JP2000076611A - Device and method for mounting - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable mounting of high accuracy by applying a photo setting adhesive material on a prescribed position of a bonded part of a first work, holding or sucking and transferring a second work to place it on the bonded part of the first work, and correcting alignment error, based on an attitude information of the second work and based on a positional information of the bonded part of the first work. SOLUTION: An upper CCD camera 12 detects its attitude information by an amount of misalignment from a standard position of a core slider held by a slider chuck 10, and a lower CCD camera 13 obtains a positional information of a flexure plate, based on a pivot through an amount of deviation from a standard position of dimple. A correction and control section issues a correction demand to a motor driving section after calculating an amount of correction of alignment, based on the attitude information of the core slider and the positional information of the flexure plate, and then drives a work table 4, moves a gimbals set on the work table 4 in the direction of X-Y axis and angle of θ, and thus corrects the alignment error.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a mounting device and a mounting method, and more particularly to a mounting device and a mounting method for mounting a core slider on a gimbal constituting a magnetic head of a hard disk drive.

[0002]

2. Description of the Related Art Conventionally, when a core slider, which is a component of a magnetic head, is mounted on a gimbal, a gimbal having a bonded portion is fixed to a jig board, and an adhesive is applied to the bonded portion of the gimbal by a dispenser. After that, the core slider is sucked and transferred from the core slider storage portion by the chuck of the robot head.

[0003] The core slider is once mounted on a positioning unit, and the amount of displacement of the gimbal fixed to the jig board is detected by image processing. This is corrected by an actuator, and the alignment between the core slider and the gimbal is performed with high precision. It is performed. The position correction method is performed by fixing a gimbal or a core slider on a high-precision XYθ actuator and moving the same by an amount of deviation obtained from image processing.

The core slider is attracted by the chuck of the robot head and is transferred to the bonded portion of the gimbal. Then, the core slider is brought into contact with the bonded portion in the attracted state, and is irradiated with UV light from the spot irradiating portion to be bonded. The agent is cured.

[0005]

By the way, the magnetic head has a mechanism in which a pivot (protrusion) exists on the back surface of the flexure plate, and a compliance is established with the pivot as a fulcrum so as to be parallel to the disk surface. The reference that requires alignment accuracy is the pivot.

However, since the pivot is hidden behind the flexure plate, there is a problem that when the center of the pivot is predicted from features such as the outer shape of the gimbal, the component accuracy affects the positioning accuracy.

In particular, with the improvement of the performance of magnetic heads today, the necessity of predicting the pivot with high accuracy has been increased.

Further, since the gimbal posture when the core slider and the gimbal are aligned cannot be confirmed, the displacement when the core slider is pressed against the gimbal and the mechanical accuracy when the actuator is moved affect the alignment accuracy. There is a problem that.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has as its object to mount a core slider with high precision in a magnetic head having a pivot on the back surface of a flexure plate. It is an object of the present invention to provide a mounting device and a mounting method that can perform the mounting.

The above and other objects and novel features of the present invention will become apparent from the description of the present specification and the accompanying drawings.

[0011]

In order to achieve the above object,
The mounting apparatus according to the present invention has at least one or more parts to be bonded, a first work having a positioning marker on the back surface indicating the position of the part to be bonded is set via a jig board, and A table for displacing the work No. 1 in the XY axis direction and the θ angle direction and transferring the work to a predetermined position;
A dispenser for applying a light-curable adhesive to a predetermined portion of a part to be bonded of the work, a work storage part for storing at least one or more second works, and the second storage part extracted from the work storage part. And a chuck unit for transferring the work by nipping or sucking the work and placing the work on the bonded part of the first work and the adhesive applied by the dispenser.
A spot irradiator for irradiating a V-ray, posture detecting means for detecting a holding posture of the second work above the second work held or sucked by the chuck, and set on the table; A position detecting means for detecting a position of a portion to be bonded of the first work from the positioning marker below the first work, and the second position obtained by the position detecting means and the position detecting means; 2 based on the posture information of the second work and the position information of the portion to be bonded of the first work, and the second work immediately before bonding to the portion to be bonded of the first work by curing of the adhesive. The present invention is characterized in that there is provided an alignment correcting means for correcting an alignment error between the bonded portion of the first work and the second work.

Further, in the mounting apparatus according to the present invention, a gimbal having a portion to be bonded and having a positioning marker indicating the position of the portion to be bonded is set via a jig board on the back surface.
Displace the gimbal in the XY axis direction and the θ angle direction,
A table for transferring to a predetermined position, a dispenser for applying a light-curable adhesive to a predetermined portion of the bonded portion of the gimbal, a core slider housing for housing at least one core slider, and a core slider housing The core slider extracted from the section is pinched or sucked and transferred,
A slider chuck portion to be mounted on the bonded portion of the gimbal; and an adhesive applied by the dispenser to the adhesive.
A spot irradiator for irradiating a V ray, and above the core slider sandwiched by the slider chuck,
Attitude detecting means for detecting a holding attitude of the core slider, position detecting means located below the gimbal set on the table and detecting the position of the bonded portion of the gimbal from the positioning marker, and the attitude Immediately before the core slider is bonded to the gimbal to be bonded by the curing of the adhesive, based on the attitude information of the core slider and the position information of the bonded part of the gimbal obtained by the detecting means and the position detecting means. And a positioning correction means for correcting a positioning error between the bonded portion of the gimbal and the core slider.

Further, the attitude detecting means and the position detecting means are optical cameras which detect the attitude of the core slider and the position of the bonded portion of the gimbal by an image.

Further, a laser sensor is used as the attitude detecting means and the position detecting means, and the attitude of the core slider and the position of the bonded portion of the gimbal are detected.

Further, a projection is formed at a predetermined position on the upper surface of the gimbal, and a cantilevered flexure plate to which the core slider is adhered is mounted on the projection, and the gimbal is located at the same position as the projection. The positioning marker is provided on the back surface of the gimbal or on the back surface of the gimbal from which the position of the projection can be estimated.

Further, the positioning marker is a dimple formed at the time of processing the projection.

Further, the mounting method according to the present invention includes a step of setting a gimbal on a table via a jig board;
A step of applying an adhesive to a predetermined portion of the flexure plate based on positional information of the projection of the gimbal obtained by detecting the positioning marker of the gimbal; and a step of applying a core slider to the flexure via the adhesive. A step of pressing and placing on a plate, a step of detecting the position information of the core slider by the position detecting means, and a step of detecting the position information of the projection of the gimbal by the position detecting means; Correcting the positioning error between the core slider and the gimbal protrusion immediately before bonding the core slider on the flexure plate, based on the information and the position information of the gimbal protrusion, And curing the adhesive.

Accordingly, the present invention provides image recognition when the core slider (second work) is mounted on the bonded portion (flexure plate) of the gimbal (first work) or posture information of the core slider by a laser sensor. Based on the position information of the gimbal to be bonded, the core slider and the gimbal to be bonded are comprehensively aligned, and after correcting the alignment error between the core slider and the gimbal to be bonded, Since the adhesive is cured and the core slider is mounted, there are few error factors in the transfer mechanical system, and the mounting accuracy of the core slider is improved.

In this case, the position information of the bonded portion of the gimbal is obtained by image recognition of a positioning marker or by a laser sensor, and even in the case of a magnetic head having a pivot (projection) on the back surface of the flexure plate, position detection is performed. By detecting the positioning marker on the back surface of the gimbal by the means, the position of the flexure plate with respect to the pivot is reliably detected.

[0020]

Embodiments of the present invention will be described below in detail with reference to the drawings. In describing the embodiments, those having the same functions will be denoted by the same reference numerals.

FIG. 1 is a front view of a mounting apparatus according to an embodiment of the present invention. FIG. 2 is a configuration diagram of a core slider and gimbal alignment correction unit in the mounting apparatus according to the embodiment of the present invention. 3 is a plan view of a magnetic head according to an embodiment of the present invention, FIG. 4 is a sectional view taken along line AA of FIG. 3, FIG. 5 is a sectional view taken along line BB of FIG. 3, and FIG. FIG. 7 is a perspective view of an alignment portion between a core slider and a gimbal in the mounting device according to the embodiment of the present invention, and FIG. 7 is a diagram showing the XY axis direction and the θ angle direction of the gimbal in the mounting device according to the embodiment of the present invention; FIG. 8 is a perspective view of a main part of a suction head of a mounting device according to another embodiment of the present invention.
Is a cross-sectional view taken along the line CC of FIG. 8, and FIG. 10 is a plan view of a main part of a suction head of a mounting apparatus according to another embodiment of the present invention.

The mounting device shown in FIG. 1 is provided with a work exchanging section 2 for carrying in and out a work having at least one or more parts to be bonded on the leg side 1 on the worker side.

A work table 4 on which the work is set via a jig board 3 and which transfers the work in the XY axis direction and the θ angle direction is provided downstream of the work replacement section 2. Is provided with a work clamper 5 for fixing the work.

Above the work table 4, a dispenser 6 for applying a photocurable adhesive to a predetermined portion of the work to be bonded and the work posture of the work set on the work table 4 are optically recognized. The workpiece to be bonded and the core slider 2 based on the workpiece shape recognition information
An optical camera 7 corresponding to a work form recognition means for correcting a positioning error with respect to the work 4 (see FIG. 3) is provided. The dispenser 6 applies an adhesive to the end of the bonded portion of the work based on the work shape recognition information from the work shape recognition means (optical camera 7).

A core slider accommodating portion 8 on which a predetermined number of core sliders 24 are neatly accommodated is provided on the leg base 1 on the side opposite to the work exchanging portion 2. The core slider accommodating portion 8 is provided with a core table. 9 allows movement in the XY axis directions.

In the vicinity of the core slider accommodating portion 8, there is provided a slider chuck 10 for sandwiching and extracting the core slider 24 from the core slider accommodating portion 8 in a horizontal direction by a pair of claw portions 10a, 10a operated by air pressure. Have been.

An upper CCD camera 12 for recognizing the holding posture of the core slider 24 by the slider chuck 10 is disposed above the slider chuck 10, and a lower CCD camera 13 for detecting the position of a workpiece to be bonded is provided below the slider chuck 10.
Are arranged so as to face the upper CCD camera 12.

In the vicinity of the upper CCD camera 12, a spot irradiator 11 for irradiating the adhesive applied from the dispenser 6 with UV light is provided.

As shown in FIG. 2, the work table 4 is connected to an alignment correction unit 30 for correcting an alignment error between the bonded part of the work and the core slider 24.

The alignment correction unit 30 has a correction control unit 14, which includes the upper CCD camera 12,
The lower CCD camera 13 and the motor drive unit 15 that drives the work table 4 are connected.

The correction control unit 14 receives the attitude information of the core slider 24 and the position information of the workpiece to be bonded, and calculates the position correction amount of the core slider 24 and the workpiece to be bonded based on the information. Correction control unit 14
The motor drive unit 15 drives the work table 4 in accordance with the correction command from.

The work described above is a gimbal 21 constituting the magnetic head 20 shown in FIGS. 3 to 5. In the gimbal 21, most of the frame portion 21b is welded with the frame portion 21b overlapped on the load beam 21a. Is provided with a notch 22 punched in an inverted U-shape, and a cantilevered flexure plate 23 is provided at the center of the notch 22.
Are formed, and the core slider 24 is bonded onto the flexure plate 23.

A pivot 25 is formed at the tip of the load beam 21a, a flexure plate 23 is placed on the pivot 25, and a dimple as a positioning marker is provided at the same position as the pivot 25 on the back surface of the load beam 21a. 26 are formed simultaneously with the processing of the pivot 25. In this case, the positioning marker is the pivot 25
The position is not limited to the dimple 26 as long as the position can be estimated.

Next, a mounting method using such a mounting device will be described (see FIG. 6).

First, the operator sets the gimbal 21 on the jig board 3. The jig board 3 is lifted by a lifter (not shown) and placed on the work table 4.

Lower the work clamper 5 and move the gimbal 2
1 is fixed to the work table 4. The presence / absence and posture of the gimbal 21 set on the work table 4 are recognized by the optical camera 7 to obtain work shape recognition information. In this case, the lower CCD camera 13 may be used to determine the amount of deviation from the position of the dimple 26 of the gimbal 21 with respect to the reference position to obtain the work form recognition information.

An adhesive is applied from the dispenser 6 onto the flexure plate 23, which is the bonded portion of the gimbal 21, based on the work form recognition information from the optical camera 7. At this time, the adhesive is previously thrown away by the dispenser 6.

The core slider 24 is moved to the slider chuck 10
The flexure plate 2 of the gimbal 21 extracted from the core slider accommodating portion 8 and set on the work table 4
3 is pressed and placed via an adhesive.

The upper CCD camera 12 detects the attitude information of the core slider 24 from the amount of deviation of the core slider 24 held by the slider chuck 10 from the reference position, and the lower CCD camera 13 simultaneously detects the dimples 26.
The position information of the flexure plate 23 based on the pivot 25 is detected from the amount of deviation from the reference position.

The correction control unit 14 calculates a correction amount for alignment based on the attitude information of the core slider 24 and the position information of the flexure plate 23, and then issues a correction command to the motor drive unit 15 to drive the work table 4. Then, by moving the gimbal 21 set on the work table 4 in the XY axis direction and the θ angle direction (see FIG. 7), the positioning error between the core slider 24 and the flexure plate 23 is corrected. Thereby, the core slider 24 and the flexure plate 23 are aligned with high accuracy.

Next, UV irradiation is performed from the spot irradiation section 13 to cure the adhesive. In this case, the number and the irradiation angle of the spot irradiators 11 differ depending on the shape and characteristics of the target core slider 24.

Thereafter, the core slider 24 is released from the slider chuck 10, and the gimbal 21 on which the mounting of the core slider 24 has been completed is returned to the work table 4, and is carried out from the work replacement unit 2.

As described above, according to the mounting apparatus of the present embodiment, the core slider 24 and the pivots are determined based on the displacement of the core slider 24 and the dimple 26 when the core slider 24 is mounted on the flexure plate 23. Since the overall positioning of the flexure plate 23 based on image recognition with reference to 25 can be performed and the positioning error between the core slider 24 and the flexure plate 23 is corrected, the adhesive is cured and the core slider 24 is mounted. In addition, the error factor of the transfer mechanical system is small, and the mounting accuracy of the core slider 24 is improved.

Further, since the position of the core slider 24 and the dimple 26 are individually recognized, the reference position required for the function of the product coincides with the position recognition point of each component, so that the accuracy of the product is not affected.

Furthermore, since the core slider 24 and the dimple 26 are individually image-recognized by the upper CCD camera 12 and the lower CCD camera 13, the optical systems of the core slider 24 and the dimple 26 can be individually designed, and good image recognition can be performed. Easy to make conditions.

The upper CCD camera 12 and lower C
Since the CD cameras 13 are arranged to face each other, the calibration of each image can be performed based on the same object, so that the relative accuracy between the images can be easily guaranteed.

As a mounting device of another embodiment, a laser sensor may be used instead of the upper CCD camera 12 and the lower CCD camera 13 to detect the positions of the core slider 24 and the gimbal 21.

Although a light-curable adhesive is used for the mount of the core slider 24, a thermosetting adhesive may be used instead of the light-curable adhesive, and heat-cured by a heating means.

In this embodiment, a pair of claws 10a, 1
Although the core slider 24 is horizontally held and transported by the slider chuck 10 having 0a, the core slider 24 is vacuum-adsorbed and transported by the slider chuck 40 shown in FIGS. 8 and 9 instead. Is also good.

Here, on the back surface from the tip of the slider chuck 40, a concave portion 43 in which the core slider 24 is fitted in the same shape as the outer shape of the core slider 24 is formed. A pair of notches 41 are formed so that diagonal corners of the fitted core slider 24 are exposed.
Is formed, and the posture of the core slider 24 at the time of suction is changed to the upper C
It is designed to be surely detected by the CD camera 12.

A vacuum path 42 is formed in the longitudinal direction of the inside of the slider chuck 40, and a suction portion 42a at the tip of the vacuum path 42 is opened in a concave portion 43, and the core slider 24 is suctioned to the suction portion 42a.

The slider chuck 50 shown in FIG. 10 sucks and transfers the core slider 24 in the same manner as the slider chuck 40, and a pair of penetrating holes is provided so that diagonal corners of the core slider 24 at the time of suction are exposed. A hole 51 is formed so that the attitude of the core slider 24 by the upper CCD camera 12 is reliably detected.

Further, a core slider positioner (not shown) having a positioning claw for positioning the core slider 24 in the X-axis direction (or the Y-axis direction) is provided in the mounting apparatus of the present embodiment. After the core slider 24 is extracted from the core slider accommodating portion 8 by the slider chucks 10, 40 or 50, the core slider 24 is attracted to the core slider positioner, and is sandwiched and aligned by the positioning claws in the X-axis direction (or the Y-axis direction). Thereafter, the core slider 24 may be transferred to the mount position by the slider chuck 10, 40 or 50.

[0054]

As will be understood from the above description, according to the present invention, the attitude information of the core slider when the core slider is mounted on the workpiece to be bonded and the position information of the workpiece to be bonded by the positioning marker are provided. After correcting the positioning error between the core slider and the workpiece to be bonded based on the above, the adhesive is cured and the core slider is mounted. Accuracy can be improved.

Further, since the position of the core slider and the positioning marker are individually recognized, the reference position required for the function of the product coincides with the position recognition point of each component.
The effect on product accuracy can be avoided.

Furthermore, since the core slider and the positioning marker are individually recognized by the image or the laser sensor, it is possible to design the optical system of the core slider and the positioning marker individually, and to obtain good image recognition conditions.

[Brief description of the drawings]

FIG. 1 is a front view of a mounting device according to an embodiment of the present invention.

FIG. 2 is a configuration diagram of a correction unit for aligning a core slider and a gimbal in the mounting apparatus according to the embodiment of the present invention;

FIG. 3 is a plan view of a magnetic head according to the embodiment of the invention.

FIG. 4 is a sectional view taken along line AA of FIG. 3;

FIG. 5 is a sectional view taken along line BB of FIG. 3;

FIG. 6 is a perspective view of an alignment portion between a core slider and a gimbal in the mounting device according to the embodiment of the present invention.

FIG. 7 is a view showing the XY axis direction and the θ angle direction of the gimbal in the mounting device according to the embodiment of the present invention.

FIG. 8 is a perspective view of a main part of a suction head of a mounting device according to another embodiment of the present invention.

FIG. 9 is a sectional view taken along the line CC of FIG. 8;

FIG. 10 is a plan view of a main part of a suction head of a mounting device according to another embodiment of the present invention.

[Explanation of symbols]

 Reference Signs List 1 Leg base 2 Work changing part 3 Jig board 4 Work table 5 Work clamper 6 Dispenser 7 Optical camera 8 Core slider accommodating part 9 Core table 10 Slider chuck 10a Claw part 11 Spot irradiation part 12 Upper CCD camera 13 Lower CCD camera 14 Correction Control part 15 Motor drive part 20 Magnetic head 21 Gimbal 21a Load beam 21b Frame part 22 Notch part 23 Flexure plate 24 Core slider 25 Pipot (protrusion part) 26 Dimple (positioning marker) 30 Positioning correction part

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Mitsuo Iwadate 4-3-1 Yashiki, Narashino-shi, Chiba Seiko Seiki Co., Ltd. (72) Inventor Yoshifumi Asano 4-3-1 Yashiki, Narashino-shi, Chiba F-term (reference) in Koseiki Co., Ltd. 5D093 AA05 AC07 FA21 HB13 HB29 HB36 HC20

Claims (7)

[Claims] A first work having at least one or more parts to be bonded and a positioning marker on a back surface indicating a position of the part to be bonded is set via a jig board; Is displaced in the XY axis direction and the θ angle direction,
A table for transferring to a predetermined position, a dispenser for applying a light-curable adhesive to a predetermined portion of the bonded portion of the first work, a work storage unit for storing at least one or more second works, The second work extracted from the work accommodating part is transported while being pinched or adsorbed, and is mounted on the bonded part of the first work, and the adhesive applied by the dispenser is attached to the chuck. A spot irradiator for irradiating UV light, posture detecting means for detecting a holding posture of the second work above the second work held or sucked by the chuck portion, and set on the table A position detecting means for detecting the position of the portion to be bonded of the first work from the positioning marker below the first work, the posture detecting means and the position detecting means; Based on the posture information of the second work and the position information of the part to be bonded of the first work obtained by the dispensing means, the bonding of the first work to the second work by the curing of the adhesive is performed. And a positioning correction means for correcting a positioning error between the bonded portion of the first work and the second work immediately before bonding to the portion. 2. A gimbal having a portion to be bonded and having a positioning marker on the back surface indicating the position of the portion to be bonded is set via a jig board, and the gimbal is moved in the XY axis direction and θ.
A table which is displaced in the angular direction and is transferred to a predetermined position; a dispenser which applies a light-curable adhesive to a predetermined portion of the bonded portion of the gimbal; and a core slider housing portion which houses at least one or more core sliders A slider chuck portion for holding and adsorbing the core slider extracted from the core slider accommodating portion and transporting the core slider and mounting the core slider on the bonded portion of the gimbal; and applying UV to the adhesive applied from the dispenser. A spot irradiating unit that irradiates a light beam; an attitude detecting unit that is located above the core slider sandwiched by the slider chuck unit and detects a sandwiching attitude of the core slider; and is below the gimbal set on the table. Position detecting means for detecting the position of the bonded portion of the gimbal from the positioning marker; Means and the position information of the core slider to be bonded obtained by the position detecting means and the position information of the bonded part of the gimbal, the core slider being hardened by the adhesive immediately before the core slider is bonded to the bonded part of the gimbal. A mounting device comprising: a positioning correction unit configured to correct a positioning error between the bonded portion of the gimbal and the core slider. 3. The optical camera according to claim 2, wherein the attitude detecting means and the position detecting means are optical cameras which detect the attitude of the core slider and the position of the bonded portion of the gimbal by an image. Mounting device. 4. The mounting device according to claim 2, wherein a laser sensor is used as the attitude detecting means and the position detecting means, and the attitude of the core slider and the position of the bonded portion of the gimbal are detected. . 5. A projection is formed at a predetermined position on an upper surface of the gimbal, and a cantilevered flexure plate to which the core slider is adhered is placed on the projection, and the gimbal is located at the same position as the projection. The mounting device according to claim 3, wherein the positioning marker is provided on a back surface of the gimbal or a back surface of the gimbal from which a position of the protrusion can be estimated. 6. The mounting device according to claim 5, wherein the positioning marker is a dimple formed at the time of processing the projection. 7. A step of setting a gimbal on a table via a jig board; and determining a predetermined position of the flexure plate based on positional information of a projection of the gimbal obtained by detecting a positioning marker of the gimbal. A step of applying an adhesive to a portion; a step of pressing and placing a core slider on the flexure plate via the adhesive; and detecting the position information of the core slider by detecting the position information of the core slider by the position detecting means. Means for detecting the position information of the protrusion of the gimbal by means, and the core just before bonding the core slider on the flexure plate based on the attitude information of the core slider and the position information of the protrusion of the gimbal. Correcting the alignment error between the slider and the protrusion of the gimbal; Mount method characterized by and a step of curing the.