11 52553

Disclosure of the invention

Problems to be solved by the invention

[0007] The inventions described in Patent Document 2 to Patent Document 4 described above are extremely effective for cases in which semiconductor pellicles such as 5 inches and 6 inches, which have been generally used in the past, are stored. Power When these inventions are applied to a case that accommodates a large pellicle having a pellicle area of 1000 cm ² or more, which is the subject of the present invention, there are some problems as described later.

In the technique of Patent Document 2, it is sufficient to form a relatively deep undercut portion on the side surface of the protruding portion that stands upright on the surface of the tray by using a vacuum forming method that is inexpensive and easy to manufacture. There was a problem that it was difficult to obtain accuracy. In addition, when molding a tray using the injection molding method, molding is possible because the molding accuracy is good, but when molding a large pellicle of 1000 cm ² or more that is the subject of the present invention by the injection molding method. This is not practical because it requires a very large molding machine, and the size of the tray is very large, so molding distortion occurs, and a narrow and deep undercut portion is accurately formed on the side of the protrusion. It was difficult to install well.

[0008] In the technique of Patent Document 3, the method of applying an adhesive to the lower surface of the protective film of the pellicle and attaching the protective film to the surface of the tray is a small size like the case of a pellicle for semiconductors. In a large case that accommodates a large pellicle as in the present invention, since the molding accuracy is not always perfect, the tray pellicle mounting portion may be warped. For this reason, distortion due to the warp of the tray is transferred to the protective film, and the adhesive material strength part of the protective film peels off, reducing the adhesive strength of the adhesive material, which causes the pellicle to evenly adhere to the photomask. There was a problem that it was difficult to paste.

[0009] In the technique of Patent Document 4, the pressing body suspended from the ceiling surface of the case lid is used to This is a method of holding and fixing the pellicle by pressing the protective film of the pellicle mounted on the lei. Even in this technology, in the case of a case of a small size such as 5-6 inches, such as a semiconductor pellicle storage case, the force S that can maintain the forming accuracy is as described above. In a large case that accommodates a large pellicle, the molding accuracy is not sufficient, and warping occurs in the molded case. Therefore, when the case is covered with a lid, the pressing body provided on the lid side of the pellicle There is a problem that it is difficult to press and hold the protective film accurately and reliably.

The storage method and storage structure for a large pellicle according to the present invention is a completely new technology developed in view of the above-mentioned many problems, and in particular, a part or all of the outer periphery of the protective film of the large pellicle is used. The presser foot is formed by protruding outwards, and when the pellicle is mounted on the tray, the presser foot is adhered to the surface of the tray with adhesive tape to securely hold and fix the pellicle to the tray. It is.

Means for solving the problem

The large pellicle storage method and storage structure according to the present invention are technologies that fundamentally solve the above-described problems. In a first aspect of the present invention, a frame, a pellicle film bonded to the upper edge surface of the frame, an adhesive material applied to the lower edge surface of the frame body, and the adhesive material are protected. In the large pellicle storage method, including a large pellicle having an area of 1000 cm ² or more, which also has a protective film force adhered to the lower surface of the frame body, in a case composed of a tray and a lid. The presser margin is formed by projecting part or all of the outer peripheral edge of the outer periphery to the outside, and the presser margin is fixed to the tray via an adhesive tape, and the large pellicle is stored in the case. Is the method. The pellicle area here is the outer diameter area of the frame.

In the first aspect described above, a part or all of the outer peripheral edge of the pellicle protective film protrudes outward to form a presser foot, so that when the pellicle is mounted on the tray, the outer frame of the pellicle is The presser allowance protruding outward can be overlaid on the surface of the tray. In the present invention, since the presser foot is adhered to the tray via the adhesive tape, the pellicle can be securely held and fixed to the tray in a very simple operation. Furthermore, in the present invention, the protective film of the large pellicle is attached to the tray through a flexible adhesive tape, so that if the tray has a sufficient molding accuracy or the tray is warped. Even if it occurs, it is possible to hold and fix a large pellicle that is unaffected by the tray accurately and reliably.

[0011] A second aspect of the present invention is a method for storing a large pellicle according to the first aspect of the present invention, wherein a width of the presser foot of the protective film is 6 mm or more and a length is 20 mm or more.

In the second aspect described above, it is a more preferable embodiment that the length of the presser foot of the protective film is formed to be 50 mm or more, and it is a more preferable embodiment that the length is 300 mm or more. . Further, when the area force of the large pellicle is 000 cm ² or more, it is particularly effective in the present invention that the length of the presser foot of the protective film is 300 mm or more.

In the second invention described above, the size of the presser foot allowance provided on the protective film of the large pellicle is 6 mm or more and the length of 20 mm or more. Therefore, when the large pellicle is mounted on the tray, It can be stacked widely on the surface, and the presser allowance can be stably and securely held and fixed to the surface of the tray via the adhesive tape.

[0012] A third aspect of the present invention is that at least lmm is provided over the entire circumference in consideration of molding accuracy between a frame of a large pellicle mounted on the tray of the case and a lid covered with the tray. This is a method for storing a large pellicle according to the first or second aspect of the present invention, which stores the above space.

In the third aspect described above, the large pellicle is stored with a space of at least 1 mm between the frame of the large pellicle mounted on the tray of the case and the lid covered by the tray. Therefore, when transporting large pellicles, there is no concern that the large pellicles will come into contact with the lid due to vibration or the like. In addition, since the large pellicle is held and fixed to the tray in a stable state via the adhesive tape as described above, it is not necessary to hold the large pellicle with the lid. All the problems of molding accuracy and distortion of the case can be solved.

[0013] In a fourth aspect of the present invention, there is provided a frame, a pellicle film adhered to the upper edge surface of the frame, an adhesive material applied to the lower edge surface of the frame, and the adhesive material. Stick to the bottom of the frame to protect In a large pellicle storage structure in which a large pellicle with an area of 1000 cm ² or more, which has a sufficient protective film strength, is stored in a case made up of a tray and a lid, part or all of the outer peripheral edge of the protective film of the large pellicle is The large pellicle storage structure having a presser foot protruding outward and the presser foot fixed to the tray via an adhesive tape.

[0014] A fifth aspect of the present invention is the large pellicle storage structure according to the fourth aspect of the present invention, wherein a width of the presser foot of the protective film is 6 mm or more and a length is 20 mm or more.

[0015] In a sixth aspect of the present invention, there is provided a space of at least 1 mm or more between a frame of a large pellicle mounted on the tray of the case and a lid covered with the tray. A large pellicle storage structure according to the fourth or fifth aspect.

The invention's effect

[0016] The present invention prevents foreign matter from adhering to a photomask or a reticle used in a lithography process when manufacturing a thin film transistor (TFT), a color filter (CF), or the like constituting a liquid crystal display (LCD). A method for storing a large pellicle having a pellicle area of 1000 cm 2 or more, and a storage structure for the large pellicle according to the present invention, which is useful for the storage structure, and a storage structure thereof. Since the press margin is formed by projecting part or all of the outer peripheral edge of the protective film of the pellicle to the outside, when the pellicle is mounted on the tray, the press margin projecting to the outside of the outer frame of the pellicle is reduced. It has the effect of being able to be stacked on the surface of the tray. In the present invention, since the presser foot is adhered to the tray via the adhesive tape, there is also an effect that the pellicle can be securely held and fixed to the tray in a very simple operation. In addition, since the presser foot having the flexibility of the protective film of the pellicle is attached to the tray via a flexible adhesive tape, if the tray is formed with sufficient precision or warped. Even when this occurs, there is an effect that the pellicle can be accurately held and fixed to the tray without any influence.

In the present invention, when the size of the presser foot provided on the protective film of the pellicle is formed with a width of 6 mm or more and a length of 20 mm or more, when the pellicle is mounted on the tray, The allowance can be widely overlapped on the surface of the tray, and the presser allowance can be stably and securely held and fixed on the surface of the tray via the adhesive tape.

Also, in the present invention, when storing the frame of the large pellicle mounted on the tray of the case and the lid covered by the tray with a space of at least 1 mm, the large pellicle is transported. Even in this case, there is no concern that the large pellicle will come into contact with the lid and rub due to vibration or the like. In addition, when the large pellicle is held and fixed to the tray in a stable state via the adhesive tape as described above, it is not necessary to press the large pellicle with the lid. It has the effect of solving all the problems of molding accuracy and distortion of the case.

BEST MODE FOR CARRYING OUT THE INVENTION

An embodiment of a large pellicle storage method and storage structure according to the present invention will be specifically described with reference to the drawings. FIG. 1 is a longitudinal sectional view of a large pellicle storage method and storage structure according to the present invention. FIG. 2 is an enlarged explanatory view of a main part of the storage structure and the large pellicle storage structure of FIG. Is a plan view of the large pellicle storage method of FIG. 1 and the protective film for the large pellicle used in the storage structure, and FIG. 4 is similar to FIG. 3 in the storage method and storage structure of the large pellicle of FIG. It is a top view of the protective film for large pellicles used.

In FIGS. 1 and 2 (a) and (b), A is a large pellicle and, as already described in detail, is a large pellicle having a pellicle area of 1000 cm ² or more. The pellicle film 3 bonded to the upper edge surface via the adhesive 2, the adhesive material 4 applied to the lower edge surface of the frame body, and the adhesive material 4 adhered to the adhesive material 4 to protect the adhesive material 4 It is composed of 5 protective films.

[0018] In the embodiment described above, when the adhesive material 4 is applied to the lower edge surface of the frame 1, a layered adhesive material in which the adhesive material 4 and the protective film 5 are formed in layers is used. For this, simply laminating the layered adhesive material on the lower edge surface of the frame 1 and adhering it is sufficient. However, in this specification, including such a case, it is simply referred to as “to apply”. Next, the large pellicle A configured as described above is housed in a case B including a tray 6 and a lid 7. The mating surface of the lid and the tray should be sealed with tape over the entire circumference, or the corner between the tray 6 and the lid 7 Clip 8 may be attached to a part.

On the outer side of the outer peripheral edge of the protective film 5 of the large pellicle A, a presser allowance 5a that sticks and is fixed to the surface of the tray 6 by an adhesive tape to be described later is provided. As a result of various experiments conducted by the present inventors, it has become clear that it is desirable that the width W is 6 mm or more and the length L is 20 mm or more. The presser foot allowance 5 a having such dimensions could be easily adhesively fixed to the surface of the tray 6 through the adhesive tape 9 in a stable state. In the present invention, it is more preferable that the length L is 50 mm or more. It is further preferable that the length L is 300 mm or more. In addition, it is preferable that at least two sides of the pellicle frame have a presser foot length of at least 5% of the length of each side. At least two sides that face each other have at least 5% of the presser foot length. It is preferable to set it as the length. The upper limit for the width W and length L of the presser foot allowance 5a is the upper limit when the presser foot foot is at the end of the tray.

In carrying out the storage method and the storage structure of the present invention, a large pellicle A is mounted on the central portion of the tray 6 of the case B as shown in FIGS. 1 and 2, and the frame of the large pellicle A is provided. The large pellicle A is attached to the center of the tray 6 by adhering the presser allowance 5a of the protective film 5 protruding outward of the body 1 to the surface of the tray 6 using an adhesive tape 9 having a predetermined width and length. It can be held and fixed easily and reliably in a very stable state. In the storage method and the storage structure according to the present invention, as described above, the presser allowance 5a having the flexibility of the protective film 5 projecting outward from the frame 1 of the large pellicle A is rich in flexibility. Since it is adhesively fixed to the surface of the tray 6 of the case B via the adhesive tape 9, even if the molding accuracy of the tray 6 of the case B is not sufficient or the tray 6 is warped, it is related to these problems. The large pellicle A can be easily fixed to the tray 6 in a stable state.

The adhesive tape 9 is preferably stuck so as to cover the entire presser allowance 5a, but may be partially covered if an adhesive fixing effect can be obtained.

Furthermore, in the storage method and the storage structure of the present invention, the large pellicle A can be securely held and fixed in a stable state on the tray 6 of the case B, so the large pellicle A is pressed by the lid 7 of the case B. For this purpose, the lid 7 and the frame of the large pellicle A The distance D from 1 can be lmm or more. Therefore, since the large pellicle A and the lid 7 have a sufficient distance, there is no fear that the problem of dust generation that the large pellicle A and the lid do not rub due to vibration during transportation or the like does not occur. In addition, the distance D is preferably 300 mm or less from the viewpoint of the storage and cleaning properties of the large size barrel case.

[0020] When the presser allowance 5a is provided on the protective film 5 of the above-described large pellicle A, for example, the protective film 5 shown in FIGS. 3 (a)-(d) or 4 (a)-(d) A presser allowance 5a with a width W force of S6 mm or more and a length L of 20 mm or more can be provided on the outside of the outer edge. That is, in the case of FIG. 3 (a), the presser allowance 5a is provided at the outer center of the long side of the protective film 5 from which the center of the large pellicle A is removed. In this structure, the presser allowance 5a is provided at the outer center of the short side of the protective film 5 that has been removed. In the case of (c) in the figure, the presser allowance 5a is provided at the center of the outer side of each of the long side and the short side of the protective film 5 that has been removed from the center. In this structure, the presser allowance 5a is provided at the outer center of each of the long side and the short side of the protective film 5 that is not removed.

In the case of Fig. 4 (a), the presser allowance 5a is provided over almost the entire length of the outer center of the long side and the outer side of the short side of the protective film 5 with the center removed. Is a structure in which a presser allowance 5a is provided at substantially the entire length of the outer side of the long side of the protective film 5 that has been removed from the center and at the center of the short side. Further, in the case of FIG. 3C, the presser allowance 5a is continuously provided over the entire length of the long side and the short side of the protective film 5 that is removed from the center. In the case of (d) in the figure, the presser allowance 5a is provided continuously over the entire length of the long side and the short side of the protective film 5 that is not centered.

An example of the shape of the protective film is shown in FIG.

[0021] The protective film used in the present invention is preferably made of polyethylene terephthalate resin, polyethylene resin, or the like. The thickness of the protective film is preferably 30 μm-500 μm.

As the material of the case used in the present invention, a resin such as polyethylene terephthalate resin, talin-tolyl butadiene styrene resin, acrylic resin, polycarbonate resin, polychlorinated bur resin can be used. Moreover, you may use the antistatic type of resin. In particular, it is preferable to use a product that generates less outgassing! Moreover, as a base material of the adhesive tape used for this invention, a polyethylene, a polypropylene, a polyethylene terephthalate, a polyvinyl chloride nonwoven fabric etc. can be used, for example. Further, as the adhesive tape adhesive, for example, acrylic or polybulu alcohol can be used. Furthermore, it is preferable that the adhesive tape has a small amount of outgas generation. Further, it may be subjected to antistatic treatment.

[0022] As a result of experiments using the large-sized pellicle storage method and storage structure of the present invention having the above-described configuration, the present inventor has obtained good results as shown in the following examples. It was obtained.

[0023] Example 1

Case B in which a large pellicle A with an outer dimension force of 27mm X 294mm and a presser allowance 5a of WlOmmX LlOOmm in the center of the long and short sides of the protective film 5 is vacuum-formed with ABS grease. The above-mentioned presser allowance 5a is adhesively fixed to the tray 6 via an adhesive tape 9 (tape size: 15 mm X 120 mm), and then a lid 7 is covered on the tray 6. A clip 8 was attached to the corner between the tray 6 and the lid 7 to fix them together. At this time, the distance D between the frame 1 of the large pellicle A and the lid 7 was kept at 3.6 mm or more in consideration of molding accuracy. As a result of the long-distance transportation test of the large pellicle A in this state, no rubbing was observed between the large pellicle A and the case B, and the pericle film 3 of the large pellicle A was also surrounded by the frame 1 In any case, no dust was observed. The large pellicle A was held and fixed as it was first mounted. The maximum impact value of the long-distance transport test was lOcmZs ² .

[0024] Example 2

Large pellicle A with presser allowance 5a with outer dimensions of 905mm x 750mm and the center of the long side and short side of protective film 5 is WlOmmX LlOOmm. Case B tray vacuum-formed with ABS grease After mounting the presser foot 5a on the tray 6 via adhesive tape 9 (tape size: 15mm x 120mm), the lid 7 is covered on the tray 6 Clip 8 was attached to the corner of tray 6 and lid 7 to secure them. At this time, the distance D between the frame 1 of the large pellicle A and the lid 7 was kept at 3.6 mm or more in consideration of molding accuracy. Results of transport test under exactly the same conditions as in Example 1 No rubbing was observed between the large pellicle A and the case B, and no dust adhered to either the pellicle film 3 of the large pellicle A or around the frame 1. The large pellicle A was held and fixed in a stable state on the tray 6 as in the first loading.

[0025] Example 3-6

A large pellicle A with the outer dimensions of the pellicle and the size of the presser foot (WX L) provided at the center of the long and short sides of the protective film as shown in Table 1 is vacuum-formed with ABS grease. Is mounted on the tray 6 of the case B and the presser foot 5a is adhesively fixed to the tray 6 via the adhesive tape 9, and then the lid 7 is covered on the tray 6, and these trays 6 And the lid 7 were sealed with tape. Table 1 below shows the presser tape size and the distance D between the frame 1 and the lid 7 of the large pellicle A. As a result of carrying out a transportation test on these pellicle cases under exactly the same conditions as in Example 1, no rubbing was observed between the large pellicle A and case B, and the large pellicle A was Similarly, the tray 6 was held and fixed in a stable state.

[0026] [Table 1] Table 1

Single: m m

[0027] Comparative Example 1

A large pellicle A with external dimensional force of 27mm X 294mm is mounted directly on the tray 6 formed by vacuum forming ABS grease (without using adhesive tape 9), and the lid 7 is covered on the tray 6. The result of a transportation test under the same conditions as in Example 1 with the distance D between the lid 7 and the frame 1 of the large pellicle A kept at 0.5 mm in design dimensions In addition, there was evidence of rubbing between the large pellicle A and the lid 7, and fine dust was found adhering to a part of the pellicle film 3 of the large pellicle A.

[0028] Comparative Example 2

A large pellicle A with external dimensional force of 27mm X 294mm is placed on tray 6 as in Comparative Example 1. In this state, the distance D between the lid 7 covered on the tray 6 and the frame 1 of the large pellicle A is set to 3.6 mm or more in consideration of molding accuracy, and transported under the same conditions as in Example 1. As a result of the test, there was evidence of rubbing between the large pellicle A and the lid 7. In addition, adhesion of fine force and dust around the frame 1 of the large barrel A was observed.

Industrial applicability

[0029] By using the storage method and storage structure of a large pellicle according to the present invention, the large pellicle can be stored in the case in a stable state regardless of whether the molding accuracy of the case is high or low. The pellicle can be safely transported without damage.

Brief Description of Drawings

FIG. 1 is a longitudinal cross-sectional explanatory view of a large pellicle storage method and storage structure according to the present invention.

FIG. 2 is an enlarged explanatory view of a main part of the large pellicle storage method and the storage structure of FIG.

FIG. 3 is a plan view of a method for storing the large pellicle of FIG. 1 and a protective film for a large pellicle used in the storage structure.

FIG. 4 is a plan view of a method for storing the large pellicle of FIG. 1 and a protective film for a large pellicle used in the storage structure.

FIG. 5 is a diagram showing an example of the shape of a protective film.

Claims

The scope of the claims

[1] A frame, a pellicle film bonded to the upper edge of the frame, an adhesive applied to the lower edge of the frame, and a lower surface of the frame to protect the adhesive In a large pellicle storage method, including a large pellicle having an area of 1000 cm ² or more in a case that also has a tray and a lid, the outer peripheral edge of the protective film of the large pellicle, The presser foot is formed by projecting part or all of the presser foot outward, and the presser foot is fixed to the tray via an adhesive tape, and the large pellicle is stored in the case. .

[2] The width of the presser foot allowance of the protective film is 6 mm or more and the length is 20 mm or more.

1. A method for storing a large pellicle according to 1.

3. The large pellicle according to claim 1 or 2, wherein the large pellicle frame mounted on the tray of the case and the lid covered by the tray are stored with a space of at least lmm or more. How to store the mold pellicle.

[4] A frame, a pellicle film adhered to the upper edge of the frame, an adhesive applied to the lower edge of the frame, and a lower surface of the frame to protect the adhesive A large pellicle storage structure in which a large pellicle with an area of 1000 cm ² or more is housed in a case that also serves as a tray and lid! The large pellicle storage structure according to claim 1, wherein a part or all of the periphery has a presser foot protruding outward, and the presser foot is fixed to the tray via an adhesive tape.

5. The large pellicle storage structure according to claim 4, wherein a width of the presser foot of the protective film is 6 mm or more and a length is 20 mm or more.

[6] The large pellicle storage according to claim 4 or 5, wherein a space of at least lmm is provided between the frame of the large pellicle mounted on the tray of the case and the lid covered with the tray. Structure.