CN101124859A - Clamping apparatus and image forming apparatus - Google Patents
Clamping apparatus and image forming apparatus Download PDFInfo
- Publication number
- CN101124859A CN101124859A CNA2006800028227A CN200680002822A CN101124859A CN 101124859 A CN101124859 A CN 101124859A CN A2006800028227 A CNA2006800028227 A CN A2006800028227A CN 200680002822 A CN200680002822 A CN 200680002822A CN 101124859 A CN101124859 A CN 101124859A
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- Prior art keywords
- mounting table
- matrix
- clamp
- clamp member
- workpiece
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G15/00—Apparatus for electrographic processes using a charge pattern
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
- H05K13/0069—Holders for printed circuit boards
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Jigs For Machine Tools (AREA)
- Laser Beam Processing (AREA)
Abstract
A clamping apparatus, which can be removably arranged on a stage, and can surely fix on the stage even a work having a thickness which might cause warping; and an image forming apparatus provided with such clamping apparatus. The clamping apparatus (30) is provided with a base (32) which is removably mounted on the stage (20) with the board-shaped work (100) placed on the base, and a clamping section (34) arranged on the base (32) for clamping an edge section (100A) of the work (100). A plurality of communicating holes (32A) penetrate the base (32) for communicating between an upper plane side of the base (32) and a side of a stage (20). The image forming apparatus (10) is provided with the clamping apparatus (30).
Description
Technical field
The present invention relates to clamp the grip device of the workpiece such as printed circuit substrate of mounting on mounting table, the drawing area of workpiece such as this nipped printed substrate is exposed form the imaging device of image thereby relate in particular to light beam that utilization modulates based on image information.
Background technology
In the past, for example as waiting the laser explosure device of the imaging device of going up the formation wiring pattern known at printed circuit substrate (below be also referred to as " substrate " or " baseplate material ").In this laser explosure device, possess the mounting table parts of mounting (loading), and these mounting table parts are moved along the transport path of regulation as the printed circuit substrate of image exposure object.
Specifically describe, at first, by a plurality of (several) hole portion attraction air from being provided with at the mounting table parts, thereby to be adsorbed on the state location mounting printed circuit substrate on these mounting table parts.On the mounting table parts, locate mounting, the mounting table parts that are adsorbed maintenance move to sub scanning direction with the speed of stipulating, locating of regulation, the registration holes (hereinafter referred to as aiming at sign) that is provided with on this printed circuit substrate is made a video recording by ccd video camera.And the registration process for image information by coordinate transform is carried out in the drawing object zone in the drawing coordinate system, is carried out in the position of the printed circuit substrate that contrast is obtained by this shooting.
After carrying out registration process, the printed circuit substrate on the mounting table parts is filmed to the photonasty that laser beam scans and exposure-processed forms in the above of main scanning direction deflection based on the image information modulation and by polygon mirror in the exposure position utilization of regulation.Thus, the regulation zone (drawing area) on printed circuit substrate forms the image (sub-image) based on image information (corresponding with wiring pattern).
Then, in mounting table parts reset movement behind initial position, from the mounting table parts, take out (unloading) and formed the printed circuit substrate of image (sub-image), and the mounting table parts that will take out printed circuit substrate move to the operation (for example with reference to patent documentation 1) of the next printed circuit substrate that exposes.
Patent documentation 1: the Japanese documentation spy opens the 2000-338432 communique.
Summary of the invention
But, at the thickness of printed circuit substrate below as 1.5mm under the relatively thinner situation, though can utilize the attraction of air fully this substrate absorption to be remained on the mounting table parts, but for example more than the 3.0mm under the thicker situation, because substrate self produces crooked, be difficult to fully this substrate absorption be kept (fixing) rough sledding on the mounting table parts so only exist by the attraction of air.
Therefore, need can complementary ground chucking substrate grip device, but printed circuit substrate so do not need grip device always to be mounted on the mounting table parts, wishes that grip device can load and unload for the mounting table parts as mentioned above because of the thickness difference on the contrary.
Therefore, a kind ofly can load and unload and have the imaging device that the workpiece (process object thing) that produces crooked thickness still can be fixed on the grip device on this mounting table reliably and possess this grip device even the object of the present invention is to provide for mounting table.
The grip device of first mode of the present invention is characterised in that to possess: matrix, and the workpiece that its mounting is tabular, and releasably be installed on the mounting table; And clamp portion, it is arranged on the described matrix, and clamps the marginal end portion of described workpiece; Wherein, make a plurality of intercommunicating pores that are communicated with between this substrates side and the described mounting table side penetrating on the described matrix to be provided with.
And the grip device of second mode of the present invention is characterised in that in the grip device of first mode of the present invention, at least a portion of described intercommunicating pore is identical with the configuration of at least a portion of a plurality of adsorption holes that are provided with on described mounting table.
According to first, second mode of the present invention, because being provided with the matrix of clamp portion can load and unload with respect to mounting table, but so can be with respect to mounting table loading and unloading clamp portion, and, be provided with a plurality of intercommunicating pores that are communicated with the adsorption hole of mounting table because on the matrix of mounting workpiece, penetrate, so still can be fixed on the mounting table reliably via matrix even produce crooked thicker workpiece.In addition, because do not need, can easily carry out clamp operation the clamp operation of carrying out workpiece on the mounting table (clamp operation of carrying out workpiece on matrix gets final product).
In addition, the grip device of Third Way of the present invention is characterised in that in the grip device of the present invention first or second mode, the limit that described clamp portion has with respect to described matrix is provided with a plurality of clamp member separately.
According to Third Way of the present invention, even the size of change workpiece still can flexible be tackled.
In addition, the grip device of cubic formula of the present invention is characterised in that, in the grip device of any mode of first mode of the present invention to the Third Way, described clamp portion has: guide portion, and it is arranged on the described matrix, and is formed with the anti-delinking part; Clamp member, it penetrates the installing hole that is provided with described guide portion trip embedding, and is formed with the abutting part with described marginal end portion butt; Latch for printed circuit, it is arranged on the described clamp member, and engages with described anti-delinking part, and this clamp member can not be come off from described guide portion; Support, it is not inserted not tear-awayly and leads in penetrating in the through hole of setting on described clamp member and base portion described abutting part opposition side; Push part, it is inserted and is embedded on the described support, and pushes this support downwards; And be arranged on the described matrix and support the support of described support.
And the grip device of the 5th mode of the present invention is characterised in that, in the grip device of any mode of first mode of the present invention to the Third Way, described clamp portion has: pillar, and it is arranged on the described matrix, and is formed with bead at head; Clamp member, it penetrates the installing hole that is provided with described pillar trip embedding, and is formed with from the claw of top and described marginal end portion butt; Card ends plate, and it is slidably disposed on the upper surface of described clamp member, and engages with described bead, and this clamp member can not be come off from described pillar; Cramp bar, it is not inserted not tear-awayly and leads in penetrating in the through hole of setting on described clamp member and base portion described claw opposition side; Helical spring, it is inserted and is embedded on the described cramp bar, and pushes this cramp bar downwards; And support, it is arranged on the described matrix, and supports the bottom of described cramp bar.
According to the of the present invention the 4th or the 5th mode, for matrix, sectional fixture parts easily.In addition, by the base portion of top clamp member from bottom to top, the abutting part (claw) that is arranged on the base portion opposition side is clamped (pushing) workpiece, can realize the slimming of clamp portion thus.
In addition, the imaging device of the 6th mode of the present invention is characterised in that to have: conveying mechanism, and its transport path along regulation is carried the mounting table that the matrix in each described grip device in the present invention's first to the 5th mode is installed; Determination part, it detects the aligning sign of the workpiece on the mounting table of being carried by described conveying mechanism; And drawing portion, it carries out imaging to the workpiece after aiming at based on the testing result of described determination part.
And the imaging device of the 7th mode of the present invention is characterised in that to have: conveying mechanism, its transport path along regulation are carried the mounting table of matrix of the grip device of any mode in first mode to the, five modes of the present invention that is equipped with; Determination part, it detects the aligning of the workpiece on the mounting table of being carried by described conveying mechanism; Exposure portion, it utilizes the light beam of modulating based on image information to come the drawing area of the workpiece after aiming at based on the testing result of described determination part is exposed, and forms image at this drawing area.
According to the of the present invention the 6th or the 7th mode,, still can be fixed on the mounting table reliably even generate crooked thicker workpiece.Thereby can on this workpiece, suitably form image.
The invention effect
As mentioned above, can provide for mounting table and can load and unload, even and produce the imaging device that crooked thicker workpiece still can be fixed on the grip device on this mounting table reliably and possess this grip device according to the present invention.
Description of drawings
Fig. 1 is the concise and to the point stereogram that laser explosure device is shown.
Fig. 2 is the concise and to the point vertical view that grip device is shown.
Fig. 3 illustrates the slide unit that is arranged on the matrix part and the concise and to the point stereogram of clamp member.
Fig. 4 is the concise and to the point vertical view that the slide unit that is arranged on the matrix part is shown.
Fig. 5 (A) is that the card that clamp member is shown ends the preceding concise and to the point vertical view of plate slip.
Fig. 5 (B) is that card that clamp member is shown ends the concise and to the point vertical view after plate slides.
Fig. 6 (A) is the concise and to the point stereogram that the structure of location division is shown.
Fig. 6 (B) is the concise and to the point stereogram that the structure of location division is shown.
Fig. 7 (A) is the concise and to the point vertical view that explanation utilizes the localization method of location division.
Fig. 7 (B) is the concise and to the point vertical view that explanation utilizes the localization method of location division.
Fig. 7 (C) is the concise and to the point vertical view that explanation utilizes the localization method of location division.
Fig. 7 (D) is the concise and to the point vertical view that explanation utilizes the localization method of location division.
Fig. 8 (A) is the concise and to the point end view that illustrates by the situation behind the different baseplate material of the clamp portion grip thickness of movable type.
Fig. 8 (B) is the concise and to the point end view that illustrates by the situation behind the different baseplate material of the clamp portion grip thickness of movable type.
Fig. 8 (C) is the concise and to the point end view that illustrates by the situation behind the different baseplate material of the clamp portion grip thickness of movable type.
Fig. 9 (A) is the concise and to the point end view that illustrates by the situation behind the different baseplate material of the clamp portion grip thickness of fixed.
Fig. 9 (B) is the concise and to the point end view that illustrates by the situation behind the different baseplate material of the clamp portion grip thickness of fixed.
Fig. 9 (C) is the concise and to the point end view that illustrates by the situation behind the different baseplate material of the clamp portion grip thickness of fixed.
Figure 10 (A) is the concise and to the point vertical view that the exposure area of photohead generation is shown.
Figure 10 (B) is the concise and to the point vertical view that the spread geometry of photohead is shown.
Among the figure, 10-laser explosure device (imaging device); 18-motor (conveying mechanism); 20-mounting table parts (mounting table); 20A-hole portion (adsorption hole); 22-ball-screw (conveying mechanism); 26-CCD video camera (determination part); 28-photohead (exposure portion, drawing portion); The 30-grip device; The 32-matrix part; 32A-hole portion (intercommunicating pore); The 33-alignment pin; The 34-clamp portion; The 36-slide unit; The 38-fixed part; The 40-clamp member; The 42-mounting panel; 44-pillar (guide portion); 44A-bead (anti-delinking part); The 46-fixed head; The 48-support; The 50-card ends plate (latch for printed circuit); The 52-stop hole; The 53-notch; 54-claw (abutting part); The 56-base portion; 58-cramp bar (support); 60-helical spring (push part); 66A-first slit; 66B-second slit; The 68-perforate; The 70-location division; The 72-positioning element; The 74-helical spring; The 76-card ends bead; The 78-card ends bead; 100-baseplate material (workpiece); The 100A-marginal end portion; The 100B-end face.
Embodiment
Below, based on embodiment shown in the drawings optimum execution mode of the present invention is described in detail.Fig. 1 is the concise and to the point stereogram that illustrates as the laser explosure device 10 of an example of imaging device of the present invention, and Fig. 2 to Fig. 9 (A) (B) (C) is the structure diagram that grip device is shown.And in Fig. 1, Fig. 2, arrow A is a throughput direction, arrow B is a Width, and arrow FR is made as " preceding ", and arrow " RE " is made as " back ", arrow RI is made as " right side ", and arrow LE is made as " left side ", and use method for expressing all around illustrates the position of each several part.
[structure of laser explosure device]
At the upper surface of mounting table parts 20, utilize not shown location division, with the state mounting of the position that is positioned to stipulate baseplate material 100 as the rectangular flat shape of exposure object thing.Penetrate at the upper surface of these mounting table parts 20 a plurality of (several) hole 20A of portion is set, be made as negative pressure by inner utilization negative pressure feeding source (omitting diagram) with these mounting table parts 20, attract air from the 20A of hole portion, baseplate material 100 utilizes this attraction and is adsorbed the upper surface that remains on mounting table parts 20.
And, more than the thickness of baseplate material 100, produce under the crooked situation for regulation, owing to only can not adsorb maintenance (because being difficult to fixing reliably) fully by the attraction of air, so utilize grip device 30 described later to assist, kept (fixing) upper surface at mounting table parts 20 so that baseplate material 100 adsorbs reliably.
In addition, on baseplate material 100, be provided with a plurality of aligning signs (omitting diagram) that its benchmark that is exposed the exposure position in the drawing area on the face is represented.This aligning sign for example is made of the through hole of circle, respectively is provided with one near four jiaos (hereinafter referred to as bights) of baseplate material 100, amounts to four.
Be provided with roughly the door 24 that is " コ " font at the central portion that platform 14 is set in the mode of the mobile route of crossing over mounting table parts 20.The two ends of door 24 are individually fixed in and are provided with on the platform 14, and photohead 28 and Duo Tai (for example two) ccd video camera 26 are set in the mode of clamping door 24, photohead 28 is arranged on a side (rear side), and as the exposure portion (drawing portion) of exposure base material 100, ccd video camera 26 is arranged on opposite side (front side), and as the determination part that the aligning sign that is provided with on baseplate material 100 is taken.
Thereby, when baseplate material 100 follow mounting table parts 20 move through the below of ccd video camera 26 time, utilize this ccd video camera 26 to aim at the mensuration of sign.Promptly, each ccd video camera 26 arrives the moment of the camera site of regulation in the aligning sign of baseplate material 100, make flash of light (strobo) light source luminescent, make to the flash of light of baseplate material 100 irradiations and inject in the camera body via lens, thus this aligning sign is taken at the reverberation of baseplate material 100 upper surfaces.
In addition, these controller (omitting diagram) of the conveying mechanism (motor 18 and ball-screw 22) that is used to mounting table parts 20 are moved, ccd video camera 26, photohead 28 etc. and control is connected.Utilize these controller control mounting table parts 20 speed to move with regulation, the aligning sign that control ccd video camera 26 is taken baseplate material 100 in the moment of regulation, control photohead 28 is at the moment exposure base material 100 of regulation.
In addition, for make banded exposure finish zone 102 with the Width of throughput direction quadrature on (left and right directions) gapless arrangement, the photohead 28 that respectively is arranged in each row of wire predetermined distance that staggers in orientation disposes (the natural several times on the long limit of exposure area 28A).Therefore, for example the part of failing to expose between the exposure area 28A of the exposure area 28A of first row and second row can be exposed by the exposure area 28A of second row.
Each photohead 28 has digital micromirror device (DMD) (omitting diagram), and this digital micromirror device is respectively as the spatial optical modulation element of the laser beam of incident being modulated according to each pixel according to view data.This DMD is connected with the above-mentioned controller that possesses data processing division and mirror drive control part.
In the data processing division of controller, based on the view data of input, by the control signal of each micro-reflector in the need control area of each photohead 28 generation drive controlling DMD.In addition, in the mirror drive control part,, control the angle of the reflecting surface of each micro-reflector among DMD by each photohead 28 based on the control signal that generates by data processing division.
The light incident side of DMD in each photohead 28 connects the optical fiber of the pencil of drawing from lighting device, and this lighting device penetrates multiple beam as laser.Lighting device within it portion a plurality of laser composite waves that will penetrate from a plurality of semiconductor laser chips and input optical fibre be set close the mode piece.Close glistening light of waves fibre from respectively closing optical fiber that the mode piece extends for what transmit the laser that closes behind the ripple, with the optical fiber of the integrated a branch of formation pencil of a plurality of optical fiber.
[effect of laser explosure device]
Next, to as the effect of the laser explosure device 10 of above structure describe.And, for example can enumerate substrate as the baseplate material 100 that utilizes laser explosure device 10 to carry out image exposure as the material of the pattern that forms (image exposure) printed circuit substrate or liquid crystal display cells etc., or on surfaces such as glass plate photoresist such as coating photonasty epoxy resin, perhaps under the situation of dry film, carry out the substrate of lamination (laminate).
At first, when utilizing not shown loading machine baseplate material 100 to be positioned in the upper surface of mounting table parts 20, and when utilizing not shown location division to position,, these baseplate material 100 absorption are remained on the upper surface of mounting table parts 20 by attracting air from the 20A of hole portion.
At this moment, at baseplate material 100 is the thick substrate more than the 3mm for example, and produce under the crooked situation, owing to only can not adsorb maintenance (owing to being difficult to fixing reliably) fully by the attraction of air, so mounting baseplate material 100 on the matrix part 32 of grip device 30 described later, by the clamp portion 34 chucking substrate materials 100 that on this matrix part 32, are provided with, and this matrix part 32 together is installed on the mounting table parts 20.At this moment, the same 32A of hole portion of a plurality of and mounting table parts 20 is set, remains on the mounting table parts 20 so baseplate material 100 is adsorbed across matrix part 32 because on matrix part 32, penetrate.
Like this, baseplate material 100 absorption remained on mounting table parts 20 top after, 20 beginnings of mounting table parts are moved to throughput direction (from rear side to the front side), and baseplate material 100 is carried to the aim detecting operation of being undertaken by ccd video camera 26.That is, operator's input operation of importing exposure beginning by the indication input part of slave controller begins the exposure actions of laser explosure device 10.
At first, utilize controller control conveying mechanism (motor 18 and ball-screw 22), keep superincumbent mounting table parts 20 beginnings to move with certain speed to throughput direction (from rear side to the front side) baseplate material 100 absorption along guide rail 16.Synchronous with the mobile beginning of these mounting table parts 20, perhaps when the front end of baseplate material 100 to arrive at once each ccd video camera 26 under the moment, control each ccd video camera 26 by controller and start working.
Promptly, if aim at and identify (just descending of ccd video camera 26) on the optical axis that arrives the lens in each ccd video camera 26 respectively for four that for example near each bight of baseplate material 100, are provided with, then each ccd video camera 26 makes stroboscopic light sources luminous in the moment of regulation, and each is aimed at sign take.The view data that is taken (reference position data) is to the data processing division output of controller.
Data processing division is held the position of the aligning sign in the image of distinguishing according to the view data of being imported (reference position data) of respectively aiming at sign and the spacing between the aligning sign etc., and pass through calculation process, the offset of the baseplate material 100 on the position of the mounting table parts 20 when taking this and aim at sign and the resulting mounting parts 20 in position of ccd video camera 26, for the inclination of moving direction, dimensional accuracy error etc., and calculate suitable exposure position with respect to the face that is exposed of baseplate material 100.
Herein, the view data corresponding with exposing patterns is stored in the memory in the controller for the time being.Thereby, when utilizing photohead 28 to carry out image exposure, carry out Correction and Control (aligning), in this Correction and Control, will carry out image exposure accordingly based on the control signal of the view data generation that is stored in the exposing patterns in this memory and above-mentioned suitable exposure position.And this view data is the data with the concentration of each pixel of two-value (having or not of the record of point) expression composing images.
Like this, when the mensuration (shootings) of the aligning that utilizes each ccd video camera 26 to carry out sign when finishing, mounting table parts 20 are by the driving of conveying mechanism (motor 18 and ball-screw 22), to the exposure process conveying of being undertaken by photohead 28.That is, mounting table parts 20 begin along guide rail 16 to moving with above-mentioned opposite direction (side direction rear side in the past).And, if baseplate material 1 00 be exposed the exposure starting position that drawing area in the face arrives photohead 28 belows, each photohead 28 irradiating laser light beam then begin to carry out the image exposure to the face that is exposed (drawing area) of baseplate material 100.
That is, read successively according to a multirow, generated control signals based on the view data of reading by each photohead 28 at data processing division in the view data of the store memory of controller storage.In this control signal, apply the correction that is offset for the exposure position of aiming at the baseplate material 100 after measuring by Correction and Control (aligning).And the mirror drive control part is based on generating and revised control signal is carried out open and close control by each photohead 28 to the micro-reflector of each DMD.
If the laser that penetrates from the optical fiber of lighting device shines to DMD, then laser light reflected utilizes lens to tie up to the imaging on the face that is exposed of baseplate material 100 when the micro-reflector of DMD is in opening.Like this, the laser open and close of penetrating from lighting device according to pixels, thereby with pixel unit (exposure area 28A) the exposure base material 100 of the roughly the same number of use pixel count of DMD.
And, baseplate material 100 is by moving with fixed speed with mounting table parts 20, utilize photohead 28 along direction (scanning direction in Figure 10 (A) with arrow S represented) the exposure base material 100 opposite, and zone 102 (with reference to Figure 10 (A)) are finished in the exposure that each photohead 28 forms band shape with the moving direction of mounting table parts 20.
Like this, when the image exposure of 28 pairs of baseplate materials 100 of photohead is finished, mounting table parts 20 reset to baseplate material 100 by the initial position of mounting, therefore remove the absorption that the attraction by air forms, and then remove, and utilize not shown emptier to take off baseplate material 100 from mounting table parts 20 (matrix part 32) by clamping that grip device 30 produces.Then, carry, carry to next operation from the conveyer belt of baseplate material 100 outside not shown machine that mounting table parts 20 take off.
[structure of grip device]
Next, based on Fig. 2 to Fig. 9 (A) (B) (B) grip device 30 that uses in laser explosure device 10 imaging devices such as grade as above is described in detail.As shown in Figure 2, this grip device 30 is positioned on the mounting table parts 20, and has (surface area is greater than the baseplate material 100 certainly) matrix part 32 of the rectangular plate shape of being located by not shown location division and the clamp portion 34 that is provided with on matrix part 32.
The 32A of hole portion that a plurality of (several) are in same position and are communicated with the 20A of hole portion is set penetrating on the matrix part 32 after mounting is positioned mounting table parts 20, thus mounting table parts 20 can across matrix part 32 (with matrix part 32 together) absorption keeps (fixing) baseplate material 100 of mounting on matrix part 32.
The clamp portion 34A of fixed has that following some is different with the clamp portion 34B of movable type, because slide unit 36 described later is made as fixed part 38, therefore the location division 70 that Fig. 6 (A) (B) is shown specifically is not set that is:; And when being positioned in baseplate material 100 on the matrix part 32, near the inboard of fixed head 46 described later, erectting the location division that a plurality of (front side is two in the diagram, and the left side is, amounts to three) position at first is set, for example alignment pin 33.Below mainly the clamp portion 34B of movable type is described, for the clamp portion 34A of fixed, to having the identical label of parts mark with the clamp portion 34B identical functions of movable type, and omit its detailed explanation among each figure.
As shown in Figure 3, Figure 4, the clamp portion 34B of movable type has: slidably and the slide unit 36 of the elongated plate-like that can be provided with regularly, its for the baseplate material 100 of mounting on matrix part 32 near deviating from; And tabular a plurality of (in the diagram, respectively having three for each limit of the baseplate material 100) clamp member 40 of essentially rectangular, it releasably is installed on the slide unit 36.And, in the clamp portion 34A of fixed, a plurality of (in the diagram, respectively having three for each limit of baseplate material 100) clamp member 40 releasably is installed for fixed part 38.
At the both ends of slide unit 36, along penetrating long slotted hole 36A is set with the direction of its length direction quadrature, in this slotted hole 36A, insert the logical hold-down screw 90 that can enough fingers screws togather, thereby screw thread is fixed on the matrix part 32.Thereby, slide unit 36 on matrix part 32, can by manually with respect to baseplate material 100 near sliding on the directions that deviate from and fixing.And fixed part 38 is fixed on the matrix part 32 by mounting screw 94.
In addition, at the upper surface of slide unit 36, erect the roughly columned pillar 44 that is provided for sectional fixture parts 40 across mounting panel 42.The forked base portion 42A side of the formation of mounting panel 42 is installed on the slide unit 36 by mounting screw 96, and in the assigned position setting of front end 42B side pillar 44 is set.
This pillar 44 along interval that the length direction of slide unit 36 is stipulated at interval via mounting panel 42 be straightened be provided with a plurality of (in the diagram, respectively be provided with three for a clamp member 40), and form the approximate circle tabular bead 44A bigger than the diameter of pillar 44 on the top of each pillar 44.And,, (B) shown in (C), screwed togather mounting screw 92 as Fig. 8 (A) in the bottom of pillar 44.
In addition, in the inboard of slide unit 36 (baseplate material 100 sides), by mounting screw 94 fixed head 46 is installed, this fixed head 46 is parallel with slide unit 36, and the interval predetermined distance.On this fixed head 46, penetrate be provided with along with the long slotted hole 46A of the direction of length direction quadrature (with respect to baseplate material 100 near the directions that deviate from), this slotted hole 46A can be inserted in the bottom that comprises mounting screw 92 of pillar 44, and, when slide unit 36 when slotted hole 36A moves, move along slotted hole 46A the bottom of pillar 44.
And, in fixed part 38 sides, same fixed head 46 being installed by mounting screw 94, this fixed head 46 is parallel with fixed part 38, and the interval predetermined distance, but penetrate on this fixed head 46 slotted hole 46A is not set.That is, in fixed part 38 sides mounting panel 42 is not installed, pillar 44 is directly installed on the fixed head 46 (with reference to Fig. 9 (A) (B) (C)).
Thereby baseplate material 100 is configured in the inboard of fixed head 46, and slide unit 36 is in the outside of fixed head 46, to slide near the mode that deviates from respect to fixed head 46.That is, the structure of the clamp portion 34B of movable type by slide unit 36 with respect to fixed head 46 near deviating from, can adjust clamp member 40 with respect to position as the marginal end portion 100A outside the drawing area at the baseplate material 100 of the inboard of fixed head 46 configuration.
On the other hand, as Fig. 5 (A) (B) shown in, substantial middle portion at the Width (D represents with arrow) of clamp member 40, penetrate along its length and at interval predetermined distance and a plurality of (diagram is three) pillars 44 (comprising bead 44A) are set swim slotting installing hole 40A, and be provided with and end plate 50 along the card that its length direction slides in the upper surface substantial middle portion of clamp member 40, the length that card ends plate 50 is than the length along its length of clamp member 40 slightly short (even slide it along its length, also can be from the outstanding length of clamp member 40).
In addition, end penetrating at interval on the plate 50 that two (glide direction) long slotted hole 50A along its length being set at this card predetermined distance, by this slotted hole 50A respectively at the upper surface installation mounting screw 94 of clamp member 40.Thus, only plate 50 can slip along its length in the scope of this slotted hole 50A for card.
In addition, only penetrate two (in diagram, being central authorities and right side) stop holes 52 that setting can be communicated with installing hole 40A on the plate 50 at this card, this stop hole 52 is communicated with formation by large-diameter portion 52A and minor diameter part 52B, the diameter of this large-diameter portion 52A is identical with bead 44A or big more some than it, and the diameter than installing hole 40A is little, the diameter of minor diameter part 52B is identical with the diameter of pillar 44, and is the slotted hole shape on glide direction.And the left part of ending plate 50 at card forms and the roughly the same notch 53 of minor diameter part 52B.
Thereby, the bead 44A of pillar 44 insert logical installing hole 40A and large-diameter portion 52A and end from card the upper surface of plate 50 outstanding after, making this card end plate 50 (is illustrated as left-hand) along its length and slides, by making pillar 44 be fastened on minor diameter part 52B and notch 53, shown in Fig. 5 (B), prevent that clamp member 40 from coming off from slide unit 36.
In addition, as Fig. 3, Fig. 8 (A) (B) (C), Fig. 9 (A) (B) shown in (C), the lower surface of a side long leg of clamp member 40 form section for give prominence to roughly circular-arcly and from above with the claw 54 of the marginal end portion 100A butt of baseplate material 100.And the opposite side long leg of clamp member 40 is made as base portion 56, penetrates the through hole 56A that is provided with a plurality of (being illustrated as three) and installing hole 40A corresponding (side by side) on this base portion 56 along its length and at interval predetermined distance.
Insert the roughly outstanding approximate columned cramp bar 58 of spherical shape of logical bottom in through hole 56A, embedding has diameter bead 62A, the 62B bigger than cramp bar 58 near near the upper end of this cramp bar 58 and bottom.Prevent that thus cramp bar 58 from coming off from clamp member 40.
In addition, (B) (C), Fig. 9 (A) are (B) shown in (C) as Fig. 8 (A), and in the lower face side of clamp member 40 (base portion 56), helical spring 60 is inserted and is embedded on the cramp bar 58.That is, between the following side flanges 62B of the lower surface of clamp member 40 (base portion 56) and cramp bar 58, insert and be embedded with helical spring 60.Thus, always push cramp bar 58 in outstanding mode downwards from the lower surface of clamp member 40.
In addition, as shown in Figure 3, Figure 4, on slide unit 36, between the base portion 42A of forked mounting panel 42, form the support 48 that the bottom of cramp bar 58 is supported.This support 48 is by the recessed little approximate semi-spherical shape of curvature of being arranged to the bottom of ratio of curvature cramp bar 58, and the bottom of butt cramp bar 58 slidably.
In addition, the relative location division 70 of a plurality of (in the diagram, for each slide unit 36, at interval predetermined distance respectively is provided with two) and baseplate material 100 is set on the end face of the inboard of slide unit 36 (baseplate material 100 sides).And the fixed head 46 that is provided with on the position of this location division 70 is suitably cut, thereby forms the structure that allows to install this location division 70.
As Fig. 6 (A) (B), Fig. 7 (A) (B) (C) (D) shown in, location division 70 has the positioning element 72 of pin shape, this positioning element 72 is configured to and can comes in and goes out with respect to slide unit 36, by this positioning element 72 and the end face 100B of baseplate material 100 are connected, carry out the location of slide unit 36 (clamp member 40) with respect to baseplate material 100.
Promptly, on the end face of the inboard of slide unit 36 (baseplate material 100 sides), utilize mounting screw 96 that the shell (casing) 64 of approximate rectangular flat is installed, and on the end face 64A of this shell 64, penetrate the first slit 66A is set, 66A is parallel with the length direction of slide unit 36 for this first slit, and until the substantial middle place of this end face 64A.And, on the sidewall 64B of a side of this shell 64, penetrating the second slit 66B that is communicated with the first slit 66A is set, this second slit 66B is provided with specific length to the direction (slide unit 36 sides) that deviates from baseplate material 100.
Positioning element 72 is bent into roughly " L " shape by the columned pin of specific length and forms, and its short end (hereinafter referred to as " operating portion ") 72A is outwards outstanding from the first slit 66A or the second slit 66B.In addition, on shell 64 and antetheca 64C baseplate material 100 subtends, penetrate the identical or big some round holes 68 of the diameter that diameter and positioning element 72 are set, and the other end of positioning element 72 (hereinafter referred to as " abutting part ") 72B can come in and go out from this perforate 68.
And, be embedded with helical spring 74 inserting near abutting part 72B one side of this positioning element 72 than kink 72C.One end of helical spring 74 with kink 72C and abutting part 72B roughly in the middle of the attached card of place's embedding end bead 76 butts, the other end of helical spring 74 is fixed on the inner surface of antetheca 64C, and can insert logical card with abutting part 72B and end bead 78 butts.Thereby positioning element 72 always is urged to the direction that deviates from baseplate material 100 (slide unit 36 sides) under the effect of the pushing force of helical spring 74.
[effect of grip device]
Next, to as the effect of the grip device 30 of above structure describe.At first, mainly based on Fig. 7 (A) (B) (C) (D) localization method of location division 70 is described.At first, mounting baseplate material 100 on matrix part 32, and make the front end face 100B of baseplate material 100 and left side 100B respectively with the inboard (baseplate material 100 sides) of fixed head 46 in the clamp portion 34A of fixed near alignment pin 33 butts that are provided with.
Then, in the clamp portion 34B of movable type, at first overcome the pushing force of this helical spring 74 to baseplate material 100 side shiftings (with reference to Fig. 7 (A)) by manually making from each operating portion 72A that slide unit 36 side ends of the second slit 66B are given prominence to and the quilt card ends maintenance under the state that is pushed by the pushing force of helical spring 74.
After arriving baseplate material 100 side ends of the second slit 66B, rotate (with reference to Fig. 7 (B)) upward in the mode that in the first slit 66A, moves with maintaining the original state.Thus, the operating portion 72A of each positioning element 72 is at the end face 64A of first slit 66A side end (substantial middle of end face 64A), utilize the pushing force of helical spring 74, end, and the abutting part 72B of each positioning element 72 is from perforate 68 outstanding specific lengths with this end face 64A butt card.
Like this, after each abutting part 72B is given prominence to from perforate 68, before the right side 100B and rear end face 100B butt of this each abutting part 72B and baseplate material 100, make each slide unit 36 along slotted hole 36A and slotted hole 46A to nearly (slip) (with reference to Fig. 7 (C)) of baseplate material 100 1 side joints.And, behind right side 100B that makes each abutting part 72B and baseplate material 100 and rear end face 100B butt, utilize hold-down screw 90 to fix each slide unit 36 in this position.
Like this, in the clamp portion 34B of movable type, slide unit 36 finishes back (fixing each slide unit 36 back) with respect to the location of baseplate material 100, each operating portion 72A is rotated to above-mentioned rightabout in the first slit 66A, and finger is decontroled in the back in turning to the second slit 66B.
So each positioning element 72 utilizes the pushing force of helical spring 74 automatically to move to the direction that deviates from baseplate material 100 (slide unit 36 sides), and return in the shell 64 (with reference to Fig. 7 (D)) from perforate 68 each outstanding abutting part 72B.Thus, slide unit 36 finishes with respect to the positioning action of baseplate material 100.
And, after location division 70 positions, a plurality of (in the diagram for each three on each limit) clamp member 40 is installed on fixed part 38 and slide unit 36.Thereby, next mainly the installation method of clamp member 40 is described based on Fig. 3.
After positioning by the 70 pairs of slide units 36 in location division, each clamp member 40 makes the bottom of cramp bar 58 and support 48 butts that are provided with on each slide unit 36 and each fixed part 38, and makes the bead 44A of pillar 44 insert logical installing hole 40A.
At this moment, because be in operating portion 72A not from the outstanding state of the end face 64A of shell 64, so can be with respect to slide unit 36 sectional fixture parts 40.That is, if the operating portion 72A of positioning element 72 from the outstanding state of end face 64A, then become can not sectional fixture parts 40 structure, so in the clamp member 34B of movable type, can prevent to forget the operation behind the location of positioning element 72.
In any case, after making the slotting logical installing hole 40A of bead 44A of pillar 44, overcome with maintaining the original state helical spring 60 pushing force press...with one's finger press clamp member 40 above, and the bead 44A that makes pillar 44 inserts logical installing hole 40A and stop hole 52 (large-diameter portion 52A), makes card end plate 50 simultaneously and slides to Fig. 5 (A) left-hand (B).
That is, be embedded with helical spring 60, so the bead 44A of pillar 44 only can be outstanding upward from the large-diameter portion 52A of installing hole 40A and stop hole 52 under the effect of the deadweight of clamp member 40 because insert on the cramp bar 58.Thereby, utilize manually push clamp member 40 above, make the bead 44A of pillar 44 outstanding upward from the large-diameter portion 52A of installing hole 40A and stop hole 52.And, keep this state, make card end plate 50 and in the scope of slotted hole 50A, slide to the left-hand of Fig. 5 (A) in (B).
So, be arranged on the side face butt that card ends the minor diameter part 52B of the stop hole 52 on the plate 50 and notch 53 and pillar 44 because penetrate, thus utilize the pushing force of helical spring 60, can make card only the following butt of the top and bead 44A of plate 50 engage.That is, each clamp member 40 can be installed with respect to pillar 44 to prevent its state that comes off.Like this, by each clamp member 40 is installed on slide unit 36 and fixed part 38, the marginal end portion 100A of baseplate material 100 is clamped by each clamp member 40.
Promptly, since base portion 56 sides of clamp member 40 under the effect of the pushing force of helical spring 60 from (from matrix part 32) down to upper process, and between pillar 44 and installing hole 40A, form predetermined gap, therefore to insert near the installing hole 40A that is embedded with this pillar 44 as fulcrum, rotate claw 54 side direction below.Thereby this claw 54 can be pushed the marginal end portion 100A that keeps baseplate material 100 by means of the pushing force of helical spring 60, and clamp member 40 can clamp the marginal end portion 100A of baseplate material 100.
Here, front end face 100B and left side 100B and alignment pin 33 butts of fixed part 38 sides by making baseplate material 100, clamp member 40 is finished with respect to the location of its each marginal end portion 100A.And, because slide unit 36 sides are also finished the location of clamp member 40 with respect to each marginal end portion 100A of baseplate material 100 by location division 70, therefore, even baseplate material 100 has bending (distortion), still can clamp reliably as the outer marginal end portion 100A of drawing area.
Promptly, when clamping baseplate material 100 with bending by clamp member 40, though this baseplate material 100 has the distortion of some expansions, but owing between the fixed head 46 of slide unit 36 sides and baseplate material 100, utilize positioning element 70 formation predetermined gap, in other words, the extension of the baseplate material 100 of generation when correcting bending has been considered in the location of this positioning element 72, so even produce this distortion, still can be allowed fully.
In addition, because base portion 56 sides of utilizing this clamp member 40 are projection from bottom to top, the claw 54 of its opposition side is pushed from the top down, so can realize slimming in clamp portion 34, and as Fig. 8 (A) (B) (C), Fig. 9 (A) (B) shown in (C), even the thickness difference (even thickening) of baseplate material 100 still can be tackled fully and clamp reliably.In addition, in this grip device 30, can clamp the baseplate material 100 that thickness reaches 7mm.
In addition, this clamp portion 34 constitutes each bight of chucking substrate material 100 reliably.Promptly, as Fig. 2, shown in Figure 4, overlapping with the extended line as the clamp portion 34A of fixed and right side in left side respectively as the clamp portion 34A of fixed and rear side of front side as the length direction of the claw 54 of the clamp portion 34B of movable type as the claw 54 of the clamp portion 34B of movable type, and then the pillar 44 that is used for sectional fixture parts 40 is positioned at this extended line (Fig. 4 is represented by imaginary line K).
If adopt this kind structure, even baseplate material 100 bends, owing to still can clamp its each bight reliably, so can correct (releasing) its bending fully.Thereby, utilize the attraction of the air that the 32A of hole portion of 20A of hole portion by mounting table parts 20 and matrix part 32 is attracted, can adsorb reliably and keep baseplate material 100.
Promptly, after grip device 30 is finished for the clamping of baseplate material 100, matrix part 32 is positioned on the mounting table parts 20, and utilize not shown location division to position, at this moment, because be communicated with the 20A of hole portion that on mounting table parts 20, penetrates setting, so by attracting air, the baseplate material 100 by grip device 30 clampings can be adsorbed reliably and remain on the mounting table parts 20 from the 20A of this hole portion, 32A at the 32A of hole portion that penetrates setting on the matrix part 32.
Thereby, can high accuracy and suitably carry out the exposure-processed that registration process that CCD camera 26 carries out and photohead 28 carry out, and can form correct image reliably.Thereby, can improve the reliability of laser explosure device 10 imaging devices such as grade.And this grip device 30 is also applicable to the device that penetrates the hole portion that conduction usefulness is set such as laser machine etc. on baseplate material 100 etc.
In a word, according to the present invention, because can load and unload the matrix part 32 that is provided with clamp portion 34 with respect to mounting table parts 20, and mounting baseplate material 100 on this matrix part 32, so clamp portion 34 can be able to be loaded and unloaded with respect to mounting table parts 20, even and under the situation that the thicker baseplate material 100 that has produced bending is exposed, still can adsorb maintenance (fixing) reliably on mounting table parts 20 via matrix part 32.In addition, this fixture operation gets final product on matrix part 32, need not to carry out on mounting table parts 20, so have maneuverable advantage.
In addition, because clamp member 40 forms the structure of installing with respect to pillar 44 by making card end plate 50 slips, so can easily carry out charge and discharge operations.And because with respect to each limit of baseplate material 100, promptly slide unit 36 and fixed part 38 are provided with a plurality of these clamp member 40 and clamp, so even the size of baseplate material 100 has change, still can flexible tackle.And under the big situation of the size change of baseplate material 100,, together change matrix part 32 according to the size of baseplate material 100.
Claims (7)
1. grip device is characterized in that having:
Matrix, the workpiece that its mounting is tabular, and releasably be installed on the mounting table; With
Clamp portion, it is arranged on the described matrix, and clamps the marginal end portion of described workpiece;
Wherein, make a plurality of intercommunicating pores that are communicated with between this substrates side and the described mounting table side penetrating on the described matrix to be provided with.
2. grip device as claimed in claim 1 is characterized in that,
At least a portion of described intercommunicating pore is identical with the configuration of at least a portion of a plurality of adsorption holes that are provided with on described mounting table.
3. grip device as claimed in claim 1 is characterized in that,
The limit that described clamp portion has with respect to described matrix is provided with a plurality of clamp member separately.
4. grip device as claimed in claim 1 is characterized in that, described clamp portion has:
Guide portion, it is arranged on the described matrix, and is formed with the anti-delinking part;
Clamp member, it penetrates the installing hole that is provided with described guide portion trip embedding, and is formed with the abutting part with described marginal end portion butt;
Latch for printed circuit, it is arranged on the described clamp member, and engages with described anti-delinking part, and this clamp member can not be come off from described guide portion;
Support, it is not inserted not tear-awayly and leads in penetrating in the through hole of setting on described clamp member and base portion described abutting part opposition side;
Push part, it is inserted and is embedded on the described support, and pushes this support downwards; And
Be arranged on the described matrix and support the support of described support.
5. grip device as claimed in claim 1 is characterized in that, described clamp portion has:
Pillar, it is arranged on the described matrix, and is formed with bead at head;
Clamp member, it penetrates the installing hole that is provided with described pillar trip embedding, and is formed with from the claw of top and described marginal end portion butt;
Card ends plate, and it is slidably disposed on the upper surface of described clamp member, and engages with described bead, and this clamp member can not be come off from described pillar;
Cramp bar, it is not inserted not tear-awayly and leads in penetrating in the through hole of setting on described clamp member and base portion described claw opposition side;
Helical spring, it is inserted and is embedded on the described cramp bar, and pushes this cramp bar downwards; And
Support, it is arranged on the described matrix, and supports the bottom of described cramp bar.
6. imaging device is characterized in that having:
Conveying mechanism, its transport path along regulation is carried the mounting table that the matrix in the grip device is installed, wherein, described grip device has: the tabular workpiece of mounting, and releasably be installed in matrix on the mounting table, with be arranged on the described matrix and clamp the clamp portion of the marginal end portion of described workpiece, and, make a plurality of intercommunicating pores that are communicated with between this substrates side and the described mounting table side penetrating on the described matrix to be provided with;
Determination part, it detects the aligning sign of the workpiece on the mounting table of being carried by described conveying mechanism; And
Drawing portion, it carries out imaging to the workpiece after aiming at based on the testing result of described determination part.
7. imaging device is characterized in that having:
Conveying mechanism, its transport path along regulation is carried the mounting table that the matrix in the grip device is installed, wherein, described grip device has: the tabular workpiece of mounting, and releasably be installed in matrix on the mounting table, with be arranged on the described matrix and clamp the clamp portion of the marginal end portion of described workpiece, and, make a plurality of intercommunicating pores that are communicated with between this substrates side and the described mounting table side penetrating on the described matrix to be provided with;
Determination part, it detects the aligning sign of the workpiece on the mounting table of being carried by described conveying mechanism; And
Exposure portion, it utilizes the light beam of modulating based on image information to come the drawing area of the workpiece after aiming at based on the testing result of described determination part is exposed, and forms image at this drawing area.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP013372/2005 | 2005-01-20 | ||
| JP2005013372A JP2006198725A (en) | 2005-01-20 | 2005-01-20 | Clamping device and image forming device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101124859A true CN101124859A (en) | 2008-02-13 |
Family
ID=36692194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006800028227A Pending CN101124859A (en) | 2005-01-20 | 2006-01-17 | Clamping apparatus and image forming apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2006198725A (en) |
| KR (1) | KR20070094926A (en) |
| CN (1) | CN101124859A (en) |
| WO (1) | WO2006077804A1 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101807007A (en) * | 2009-02-16 | 2010-08-18 | 株式会社日立高新技术 | Liquid crystal exposure apparatus |
| CN102034732A (en) * | 2009-09-30 | 2011-04-27 | 京瓷株式会社 | Attraction member, and attraction device and charged particle beam apparatus using the same |
| TWI507267B (en) * | 2013-04-11 | 2015-11-11 | Chao Shen Chou | Machining machine |
| CN108351312A (en) * | 2015-12-04 | 2018-07-31 | 株式会社V技术 | Check device |
| CN109143793A (en) * | 2018-09-06 | 2019-01-04 | 重庆科技学院 | A kind of application method of adjustable chip fixture |
| CN114290178A (en) * | 2021-12-28 | 2022-04-08 | 苏州慧博光学科技有限公司 | Tool clamp for processing prism and use method thereof |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4866782B2 (en) * | 2007-04-27 | 2012-02-01 | 富士フイルム株式会社 | Substrate clamping mechanism and drawing system |
| JP5593912B2 (en) * | 2010-07-22 | 2014-09-24 | ソニー株式会社 | Display device |
| JP5813555B2 (en) * | 2012-03-30 | 2015-11-17 | 株式会社アドテックエンジニアリング | Exposure drawing apparatus and exposure drawing method |
| CN103091997B (en) * | 2012-09-27 | 2014-08-20 | 上海现代先进超精密制造中心有限公司 | Gluing method of wedge-shaped plate group and fixture |
| JP6543061B2 (en) * | 2015-03-20 | 2019-07-10 | 株式会社オーク製作所 | Exposure apparatus using substrate correction jig, and substrate correction jig |
| CN110977189B (en) * | 2019-11-18 | 2021-07-13 | 济南邦德激光股份有限公司 | Laser cutting system and cutting method thereof |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01130524A (en) * | 1987-11-16 | 1989-05-23 | Mitsubishi Electric Corp | Electronic beam printing apparatus |
| JPH03282473A (en) * | 1990-03-30 | 1991-12-12 | Ushio Inc | Film exposure device |
| JP2002217276A (en) * | 2001-01-17 | 2002-08-02 | Ushio Inc | Stage device |
| JP2003039222A (en) * | 2001-07-26 | 2003-02-12 | Matsushita Electric Works Ltd | Processing equipment for end face of laminated board and clamp |
-
2005
- 2005-01-20 JP JP2005013372A patent/JP2006198725A/en active Pending
-
2006
- 2006-01-17 CN CNA2006800028227A patent/CN101124859A/en active Pending
- 2006-01-17 KR KR1020077016651A patent/KR20070094926A/en not_active Application Discontinuation
- 2006-01-17 WO PCT/JP2006/300478 patent/WO2006077804A1/en not_active Application Discontinuation
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101807007A (en) * | 2009-02-16 | 2010-08-18 | 株式会社日立高新技术 | Liquid crystal exposure apparatus |
| CN101807007B (en) * | 2009-02-16 | 2013-06-12 | 株式会社日立高新技术 | Liquid crystal exposure apparatus |
| CN102034732A (en) * | 2009-09-30 | 2011-04-27 | 京瓷株式会社 | Attraction member, and attraction device and charged particle beam apparatus using the same |
| CN102034732B (en) * | 2009-09-30 | 2015-01-21 | 京瓷株式会社 | Attraction member, and attraction device and charged particle beam apparatus using the same |
| TWI507267B (en) * | 2013-04-11 | 2015-11-11 | Chao Shen Chou | Machining machine |
| CN108351312A (en) * | 2015-12-04 | 2018-07-31 | 株式会社V技术 | Check device |
| CN108351312B (en) * | 2015-12-04 | 2021-05-07 | 株式会社V技术 | Inspection apparatus |
| CN109143793A (en) * | 2018-09-06 | 2019-01-04 | 重庆科技学院 | A kind of application method of adjustable chip fixture |
| CN109143793B (en) * | 2018-09-06 | 2023-06-06 | 重庆科技学院 | Use method of adjustable chip clamp |
| CN114290178A (en) * | 2021-12-28 | 2022-04-08 | 苏州慧博光学科技有限公司 | Tool clamp for processing prism and use method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20070094926A (en) | 2007-09-27 |
| JP2006198725A (en) | 2006-08-03 |
| WO2006077804A1 (en) | 2006-07-27 |
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