JP2006198725A - Clamping device and image forming device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a clamping device capable of being attached/detached to/from a stage and surely fixing even a workpiece of thickness to generate a warpage on the stage, and an image forming device provided with the clamping device. <P>SOLUTION: This clamping device 30 is provided with a base 32 mounted with the planar workpiece 100 thereon and attachably/detachably mounted on the stage 20, and a clamping part 34 provided in the base 32 to clamp an edge end part 100A of the workpiece 100. In the base 32, a plurality of communicating holes 32A for communicating an upper surface side of the base 32 with the stage 20 side are punched. This image forming device 10 is provided with the clamping device 30. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a clamping device that clamps a workpiece such as a printed wiring board placed on a stage, and further, a workpiece such as a printed wiring board clamped by a light beam modulated based on image information. The present invention relates to an image forming apparatus that forms an image by exposing a drawing area.

  2. Description of the Related Art Conventionally, there has been known a laser exposure apparatus as an image forming apparatus that forms a wiring pattern on a printed wiring board (hereinafter also referred to as “substrate” or “substrate material”). This laser exposure apparatus is provided with a stage member on which a printed wiring board to be subjected to image exposure is placed (loaded), and the stage member is moved along a predetermined conveyance path.

  More specifically, first, the printed wiring board is positioned and placed in a state where air is sucked from a plurality of (many) holes provided on the upper surface of the stage member and is sucked onto the stage member. Is done. The stage member positioned and mounted on the stage member and attracted / held moves in the sub-scanning direction at a predetermined speed, and at a predetermined measurement position, an alignment hole (hereinafter referred to as “alignment” provided in the printed wiring board). The image is referred to as “mark”) by the CCD camera. Then, the alignment process for the image information is executed by coordinate-transforming the drawing target area in the drawing coordinate system in accordance with the position of the printed wiring board obtained by the imaging.

  After execution of the alignment process, the printed circuit board on the stage member is modulated on the basis of image information at a predetermined exposure position and is formed on the upper surface by a laser beam deflected in the main scanning direction by a polygon mirror. The photosensitive coating film is scanned and exposed. Thereby, an image (latent image) based on the image information (corresponding to the wiring pattern) is formed in a predetermined area (drawing area) on the printed wiring board.

The printed wiring board on which the image (latent image) is formed is removed (unloaded) from the stage member after the stage member returns to the initial position, and the stage member from which the printed wiring board has been removed is It shifts to the process of exposing the printed wiring board of (refer patent document 1).
JP 2000-338432 A

  However, if the thickness of the printed circuit board is as thin as 1.5 mm or less, for example, the board can be sufficiently adsorbed and held on the stage member by the air suction force. If the substrate is thick, the substrate itself may be warped, and it is difficult to sufficiently attract and hold (fix) the substrate on the stage member only by the air suction force.

  Therefore, there is a need for a clamping device that can clamp the substrate supplementarily. However, since the printed wiring board has a different thickness as described above, the clamping device does not always have to be attached to the stage member. It is desirable that the clamping device be detachable from the stage member.

  Accordingly, in view of the above circumstances, the present invention provides a clamping device that can be reliably fixed on the stage even with a workpiece that is detachable from the stage and warps. It is an object to obtain an image forming apparatus provided.

  In order to achieve the above object, the clamping device according to claim 1 according to the present invention is provided with a base on which a plate-like workpiece is placed and detachably mounted on a stage, and the base. A clamp portion that clamps the edge of the workpiece, and the base is provided with a plurality of communication holes for communicating between the base upper surface side and the stage side. .

  A clamping device according to a second aspect is the clamping device according to the first aspect, wherein at least a part of the communication holes are arranged in the same manner as at least a part of the plurality of suction holes provided in the stage. It is characterized by that.

  According to the first and second aspects of the present invention, since the base provided with the clamp part is detachable from the stage, the clamp part can be attached to and detached from the stage, and the workpiece is mounted. Since a plurality of communication holes communicating with the suction holes of the stage are formed in the base to be placed, even a workpiece having a thickness that causes warping can be securely fixed on the stage via the base. . Further, since it is not necessary to clamp the workpiece on the stage (since it is only necessary to clamp the workpiece on the base), the clamping operation can be easily performed.

  Moreover, the clamp apparatus of Claim 3 is a clamp apparatus of Claim 1 or Claim 2, Comprising: The said clamp part is provided with the clamp member provided with two or more with respect to one edge | side of the said base, respectively. It is a feature.

  According to the invention described in claim 3, even if the size of the workpiece is changed, it is possible to flexibly cope with it.

  A clamp device according to a fourth aspect of the present invention is the clamp device according to any one of the first to third aspects, wherein the clamp portion is provided on the base and a retaining portion is formed. And a clamp member in which a mounting hole loosely fitted in the guide means is formed and an abutting portion abutting on the edge is formed, and the clamp member is provided and engaged with the retaining portion And a support member inserted into the through hole formed in the base portion on the opposite side of the abutting portion of the clamp member so that the clamp member cannot be removed from the guide means. Means, a biasing member that is fitted into the support means and biases the support means downward, and a support portion that is provided on the base and supports the support means. .

  And the clamp apparatus of Claim 5 WHEREIN: The clamp apparatus in any one of Claim 1 thru | or 3 WHEREIN: The said clamp part was provided in the said base and the flange was formed in the head. A support member, a clamp member in which a mounting hole loosely fitted in the support member is formed, and a claw portion that is in contact with the edge end portion from above; a clamp member that is slidable on the upper surface of the clamp member; The clamp member is inserted into a non-detachable through a locking plate that prevents the clamp member from falling off the support column, and a through hole formed in a base portion opposite to the claw portion of the clamp member. A support rod; a coil spring that is inserted into the support rod and biases the support rod downward; and a support portion that is provided on the base and supports a lower end portion of the support rod. as a feature That.

  According to invention of Claim 4 or Claim 5, a clamp member can be easily mounted | worn with respect to a base. Also, by pushing up the base of the clamp member from below, the contact part (claw part) provided on the side opposite to the base is configured to clamp (press) the workpiece, so the clamp part is made thinner Can be achieved.

  According to a sixth aspect of the present invention, in the image forming apparatus according to the sixth aspect, the stage on which the base is mounted in the clamping device according to any one of the first to fifth aspects is conveyed along a predetermined conveyance path. A transport mechanism, a measurement unit that detects an alignment mark of a workpiece on a stage transported by the transport mechanism, and a drawing unit that forms an image on the workpiece after alignment based on the detection result of the measurement unit. It is characterized by having.

  Still further, according to a seventh aspect of the present invention, in the image forming apparatus of the present invention, the stage on which the base is mounted in the clamping device according to any one of the first to fifth aspects is disposed along a predetermined conveyance path. A transport mechanism for transporting, a measurement unit for detecting an alignment mark of a work on a stage transported by the transport mechanism, and a drawing area of the workpiece after alignment based on the detection result of the measurement unit are modulated based on image information. And an exposure part that forms an image in the drawing area.

  According to the invention described in claim 6 or claim 7, even a workpiece having such a thickness that warps can be reliably fixed on the stage. Therefore, an image can be suitably formed on the work.

  As described above, according to the present invention, there is provided a clamp device that can be securely fixed on a stage even with a workpiece that is detachable from the stage and warps. An image forming apparatus can be provided.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS The best mode for carrying out the present invention will be described below in detail based on the embodiments shown in the drawings. FIG. 1 is a schematic perspective view of a laser exposure apparatus 10 showing an example of an image forming apparatus according to the present invention, and FIGS. 2 to 9 are schematic views showing a configuration of a clamp apparatus. 1 and 2, the arrow A is the transport direction, the arrow B is the width direction, the arrow FR is “front”, the arrow RE is “back”, the arrow RI is “right”, and the arrow LE is “left”. In some cases, the position of each part will be described using front / rear / right / left expressions.

[Configuration of laser exposure system]
First, the laser exposure apparatus 10 will be described. As shown in FIG. 1, the laser exposure apparatus 10 includes a rectangular thick plate-shaped installation base 14 supported by six legs 12. Two guide rails 16 are disposed along the longitudinal direction (conveying direction) on the upper surface of the installation table 14. A rectangular flat plate shape is provided on the two guide rails 16 via a guide portion 19. Stage member 20 is provided.

  The stage member 20 is disposed so that the longitudinal direction thereof is in the extending direction (conveying direction) of the guide rail 16, and is supported by the guide rail 16 and the guide portion 19 so as to be capable of reciprocating on the installation table 14. That is, it is configured to reciprocate at a predetermined speed along the guide rail 16 by a transport mechanism such as a motor 18 and a ball screw 22.

  On the upper surface of the stage member 20, a rectangular flat substrate material 100 as an exposure object is placed in a state of being positioned at a predetermined position by a positioning means (not shown). A plurality of (many) holes 20A are formed on the upper surface of the stage member 20, and the inside of the stage member 20 is made negative by a negative pressure supply source (not shown), so that the holes Air is sucked from 20 </ b> A, and the substrate material 100 is sucked and held on the upper surface of the stage member 20 by the suction force.

  In addition, when the substrate material 100 is warped at a predetermined thickness or more, it cannot be sufficiently adsorbed and held only by the air suction force (because it is difficult to securely fix), The clamping device 30 described later assists the substrate material 100 to be reliably attracted and held (fixed) on the upper surface of the stage member 20.

  Further, the substrate material 100 is provided with a plurality of alignment marks (not shown) indicating the reference of the exposure position in the drawing region on the exposed surface. The alignment marks are formed by, for example, circular through-holes, and four alignment marks are disposed in the vicinity of the four corners (hereinafter referred to as “corner portions”) of the substrate material 100, respectively.

  A substantially “U” -shaped gate 24 is provided at the center of the installation table 14 so as to straddle the movement path of the stage member 20. Both ends of the gate 24 are fixed to the installation table 14, and an exposure head 28 serving as an exposure unit (drawing unit) that exposes the substrate material 100 is disposed on one side (rear side) with the gate 24 interposed therebetween. On the other side (front side), a plurality of (for example, two) CCD cameras 26 are provided as measurement units for photographing the alignment marks provided on the substrate material 100.

  Therefore, when the substrate material 100 passes below the CCD camera 26 as the stage member 20 moves, the alignment mark is measured by the CCD camera 26. That is, each CCD camera 26 emits a strobe light source at the timing when the alignment mark of the substrate material 100 reaches a predetermined photographing position, and reflects the reflected light on the upper surface of the substrate material 100 of the strobe light irradiated to the substrate material 100. The alignment mark is photographed by inputting to the camera body through the lens.

  Further, a transport mechanism (motor 18 and ball screw 22) for moving the stage member 20, a CCD camera 26, an exposure head 28, and the like are connected to a controller (not shown) that controls them. By this controller, the stage member 20 is controlled to move at a predetermined speed, the CCD camera 26 is controlled to take an alignment mark of the substrate material 100 at a predetermined timing, and the exposure head 28 is a substrate at a predetermined timing. The material 100 is controlled to be exposed.

  The exposure heads 28 are arranged in an approximate matrix of m rows and n columns (for example, 2 rows and 4 columns). As shown in FIG. 10, the exposure area 28 </ b> A by the exposure head 28 is configured in a rectangular shape whose short side is the transport direction, for example. Therefore, a strip-shaped exposed region 102 is formed for each exposure head 28 in the substrate material 100 in accordance with the movement operation in the transport direction (front side to rear side).

  Further, each of the exposure heads 28 in each row arranged in a line is arranged at a predetermined interval (exposure area) in the arrangement direction so that the strip-shaped exposed regions 102 are arranged without gaps in the width direction (left-right direction) orthogonal to the conveyance direction. 28A is a natural number times the long side). For this reason, for example, a portion that cannot be exposed between the exposure area 28A of the first row and the exposure area 28A of the second row can be exposed by the exposure area 28A of the second row.

  Each exposure head 28 includes a digital micromirror device (DMD) (not shown) as a spatial light modulation element that modulates an incident laser beam for each pixel in accordance with image data. The DMD is connected to the controller having a data processing unit and a mirror drive control unit.

  The data processing unit of the controller generates a control signal for driving and controlling each micromirror in the region to be controlled by the DMD for each exposure head 28 based on the input image data. The mirror drive control unit controls the angle of the reflection surface of each micromirror in the DMD for each exposure head 28 based on the control signal generated by the data processing unit.

  A bundle-shaped optical fiber drawn from an illumination device that emits a multi-beam as a laser beam is connected to the light incident side of the DMD in each exposure head 28. The illuminating device is provided with a plurality of multiplexing modules that multiplex laser beams emitted from a plurality of semiconductor laser chips and input them to an optical fiber. The optical fiber extending from each multiplexing module is a combined optical fiber that propagates the combined laser beam, and a plurality of optical fibers are bundled into one to form a bundle-shaped optical fiber.

[Operation of laser exposure equipment]
Next, the operation of the laser exposure apparatus 10 configured as described above will be described. The substrate material 100 for image exposure by the laser exposure apparatus 10 is a substrate as a material for forming a pattern (image exposure) such as a printed wiring board or a liquid crystal display element, or a photosensitive epoxy resin on the surface of a glass plate or the like. In the case of a dry film, a laminated film is applied.

  First, when the substrate material 100 is placed on the upper surface of the stage member 20 by a loader (not shown) and positioned by positioning means (not shown), the substrate material 100 is attracted to the upper surface of the stage member 20 by suction of air from the hole 20A. Adsorbed and retained by

  At this time, if the substrate material 100 is a thick substrate of, for example, 3 mm or more and warps, it cannot be sufficiently adsorbed and held only by the air suction force (because it is difficult to securely fix it). ), The substrate material 100 is placed on the base member 32 of the clamp device 30 to be described later, the substrate material 100 is clamped by the clamp portion 34 provided on the base member 32, and the base member 32 is attached to the stage member 20 together. . At this time, since the base member 32 is provided with a plurality of (many) holes 32A similar to the stage member 20, the substrate material 100 is adsorbed and held (fixed) on the stage member 20 via the base member 32. Is done.

  When the substrate material 100 is sucked and held (fixed) on the upper surface of the stage member 20 in this way, the stage member 20 starts to move in the conveyance direction (from the rear side to the front side), and the substrate material 100 is conveyed to the alignment detection step by the CCD camera 26. Is done. That is, the exposure operation of the laser exposure apparatus 10 is started by the operator performing an exposure start input operation from the instruction input means of the controller.

  First, the transport mechanism (the motor 18 and the ball screw 22) is controlled by the controller, and the stage member 20 that adsorbs and holds the substrate material 100 on the upper surface moves along the guide rail 16 in the transport direction (from the rear side to the front side) at a constant speed. Start moving. In synchronism with the start of movement of the stage member 20 or at a timing just before the tip of the substrate material 100 reaches just below each CCD camera 26, each CCD camera 26 is controlled by the controller and starts operating.

  That is, for example, when four alignment marks provided in the vicinity of each corner portion of the substrate material 100 reach the optical axis of the lens in each CCD camera 26 (below the CCD camera 26), each CCD camera 26 The strobe light source emits light at a predetermined timing, and each alignment mark is photographed. The captured image data (reference position data) is output to the data processing unit of the controller.

  The data processing unit includes the position of the alignment mark in the image determined from the input image data (reference position data) of each alignment mark, the pitch between the alignment marks, and the like of the stage member 20 when the alignment mark is photographed. From the position and the position of the CCD camera 26, the position deviation of the substrate material 100 on the stage member 20, the inclination with respect to the moving direction, the dimensional accuracy error, etc. are grasped by arithmetic processing, and the appropriate exposure position of the substrate material 100 with respect to the exposed surface. Is calculated.

  Here, the image data corresponding to the exposure pattern is temporarily stored in a memory in the controller. Therefore, correction control (alignment) is performed in which image exposure is performed by aligning the control signal generated based on the image data of the exposure pattern stored in the memory at the appropriate exposure position when the image is exposed by the exposure head 28. Execute. This image data is data representing the density of each pixel constituting the image in binary (whether or not dots are recorded).

  Thus, when the measurement (photographing) of the alignment mark by each CCD camera 26 is completed, the stage member 20 is transported to the exposure process by the exposure head 28 by driving the transport mechanism (motor 18 and ball screw 22). That is, the stage member 20 starts to move along the guide rail 16 in the opposite direction (from the front side to the rear side). When the drawing area on the exposed surface of the substrate material 100 reaches the exposure start position below the exposure head 28, each exposure head 28 irradiates a laser beam to image the exposed surface (drawing area) of the substrate material 100. Start exposure.

  That is, the image data stored in the memory of the controller is sequentially read out for a plurality of lines, and a control signal is generated for each exposure head 28 based on the image data read out by the data processing unit. This control signal is subjected to correction of the exposure position deviation with respect to the substrate material 100 subjected to the alignment measurement by correction control (alignment). Then, the mirror drive control unit controls each of the DMD micromirrors for each exposure head 28 based on the generated and corrected control signals.

  When the DMD is irradiated with laser light emitted from the optical fiber of the illumination device, the laser light reflected when the micromirror of the DMD is turned on is imaged on the exposed surface of the substrate material 100 by the lens system. The Thus, the laser light emitted from the illumination device is turned on / off for each pixel, and the substrate material 100 is exposed in pixel units (exposure area 28A) of approximately the same number as the number of used pixels of the DMD.

  Then, the substrate material 100 is moved together with the stage member 20 at a constant speed, whereby the substrate material 100 is moved by the exposure head 28 in the direction opposite to the moving direction of the stage member 20 (the scanning direction indicated by the arrow S in FIG. 10A). ) And a strip-shaped exposed region 102 is formed for each exposure head 28 (see FIG. 10A).

  Thus, when the image exposure onto the substrate material 100 by the exposure head 28 is completed, the stage member 20 returns to the initial position on which the substrate material 100 is placed, so that suction by air suction and further clamping by the clamp device 30 are performed. Is released, and the substrate material 100 is removed from the stage member 20 (base member 32) by an unloader (not shown). Then, the substrate material 100 removed from the stage member 20 is transported to a transport conveyor (not shown) and transported to the next process.

[Configuration of clamping device]
Next, the clamp apparatus 30 used in the image forming apparatus such as the laser exposure apparatus 10 as described above will be described in detail with reference to FIGS. As shown in FIG. 2, the clamp device 30 is placed on the stage member 20 and is positioned by a positioning means (not shown) and has a rectangular plate shape (which naturally has a surface area larger than that of the substrate material 100) and And a clamp portion 34 provided on the base member 32.

  The base member 32 has a plurality of (many) holes 32 </ b> A that are in communication with the holes 20 </ b> A when placed and positioned on the stage member 20. The stage member 20 is configured such that the stage member 20 can be sucked and held (fixed) via the base member 32 (for each base member 32).

  There are two types of clamp parts 34, a fixed type clamp part 34A and a movable type clamp part 34B. For example, the front side and the left side of the stage member 20 are fixed type clamp parts 34A, and the right side and the rear side are movable type. The clamp portion 34B is used.

  In the fixed type clamp portion 34A, a slide member 36, which will be described later, is used as the fixed member 38. Therefore, the positioning means 70 shown in detail in FIG. 6 is not provided, and the substrate material 100 is placed on the base member 32. In this case, a plurality of positioning means for positioning first, for example, positioning pins 33, are set up in the vicinity of the inner side of the fixing plate 46 described later (two in the figure are one on the front side and one on the left side in total). This is different from the movable type clamp part 34B. Therefore, hereinafter, the movable type clamp part 34B will be mainly described, and for the fixed type clamp part 34A, in each drawing, the same reference numerals are given to those having the same function as the movable type clamp part 34B, Detailed description thereof is omitted.

  As shown in FIGS. 3 and 4, the movable type clamp portion 34 </ b> B is an elongated plate shape that is slidably and fixedly provided so as to approach and separate from the substrate material 100 placed on the base member 32. And a plurality of substantially rectangular plate-like clamp members (three in the figure are provided for each side of the substrate material 100) that are detachably attached to the slide member 36. Yes. In the fixed-type clamp portion 34A, a plurality of clamp members 40 are detachably attached to the fixed member 38 (three in the figure are attached to each side of the substrate material 100).

  At both ends of the slide member 36, a long slot 36A is formed in a direction perpendicular to the longitudinal direction, and a fixing screw 90 that can be screwed with a finger is inserted into the slot 36A and inserted into the base member 32. Screwed. Therefore, the slide member 36 is configured to be slidable and fixable manually in the direction of approaching and separating from the substrate material 100 on the base member 32. Note that the fixing member 38 is fixed to the base member 32 by mounting screws 94.

  A substantially columnar column 44 for attaching the clamp member 40 is erected on the upper surface of the slide member 36 via an attachment plate 42. The mounting plate 42 has a bifurcated base 42A side attached to the slide member 36 by mounting screws 96, and a column 44 is erected at a predetermined position on the tip 42B side.

  A plurality of the support posts 44 are erected via a mounting plate 42 at a predetermined interval in the longitudinal direction of the slide member 36 (three shown in the figure are each one of the clamp members 40). A substantially disc-shaped flange 44 </ b> A having a diameter larger than that of the support 44 is formed integrally with the upper portion 44. Then, as shown in FIG. 8, a mounting screw 92 is screwed into the lower end portion of the column 44.

  A fixing plate 46 is attached to the inner side (the substrate material 100 side) of the slide member 36 by an attachment screw 94 in parallel to the slide member 36 and at a predetermined interval. The fixing plate 46 is provided with a long hole 46A that is long in a direction perpendicular to the longitudinal direction (direction approaching or separating from the substrate material 100) so that the lower end portion including the mounting screw 92 of the column 44 can be inserted. When the slide member 36 moves along the long hole 36A, the lower end portion of the support column 44 moves along the long hole 46A.

  A similar fixing plate 46 is also attached to the fixing member 38 side by a mounting screw 94 in parallel to the fixing member 38 and at a predetermined interval. However, the fixing plate 46 is not provided with a long hole 46A. . That is, the attachment plate 42 is not attached to the fixed member 38 side, and the support column 44 is directly attached to the fixed plate 46 (see FIG. 9).

  Therefore, the substrate material 100 is disposed on the inner side of the fixed plate 46, and the slide member 36 slides so as to approach and separate from the fixed plate 46 on the outer side of the fixed plate 46. That is, the movable-type clamp portion 34B moves toward the edge portion 100A that is outside the drawing region of the substrate material 100 disposed inside the fixed plate 46 when the slide member 36 approaches and separates from the fixed plate 46. The position of the clamp member 40 can be adjusted.

  On the other hand, as shown in FIG. 5, a mounting hole 40 </ b> A into which the support 44 (including the flange 44 </ b> A) can be loosely inserted is provided along the longitudinal direction at a substantially central portion in the width direction (indicated by arrow D) of the clamp member 40. In addition, a plurality of (three in the drawing) are formed at predetermined intervals, and a locking plate 50 configured to be slidable in the longitudinal direction is provided at a substantially central portion of the upper surface of the clamp member 40. The clamp member 40 is provided with a length slightly shorter than the length in the longitudinal direction (a length that does not protrude from the clamp member 40 even if it is slid in the longitudinal direction).

  In addition, two long holes 50A that are long in the longitudinal direction (sliding direction) are formed in the locking plate 50 at a predetermined interval, and the mounting screws 94 of the clamp member 40 are respectively passed through the long holes 50A. It is attached to the top surface. Thus, the locking plate 50 is configured to be slidable in the longitudinal direction within the range of the long hole 50A.

  Further, the locking plate 50 has the same diameter as the flange 44A, or a slightly larger diameter than that of the flange 44A, and a diameter smaller than that of the mounting hole 40A, the same diameter as that of the support column 44, and a slide. Two locking holes 52 formed so as to communicate with the small-diameter portion 52B formed into a long hole shape in the moving direction are formed so as to be able to communicate with the mounting hole 40A. A notch 53 that is substantially the same as the small diameter portion 52 </ b> B is formed at the left end of the locking plate 50.

  Therefore, after the flange 44A of the column 44 is inserted into the mounting hole 40A and the large diameter portion 52A and protrudes from the upper surface of the locking plate 50, the locking plate 50 is slid in the longitudinal direction (the left in the drawing is the left side). By engaging the small-diameter portion 52B and the notch portion 53 with the support 44, the clamp member 40 is attached from the slide member 36 to prevent it from falling off as shown in FIG.

  As shown in FIGS. 3, 8, and 9, the lower surface of one long side of the clamp member 40 protrudes in a substantially circular arc shape when viewed in cross section, and contacts the edge 100 </ b> A of the substrate material 100 from above. The nail | claw part 54 which touches is formed. And the other long side part of the clamp member 40 is made into the base part 56, The through-hole 56A corresponding to the attachment hole 40A (parallel) is formed in the base part 56 along the longitudinal direction and at a predetermined interval. A plurality (three shown) are formed.

  A substantially cylindrical support rod 58 having a lower end protruding in a substantially hemispherical shape is inserted into the through hole 56A, and the support rod 58 is provided near the upper end and the lower end of the support rod 58. Larger flanges 62A and 62B are fitted. Thus, the support rod 58 is prevented from falling off from the clamp member 40.

  As shown in FIGS. 8 and 9, a coil spring 60 is inserted into the support rod 58 on the lower surface side of the clamp member 40 (base portion 56). That is, the coil spring 60 is inserted between the lower surface of the clamp member 40 (base 56) and the lower flange 62B of the support rod 58. Accordingly, the support rod 58 is urged so as to always protrude downward from the lower surface of the clamp member 40.

  As shown in FIGS. 3 and 4, in the slide member 36, a support portion 48 that supports the lower end portion of the support rod 58 is formed between the base portions 42 </ b> A of the bifurcated mounting plate 42. The support 48 is recessed in a substantially hemispherical shape having a smaller curvature than the lower end of the support rod 58, and is configured such that the lower end of the support rod 58 is slidably contacted.

  Further, a plurality of positioning means 70 for the substrate material 100 are provided on the inner side (substrate material 100 side) end surface of the slide member 36 (two in the figure are provided at a predetermined interval with respect to each slide member 36). It has been. And the fixing plate 46 in the site | part in which this positioning means 70 is provided is set as the structure which accept | permits the attachment of the positioning means 70 by notching suitably.

  As shown in FIGS. 6 and 7, the positioning means 70 has a pin-shaped positioning member 72 provided so as to be able to enter and exit the slide member 36, and this positioning member 72 is attached to the end surface 100 </ b> B of the substrate material 100. The sliding member 36 (clamp member 40) is positioned with respect to the substrate material 100 by abutting.

  That is, a substantially rectangular flat casing 64 is attached to the end surface of the slide member 36 on the inner side (substrate material 100 side) by a mounting screw 96, and the first slit 66A is formed on the top plate 64A of the casing 64. In parallel with the longitudinal direction of the slide member 36, the top plate 64A is drilled to substantially the center. A second slit 66 </ b> B communicating with the first slit 66 </ b> A is formed in one side wall 64 </ b> B of the casing 64 by a predetermined length in a direction away from the substrate material 100 (on the slide member 36 side).

  The positioning member 72 is formed by bending a cylindrical pin having a predetermined length into a substantially “L” shape, and a shorter one end (hereinafter referred to as “operation unit”) 72A is the first slit 66A or the second slit 66B. Projecting outward. A circular opening 68 having a diameter equal to or slightly larger than the diameter of the positioning member 72 is formed in the front wall 64C of the casing 64 facing the substrate material 100. The other end portion (hereinafter referred to as “contact portion”) 72 </ b> B can enter and exit from the opening 68.

  A coil spring 74 is inserted into the contact portion 72B side of the bending member 72C of the positioning member 72. One end of the coil spring 74 abuts on a locking flange 76 fitted approximately in the middle between the bent portion 72C and the abutment portion 72B, and the other end of the coil spring 74 is fixed to the inner surface of the front wall 64C. The contact portion 72B is in contact with a locking flange 78 that can be inserted. Therefore, the positioning member 72 is constantly biased in the direction away from the substrate material 100 (the slide member 36 side) by the biasing force of the coil spring 74.

[Operation of clamping device]
Next, the operation of the clamp device 30 configured as described above will be described. First, the positioning method by the positioning means 70 will be described mainly based on FIG. First, the substrate material 100 is placed on the base member 32, and the front end surface of the substrate material 100 is placed on the positioning pins 33 provided in the vicinity of the inner side (substrate material 100 side) of the fixed plate 46 in the fixed type clamp portion 34A. 100B and the left end surface 100B are brought into contact with each other.

  Thereafter, in the movable type clamp portion 34B, first, each operation that protrudes from the end of the second slit 66B on the slide member 36 side and is locked and held in a state of being biased by the biasing force of the coil spring 74 is performed. The portion 72A is moved toward the substrate material 100 against the biasing force of the coil spring 74 (see FIG. 7A).

  When the second slit 66B reaches the end of the substrate material 100 side, the second slit 66B is rotated upward so as to be moved into the first slit 66A as it is (see FIG. 7B). As a result, the operation portion 72A of each positioning member 72 abuts on the top plate 64A by the biasing force of the coil spring 74 at the end of the first slit 66A on the top plate 64A side (substantially the center of the top plate 64A). The contact portion 72 </ b> B of each positioning member 72 protrudes from the opening 68 by a predetermined length.

  Thus, when each contact portion 72B protrudes from the opening 68, each slide member 36 is inserted into the long hole 36A and the long hole until each contact portion 72B contacts the right end surface 100B and the rear end surface 100B of the substrate material 100. The substrate material 100 is made to approach (slide) along 46A (see FIG. 7C). Then, when the respective contact portions 72B are brought into contact with the right end surface 100B and the rear end surface 100B of the substrate material 100, the respective slide members 36 are fixed by the fixing screws 90 at the positions.

  Thus, when the positioning of the slide member 36 with respect to the substrate material 100 is completed in the movable type clamp portion 34B (when each slide member 36 is fixed), the operation portions 72A are placed in the first slit 66A in the opposite direction to the above. The finger is released when the second slit 66B is rotated.

  Then, each positioning member 72 is automatically moved in a direction away from the substrate material 100 (on the slide member 36 side) by the biasing force of the coil spring 74, and each contact portion 72 </ b> B protruding from the opening 68 is formed in the casing. Retract into 64 (see FIG. 7D). Thereby, the positioning operation of the slide member 36 with respect to the substrate material 100 is completed.

  After the positioning by the positioning means 70, a plurality of clamp members 40 (three in the figure for each side) are attached to the fixing member 38 and the slide member 36. Therefore, a method for attaching the clamp member 40 will be described mainly with reference to FIG.

  Each clamp member 40, after the slide member 36 is positioned by the positioning means 70, abuts the lower end portion of the support rod 58 on the support portion 48 provided on each slide member 36 and each fixing member 38, and The flange 44A of the column 44 is inserted through the mounting hole 40A.

  At this time, since the operation portion 72A does not protrude from the top plate 64A of the casing 64, the clamp member 40 can be attached to the slide member 36. That is, since the clamp member 40 cannot be attached when the operation portion 72A of the positioning member 72 protrudes from the top plate 64A, the positioning member 72 is positioned in the movable type clamp portion 34B. It is possible to prevent forgetting to operate later.

  In any case, when the flange 44A of the column 44 is inserted into the mounting hole 40A, the upper surface of the clamp member 40 is pressed with a finger against the urging force of the coil spring 60 in this state, and the flange 44A of the column 44 is pressed. The locking plate 50 is slid in the left direction in FIG. 5 while being inserted through the mounting hole 40A and the locking hole 52 (large diameter portion 52A).

  That is, since the coil spring 60 is inserted into the support rod 58, the flange 44 </ b> A of the column 44 does not protrude upward from the mounting hole 40 </ b> A and the large diameter portion 52 </ b> A of the locking hole 52 only by the weight of the clamp member 40. . Therefore, the upper surface of the clamp member 40 is manually pressed, and the flange 44 </ b> A of the column 44 is protruded upward from the mounting hole 40 </ b> A and the large diameter portion 52 </ b> A of the locking hole 52. Then, with this state maintained, the locking plate 50 is slid (slid) in the left direction in FIG. 5 within the range of the long hole 50A.

  Then, since the small diameter portion 52B and the notch portion 53 of the locking hole 52 formed in the locking plate 50 abut on the peripheral surface of the support column 44, it is locked to the lower surface of the flange 44A by the biasing force of the coil spring 60. The upper surface of the plate 50 can be abutted and engaged. That is, each clamp member 40 can be attached to the support column 44 in a state in which the drop-off is prevented. Thus, each clamp member 40 is attached to the slide member 36 and the fixing member 38, whereby the edge portion 100 </ b> A of the substrate material 100 is clamped by each clamp member 40.

  That is, the clamp member 40 has its base portion 56 side pushed upward (from the base member 32) upward by the urging force of the coil spring 60, and between the support column 44 and the mounting hole 40A, a predetermined amount. Since the gap is formed, the claw portion 54 side is rotated downward with the vicinity of the mounting hole 40A into which the support column 44 is inserted as a fulcrum. Therefore, the claw portion 54 can press and hold the edge portion 100A of the substrate material 100 by the biasing force of the coil spring 60, and the clamp member 40 clamps the edge portion 100A of the substrate material 100. Is possible.

  Here, on the fixing member 38 side, the front end surface 100B and the left end surface 100B of the substrate material 100 are brought into contact with the positioning pins 33, whereby the positioning of the clamp members 40 with respect to the respective edge portions 100A has already been completed. Since the positioning of the clamp member 40 with respect to each edge 100A of the substrate material 100 is completed by the positioning means 70 on the slide member 36 side, even if the substrate material 100 is warped (deformed), the drawing region The outer edge portion 100A can be reliably clamped.

  That is, when the warped substrate material 100 is clamped by the clamp member 40, the substrate material 100 is deformed so as to spread slightly. However, the positioning member is located between the fixed plate 46 on the slide member 36 side and the substrate material 100. 72, a predetermined gap is formed. In other words, the positioning member 72 is positioned in consideration of the elongation of the substrate material 100 that occurs when the warp is corrected. Even if such deformation occurs, it can be sufficiently tolerated.

  Further, the clamp member 40 is configured such that the claw portion 54 on the opposite side presses from the top to the bottom when the base portion 56 side is pushed up from the bottom, so that the clamp portion 34 8 and 9, as shown in FIGS. 8 and 9, even if the thickness of the substrate material 100 is different (even if it becomes thicker), it can be clamped correspondingly enough. Incidentally, in this clamping device 30, it is possible to clamp the substrate material 100 having a thickness of up to 7 mm.

  In addition, the clamp portion 34 is configured so that each corner portion of the substrate material 100 can be reliably clamped. That is, as shown in FIG. 2 and FIG. 4, the clamp portion 34 </ b> A that is a fixed type on the front side and the claw portion 54 of the clamp portion 34 </ b> B that is a movable type on the rear side are each a clamp portion that is a fixed type on the left side. 34A and the clamp member 40 on the extension line (indicated by the phantom line K in FIG. 4) so as to overlap with the extension line in the longitudinal direction of the claw part 54 of the clamp part 34B of the right movable type clamp part 34B. It is comprised so that the support | pillar 44 for attaching may come.

  With such a configuration, even if warpage or the like occurs in the substrate material 100, each corner portion can be reliably clamped, so that the warpage can be sufficiently corrected (resolved). Therefore, the substrate material 100 can be reliably adsorbed and held by the suction force of the air sucked through the hole 20A of the stage member 20 and the hole 32A of the base member 32.

  That is, when the clamping of the clamping device 30 with respect to the substrate material 100 is completed, the base member 32 is placed on the stage member 20 and positioned by positioning means (not shown). At this time, the hole formed in the base member 32 Since the hole portion 20A formed in the stage member 20 communicates with the hole portion 32A, the substrate material 100 clamped by the clamping device 30 can be reliably placed on the stage member 20 by sucking air from the hole portions 20A and 32A. Can be adsorbed and held.

  Therefore, it is possible to execute the alignment process by the CCD camera 26 and the exposure process by the exposure head 28 accurately and suitably, and an accurate image can be reliably formed. Therefore, the reliability in the image forming apparatus such as the laser exposure apparatus 10 can be improved. The clamp device 30 can also be applied to a device such as a laser processing machine that forms a hole for conduction in the substrate material 100.

  In any case, according to the present invention, the base member 32 provided with the clamp portion 34 can be attached to and detached from the stage member 20, and the substrate material 100 is placed on the base member 32. Therefore, the clamp portion 34 can be attached to and detached from the stage member 20, and even when the substrate material 100 having a thickness that causes warping is exposed, the clamp member 34 can be reliably placed on the stage member 20 via the base member 32. Can be adsorbed and held (fixed). Further, this clamping work may be performed on the base member 32, and it is not necessary to perform it on the stage member 20. Therefore, there is an advantage that it can be easily performed.

  Further, the clamp member 40 is configured to be attached to the support column 44 by sliding the locking plate 50, so that the attaching / detaching operation can be easily performed. A plurality of clamp members 40 are provided and clamped on each side of the substrate material 100, that is, on the slide member 36 and the fixing member 38 (in other words, on each slide member 36 and each fixing member 38). Therefore, even if the size of the substrate material 100 is changed, it is possible to flexibly cope with the change. However, when the size of the substrate material 100 is significantly changed, the base member 32 is replaced according to the size of the substrate material 100.

Schematic perspective view showing a laser exposure apparatus Schematic plan view showing the clamp device Schematic perspective view showing slide member and clamp member provided on base member Schematic plan view showing a slide member provided on the base member (A) Schematic plan view showing the clamp member before the locking plate slides, (B) Schematic plan view showing the clamp member after the locking plate slides Schematic perspective view showing configuration of positioning means Schematic plan view for explaining a positioning method by positioning means Schematic side view showing a situation when substrate materials with different thicknesses are clamped by a movable type clamp Schematic side view showing a situation when substrate materials with different thicknesses are clamped by a fixed type clamp (A) Schematic plan view showing exposure area by exposure head, (B) Schematic plan view showing arrangement pattern of exposure heads

Explanation of symbols

10 Laser exposure equipment (image forming equipment)
18 Motor (conveyance mechanism)
20 Stage member (stage)
20A hole (adsorption hole)
22 Ball screw (conveyance mechanism)
26 CCD camera (measurement unit)
28 Exposure head (exposure unit, drawing unit)
30 Clamping device 32 Base member 32A Hole (communication hole)
33 Positioning Pin 34 Clamping Section 36 Slide Member 38 Fixing Member 40 Clamp Member 42 Mounting Plate 44 Column (Guide Means)
44A Flange (Retaining part)
46 fixed plate 48 support part 50 locking plate (locking member)
52 Locking hole 53 Notch part 54 Claw part (contact part)
56 Base 58 Support rod (support means)
60 Coil spring (biasing member)
66A First slit 66B Second slit 68 Opening 70 Positioning means 72 Positioning member 74 Coil spring 76 Locking flange 78 Locking flange 100 Substrate material (workpiece)
100A edge 100B end face

Claims (7)

A base on which a plate-like workpiece is placed and detachably mounted on the stage;
A clamp part that is provided on the base and clamps an edge of the workpiece;
With
The clamp apparatus according to claim 1, wherein a plurality of communication holes are formed in the base so as to communicate between the base upper surface side and the stage side.   The clamping device according to claim 1, wherein at least a part of the communication hole is arranged in the same manner as at least a part of a plurality of suction holes provided in the stage.   The clamp apparatus according to claim 1, wherein the clamp unit includes a plurality of clamp members provided for one side of the base. The clamp part is
Guide means provided on the base and formed with a retaining portion;
A clamp member in which a mounting hole loosely fitted in the guide means is formed, and a contact portion that contacts the edge portion is formed;
A locking member that is provided on the clamp member, engages with the retaining portion, and prevents the clamp member from dropping from the guide means;
Support means inserted in a through-hole formed in the base opposite to the contact portion of the clamp member so as not to fall off;
A biasing member inserted into the support means and biasing the support means downward;
A support portion provided on the base and supporting the support means;
The clamp device according to any one of claims 1 to 3, wherein the clamp device is provided. The clamp part is
A support provided on the base and having a flange formed on the head,
A clamp member in which a mounting hole that is loosely fitted to the support column is formed, and a claw portion that contacts the edge end portion from above is formed;
A locking plate that is slidably provided on the upper surface of the clamp member, engages with the flange, and prevents the clamp member from falling off the support column;
A support rod inserted so as not to fall off into a through-hole formed in a base portion on the opposite side of the claw portion of the clamp member;
A coil spring that is inserted into the support rod and biases the support rod downward;
A support portion provided on the base and supporting a lower end portion of the support rod;
The clamp device according to any one of claims 1 to 3, wherein the clamp device is provided. A transport mechanism that transports a stage on which a base is mounted in the clamping device according to any one of claims 1 to 5 along a predetermined transport path;
A measurement unit for detecting an alignment mark of a workpiece on a stage conveyed by the conveyance mechanism;
A drawing unit that forms an image on the workpiece after alignment based on the detection result of the measurement unit;
An image forming apparatus comprising: A transport mechanism that transports a stage on which a base is mounted in the clamping device according to any one of claims 1 to 5 along a predetermined transport path;
A measurement unit for detecting an alignment mark of a workpiece on a stage conveyed by the conveyance mechanism;
An exposure unit that exposes a drawing region of the workpiece after alignment based on the detection result of the measurement unit with a light beam modulated based on image information, and forms an image in the drawing region;
An image forming apparatus comprising:

Images