JP2011177874A - Device and method for adjusting position of rotary plate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device and a method for adjusting a position of a rotary plate responsive to micro displacement of the rotary plate, wherein its structure is simple. <P>SOLUTION: The device 50 for adjusting the position of the rotary plate includes an absorption conveying device 51, a recognition camera 7, and a control device 10. The absorption conveying device is provided with an absorption head 1 to absorb the rotary plate 2, wherein the absorption head 1 includes a head body 101, a metal absorption pad 102 absorbing the rotary plate, and a bonding part 103 joining the head body and the absorption pad and deformed so that the absorption pad can follow an attitude of the rotary plate. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention provides, for example, a rotary plate that adsorbs and holds a rotary plate for an encoder as a sensor for detecting a position, and adjusts the position by moving the rotary plate slightly relative to a rotary member to which the rotary plate is attached. The present invention relates to a position adjusting apparatus and method.

  For example, in a semiconductor manufacturing facility or the like, in order to hold and transport a minute work, a suction head that has a suction hole and sucks and holds the work that is the object to be transported, and a transport head that transports the suction head that has sucked the work And are used. Here, in order to realize stable suction and transport even when the transported object and the suction surface of the suction head that contacts and holds the transported object are not parallel, conventionally, the following devices have been proposed. Is given.

  For example, in Patent Document 1, a suction nozzle corresponding to the suction head includes a cushion portion made of an elastic body having flexibility between a suction chuck having a suction surface that comes into contact with an object to be transported and a main body. Provided. By providing the cushion part, even when the suction surface of the chuck for chucking and the object to be transported are not parallel, the cushion part is bent by pressing the suction surface of the chuck for chucking against the object to be transported, and the suction surface is It becomes possible to make it closely adhere to the object to be conveyed, and the object to be conveyed can be sucked and conveyed.

  Patent Document 2 discloses a configuration in which a closed bubble pad member that is a member having higher elasticity than the suction pad member is provided between the holder member and the suction pad member in the suction jig corresponding to the suction head. Has been. According to this configuration, when the suction pad member sucks the object to be transported, the closed cell pad member is deformed to absorb the inclination of the object to be transported, and the parallelism between the object to be transported and the suction surface of the suction pad member And stable adsorption holding is possible.

JP-A-8-290382 JP 2006-49485 A

  However, in the configuration of the above-described prior art, the structure of the transport head is complicated because the flexible cushion portion and the closed cell pad portion that can be deformed when the suction surface is pressed against the object to be transported are provided. There was a problem of increasing the size.

  In addition, a glass disk suction transport device for an encoder as a sensor for position detection needs to attach the glass disk to a rotating shaft with high accuracy, and each process of suction, transport, and position adjustment is performed. It is necessary to repeat. Therefore, as compared with the above-described conventional suction head, the suction head in the suction conveyance apparatus for the glass disk for encoder needs to perform the suction and suction release of the glass disk accurately following the attitude of the glass disk. .

  As described above, the suction head for the glass disk needs to accurately follow the posture of the glass disk, and a flexible cushion portion or a closed cell pad portion is interposed as in the conventional suction head described above. In such a configuration, there is a problem that the glass disk cannot be adjusted to the minute inclination and the position of the glass disk cannot be adjusted.

  Furthermore, when a suction surface made of a resin material is brought into contact with the glass disk for the encoder, there arises a problem that foreign matters such as dust and dirt adhere. Therefore, there is also a problem that the adsorption surface cannot be made of a resin material such as rubber, sponge, or MC nylon.

  The present invention has been made to solve the above-described problems, and it is an object of the present invention to provide a rotating plate position adjusting apparatus and method that have a simple structure and can cope with a minute displacement of the rotating plate. .

In order to achieve the above object, the present invention is configured as follows.
That is, the rotating plate position adjusting device according to one aspect of the present invention images the suction conveying device that sucks and conveys the rotating plate, and the rotating plate that is provided on the rotating member by the suction conveying device and is rotated by the rotating device. A rotary plate position adjusting device comprising: a recognition camera that controls the relative position adjustment operation of the rotary member and the rotary plate that are electrically connected to the suction conveyance device and the recognition camera. The suction head that is provided in the suction conveyance device and performs the suction operation of the rotary plate includes a head main body, a metal suction pad that contacts and holds the rotary plate, and the head main body and the suction pad. And an adhesive portion that joins the head main body and the suction pad and deforms so that the suction pad follows the posture of the rotating plate.

  According to the rotating plate position adjusting device in one aspect of the present invention, in the suction head that is provided in the suction conveyance device and sucks the rotating plate, the suction pad that comes into contact with and sucks the rotating plate is made of metal, such as dust or dust. There is no problem of foreign matter adhering. Furthermore, the suction pad is attached to the head main body via an adhesive portion, and the adhesive portion can be deformed so that the suction pad follows the posture of the rotating plate. As described above, the suction head in the suction conveyance device has a very simple structure, can be miniaturized, can cope with a minute displacement of the rotating plate, and can damage the rotating plate that is the object to be conveyed. Absent. Therefore, the rotating plate can be accurately and surely placed on the rotating member, which can contribute to improving the accuracy of the encoder, for example.

It is a figure which shows schematic structure of the rotating plate position adjustment apparatus in one Embodiment of this invention. It is an enlarged view which shows the front-end | tip part of the suction head shown in FIG. FIG. 2 is a perspective view of a rotating plate that is suction-held by the suction head shown in FIG. 1. It is a figure for demonstrating the operation | movement which rotates the rotating plate mounted in the disc mounting member shown in FIG. It is a figure for demonstrating the movement of the disc center mark of a rotating plate in the state which looked at the rotating plate from A direction shown to FIG. 4A. It is a figure for demonstrating the position adjustment operation | movement of a rotating plate based on the movement of the disc center mark of a rotating plate. It is a figure which shows the state which the adsorption | suction head canceled adsorption | suction of the rotating plate in the positional relationship where an adsorption head and a disc mounting member are not parallel. It is a figure which shows the state which the adsorption head adsorb | sucked the rotating plate in the positional relationship where an adsorption head and a disc mounting member are not parallel. It is an enlarged view of the A section shown in FIG. It is a figure which shows the state which the suction pad of the suction head shown in FIG. 1 adsorb | sucked the rotating plate in the positional relationship where a suction head and a disc mounting member are not parallel. It is a flowchart for demonstrating operation | movement of the rotating plate position adjustment method in other embodiment of this invention.

  A rotating plate position adjusting device according to an embodiment of the present invention and a rotating plate position adjusting method executed in the rotating plate position adjusting device will be described below with reference to the drawings. In each figure, the same or similar components are denoted by the same reference numerals.

  Further, in this embodiment, as the rotary plate position adjusting device, the rotary plate position for the encoder that adjusts the mounting position of the rotary plate to the motor by sucking and holding the rotary plate for the encoder as a sensor for detecting the position. The adjustment device will be described as an example. However, the present invention is not limited to this, and in general, the suction head that sucks and holds the transported object, and the positioning of the transported object with respect to the support that includes the suction head and supports the transported object. The present invention can be applied to a position adjusting device that performs the same.

Embodiment 1 FIG.
With reference to FIGS. 1 to 3, a rotary plate position adjusting device 50 for an encoder in the present embodiment will be described.
The encoder rotary plate position adjusting device 50 includes a suction conveyance device 51, a recognition camera 7, and a control device 10 as basic components, and further includes a rotation device 52 in this embodiment. Such an encoder rotary plate position adjusting device 50 is provided in an encoder as a sensor for position detection, and position adjustment when a rotary plate corresponding to an example of the conveyed object is attached to the encoder motor. It is a device for performing. Here, the rotating plate is a disc in which a slit for constituting a rotary encoder is formed. In the present embodiment, the rotating plate is made of a glass disc. Of course, the rotating plate is not limited to glass.

  The suction conveyance device 51 includes a suction head 1, a negative pressure source 6, a Z stage 8, and an X and Y stage 9. The suction head 1 is connected to a negative pressure source 6 that generates negative pressure air for sucking and holding the rotary plate 2 and is installed on the Z stage 8. The Z stage 8 is a device that moves the suction head 1 along the thickness direction of the rotating plate 2, that is, the Z direction, which is the vertical direction here. Such a Z stage 8 is installed on an X and Y stage 9 that can move in the X direction and the Y direction perpendicular to the Z direction. Therefore, the suction head 1 is movable in the X and Y directions by the X and Y stages 9 and is movable in the Z direction by the Z stage 8.

  As shown in FIG. 2, the tip portion of the suction head 1, which is one of the characteristic components in the encoder rotary plate position adjusting device 50 of the present embodiment, is a head main body 101, a suction pad 102, and an adhesive portion 103. And have. The head body 101 has a hollow shape, for example, a cylindrical shape, and the hollow portion 101 a communicates with the negative pressure source 6. The suction pad 102 is a member having a hollow cylindrical shape, for example, and a suction surface 102a that is in contact with the suction conveyance surface 2a of the rotating plate 2 shown in FIG. 3, and is made of metal in order to prevent foreign matter from adhering to the suction conveyance surface 2a. For example, it is made of stainless steel. The hollow portion 102b of the suction pad 102 communicates with the negative pressure source 6 through the hollow portion 101a of the head body 101. Therefore, the rotating plate 2 can be sucked and held on the suction surface 102a of the suction pad 102.

  The bonding portion 103 is provided between the head main body 101 and the suction pad 102 and can be deformed so that the head main body 101 and the suction pad 102 are joined and the suction pad 102 follows the posture of the rotating plate 2. It is. More specifically, in this embodiment, as an example, the distance between the head main body 101 and the suction pad 102 is set to about 0.5 mm, and this gap is filled with a UV adhesive that is cured by ultraviolet irradiation to form an adhesive portion. 103 is formed. The hardness of the UV adhesive used for the bonding part 103 after curing is 40 to 50 degrees in terms of rubber hardness. Since the bonding portion 103 has such a rubber hardness, the bonding portion 103 acts as a flexible elastic member, can absorb the tilt of the rotating plate 2, and the suction pad is placed in the posture of the rotating plate 2. 102 can be copied.

  By configuring the suction head 1 as described above, the suction head 1 has an extremely simple structure and can be miniaturized, and can cope with the tilt of the rotating plate 2, that is, a minute displacement. Is obtained.

  Next, the rotating device 52 is a device that rotates the rotating plate 2, and includes the gripping mechanism 13 and the driving unit 14. More specifically, in the present embodiment, the gripping mechanism 13 grips the motor shaft 5 protruding from the main body of the motor 4. Here, the motor shaft 5 corresponds to an example of the support or the rotating member, and the motor 4 is arranged in a state where the motor shaft 5 is parallel to the Z direction. On the other hand, the disk mounting member 3 is attached to the non-projecting side of the motor shaft 5. The rotating plate 2 is placed on the disc placing member 3 by the suction conveyance device 51 described above. In a state where the disc mounting member 3 is attached to the motor shaft 5, the drive unit 14 rotates a gripping mechanism that grips the motor shaft 5. Due to the rotation, the disk mounting member 3 is rotated together with the motor shaft 5.

  The recognition camera 7 is a camera that captures an image of the rotating plate 2 placed on the disc placing member 3 from above the rotating plate 2 in the Z direction with the suction head 1 of the suction conveyance device 51 retracted. is there.

  The control device 10 is a device that controls the relative position adjustment operation of the motor shaft 5, that is, the disc mounting member 3 and the rotary plate 2, and includes an image recognition processing unit 11 and a position control unit 12. Note that the control device 10 can actually be configured by a computer, and the image recognition processing unit 11 and the position control unit 12 exist functionally in the computer.

  The image recognition processing unit 11 is electrically connected to the recognition camera 7 and processes the position data of the rotating plate 2 obtained from the recognition camera 7. The position control unit 12 is electrically connected to the suction conveyance device 51 and performs position control of the X, Y stage 9 and Z stage 8 based on the position data of the rotating plate 2 obtained from the recognition camera 7. Specific relative position adjustment operation control of the motor shaft 5, that is, the disc mounting member 3 and the rotating plate 2 by the control device 10 will be described in the following operation description.

  A method for adjusting the position of the rotating plate 2 with respect to the motor shaft 5, that is, the disk mounting member 3 in the rotating plate position adjusting device 50 for an encoder of the present embodiment configured as described above will be described below with reference to FIG. 10. explain. This position adjustment method is executed by the control device 10 described above, more specifically by the image recognition processing unit 11 and the position control unit 12.

  (1) First, the suction conveyance device 51 sucks and holds the rotary plate 2 by the suction head 1 from a rotary plate supply unit (not shown). On the other hand, the motor 4 is carried above the rotating device 52 by a transport device (not shown), and the motor shaft 5 is oriented on the gripping mechanism 13 side and installed on the installation surface 15. Furthermore, the disk mounting member 3 is attached to the non-projecting side of the motor shaft 5. The installation surface 15 is a surface set in parallel to the suction surface 102 a of the suction pad 102 in the suction head 1 that contacts the rotating plate 2.

  (2) Next, the rotary plate 2 sucked by the suction head 1 is placed on the placement surface 3a of the disk placement member 3 installed as described above using the suction conveyance device 51 ( Step 1) in FIG.

  (3) Next, after placing the rotating plate 2 on the placement surface 3a, the vacuum suction of the suction pad 102 is released. Then, the X and Y stages 9 are driven to retract the suction head 1 from above the rotating plate 2 to a place on the mounting surface 3a where the recognition camera 7 of the rotating plate 2 does not interfere with imaging.

  (4) Next, as shown in FIG. 4A, the recognition camera 7 images the rotating plate 2. Then, based on the imaging information obtained from the recognition camera 7, the image recognition processing unit 11 of the control device 10 obtains the position of the disc center mark 201 (FIG. 3) at the center of the rotating plate 2. The state at this time is shown in FIG. 4B. Further, in FIG. 4B, the reference numeral “211” is given to the position of the disc center mark 201 imaged by the recognition camera 7.

  (5) Next, the motor shaft 5 is gripped by the gripping mechanism 13, and the gripping mechanism 13 is rotated by 120 degrees in the clockwise direction, for example, by the drive unit 14. As described above, the disc mounting member 3 is directly connected to the non-projecting side of the motor shaft 5. By rotating the motor shaft 5, the disc mounting member 3 rotates in conjunction with the disc. Both the rotating plates 2 mounted on the mounting member 3 also rotate 120 degrees.

  (6) After the rotation, the recognition camera 7 takes an image of the rotating plate 2 again. Then, based on the imaging information obtained from the recognition camera 7, the image recognition processing unit 11 obtains the position of the disc center mark 201. In FIG. 4B, the position of the disc center mark 201 obtained in the second imaging is denoted by “212”.

  (7) After the second imaging, the rotating plate 2 is further rotated 120 degrees in the clockwise direction, the rotated rotating plate 2 is imaged again, and the position of the disc center mark 201 is obtained again. In FIG. 4B, the position of the disc center mark 201 obtained in the third imaging is denoted by “213”.

  (8) From the three pieces of position information “211” to “213” of the disk center mark 201 obtained by the operations (4) to (7) described above, the control device 10 determines the mark positions 211 and 212. The circle 214 passing through the three points 213 is obtained, and the position of the center point 215 of the circle 214 and the radius 216 of the circle 214 are obtained. The radius 216 is the amount of deviation between the disc center mark 201 that is the center of the rotating plate 2 and the rotation center of the motor shaft 5, that is, the center point 215. In other words, the radius of the rotating plate 2 to the disc mounting member 3 is Corresponds to installation error. The operations from (3) to (8) correspond to step 2 in FIG.

  If the amount of deviation is within the allowable range, the adjustment operation is terminated (step 3 in FIG. 10). Actually, since it is rare that it is within the allowable range at this time, the process usually proceeds to the following steps.

  (9) Next, as shown in FIG. 5, the disc center mark 201 which is the center of the rotating plate 2 is moved to the position of the rotation center point 215 of the motor shaft 5 obtained by calculation. That is, first, the suction head 1 is moved again above the rotary plate 2, the Z stage 8 is lowered, and the suction pad 102 of the suction head 1 is brought into contact with the rotary plate 2.

  (10) After the contact, suction of the suction head 1 is started, and the rotating plate 2 is sucked and held on the suction pad 102.

  (11) After sucking and holding, the control device 10 controls the movement of the X and Y stages 9 by the position control unit 12 in accordance with the amount of deviation obtained as described above, and the disc center mark that is the center of the rotating plate 2. 201 is moved to a center point 215 which is the rotation center of the motor shaft 5 by a radius of 216 minutes.

  (12) Next, after the rotation plate 2 is moved, the suction of the suction head 1 is released, and the suction head 1 is retracted to a place that does not interfere with the imaging operation by the recognition camera 7.

  (13) After the retreat, the operations (4) to (11) described above are executed again (step 4 in FIG. 10).

  (14) Such position adjustment operation is repeated until the amount of deviation between the disc center mark 201 of the rotating plate 2 and the rotation center point 215 of the motor shaft 5 falls within a predetermined amount, for example, within 5 μm. Then, when the amount of displacement becomes equal to or less than a predetermined value, the rotating plate 2 is bonded and fixed to the disc placing member 3.

  By the operation described above, the position adjustment and fixing of the rotary plate 2 to the disc mounting member 3 are performed, but the suction surface 102a of the suction pad 102 in the suction head 1 that is in contact with the rotary plate 2, and the disc mounting When the mounting member 3 is in a parallel positional relationship, the position adjusting operation can be performed using a conventional suction head that does not have the bonding portion 103.

  However, actually, as shown in FIG. 6, for example, the motor shaft 5 is inclined with respect to the main body of the motor 4, or the disk mounting member 3 is attached with an inclination to the motor shaft 5. For example, the suction surface 102a of the suction pad 102 and the disc mounting member 3 may not be parallel. In such a situation, when a conventional suction head that does not have the bonding portion 103 is used, problems as described below occur.

  That is, when the suction surface 102a of the suction pad 102 and the disc mounting member 3 are not parallel, the rotary plate 2 is in a state where the rotary plate 2 is sucked to the suction pad 102 as shown in FIG. And a disc mounting member 3. Under such circumstances, when the position adjusting operation described in the above (4) to (11) is performed and the suction of the rotating plate 2 is released at the position shown in FIG. 7, as shown in FIG. The disc center mark 201 of the rotating plate 2 in the attracted state moves from the position 217 to the position 218 when the rotating plate 2 is placed on the disc placing member 3. Originally, if the suction surface 102a of the suction pad 102 and the disc mounting member 3 are parallel, when the rotating plate 2 is placed on the disc mounting member 3, the disc center mark 201 is positioned. It is located at a position 219 vertically below 217.

  Here, referring to FIG. 8, an angle formed between the rotating plate 2 sucked by the suction pad 102 and the mounting surface 3a of the disk mounting member 3 is defined as θ, and the rotating plate 2 and the mounting surface 3a. When the distance in the diameter direction of the rotating plate 2 from the contact point 220 to the disk center mark 201 of the rotating plate 2 is r, the amount of deviation between the original position 219 and the position 218 in the diameter direction is r ( 1-cos θ). For example, when the distance r is 5 mm and the gap between the rotating plate 2 and the placement surface 3a is 5 μm on the Z-axis passing through the disc center mark 201, the above-described position adjustment operation ( When the suction is canceled in 3) or when the suction is performed in (10) above, the disc center mark 201 is displaced by about 3 μm.

  Therefore, when the conventional suction head is used, the disc center mark 201 of the rotating plate 2 and the rotation center point 215 of the motor shaft 5 coincide with each other due to the occurrence of such positional deviation in the rotating plate 2. There is a problem that it takes a long time to adjust the position, or the position of both cannot be adjusted.

  On the other hand, the suction head 1 provided in the encoder rotary plate position adjusting apparatus 50 according to the present embodiment has the bonding portion 103, and therefore is inclined by the elasticity of the bonding portion 103 as shown in FIG. The suction surface 102a of the suction pad 102 can be made to follow the rotating plate 2. Therefore, even when the suction release in the operation (3) and the suction holding in the operation (10) are performed, the positional deviation (minute movement) of the rotating plate 2 can be suppressed. Therefore, it is possible to stably perform alignment between the disc center mark 201 of the rotating plate 2 and the rotation center point 215 of the motor shaft 5.

Such an effect is obtained because the rubber hardness in the bonding portion 103 is 40 degrees to 50 degrees. That is, in the bonded portion having a rubber hardness of less than 40 degrees, when the rotating plate 2 is sucked, the sucking head conveys the rotating plate 2 while the bonded portion is deformed. Therefore, when the suction head 1 releases the suction of the rotating plate 2 in the next step, a positional deviation occurs.
On the other hand, at the bonded portion where the rubber hardness exceeds 50 degrees, the suction pad cannot follow the inclination of the rotary plate 2, and a gap is generated between the rotary plate 2 and the suction pad as in the conventional suction head. Therefore, a positional shift occurs when the rotating plate 2 is sucked.
Therefore, the rubber hardness at the bonding portion 103 is preferably between 40 degrees and 50 degrees.

  As described above, according to the encoder rotating plate position adjusting apparatus 50 of the present embodiment, even if the suction surface 102a of the suction pad 102 that sucks and holds the rotating plate 2 and the rotating plate 2 are not parallel to each other, By pressing the pad 102 against the rotating plate 2, the bonding portion 103 is bent, and the suction surface 102 a can be made to follow the rotating plate 2. In this state, the suction pad 102 sucks and holds the rotating plate 2. be able to. Therefore, it is possible to suppress the positional deviation of the rotating plate 2 that occurs due to the inclination of the rotating plate 2, and it is possible to realize a stable position adjustment of the rotating plate 2. As a result, the adjustment time can be shortened as compared with the conventional case, and the amount of minute displacement caused by the curing shrinkage of the adhesive, which has been misaligned after bonding and fixing until now, can be eliminated. Therefore, it is possible to provide an encoder with high detection accuracy.

  In the above-described embodiment, the disk mounting member 3 on which the rotating plate 2 is mounted is not moved, and the rotating plate 2 is moved according to the positional displacement amount, so that the disk mounting member 3 and the rotating plate 2 are moved. The position is adjusted. However, conversely, the position adjustment operation may be performed by moving the disc mounting member 3 side according to the positional deviation amount without moving the rotating plate 2, and the same effect as described above can be obtained. it can. That is, in the rotating plate position adjusting method, the position of the disc mounting member 3 and the rotating plate 2 may be relatively corrected.

1 suction head, 2 rotary plate, 3 disc mounting member, 4 motor, 7 recognition camera, 10 control device,
50 Encoder rotary plate position adjusting device, 51 Adsorbing and conveying device, 52 Rotating device,
101 head main body, 102 suction pad, 103 bonding part,
201 Disc center mark.

Claims (4)

An adsorption conveyance device that adsorbs and conveys the rotation plate, a recognition camera that images the rotation plate that is provided on a rotation member and is rotated by the rotation device in the adsorption conveyance device, and the adsorption conveyance device and the recognition camera. A rotary plate position adjusting device including a controller that is connected to the rotary member and controls a relative position adjustment operation between the rotary member and the rotary plate;
The suction head that is provided in the suction conveyance device and performs the suction operation of the rotating plate,
The head body,
A metal suction pad that comes into contact with the rotary plate and holds it by suction;
An adhesive portion that is provided between the head body and the suction pad, joins the head body and the suction pad, and deforms so that the suction pad follows the posture of the rotary plate; A rotating plate position adjusting device characterized by the above.   The rotating plate position adjusting device according to claim 1, wherein the adhesive portion is an adhesive having a rubber hardness of 40 degrees to 50 degrees.   The rotary plate position adjusting device according to claim 1, wherein the adhesive portion is a UV curable adhesive. A rotating plate position adjusting method executed by a control device provided in the rotating plate position adjusting device according to any one of claims 1 to 3,
From the locus of the center mark obtained by imaging the center mark of the rotating plate every time the rotating member is rotated after the rotating plate is placed on the rotating member by the suction head provided in the rotating plate position adjusting device. A first step of obtaining a positional deviation amount between a member center of the rotating member and a plate center of the rotating plate;
A second step of determining whether or not the positional deviation amount is within an allowable range, and ending the adjustment operation if within the allowable range;
If the amount of positional deviation is not within an allowable range, the rotary head is sucked by the suction head, and the rotary plate and the rotary member are relatively corrected in accordance with the amount of positional deviation, and the rotary plate is moved again. A third step of placing on the rotating member and shifting to the first step;
A rotating plate position adjusting method comprising:

Images