CN111630453A - Dustproof pellicle frame holding device and dustproof pellicle frame holding method - Google Patents
Dustproof pellicle frame holding device and dustproof pellicle frame holding method Download PDFInfo
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- CN111630453A CN111630453A CN201980009593.9A CN201980009593A CN111630453A CN 111630453 A CN111630453 A CN 111630453A CN 201980009593 A CN201980009593 A CN 201980009593A CN 111630453 A CN111630453 A CN 111630453A
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- Prior art keywords
- frame
- pellicle
- mask
- thin film
- dust
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
Abstract
Provided are a dustproof thin film assembly frame holding device and a dustproof thin film assembly frame holding method, which can confirm the condition that the dustproof thin film assembly is reliably adhered to a mask. A dustproof thin film assembly holding part (20) arranged on a frame body (10) is used for holding a dustproof thin film assembly frame (101) so that an adhesive member of the dustproof thin film assembly is in contact with a mask. The measurement unit (30) is disposed at a first position where the vicinity of the tip overlaps the mask to measure a first distance, which is the distance to the surface of the mask, and the measurement unit (30) is moved to a second position where the vicinity of the tip overlaps the pellicle frame (101) to measure a second distance, which is the distance to the pellicle (102).
Description
Technical Field
The present invention relates to a dustproof thin film assembly frame holding device and a dustproof thin film assembly frame holding method.
Background
Prior art documents
Patent document
Patent document 1: international publication No. 2016/133054
Disclosure of Invention
Problems to be solved by the invention
In the invention described in patent document 1, after the dust-proof pellicle is attached to the photomask, the dust-proof pellicle is released by pulling out the dust-proof pellicle holding member from the groove, but if the dust-proof pellicle is released in a state where the dust-proof pellicle is not reliably attached to the photomask, the dust-proof pellicle may fall down.
The present invention has been made in view of the above circumstances, and an object thereof is to provide a dustproof pellicle frame holding device and a dustproof pellicle frame holding method that can confirm that a dustproof pellicle is reliably attached to a mask.
Means for solving the problems
In order to solve the above problem, a dust pellicle frame holding device according to the present invention is a device for holding a dust pellicle and attaching the dust pellicle to a substantially plate-shaped mask held in a substantially vertical direction, the device including: a substantially hollow cylindrical pellicle assembly frame; a dustproof thin film which is arranged on a first surface of the dustproof thin film assembly frame approximately orthogonal to the outer peripheral surface in a mode of covering the hollow part of the dustproof thin film assembly frame; and an adhesive member provided on a second surface substantially parallel to the first surface, wherein the dustproof thin film assembly frame holding device includes: a frame body which is a frame-shaped member formed by combining a plurality of bar materials into a substantially rectangular shape; a pellicle holding section provided in the frame body and holding the outer peripheral surface of the pellicle frame; a measuring unit provided in the housing; and a control unit for controlling the frame, the pellicle unit holding unit, and the measurement unit, the measurement portion is provided so as to be movable between a first position where the vicinity of the tip overlaps the mask and a second position where the vicinity of the tip overlaps the pellicle frame, and the pellicle film holding portion and the measurement portion are provided at different positions when viewed from a direction substantially orthogonal to the extending direction of the bar material, in a state where the dustproof thin film assembly holding part holds the dustproof thin film assembly frame and the frame body extends along a substantially vertical direction so that the bonding member is in contact with the mask, the control unit is configured to place the measurement unit at the first position to measure a first distance, which is a distance to the surface of the mask, and move the measurement unit to the second position to measure a second distance, which is a distance to the dust-proof film.
According to the dustproof pellicle assembly frame holding apparatus of the present invention, the adhesive member is brought into contact with the mask, the measurement portion is arranged at a first position where the vicinity of the front end overlaps the mask to measure a first distance which is a distance to the surface of the mask, and the measurement portion is moved to a second position where the vicinity of the front end overlaps the dustproof pellicle assembly frame to measure a second distance which is a distance to the dustproof pellicle assembly. This makes it possible to confirm that the pellicle is reliably attached to the mask.
The dustproof thin film unit holding portion may include a dustproof thin film unit holding member that is provided to be movable in a horizontal direction or a vertical direction between an abutting position abutting on the outer peripheral surface and a retracted position not abutting on the outer peripheral surface, the frame body may be movable in the horizontal direction, the control portion may dispose the dustproof thin film unit holding member to the abutting position to hold the dustproof thin film unit frame, move the frame body in the horizontal direction to abut on the mask in a state where the frame body is extended in a substantially vertical direction, dispose the measurement portion to the first position to measure the first distance, move the measurement portion to the second position to measure the second distance, and when a difference between the first distance and the second distance is equal to or less than a threshold value, the dust-proof film assembly holding member can be moved from the abutment position to the retreat position. This prevents the pellicle from being released and falling off in a state where the pellicle is not reliably attached to the mask (when the difference between the first distance and the second distance is equal to or less than the threshold value).
The measurement unit may include a first measurement unit provided near an upper side and near a left end of the housing and a second measurement unit provided near an upper side and near a right end of the housing in a posture when the adhesive member is brought into contact with the mask. Thus, the measuring unit can measure the points near the upper end and the left and right ends of the mask and the dustproof thin film assembly. Further, when the dustproof thin film assembly is attached to the mask, a defect that one end of the dustproof thin film assembly is attached and the other end of the dustproof thin film assembly is not attached can be found.
The frame body may have a first vertical frame portion and a second vertical frame portion extending substantially vertically in a substantially rod shape and an upper frame portion extending substantially horizontally in the vicinity of upper ends of the first vertical frame portion and the second vertical frame portion in a posture when the adhesive member is brought into contact with the mask, the first vertical frame portion and the second vertical frame portion may be movable in an extending direction of the upper frame portion, the upper frame portion may be movable in an extending direction of the first vertical frame portion and the second vertical frame portion, the dust-proof film module gripping portion may be provided in the first vertical frame portion and the second vertical frame portion, and the measurement portion may be provided in the upper frame portion. Accordingly, the size of the frame composed of the first vertical frame portion, the second vertical frame portion, and the upper frame portion can be changed to cope with dust-proof film units of various sizes. In addition, regardless of the size of the pellicle, the height of the pellicle can be measured at a position near the upper end of the pellicle.
The frame may have a lower frame portion extending substantially horizontally in the vicinity of lower ends of the first vertical frame portion and the second vertical frame portion, and the measurement portion may have a third measurement portion provided in the lower frame portion. This makes it possible to more reliably confirm whether or not the dust-proof film unit has been attached.
When the adhesive member is brought into contact with the mask, the frame may be inclined such that a distance between the mask and the second surface on the upper end side is shorter than a distance between the mask and the second surface on the lower end side. This prevents the adhesive member from locally contacting the mask, which would otherwise cause a problem that the pellicle assembly cannot be attached to the mask. Further, the upper end portion of the dustproof thin film assembly is attached to the mask, the height of the surface of the mask and the height of the dustproof thin film assembly are measured in the vicinity of the upper ends of the mask and the dustproof thin film assembly, and whether or not the dustproof thin film assembly is attached to the mask is determined based on the measurement result, so that the attachment state of the dustproof thin film assembly can be accurately determined.
In order to solve the above problem, a method of gripping a pellicle frame according to the present invention is a method of gripping a pellicle and attaching the pellicle to a substantially plate-shaped mask held in a substantially vertical direction, the pellicle comprising: a substantially hollow cylindrical pellicle assembly frame; a dustproof thin film which is arranged on a first surface of the dustproof thin film assembly frame approximately orthogonal to the outer peripheral surface in a mode of covering the hollow part of the dustproof thin film assembly frame; and an adhesive member provided on a second surface substantially parallel to the first surface, wherein a dust-proof pellicle holding member provided movably in a horizontal direction in a frame is disposed at an abutment position with the outer peripheral surface to hold the dust-proof pellicle frame, the frame is moved in parallel to bring the adhesive member into abutment with the mask in a state where the dust-proof pellicle frame is held, a measurement portion provided in the frame is disposed at a first position where the measurement portion is located near a tip end and overlaps with the mask, a first distance, which is a distance to a surface of the mask, is measured, the measurement portion is moved to a second position where the measurement portion is located near the tip end and overlaps with the dust-proof pellicle frame, a second distance, which is a distance to the dust-proof pellicle, is measured, and when a difference between the first distance and the second distance is equal to or less than a threshold value, the dust-proof film unit holding member can be moved from the contact position to a retracted position where the dust-proof film unit holding member does not contact the outer peripheral surface.
Effects of the invention
According to the present invention, it is possible to confirm that the pellicle is reliably attached to the photomask.
Drawings
Fig. 1 is a front view showing an outline of a pellicle holding apparatus 1 according to a first embodiment.
Fig. 2 is a perspective view showing an outline of the dustproof film assembly 100.
Fig. 3 is a sectional view a-a of fig. 2.
Fig. 4 is a schematic view of the dustproof thin film assembly holding portion 20.
Fig. 5 is a diagram schematically showing a state in which the measurement unit 30 is located at the first position.
Fig. 6 is a diagram schematically showing a state in which the measurement unit 30 is located at the second position.
Fig. 7 is a block diagram showing an electrical configuration of the dust-proof film assembly holding apparatus 1.
Fig. 8 is a flowchart showing a flow of processing performed by the pellicle assembly holding apparatus 1.
Fig. 9 is a flowchart showing the processing of step S107.
Fig. 10 is a schematic diagram showing a situation at the time of the inspection shown in step S107.
Fig. 11 is a schematic diagram showing a situation at the time of the check shown in step S107.
Detailed Description
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same elements are denoted by the same reference numerals, and redundant portions are not described.
< first embodiment >
Fig. 1 is a front view showing an outline of a pellicle holding apparatus 1 according to a first embodiment. The dustproof thin film assembly holding device 1 is used for adhering the dustproof thin film assembly 100 to a substantially plate-shaped mask M held in a substantially vertical direction. The mask M is held in a substantially vertical direction by a mask holding device, not shown.
First, the pellicle assembly 100 will be described. Fig. 2 is a perspective view showing an outline of the dustproof film assembly 100. Fig. 3 is a sectional view a-a of fig. 2. The pellicle assembly 100 mainly has: a pellicle frame (pellicleframe) 101; a dustproof pellicle 102 stretched over the dustproof pellicle assembly frame 101; and an adhesive member 103 (see fig. 3) formed on the lower surface of the pellicle assembly frame 101.
The pellicle frame 101 has a frame shape (substantially hollow cylindrical shape) having a substantially rectangular outer periphery, and is formed of a metal such as iron, aluminum, or the like. The dustproof pellicle assembly frame 101 has a substantially rectangular shape in a plan view (viewed from above the paper surface in fig. 2), and has a hollow portion 101e in the center. The dustproof thin film assembly frame 101 is provided with a dustproof thin film 102 so as to cover the hollow portion 101 e. The size of the hollow portion 101e of the pellicle frame 101 is approximately the same as the size of the photomask (for example, approximately 520mm × 800mm to 1620mm × 1780 mm). The width of the frame-like portion of the pellicle frame 101 is about several tens of mm, and the thickness thereof is about 2mm to 10 mm.
The pellicle frame 101 has substantially parallel upper and lower surfaces 101a, 101 b. Further, an outer peripheral surface 101c of the pellicle frame 101, which is orthogonal to the upper surface 101a and the lower surface 101b, includes a groove 101 d. The groove 101d is formed along the outer peripheral surface 101c, and has a height and a depth of about 2 mm. A pellicle holding member 21 (described later) provided in the frame 10 is inserted into the groove 101 d.
The dust-proof film 102 is a film having a thickness of a submicron order. The dustproof film 102 is stretched over the upper surface 101a of the dustproof film module frame 101 so as to cover the hollow portion 101e of the dustproof film module frame 101. When the pellicle frame 101 is attached to the photomask substrate, the pellicle 102 is provided at a predetermined distance from the pattern formation surface (front surface) of the mask M.
The adhesive member 103 is provided on the lower surface 101b of the pellicle assembly frame 101. The adhesive member 103 is formed in a frame shape over the entire circumference of the pellicle frame 101. In addition, the adhesive member 103 is provided so as not to protrude from the dustproof film assembly frame 101.
The description returns to fig. 1. The dustproof pellicle assembly holding apparatus 1 mainly includes a frame 10, a dustproof pellicle assembly holding section 20, and a measurement section 30. The pellicle unit gripping unit 20 and the measurement unit 30 are provided in the frame 10.
The frame 10 is a frame-shaped member formed by combining a plurality of bar materials into a substantially rectangular shape. The frame body 10 mainly includes vertical frame portions 11, 12, upper frame portions 13, 14, and a frame 15 provided outside the vertical frame portions 11, 12 and the upper frame portions 13, 14. The vertical frame portions 11, 12, the upper frame portions 13, 14, and the frame 15 are made of metal, for example, iron, aluminum, or the like.
The vertical frame portions 11 and 12 are substantially rod-shaped members extending substantially vertically in a posture when the dustproof thin film assembly 100 shown in fig. 1 is attached to the mask M (the adhesive member 103 is brought into contact with the mask M), and are provided so that the longitudinal direction thereof is along the z direction. The vertical frame portions 11 and 12 are provided so as to be movable along the lower end portion 15a and the upper end portion 15b of the frame 15, i.e., along the x direction. Various known techniques can be used for the mechanism for moving the vertical frame portions 11 and 12 in the x direction.
The upper frame portions 13 and 14 are substantially rod-shaped members extending substantially horizontally in the vicinity of the upper ends of the vertical frame portions 11 and 12 in the posture when the dustproof pellicle assembly 100 shown in fig. 1 is attached to the mask M, and are provided so that the longitudinal direction thereof extends along the x direction. The upper frame portions 13 and 14 are provided movably along the vertical frame portions 11 and 12, i.e., along the z direction, respectively. Various known techniques can be used for the mechanism for moving the upper frame portions 13 and 14 in the z direction.
The form of the upper frame portions 13 and 14 is not limited to this. For example, the upper frame portion may be formed of 1 bar extending substantially horizontally, and the vicinity of both ends of the 1 bar may be provided in the vertical frame portions 11 and 12.
By thus allowing the vertical frame portions 11 and 12 and the upper frame portions 13 and 14 to move, the size of the frame constituted by the vertical frame portions 11 and 12, the upper frame portions 13 and 14, and the lower end portion 15a can be changed to accommodate dust-proof film assemblies 100 of various sizes. The pellicle 100 may be, for example, a pellicle of 420mm × 720mm, a pellicle of 700mm × 800mm, a pellicle of 520mm × 680mm, a pellicle of 750mm × 1300mm, or a pellicle of 1520mm × 1680 mm.
The housing 10 is provided to be movable in the horizontal direction by a movement mechanism not shown. When the pellicle 100 is attached to the mask M, the frame 10 is moved in parallel in the + y direction. The housing 10 includes a driving unit 16 (see fig. 7) and a mechanism for horizontally moving the housing 10. A mechanism for moving the frame 10 in the horizontal direction is well known, and therefore, the explanation thereof is omitted.
In addition, a rotation shaft, not shown, is provided in the vicinity of the lower end of the housing 10. The frame body 10 can rotate between a position where the plane formed by the frame 15 is substantially horizontal (substantially parallel to the xy plane) and a position where the plane formed by the frame 15 is substantially vertical (substantially parallel to the xz plane) around the rotation axis. In fig. 1, in a state where the dustproof thin film assembly 100 is held by the frame body 10, the frame body 10 is inclined with respect to the vertical direction such that the distance between the lower surface 101b on the upper end side (+ z side) (the back side of the paper in fig. 1) and the mask M is closer to the distance between the lower surface 101b on the lower end side (-z side) and the mask M.
The pellicle gripper 20 includes a plurality of pellicle gripper members 21 that grip the outer peripheral surface 101c of the pellicle frame 101. The dust-proof film assembly gripping members 21 are provided on the vertical frame portions 11, 12, the upper frame portions 13, 14, the lower end portion 15a, and the upper end portion 15 b.
In the example shown in fig. 1, 5 dust-proof film unit holding members 21 are provided in the vertical frame portions 11 and 12, 1 dust-proof film unit holding member 21 is provided in the upper frame portions 13 and 14, 5 dust-proof film unit holding members 21 are provided in the lower end portion 15a, and 1 dust-proof film unit holding member 21 is provided in the upper end portion 15b, but the positions and the number of the dust-proof film unit holding members 21 are not limited to these.
The dustproof thin film assembly holding member 21 used is different depending on the size of the dustproof thin film assembly 100. In fig. 1, only the dust-proof pellicle unit holding member 21 that abuts the dust-proof pellicle unit 100 (here, the outer peripheral surface 101c) out of the dust-proof pellicle unit holding members 21 provided in the frame 10 is used.
The dust-proof film unit holding member 21 is provided to be movable in the horizontal direction or the vertical direction between an abutment position abutting against the outer peripheral surface 101c and a retracted position not abutting against the outer peripheral surface 101 c. Fig. 4 is a schematic view of the dustproof thin film assembly holding portion 20.
The dust-proof pellicle unit holding member 21 is formed of a metal plate material. The dust-proof pellicle assembly holding member 21 is not limited to a plate-like member, and may be formed of, for example, a rod-like member.
The drive member 22 is provided to the pellicle unit holding member 21. The drive member 22 has a rod 22a, and an actuator 22b that moves the rod 22 a. The pellicle unit holding member 21 is coupled to the rod 22 a. The actuator 22b is provided in the housing 10 (not shown in fig. 4).
The dust-proof pellicle assembly holding member 21 is moved by the driving member 22 in the horizontal direction between an insertion position (see a solid line in fig. 4) at which the dust-proof pellicle assembly holding member 21 is inserted into the slot 101d and a retracted position (see a one-dot chain line in fig. 4) at which the dust-proof pellicle assembly holding member 21 is not inserted into the slot 101d and the dust-proof pellicle assembly holding member 21 does not interfere with the dust-proof pellicle assembly frame 101.
The front end of the dust-proof film assembly holding member 21 is covered with a sheet or the like made of resin (e.g., ultra-high molecular weight polyethylene). This prevents the dust-proof pellicle assembly holding member 21 and the dust-proof pellicle assembly frame 101 from being scraped and causing dust generation when the dust-proof pellicle assembly holding member 21 is inserted into the groove 101 d.
The description returns to fig. 1. The measurement unit 30 measures the heights (positions in the y direction) of the mask M and the pellicle frame 101. The measurement unit 30 is provided in the housing 10, here, the upper frame portions 13 and 14. The measurement unit 30 is provided at a position not interfering with the pellicle assembly holding member 21. In other words, the measurement portion 30 and the dust-proof film assembly holding member 21 are provided at different positions when viewed from a direction (y direction in this case) substantially orthogonal to the extending direction of the bar material (for example, the upper frame portions 13 and 14) constituting the frame body 10.
The measurement unit 30 is provided so as to be movable in the vertical direction between a first position (see the solid line in fig. 1) at which the vicinity of the leading end overlaps the mask M and a second position (see the two-dot chain line in fig. 1) at which the vicinity of the leading end overlaps the pellicle frame 101.
The measurement section 30 provided in the upper frame portion 13 is provided in the vicinity of the vertical frame portion 11, and the measurement section 30 provided in the upper frame portion 14 is provided in the vicinity of the vertical frame portion 12. In other words, the two measurement units 30 are provided near the upper side and the left end of the housing 10, and near the upper side and the right end of the housing 10, respectively. Thus, the measurement unit 30 can measure the mask M and the points near the upper end and the left and right ends of the pellicle frame 101. However, the positions and the number of the measurement units 30 are not limited to those shown in fig. 1.
Fig. 5 is a diagram schematically showing a state in which the measurement unit 30 is located at the first position. Fig. 6 is a diagram schematically showing a state in which the measurement unit 30 is located at the second position.
The measurement unit 30 mainly includes an ultrasonic sensor 31 and a reflector 32. The ultrasonic sensor 31 is a distance measuring sensor that transmits an ultrasonic wave toward an object, receives a reflected wave of the ultrasonic wave, and measures a distance to the object based on a time interval between transmission of the signal and reception of the reflected wave. The ultrasonic sensor 31 is well known, and thus detailed description is omitted.
The reflecting plate 32 reflects the ultrasonic waves transmitted from the ultrasonic sensor 31. By providing the reflecting portion 32a of the reflecting plate 32 with an inclination of 45 degrees on the yz plane, the ultrasonic wave transmitted downward (-z direction) from the ultrasonic sensor 31 is reflected in the reflecting portion 32a in the + y direction (see the two-dot chain line in fig. 5 and 6).
In the present embodiment, the measurement unit 30 includes the ultrasonic sensor 31, but the sensor for determining the distance is not limited to the ultrasonic sensor 31. As the distance measuring sensor, an optical sensor or an eddy current sensor that obtains a distance by using light may be used. As the optical sensor, for example, a laser displacement sensor using a laser beam or a triangulation optical sensor can be used. Among them, a noncontact sensor is desirably used as the measurement unit 30. In the present embodiment, the reflection plate 32 is provided, but the reflection plate 32 may not be used. In this case, the ultrasonic sensor 31 may be set to transmit the ultrasonic wave in the + y direction.
The measurement unit 30 has an actuator 33. The actuator 33 moves the ultrasonic sensor 31 and the reflection plate 32 between the first position and the second position along the z direction (vertical direction).
In fig. 5, the vicinity of the measurement position of the measurement unit 30 (here, the leading end (-z end) of the measurement unit 30) overlaps the mask M. Therefore, the ultrasonic wave transmitted from the ultrasonic sensor 31 hits the surface Ma of the mask M, and the measurement unit 30 measures the distance between the reflection unit 32a and the surface Ma, that is, the height (position in the y direction) of the surface Ma.
In fig. 6, the vicinity of the measurement position of the measurement unit 30 (here, the leading end (-z end) of the measurement unit 30) overlaps the pellicle assembly frame 101. Therefore, the ultrasonic wave transmitted from the ultrasonic sensor 31 hits the dust-proof film 102, and the measurement unit 30 measures the distance between the reflection unit 32a and the dust-proof film 102, that is, the height of the dust-proof film 102. When the dustproof thin film assembly 100 is attached to the mask M, the difference between the height of the dustproof thin film 102 and the height of the dustproof thin film 102 is equal to or less than a threshold value.
Fig. 7 is a block diagram showing an electrical configuration of the dust-proof film assembly holding apparatus 1. The dustproof thin film module holding apparatus 1 includes a cpu (central Processing unit)151, a ram (random Access memory)152, a rom (readonly memory)153, an input/output interface (I/F)154, a communication interface (I/F)155, and a media interface (I/F)156, and these are connected to the driving unit 16, the actuator 22b, the measurement unit 30, and the like.
The CPU151 operates based on programs stored in the RAM152 and the ROM153, and controls each unit. Signals are input to the CPU151 from the driving unit 16, the actuator 22b, and the measuring unit 30. The signal output from the CPU151 is output to the drive unit 16, the actuator 22b, and the measurement unit 30.
The RAM152 is a volatile memory. The ROM153 is a nonvolatile memory in which various control programs and the like are stored. The CPU151 operates based on programs stored in the RAM152 and the ROM153, and controls each unit. The ROM153 stores a boot program executed by the CPU151 at the time of starting the dustproof thin film assembly gripping device 1, a program depending on hardware of the dustproof thin film assembly gripping device 1, and the like. The RAM152 stores programs executed by the CPU151, data used by the CPU151, and the like.
The CPU151 controls an input/output device 161 such as a keyboard and a mouse via the input/output interface 154. The communication interface 155 receives data from other devices via the network 162 and transmits the received data to the CPU151, and transmits data generated by the CPU151 to other devices via the network 162.
The media interface 156 reads a program or data stored in the storage medium 163 and stores it in the RAM 152. The storage medium 163 is, for example, an IC card, an SD card, a DVD, or the like.
The program for realizing each function is read from the storage medium 163, loaded into the pellicle film holding apparatus 1 via the RAM152, and executed by the CPU 151.
The CPU151 has a function of a control unit 151a that controls each unit of the pellicle film assembly holding apparatus 1 based on an input signal. The control unit 151a is constructed by the CPU151 executing a predetermined program read. The processing performed by the control unit 151a will be described in detail later.
The configuration of the pellicle film assembly holding apparatus 1 shown in fig. 7 has been described mainly in describing the features of the present embodiment, but does not exclude a configuration provided in a general information processing apparatus, for example. The functional configuration shown in fig. 7 is classified for the sake of easy understanding of the configuration of the dustproof thin film assembly holding device 1, but the method and name of classifying the components are not limited to the embodiment shown in fig. 7. The configuration of the pellicle holding apparatus 1 may be further classified into more components according to the contents of the process, or the processes of a plurality of components may be executed by one component.
The operation of the pellicle assembly holding apparatus 1 configured as described above will be described. Fig. 8 is a flowchart showing a flow of processing performed by the pellicle assembly holding apparatus 1. The following processing is mainly performed by the control unit 151 a.
First, the controller 151a controls the actuator 22b to move the dust-proof pellicle assembly holding member 21 from the retracted position to the insertion position, and inserts the dust-proof pellicle assembly holding member 21 into the groove 101d (step S101). The control unit 151a executes the processing of step S101 for each dustproof thin film assembly gripping member 21. Thereby, the dustproof thin film assembly holding device 1 holds the dustproof thin film assembly 100. The amount of movement of the pellicle assembly holding member 21 between the retracted position and the insertion position is set in advance and stored in the ROM 153.
The controller 151a drives the driver 16 to rotate the housing 10 in a substantially vertical direction (step S102). Since the frame 10 holds the dustproof film assembly 100, the dustproof film assembly 100 rotates together with the frame 10. Next, the controller 151a inspects the dustproof thin film unit 100 held by the frame 10 by using an inspection unit (not shown) (step S103). The inspection unit has a transmission unit that transmits a laser beam or the like, and various known methods are used to inspect the pellicle assembly 100. Step S103 is well known, and thus, the description is omitted.
When it is confirmed that there is no abnormality in the pellicle assembly 100 by the inspection process (step S103), the controller 151a moves the frame 10 in parallel to the apparatus on which the mask M is placed, using the driver 16 (step S104). Next, the mask M and the pellicle assembly 100 are aligned (aligned) (step S105). In steps S104 and S105, the controller 151a rotates the frame 10 via the driver 16 to tilt the frame 10 such that the distance between the lower surface 101b on the upper end side (i.e., the adhesive member 103) and the mask M is shorter than the distance between the lower surface 101b on the lower end side (i.e., the adhesive member 103) and the mask M. The inclination is at a slight angle with respect to the vertical direction.
After the alignment (step S105), the controller 151a attaches the pellicle assembly 100 to the photomask (step S106). Step S106 is a so-called temporary bonding process.
The controller 151a moves the frame 10 in parallel (here, in the + y direction) by the driving unit 16 while tilting the frame 10 by a slight angle with respect to the vertical direction, so that the pellicle 100 approaches the mask M. Thus, the pellicle assembly 100 abuts the mask M. In this state, the controller 151a moves the pellicle assembly 100 in the direction (+ y direction) close to the mask M. However, since the pellicle 100 is already in contact with the mask M, the pellicle 100 is pressed against the mask M, and the pellicle 100 is attached to the mask M by the adhesive member 103.
In the pasting process (step S106), the pellicle assembly 100 is tilted at a slight angle with respect to the mask M. In contrast, in the case where the dustproof thin film assembly 100 is not inclined with respect to the mask M but is substantially parallel to the mask M, the adhesive member 103 may only partially contact the mask M due to deformation of the dustproof thin film assembly 100, and thus the dustproof thin film assembly 100 may not be attached to the mask M. Therefore, it is desirable to tilt the pellicle assembly 100 at a slight angle with respect to the mask M.
Next, the controller 151a uses the measuring unit 30 to check whether or not the pellicle assembly 100 is attached to the mask M (step S107). Fig. 9 is a flowchart showing the flow of the processing of step S107.
First, the control unit 151a disposes the measurement unit 30 at the first position as shown in fig. 5. Next, ultrasonic waves are transmitted from the ultrasonic sensor 31 to measure the height (position in the y direction) of the surface Ma of the mask M (step S201).
Next, the controller 151a moves the ultrasonic sensor 31 and the reflecting plate 32 via the actuator 33, and places the measurement unit 30 at the second position as shown in fig. 6. Next, ultrasonic waves are transmitted from the ultrasonic sensor 31 to measure the height (position in the y direction) of the dust-proof film 102 (step S202). The distance for moving the ultrasonic sensor 31 and the reflecting plate 32 from the first position to the second position is set in advance and stored in the ROM 153.
Then, the controller 151a compares the difference between the height of the mask M and the height of the dust-proof film 102 with the threshold T (step S203). The threshold value T is set to an arbitrary value in advance. For example, when the thickness of the pellicle frame 101 is approximately 7mm and the thickness of the adhesive member 103 is approximately 1mm, the threshold T is approximately 8 mm. Information (here, a value) relating to the threshold value T is stored in the ROM 153.
The controller 151a determines the attachment state of the pellicle assembly 100 based on the comparison result in step S203 (step S204). When the difference between the height of the mask M and the height of the dust-proof film 102 is not equal to or less than the threshold value (no in step S204), the control unit 151a determines that the dust-proof film assembly 100 is not attached to the mask M. When the dustproof thin film assembly 100 is not attached to the mask M, the controller 151a returns to the process of moving the frame 10 in parallel so that the dustproof thin film assembly 100 approaches the mask M (step S106), and performs the attachment inspection process of step S107 again. If the difference between the height of the mask M and the height of the dust-proof film 102 is not equal to or less than the threshold value even if steps S106 and S107 are repeated a plurality of times, the controller 151a stops the process.
When the difference between the height of the mask M and the height of the dust-proof pellicle 102 is equal to or less than the threshold value (yes in step S204), the control unit 151a determines that the dust-proof pellicle assembly 100 is attached to the mask M and releases the grip of the dust-proof pellicle assembly 100 (step S108, see fig. 8). In step S108, the controller 151a controls the actuator 22b to move the dust-proof pellicle assembly holding member 21 from the insertion position to the retracted position so that the tip of the dust-proof pellicle assembly holding member 21 does not abut on the groove 101 d.
Subsequently, the control unit 151a ends the series of processing shown in fig. 8. When the series of processes is completed, the controller 151a presses the four corners of the dustproof thin film assembly 100 toward the mask M by using a pressing portion (not shown) to attach the dustproof thin film assembly 100 to the mask M (so-called final attachment).
Fig. 10 and 11 are schematic diagrams showing the case of the inspection shown in step S107. The broken line in fig. 10 indicates the case of the dustproof thin film assembly frame 101 when the dustproof thin film 102 is not provided, and the solid line in fig. 10 indicates the case of the dustproof thin film assembly frame 101 when the dustproof thin film 102 is provided. When the pellicle 102 is provided to the pellicle frame 101, the central portion of each side of the pellicle frame 101 enters inside when viewed along the center axis of the pellicle frame 101 due to the tension of the pellicle 102. In the present embodiment, the measurement unit 30 is provided near the upper side and near the left and right ends of the housing 10 (not shown in fig. 10), and the measurement unit 30 measures the height of the dustproof thin film assembly 100 near the upper end and near the left and right ends, so that the height of the dustproof thin film 102 can be measured by the measurement unit 30 at the second position even if the dustproof thin film assembly frame 101 is deformed.
Further, as shown in fig. 11, it is assumed that the following disadvantages occur: when the dustproof thin film assembly 100 is attached to the mask M, one end (for example, the + x-side end) of the dustproof thin film assembly 100 is attached, and the other end (for example, the-x-side end) of the dustproof thin film assembly 100 is not attached. In the present embodiment, the measurement units 30 measure the heights of the dust-proof pellicle assembly 100 in the vicinity of the upper end and the left and right ends, and therefore, if the above-described problem occurs, the difference between the height of the mask M and the height of the dust-proof pellicle 102 becomes equal to or less than the threshold value in one measurement unit 30 (here, the measurement unit 30 on the + x side), but the difference between the height of the mask M and the height of the dust-proof pellicle 102 does not become equal to or less than the threshold value in the other measurement unit 30 (here, the measurement unit 30 on the-x side). Therefore, the above-described problem can be detected by providing the measurement portion 30 provided in the upper frame portion 13 in the vicinity of the vertical frame portion 11 and providing the measurement portion 30 provided in the upper frame portion 14 in the vicinity of the vertical frame portion 12.
According to the present embodiment, it is possible to confirm that the pellicle 100 is reliably attached to the mask M. Therefore, it is possible to prevent the dust-proof pellicle assembly 100 from being dropped by releasing the dust-proof pellicle assembly 100 in a state where the dust-proof pellicle assembly 100 is not reliably attached to the mask M.
For example, when the attachment state of the dust-proof pellicle assembly 100 is checked by the coordinates of a motor or the like that moves the housing 10, the positional relationship between the dust-proof pellicle assembly 100 and the mask M may be different from expected due to damage or the like of the dust-proof pellicle assembly holding member 21, and the dust-proof pellicle assembly 100 may be released in a state where the dust-proof pellicle assembly 100 is not attached to the mask M. Particularly in the case of a large-sized pellicle 100, a large loss of about 1000 million circles may occur when a single pellicle 100 is dropped. Therefore, as in the present embodiment, by confirming that the pellicle 100 is reliably attached to the mask M, wasteful cost can be reduced.
Further, according to the present embodiment, since the distance between the surface Ma of the mask M and the pellicle 100 is actually measured to check the attached state, even when the pellicle holding apparatus 1 handles pellicle frames 101 having various thicknesses, it is possible to easily cope with the situation.
Further, according to the present embodiment, the upper end portion of the dust-proof pellicle assembly 100 is attached to the mask M by moving the frame body 10, that is, the dust-proof pellicle assembly 100 in parallel while being inclined at a slight angle with respect to the vertical direction to press the adhesive member 103 against the mask M, and whether or not the dust-proof pellicle assembly 100 is attached to the mask M is determined based on the results of measuring the height of the surface Ma and the height of the dust-proof pellicle 102 in the vicinity of the upper ends of the mask M and the dust-proof pellicle assembly 100, so that the attached state of the dust-proof pellicle assembly 100 can be accurately determined.
In the present embodiment, the dustproof thin film assembly holding apparatus 1 includes two measurement portions 30, and the two measurement portions 30 are provided near the upper side and both left and right ends of the housing 10, but the positions and the number of the measurement portions 30 are not limited to this. The two measurement portions 30 may be provided near the upper ends of the vertical frame portions 11 and 12 instead of the upper frame portions 13 and 14. In this case, the actuator 33 may move the ultrasonic sensor 31 and the reflection plate 32 in the x direction (horizontal direction) between the first position and the second position.
For example, the dustproof thin film module holding apparatus 1 may have 3 measurement units 30, and the 3 measurement units 30 may be provided in the upper frame portions 13 and 14 and the lower end portion 15 a. By measuring the height of the dustproof film 102 in the vicinity of the upper and lower ends of the dustproof film assembly 100, whether or not the dustproof film assembly 100 is attached can be confirmed more reliably. In this case, when the pellicle 100 is brought into contact with the mask M, the distance between the lower surface 101b on the upper end side and the mask M is shorter than the distance between the lower surface 101b on the lower end side and the mask M, and therefore, in steps S203 and S204, the threshold value on the lower end side is set to be smaller than the threshold value on the upper end side. The measurement portion 30 provided at the lower end portion 15a is preferably disposed at a substantially central portion of the lower end portion 15a in the x direction.
For example, the measurement unit 30 may be provided not on the upper frame portions 13 and 14 but on the upper end portion 15 b. Since the measuring portion 30 is provided at the upper end portion 15b, the height of the pellicle 102 can be measured at a position near the upper end of the pellicle assembly 100. When there are 1 measurement unit 30 provided at the upper end portion 15b, the measurement unit 30 is desirably provided near the center of the housing 10. In order to detect a state in which a part (for example, the + x end) of the pellicle 100 is attached to the mask M and the other part (for example, the-x end) is not attached to the mask M, it is desirable that the measurement unit 30 be provided near the upper and left and right ends of the frame 10.
In the present embodiment, the frame body 10 is mainly provided so that the vertical frame portions 11, 12 and the upper frame portions 13, 14 are movable with respect to the frame 15 in order to enable gripping of dust-proof pellicle assemblies 100 of various sizes, but the vertical frame portions 11, 12 and the upper frame portions 13, 14 are not essential. For example, in the case where the frame 10 can hold 1 kind of the dustproof thin film assembly 100, only the frame 15 may be provided. In this case, the measurement unit 30 is preferably provided near two corners located above the frame 15 in order to measure a point near the upper side and both left and right ends of the pellicle assembly 100.
While the embodiments of the present invention have been described above with reference to the drawings, the specific configuration of the present invention is not limited to the embodiments, and design changes and the like are included within the scope not departing from the gist of the present invention. Those skilled in the art can appropriately change, add, or convert the respective elements of the embodiments.
In the present invention, "substantially" means not only the case of being strictly identical but also the concept of including errors and variations to the extent that identity is not lost. For example, the substantial parallelism is not limited to the case of the strict parallelism, but represents a concept including an error of about several degrees, for example. For example, when simply expressed as parallel or orthogonal, the term includes not only the case of being strictly parallel or orthogonal, but also the case of being substantially parallel or substantially orthogonal. In the present invention, "vicinity" refers to a region including a certain range (which can be arbitrarily specified) in the vicinity of the reference position. For example, when a vicinity of a is referred to, it means a certain range of region in the vicinity of a, and may or may not include a.
Description of reference numerals:
1: dustproof thin film assembly frame holding device
10: frame body
11. 12: longitudinal frame part
13. 14: upper frame part
15: frame
15 a: lower end part
15 b: upper end part
16: driving part
20: dustproof thin film assembly holding part
21: dust-proof film assembly holding member
22: drive member
22 a: rod
22 b: actuator
30: measurement unit
31: ultrasonic sensor
32: reflecting plate
32 a: reflection part
33: actuator
100: dustproof film assembly
101: dustproof pellicle assembly frame
101 a: upper surface of
101 b: lower surface
101 c: peripheral surface
101 d: trough
101 e: hollow part
102: dustproof film assembly
103: adhesive member
151：CPU
151 a: control unit
152：RAM
153：ROM
154: input/output interface
155: communication interface
156: media interface
161: input/output device
162: network
163: a storage medium.
Claims (7)
1. A dustproof thin film assembly frame holding device for holding a dustproof thin film assembly and pasting the dustproof thin film assembly on a substantially plate-shaped mask which is held in a substantially vertical direction, the dustproof thin film assembly frame holding device comprising: a substantially hollow cylindrical pellicle assembly frame; a dustproof thin film which is arranged on a first surface of the dustproof thin film assembly frame approximately orthogonal to the outer peripheral surface in a mode of covering the hollow part of the dustproof thin film assembly frame; and an adhesive member provided on a second surface substantially parallel to the first surface,
the dustproof thin film assembly frame holding device comprises:
a frame body which is a frame-shaped member formed by combining a plurality of bar materials into a substantially rectangular shape;
a pellicle holding section provided in the frame body and holding the outer peripheral surface of the pellicle frame;
a measuring unit provided in the housing; and
a control unit for controlling the frame, the pellicle unit holding unit, and the measurement unit,
the measurement portion is provided so as to be movable between a first position where the vicinity of the tip overlaps the mask and a second position where the vicinity of the tip overlaps the pellicle frame,
the dust-proof pellicle unit holding part and the measuring part are provided at different positions when viewed from a direction substantially orthogonal to the extending direction of the rod material,
the control unit may be configured to place the measurement unit at the first position to measure a first distance, which is a distance to a surface of the mask, and to move the measurement unit to the second position to measure a second distance, which is a distance to the dust pellicle, in a state where the dust pellicle unit holding unit holds the dust pellicle unit frame and the frame body is extended in a substantially vertical direction so that the adhesive member is brought into contact with the mask.
2. The dustproof pellicle assembly frame holder of claim 1,
the dust-proof pellicle unit holding part has a dust-proof pellicle unit holding member provided to be movable in a horizontal direction or a vertical direction between an abutment position abutting on the outer peripheral surface and a retracted position not abutting on the outer peripheral surface,
the frame body can move along the horizontal direction,
the control unit may arrange the dustproof thin film assembly holding member to the abutment position to hold the dustproof thin film assembly frame, move the frame in a horizontal direction to make the adhesive member abut against the mask in a state where the frame is extended in a substantially vertical direction, arrange the measurement unit to the first position to measure the first distance, move the measurement unit to the second position to measure the second distance, and move the dustproof thin film assembly holding member from the abutment position to the retracted position when a difference between the first distance and the second distance is equal to or less than a threshold value.
3. The pellicle frame holder of claim 1 or 2,
the measurement unit includes a first measurement unit disposed near an upper side and near a left end of the housing and a second measurement unit disposed near an upper side and near a right end of the housing in a posture when the adhesive member is brought into contact with the mask.
4. The pellicle frame holder of any of claims 1-3, where,
the frame body has a first vertical frame portion and a second vertical frame portion extending substantially vertically in a substantially rod shape and an upper frame portion extending substantially horizontally in the vicinity of upper ends of the first vertical frame portion and the second vertical frame portion in a posture when the adhesive member is brought into contact with the mask,
the first vertical frame portion and the second vertical frame portion are movable along an extending direction of the upper frame portion,
the upper frame portion is movable along an extending direction of the first vertical frame portion and the second vertical frame portion,
the dustproof thin film assembly holding part is arranged on the first vertical frame part and the second vertical frame part,
the measurement unit is provided in the upper frame portion.
5. The dustproof pellicle assembly frame holder of claim 4,
the frame body has a lower frame portion extending substantially horizontally in the vicinity of lower ends of the first vertical frame portion and the second vertical frame portion,
the measurement unit has a third measurement unit provided in the lower frame portion.
6. The pellicle frame holder of any of claims 1-5, where,
when the adhesive member is brought into contact with the mask, the frame is inclined such that a distance between the mask and the second surface on the upper end side is shorter than a distance between the mask and the second surface on the lower end side.
7. A method of holding a pellicle frame, the method comprising holding a pellicle and attaching the pellicle to a substantially plate-shaped mask held in a substantially vertical direction, the pellicle comprising: a substantially hollow cylindrical pellicle assembly frame; a dustproof thin film which is arranged on a first surface of the dustproof thin film assembly frame approximately orthogonal to the outer peripheral surface in a mode of covering the hollow part of the dustproof thin film assembly frame; and an adhesive member provided on a second surface substantially parallel to the first surface,
in the dust pellicle assembly frame holding method,
a dust-proof pellicle holding member provided to the frame so as to be movable in the horizontal direction is disposed at an abutment position with which the outer peripheral surface abuts to hold the dust-proof pellicle frame,
moving the frame body in parallel while holding the pellicle frame so that the adhesive member comes into contact with the mask,
a measuring unit disposed in the housing is disposed at a first position near a tip end thereof, the first position overlapping the mask, and measures a first distance that is a distance to a surface of the mask,
moving the measurement portion to a second position where the measurement portion overlaps the pellicle frame in the vicinity of the distal end to measure a second distance which is a distance to the pellicle,
when the difference between the first distance and the second distance is equal to or less than a threshold value, the dust-proof film unit holding member can be moved from the contact position to a retracted position where the dust-proof film unit holding member does not contact the outer peripheral surface.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018010999A JP6921412B2 (en) | 2018-01-25 | 2018-01-25 | Pellicle frame gripping device and pellicle frame gripping method |
| JP2018-010999 | 2018-01-25 | ||
| PCT/JP2019/001668 WO2019146547A1 (en) | 2018-01-25 | 2019-01-21 | Pellicle frame gripping device and pellicle frame gripping method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111630453A true CN111630453A (en) | 2020-09-04 |
| CN111630453B CN111630453B (en) | 2023-08-25 |
Family
ID=67394622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201980009593.9A Active CN111630453B (en) | 2018-01-25 | 2019-01-21 | Dustproof film assembly frame holding device and dustproof film assembly frame holding method |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6921412B2 (en) |
| KR (1) | KR20200108280A (en) |
| CN (1) | CN111630453B (en) |
| TW (1) | TWI798327B (en) |
| WO (1) | WO2019146547A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022101135A (en) | 2020-12-24 | 2022-07-06 | 株式会社ブイ・テクノロジー | Pellicle frame gripping device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05281710A (en) * | 1992-04-03 | 1993-10-29 | Tosoh Corp | Manufacture of pellicle |
| JPH0683041A (en) * | 1992-09-03 | 1994-03-25 | Fujitsu Ltd | Method and device for inspecting adhesion state of pellicle |
| JP2006163035A (en) * | 2004-12-08 | 2006-06-22 | Dainippon Printing Co Ltd | Large pellicle, method for carrying pellicle, pellicle case, and pellicle transfer device |
| CN101268349A (en) * | 2003-10-06 | 2008-09-17 | 凸版光掩膜公司 | System and method for automatically mounting a pellicle assembly on a photomask |
| CN106168735A (en) * | 2015-05-18 | 2016-11-30 | 信越化学工业株式会社 | Dustproof film component and its installation method |
| CN107112271A (en) * | 2015-02-19 | 2017-08-29 | 株式会社 V 技术 | Pellicle frame grasping device and pellicle frame holding method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111458973B (en) * | 2014-11-17 | 2024-02-09 | Asml荷兰有限公司 | Pellicle frame attachment apparatus |
-
2018
- 2018-01-25 JP JP2018010999A patent/JP6921412B2/en active Active
-
2019
- 2019-01-07 TW TW108100529A patent/TWI798327B/en active
- 2019-01-21 KR KR1020207019887A patent/KR20200108280A/en not_active Application Discontinuation
- 2019-01-21 CN CN201980009593.9A patent/CN111630453B/en active Active
- 2019-01-21 WO PCT/JP2019/001668 patent/WO2019146547A1/en active Application Filing
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05281710A (en) * | 1992-04-03 | 1993-10-29 | Tosoh Corp | Manufacture of pellicle |
| JPH0683041A (en) * | 1992-09-03 | 1994-03-25 | Fujitsu Ltd | Method and device for inspecting adhesion state of pellicle |
| CN101268349A (en) * | 2003-10-06 | 2008-09-17 | 凸版光掩膜公司 | System and method for automatically mounting a pellicle assembly on a photomask |
| JP2006163035A (en) * | 2004-12-08 | 2006-06-22 | Dainippon Printing Co Ltd | Large pellicle, method for carrying pellicle, pellicle case, and pellicle transfer device |
| CN107112271A (en) * | 2015-02-19 | 2017-08-29 | 株式会社 V 技术 | Pellicle frame grasping device and pellicle frame holding method |
| CN106168735A (en) * | 2015-05-18 | 2016-11-30 | 信越化学工业株式会社 | Dustproof film component and its installation method |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2019146547A1 (en) | 2019-08-01 |
| KR20200108280A (en) | 2020-09-17 |
| CN111630453B (en) | 2023-08-25 |
| TW201933512A (en) | 2019-08-16 |
| JP6921412B2 (en) | 2021-08-18 |
| TWI798327B (en) | 2023-04-11 |
| JP2019128501A (en) | 2019-08-01 |
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