JP2006259254A - Joining device and joining method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a joining device and a joining method for surely positioning a light transmissive first planar body and a second planar body and highly accurately joining and fixing both by surely imaging the images of a first positioning mark in the light transmissive first planar body and a second positioning mark in the second planar body. <P>SOLUTION: The joining device 1 joins and fixes the first planar body 8 having the first positioning mark 82 and the second planar body 9 having the second positioning mark through a gap 101. The joining device 1 is provided with a displacing means for relatively displacing the first planar body 8 and the second planar body 9 and an imaging means 5 for imaging the images of the first positioning mark 82 and the second positioning mark 92 from the side of the first planar body 8, and is constituted so as to fix both planar bodies by displacing the first planar body 8 and the second planar body 9 such that the images of the respective marks match. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  According to the present invention, a light-transmissive first plate-like body having a first alignment mark and a light-opaque second plate having a second alignment mark corresponding to the first alignment mark. The present invention relates to a joining apparatus and a joining method for joining and fixing two plate-like bodies through a gap.

When a light emitting layer is selectively deposited on a display unit (substrate) of an organic electroluminescence display device, a deposition mask is generally used. The deposition mask includes a glass substrate and a plurality of silicon chips arranged on the glass substrate.
In this evaporation mask, it is necessary to position and bond and fix the glass substrate and each silicon chip with high precision, and the glass substrate and each silicon chip are provided with positioning marks (alignment marks). . A glass substrate positioning mark (hereinafter, this mark is referred to as a “first mark”) is composed of a deposit adhered to the glass substrate. Each silicon chip positioning mark (hereinafter, this mark is referred to as a “second mark”) is formed of a through-hole penetrating the silicon chip.

Conventionally, in a manufacturing apparatus that manufactures a vapor deposition mask having such a configuration, an imaging unit that captures images of a first mark and a second mark is provided on the silicon chip side (see, for example, Patent Document 1). .
However, in this manufacturing apparatus, since the first mark is imaged through the second mark, there is a case where the focus (focus) on each of the first mark and the second mark is not achieved. . For this reason, it has been difficult to position the glass substrate and each silicon chip with high accuracy.
Further, as described above, since the first mark is imaged through the second mark, when the first mark and the second mark are largely misaligned, the first mark is a silicon chip. It was difficult to capture the first mark by the imaging means.

JP-A-6-308474

  An object of the present invention is to reliably capture an image of the first alignment mark on the light-transmissive first plate and the second alignment mark on the light-impermeable second plate. Accordingly, it is an object of the present invention to provide a joining apparatus and a joining method capable of accurately aligning the two and joining and fixing the first plate-like body and the second plate-like body with high accuracy. .

Such an object is achieved by the present invention described below.
The bonding apparatus according to the present invention includes a light-transmitting first plate having a first alignment mark and a second alignment mark corresponding to the first alignment mark. A joining device for joining and fixing a plate-like body via a gap,
Displacement means for relatively displacing the first plate-like body and the second plate-like body;
Imaging means for capturing images of the first alignment mark and the second alignment mark from the first plate-like body side;
The first plate-like body and the second plate-like shape are actuated by the displacement means so that the images of the first alignment mark and the second alignment mark imaged by the imaging means coincide with each other. The first plate-like body and the second plate-like body are fixed by displacing the body.
Thereby, it is possible to reliably capture images of the first alignment mark on the light-transmitting first plate and the second alignment mark on the light-impermeable second plate. Therefore, the first plate and the second plate can be joined and fixed with high accuracy by reliably aligning the two.

In the joining apparatus of this invention, it is preferable to provide the conveyance table which has a mounting part which mounts a said 1st plate-shaped object.
Thereby, a 1st plate-shaped object can be conveyed reliably.
In the bonding apparatus according to the present invention, in the mounting portion, the portion where the first alignment mark is located when the first plate-like body is placed is formed of a light-transmitting member. It is preferable.
Thereby, the images of the first alignment mark and the second alignment mark can be taken via the placement unit.

In the joining apparatus of this invention, it is preferable that the said imaging means is located under the said conveyance table.
Thereby, the images of the first alignment mark and the second alignment mark can be taken via the placement unit.
In the joining device of the present invention, the fixing between the first plate and the second plate is performed with a photocurable adhesive,
The light irradiating means installed on the first plate-like body side is operated to irradiate light, thereby curing the photo-curable adhesive, and the first plate-like body and the second plate-like body. It is preferable to fix the body.
Thereby, a photocurable adhesive agent can be hardened reliably and, therefore, a 1st plate-shaped body and a 2nd plate-shaped body can be fixed reliably.

In the bonding apparatus of the present invention, the light is preferably ultraviolet light.
Thereby, a photocurable adhesive agent can be hardened reliably and, therefore, a 1st plate-shaped body and a 2nd plate-shaped body can be fixed reliably.
In the bonding apparatus according to the aspect of the invention, it is preferable that a deposit as the first alignment mark is provided on a surface of the first plate-like body on the second plate-like body side.
Thereby, the first plate-like body is prevented from being damaged, and the first alignment mark can be easily provided on the first plate-like body.

In the joining device of the present invention, it is preferable that a concave portion as the second alignment mark is provided on the surface of the second plate-like body on the first plate-like body side.
Thereby, for example, it is possible to prevent the strength of the second plate-shaped body from being lowered, compared to the case where the second alignment mark is configured by a through-hole penetrating the second plate-shaped body.
In the joining apparatus of the present invention, it is preferable that the first alignment mark and the second alignment mark have a size and a shape such that one includes the other.
As a result, the images of the first alignment mark on the light-transmissive first plate and the second alignment mark on the light-impermeable second plate are more reliably aligned. Thus, the first plate and the second plate can be bonded and fixed with higher accuracy.

In the joining apparatus of the present invention, when one of the first alignment mark and the second alignment mark includes the other, positioning between the first plate-like body and the second plate-like body is performed. It is preferable to judge that this has been done.
As a result, the images of the first alignment mark on the light-transmissive first plate and the second alignment mark on the light-impermeable second plate are more reliably aligned. Thus, the first plate and the second plate can be bonded and fixed with higher accuracy.

In the bonding apparatus according to the aspect of the invention, when the first plate-like body and the second plate-like body are displaced, the gap is configured such that the first alignment mark and the second alignment mark are not. It is preferable that the contact size be large.
Thereby, the other can be smoothly (smoothly) displaced with respect to one of the first plate-like body and the second plate-like body.

The bonding method of the present invention includes a light-transmitting first plate having a first alignment mark and a second alignment mark corresponding to the first alignment mark. A joining method for joining and fixing a plate-like body via a gap,
Images of the first alignment mark and the second alignment mark are captured from the first plate-like body side, and the captured images of the first alignment mark and the second alignment mark are captured. The first plate and the second plate are displaced so as to match, and the first plate and the second plate are fixed. .
Thereby, it is possible to reliably capture images of the first alignment mark on the light-transmitting first plate and the second alignment mark on the light-impermeable second plate. Therefore, the first plate and the second plate can be joined and fixed with high accuracy by reliably aligning the two.

Hereinafter, the joining device and joining method of the present invention are explained in detail based on the suitable embodiment shown in an accompanying drawing.
FIG. 1 is a perspective view showing a joining apparatus of the present invention, FIG. 2 is a block diagram of the main part of the joining apparatus shown in FIG. 1, and FIG. 3 is a perspective view of the vicinity of a conveyance table of the joining apparatus shown in FIG. 4 is a perspective view of the vicinity of the imaging means included in the bonding apparatus shown in FIG. 1, FIG. 5 is a side view of the vicinity of the head portion of the bonding apparatus shown in FIG. 1, and FIG. 6 is included in the bonding apparatus shown in FIG. It is a figure which shows the image which the imaging means imaged. In the following, for convenience of explanation, in FIGS. 1 and 3 to 5, the vertical direction (vertical direction) is referred to as the z-axis direction, the direction perpendicular to the z-axis direction and the left-right direction is referred to as the y-axis direction, A direction perpendicular to each of the y-axis direction and the z-axis direction is referred to as an x-axis direction. 1 and 3 to 5, the upper side may be referred to as “upper” or “upper”, and the lower side may be referred to as “lower” or “lower”.
Here, the case where the mask 10 for vapor deposition used when selectively vapor-depositing a light emitting layer on the display part (board | substrate) of an organic electroluminescent display apparatus is made into an example by the joining apparatus (bonding apparatus) 1 of this invention. I will give you a description.

First, prior to the description of the bonding apparatus 1, the vapor deposition mask 10 manufactured by the bonding apparatus 1 will be described.
As shown in FIG. 5, the evaporation mask 10 includes a first plate 8 and a plurality of second plates 9 arranged in the first plate 8 with a gap 101 interposed therebetween. Bonded and fixed.
The first plate-like body 8 has light transparency.

In addition, a plurality of first alignment marks 82 made of a deposit are attached to the surface of the first plate 8 on the second plate 9 side, that is, the upper surface 81. Since the first alignment mark 82 is made of a deposit, the first plate-like body 8 is prevented from being damaged, and the first alignment mark 82 is attached to the first plate-like body 8. It can be easily provided.
Two first alignment marks 82 are provided at positions where the second plate-like body 9 is provided. Each first alignment mark 82 is circular in plan view (see FIG. 6).

Each second plate-like body 9 is composed of a light-impermeable piece (chip).
Further, second alignment marks 92 corresponding to the respective first alignment marks 82 are provided on the surface of the second plate-shaped body 9 on the first plate-shaped body 8 side, that is, the lower surface 91. Yes. The second alignment mark 92 is constituted by a concave portion provided on the lower surface 91, and has a rhombus in plan view (see FIGS. 5 and 6).
As described above, the second alignment mark 92 is constituted by the concave portion, so that, for example, the second alignment mark 92 is second as compared with the case where the second alignment mark 92 is constituted by the through-hole penetrating the second plate-like body 9. It is possible to prevent the strength of the plate-like body 9 from being lowered.

As shown in FIG. 6, the second alignment mark 92 is sized so as to include the first alignment mark 82.
Each of the second plate-like bodies 9 is fixed to the first plate-like body 8, and the fixing method is adhesion by a photocurable adhesive (hereinafter simply referred to as “adhesive”) 11. The uncured adhesive 11 is positioned in the vicinity of the edge of each second plate 9 when the second plate 9 is bonded and fixed to the first plate 8 by the bonding apparatus 1. The first plate-like body 8 is previously applied.

The constituent material of the first plate-like body 8 is not particularly limited as long as it is transparent, that is, has optical transparency. For example, glass, quartz, or a plastic material can be used. .
Further, the constituent material of the second plate-like body 9 is not particularly limited. For example, silicon, a metal material, and a plastic material can be used, and a material having light impermeability may be used.

Next, the bonding apparatus 1 will be described.
As shown in FIGS. 1 to 4, the joining apparatus 1 includes a conveyance table (xy table) 2, an x-axis direction moving means (displacement means) 31 that moves the conveyance table 2 in the x-axis direction, and the conveyance table 2. A y-axis direction moving means (displacement means) 32 that moves in the y-axis direction, a head part (holding means) 4 that holds (sucks) the second plate-like body 9, and a head part 4 that moves in the z-axis direction. The z-axis direction moving means (displacement means) 33, the rotation means (displacement means) 34 for rotating the head unit 4 around the z-axis, and the first alignment mark 82 and the second alignment mark 92 are captured. An image processing unit 5 that processes the captured image, a light irradiation unit 7 that emits light, and a control unit 20.

Hereinafter, the structure of each part of the joining apparatus 1 is demonstrated.
The transfer table 2 is installed horizontally in the bonding apparatus 1.
The transport table 2 includes a first placement portion (placement portion) 21 on which the first plate-like body 8 is placed, and a tray (jig) 30 in which a plurality of second plate-like bodies 9 are accommodated. Has a second placement portion 22 and an opening 23.

The first placement portion 21 is made of a light-transmitting member and is provided at the substantially central portion of the transport table 2. In addition, as a constituent material of the 1st mounting part 21, glass and various resin materials, such as quartz glass, can be used, for example.
The second placement unit 22 is provided in the positive x-axis direction of the first placement unit 21.
The opening 23 is provided in the positive y-axis direction of the second placement unit 22.

Below the transfer table 2, a y-axis direction moving unit 32 that moves the transfer table 2 in the y-axis direction is provided.
As shown in FIG. 3, the y-axis direction moving means 32 has two linear guides 321, a ball screw 322, and a motor 323 provided in parallel to each other. In such a y-axis direction moving means 32, when the motor 323 is driven, the ball screw 322 rotates, and the first plate 8 and the tray 30 move along the linear guides 321 together with the transport table 2. It is configured as follows.

Further, below the y-axis direction moving means 32, an x-axis direction moving means 31 for moving the transport table 2 in the x-axis direction is provided.
As shown in FIG. 3, the x-axis direction moving means 31 includes two linear guides 311, a ball screw 312, and a motor 313 provided in parallel to each other. In such an x-axis direction moving means 31, when the motor 313 is driven, the ball screw 312 is rotated, and the first plate-like body 8 and the tray 30 are moved along the linear guides 311 together with the transport table 2. It is configured as follows.

  Further, two imaging means 5 are fixedly installed (fixed) below the transport table 2, that is, below the y-axis direction moving means 32. As a result, as shown in FIG. 5, the first alignment mark 82 is provided from the lower side (first plate-like body 8 side) via the first placement portion 21 and the first plate-like body 8. In addition, an image of the second alignment mark 92 can be taken.

As shown in FIG. 5, each imaging unit 5 includes a CCD (Charge Coupled Device) camera 51 and a microscope 52 positioned above the CCD camera 51.
As shown in FIGS. 4 and 5, the light irradiation means 7 is fixedly installed between the two imaging means 5. By the operation of the light irradiation means 7, light is irradiated toward the adhesive 11 provided between the first plate-like body 8 and the second plate-like body 9, that is, from below. Moreover, the irradiated light is ultraviolet rays.
By such light irradiation means 7, the adhesive 11 can be reliably cured, and thus each second plate 9 can be reliably fixed to the first plate 8.

Further, a lens unit that collects the irradiated light (ultraviolet rays) may be provided above the light irradiation means 7. Thereby, light can be efficiently applied to the adhesive 11.
A head unit 4 is provided above the imaging unit 5 and the light irradiation unit 7. The head unit 4 is fixed to a frame 40 provided so as to straddle the transport table 2.
As shown in FIG. 5, the head portion 4 has an adsorption portion 41 that adsorbs the second plate-like body 9. The suction part 41 is connected to, for example, an ejector or a vacuum pump.

Above the head unit 4, a rotating unit 34 that rotates the head unit 4 about the z-axis is provided. The rotating unit 34 can be constituted by, for example, a motor provided with a rotary encoder.
Further, a z-axis direction moving unit 33 for moving the head unit 4 in the z-axis direction is provided further above the head unit 4, that is, above the rotating unit 34. For example, the z-axis direction moving unit 33 may have a configuration substantially similar to the configuration of the x-axis direction moving unit 31 and the y-axis direction moving unit 32, that is, a configuration including a linear guide, a ball screw, and a motor. .
The image processing unit 6 is configured to binarize the image captured by the imaging unit 5 and recognize it as a grayscale image (see FIG. 6).

  As shown in FIG. 2, the control means 20 controls each part (each means) mentioned above of the joining apparatus 1, respectively. The control unit 20 includes a CPU (Central Processing Unit) 201 and a storage unit (storage unit) 202. The storage unit 202 includes a storage medium (recording medium) that can be read by the CPU 201, and the storage medium includes a magnetic or optical recording medium, a semiconductor memory, or the like.

Next, a process (process) for manufacturing the evaporation mask 10 by bonding and fixing the first plate body 8 and the second plate body 9 using the bonding apparatus 1 having such a configuration will be described. 1, description will be made based on FIG. 5 and FIG.
[1] First, the first plate-like body 8 is placed and fixed on the first placement portion 21 of the transport table 2. The fixing method is not particularly limited, and examples thereof include fixing by suction such as an ejector and a vacuum pump, and fixing by a toggle clamp.
Further, the tray 30 in which the plurality of second plate-like bodies 9 are stored is placed on the second placement unit 22 and fixed. The fixing method is not particularly limited, and examples thereof include fixing by suction such as an ejector and a vacuum pump, and fixing by a toggle clamp.

  [2] Next, by the operation of the x-axis direction moving means 31 and the y-axis direction moving means 32, the transport table 2 moves, and each first alignment mark 82 of the first plate-like body 8 is imaged. Located above the means 5 (CCD camera 51). In this state, each imaging unit 5 captures an image of the first alignment mark 82 above the imaging unit 5. Each captured image is binarized by the operation of the image processing means 6, and based on this, the center is detected. Thereby, the information regarding the position shift of the 1st plate-shaped object 8 with respect to the center of the imaging means 5, ie, the adsorption | suction part 41 of the head part 4, is obtained. This information is stored in the storage unit 202 of the control means 20.

[3] Next, the transport table 2 is moved again by the operation of the x-axis direction moving means 31 and the y-axis direction moving means 32, and the predetermined second plate-like body 9 of the tray 30 is moved to the suction portion 41. Located below. In this state, the operation of the z-axis direction moving means 33 causes the head unit 4 (suction unit 41) to move in the negative z-axis direction. Thereafter, the suction portion 41 sucks the predetermined second plate-like body 9.
[4] Next, by the operation of the z-axis direction moving means 33 again, the head portion 4 in a state where the suction portion 41 sucks the second plate-like body 9 moves in the z-axis positive direction.

[5] Next, the conveyance table 2 is moved by the operation of the x-axis direction movement unit 31 and the y-axis direction movement unit 32, and the opening 23 of the conveyance table 2 is positioned above the imaging unit 5. In this state, each imaging unit 5 captures an image of the second alignment mark 92 of the second plate 9 located above the imaging unit 5 through the opening 23. Each captured image is binarized by the operation of the image processing means 6, and based on this, the center is detected. Thereby, the information regarding the position shift of the 2nd plate-shaped body 9 with respect to the center of the imaging means 5, ie, the adsorption | suction part 41 of the head part 4, is obtained. This information is stored in the storage unit 202 of the control means 20.
Further, the information regarding the positional deviation of the second plate-like body 9 is compared with the information obtained regarding the positional deviation of the first plate-like body 8 obtained previously, and the second relative to the first plate-like body 8 is compared. The rotating means 34 operates so as to correct (cancel) the deviation of the plate-like body 9 about the z axis.

  [6] Next, based on the information on the positional deviation of the first plate-like body 8 stored in the storage unit 202, the first plate-like member is operated by the operation of the x-axis direction moving unit 31 and the y-axis direction moving unit 32 The body 8 moves to a position equivalent to the first plate-like body 8 in the step [2]. Thereafter, the operation of the z-axis direction moving means 33 moves the head portion 4 in a state where the suction portion 41 sucks the second plate 9 in the negative z-axis direction. Thereby, the state shown in FIG. 5, that is, the state in which the first plate-like body 8 and the second plate-like body 9 are close to each other is obtained.

[7] Next, each imaging unit 5 captures images 821 and 921 of the first alignment mark 82 and the second alignment mark 92 corresponding to the imaging unit 5 (see FIG. 6A). ). In the state shown in FIG. 6A, that is, when the image 821 and the image 921 are misaligned, the x-axis direction moving unit 31 and the y-axis direction moving unit 32 so that the image 821 and the image 921 match. The first plate 8 is moved with respect to the second plate 9 by the operation of, i.e., the first plate 8 and the second plate 9 are positioned (FIG. 6). (See (b)). For this positioning (positioning), for example, a positioning process (means) using a known CCD camera can be used.
Whether the first plate-like body 8 and the second plate-like body 9 are positioned is determined as to whether or not the state shown in FIG. 6B is obtained, that is, the image 921 (second This registration mark 92) is performed based on whether or not it includes the image 821 (first alignment mark 82). In this alignment, it is preferable that the center of the image 821 and the image 921 substantially coincide.

[8] After positioning is performed, the light irradiation means 7 is operated to fix the first plate-like body 8 and the second plate-like body 9.
[9] Next, the suction state of the suction part 41 is released (breaked), and the head part 4 moves in the z-axis positive direction by the operation of the z-axis direction moving means 33.
[10] Steps [2] and after are repeated until a predetermined number of second plate bodies 9 are fixed to the first plate body 8. Then, the 1st plate-shaped object 8 is removed from the joining apparatus 1, and the mask 10 for vapor deposition is obtained.

Through the above-described steps, the image 821 of the first alignment mark 82 and the image 921 of the second alignment mark 92 can be reliably imaged, and thus both can be reliably aligned. Thus, the first plate-like body 8 and the second plate-like body 9 can be bonded and fixed with high accuracy. Thereby, the evaporation mask 10 can be obtained.
It should be noted that the gap 101 has a first alignment mark 82 and a second alignment mark 92 when the first plate 8 is moved relative to the second plate 9 in the step [7]. It is preferable that the size is such that is non-contact. Thereby, the 1st plate-shaped body 8 can be moved smoothly (smoothly).

Further, the positioning process in the step [7] may be performed while the light irradiation means 7 is operated.
Further, in the step [6], the positioning process substantially similar to the step [7] is performed while moving the head portion 4 in a state where the suction portion 41 sucks the second plate-like body 9 in the negative z-axis direction. You may do it.

As mentioned above, although the joining apparatus and joining method of this invention were demonstrated about embodiment of illustration, this invention is not limited to this, Each part which comprises a joining apparatus is arbitrary which can exhibit the same function. It can be replaced with that of the configuration. Moreover, arbitrary components may be added.
Moreover, what is manufactured using the joining apparatus 1 is not limited to a vapor deposition mask. For example, a metal piece joined and fixed to a substrate made of plastic, or a sheet-like body made of plastic. Alternatively, a flexible printed circuit (FPC) may be joined and fixed.

Further, the first alignment mark is not limited to a circular shape, and may be, for example, a quadrangle such as a triangle, a rhombus, or a parallelogram, or a hexagon.
Further, the second alignment mark is not limited to a rhombus, but may be a circle, a triangle, a rectangle, a square, or a hexagon, for example.
Further, the second alignment mark is not limited to being constituted by a recess provided on the lower surface of the second plate-like body, and is constituted by, for example, a through-hole penetrating the second plate-like body. It may be.

Further, the size of the second alignment mark includes the first alignment mark, but is not limited thereto, and the first alignment mark is equivalent to or included in the second alignment mark. The size may be such that they do not overlap each other.
In addition, the first placement portion of the transport table is not limited to being composed of a light-transmitting member as a whole, and the first alignment mark is placed when the first plate-like body is placed. It is only necessary that the portion where is located is made of a light-transmitting member.
In the imaging unit, an image is captured using a CCD camera. However, the present invention is not limited to this. For example, an image may be captured using an infrared camera.

It is a perspective view which shows the joining apparatus of this invention. It is a block diagram of the principal part of the joining apparatus shown in FIG. It is a perspective view of the conveyance table vicinity which the joining apparatus shown in FIG. 1 has. FIG. 2 is a perspective view of the vicinity of an imaging unit included in the joining device illustrated in FIG. 1. FIG. 2 is a side view of the vicinity of a head unit included in the bonding apparatus illustrated in FIG. 1. It is a figure which shows the image which the imaging means which the joining apparatus shown in FIG. 1 has imaged.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Joining apparatus (bonding apparatus) 2 ... Conveying table (xy table) 21 ... 1st mounting part (mounting part) 22 ... 2nd mounting part 23 ... Opening part 31 ... x-axis direction moving means (displacement means) 311 ... linear guide 312 ... ball screw 313 ... motor 32 ... y-axis direction moving means (displacement means) 321 ... linear guide 322 ... ball screw 323 ... motor 33 ... z-axis direction moving means (displacement means) 34... rotation means (displacement means) 4... head part (holding means) 41... suction part 5. Processing means 7... Light irradiation means 8... First plate-like body 81... Upper surface 82... First alignment mark 821 ... Image 9. Second alignment mark 921 ... Image 10... Evaporation mask 101... Gap 11 .. Photo-curing adhesive (adhesive) 20... Control means 201... CPU 202... Storage unit (storage means) 30. ……flame

Claims (12)

A gap is formed between the light-transmitting first plate having the first alignment mark and the second plate having the second alignment mark corresponding to the first alignment mark. A joining device for joining and fixing via,
Displacement means for relatively displacing the first plate-like body and the second plate-like body;
Imaging means for capturing images of the first alignment mark and the second alignment mark from the first plate-like body side;
The first plate-like body and the second plate-like shape are actuated by the displacement means so that the images of the first alignment mark and the second alignment mark taken by the imaging means coincide with each other. A joining apparatus configured to displace a body and fix the first plate-like body and the second plate-like body.   The joining apparatus according to claim 1, further comprising a transfer table having a placement portion on which the first plate-like body is placed.   3. The bonding according to claim 2, wherein the placement portion is configured such that a portion where the first alignment mark is located when the first plate-like body is placed is formed of a light transmissive member. apparatus.   The joining apparatus according to claim 2, wherein the imaging unit is located below the transfer table. The fixing between the first plate-like body and the second plate-like body is performed by a photocurable adhesive,
The light irradiating means installed on the first plate-like body side is operated to irradiate light, thereby curing the photo-curable adhesive, and the first plate-like body and the second plate-like body. The joining apparatus according to claim 1, wherein the body is fixed.   The bonding apparatus according to claim 5, wherein the light is ultraviolet light.   The joining apparatus according to any one of claims 1 to 6, wherein a deposit as the first alignment mark is provided on a surface of the first plate-like body on the second plate-like body side.   The joining apparatus according to claim 1, wherein a concave portion as the second alignment mark is provided on a surface of the second plate-like body on the first plate-like body side.   The joining apparatus according to claim 1, wherein the first alignment mark and the second alignment mark are sized and shaped so that one includes the other.   The positioning of the first plate-like body and the second plate-like body is determined when one of the first alignment mark and the second alignment mark includes the other. 9. The joining apparatus according to 9.   The gap is sized so that the first alignment mark and the second alignment mark are not in contact with each other when the first plate-like body and the second plate-like body are displaced. The joining device according to claim 10. A gap is formed between the light-transmitting first plate having the first alignment mark and the second plate having the second alignment mark corresponding to the first alignment mark. A joining method of joining and fixing via,
Images of the first alignment mark and the second alignment mark are captured from the first plate-like body side, and the captured images of the first alignment mark and the second alignment mark are captured. The first plate and the second plate are displaced so as to match, and the first plate and the second plate are fixed. Joining method.

Images