TWI582531B - Dust film assembly container - Google Patents

Description

Dust-proof film assembly storage container

The present invention relates to a storage container for a dustproof film assembly used as a dustproof device when manufacturing a conductor device, an IC package, a printed circuit board, a liquid crystal display element, or an organic light emitting display (OLED). A pellicle assembly container suitable for storing a large pellicle assembly having at least one side length of more than 500 mm.

In the manufacture of semiconductors such as large scale integrated circuits (LSIs) and ultra-large integrated circuits, or liquid crystal display devices, the semiconductor wafer or the glass plate for liquid crystal is irradiated with ultraviolet light to form a pattern. If there is dust adhering to the photoresist used, the dust will block or reflect the ultraviolet light, and the transferred pattern will be deformed and short-circuited, and the quality will be damaged.

Therefore, such work is usually performed in a clean room, but even if it is difficult to always keep the photoresist clean, it is necessary to attach the pellicle as a dust protector to the surface of the resist. In this case, the foreign matter is not directly attached to the surface of the photoresist, but is attached to the pellicle. In the lithography, as long as the focus is focused on the pattern of the photoresist, the foreign matter on the pellicle is not Will affect the transfer.

Generally, the pellicle is a transparent dust-proof film made of nitrocellulose, cellulose acetate or fluororesin which is well-transparent, and is then applied to a dust-proof film assembly frame made of aluminum, stainless steel, engineering plastics or the like. Formed on the end face. Then, at the lower end of the pellicle frame, an adhesive layer composed of a polybutene resin, a polyvinyl acetate resin, an acrylic resin, an anthrone resin, or the like is provided for the mounting on the photoresist, and the adhesion layer is protected. Purpose release layer (separation sheet).

On the other hand, a pellicle assembly container that accommodates such a pellicle film assembly, in particular, a large pellicle assembly having a side length of more than 500 mm, is housed on the periphery of the pellicle assembly container body on which the pellicle assembly is placed The member is configured by fitting a member such as a sealed lid. These members are produced by vacuum forming or pressure forming of a resin plate having a thickness of about 2 to 8 mm. With this method, a large container can be integrally formed, and the internal dust source is small, so that The advantage of high productivity and low cost manufacturing.

In order to improve the visibility of the adhered foreign matter, the dust-proof film module housing container body is preferably black, and the cover portion is preferably transparent or colored translucent for easy observation of the internally disposed pellicle film assembly (refer to the patent literature). 1). From this point of view, in almost all cases, the storage container body is black acrylonitrile-butadiene-styrene (ABS) resin, and the cover is transparent or translucent propylene-butadiene- Styrene resin or poly(methyl methacrylate) (PMMA) resin.

Such a resin is flammable, and is a flammable material storage container for a large-sized pellicle assembly container having a large pellicle length of more than 500 mm. The product and the weight are quite large. For example, a dust-proof membrane module storage container for a 800x920mm mask has a weight of 10 kg/piece, and a dust-proof membrane module storage container for a 1220 x 1400 mm mask has a weight of 25 kg/piece, so the dust-proof film assembly storage container is placed in one place. When it is stored in large quantities, its security becomes a problem.

Therefore, as a countermeasure, a material having flame retardancy is used as a raw material, for example, a metal and a flame retardant resin are used. However, when a metal is used, even if a lightweight material such as an aluminum alloy is used for the lid body, the manual opening and closing is still too heavy, and there is a problem that the operation is burdened. On the other hand, when a flame retardant resin material is used, the material thereof may, for example, be polyacrylonitrile (PAN) or polyvinyl chloride (PVC), but these materials can be obtained with a large number of sheets. Furthermore, there are many components that are difficult to heat and form, and there are problems that are difficult to use.

From such a viewpoint, in order to ensure flame retardancy, a method of adding a flame retardant to PMMA or ABS material which is commonly used for a material of a large-sized pellicle container storage container is preferable. The flame retardant to be added may, for example, be a bromine-based compound, a phosphorus-based compound, a ruthenium compound or a metal hydroxide. Further, an anthrone-based compound may be mentioned, and the actual case is a resin of PMMA or ABS. Bromine compounds are often used in the process.

However, when a resin containing a flame retardant is used as a raw material of the pellicle container storage container, if the pellicle container storage container is stored in an environment in which sunlight, particularly ultraviolet rays, is stored, the flame retardant may be ultraviolet rays. In addition, decomposition and aging cause contamination (turbidity) of the pellicle film unit accommodated in the inside of the storage container, and deterioration of the raw material resin is accelerated, and the appearance of the pellicle film container is deteriorated.

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2001-100394

The present invention has been made in view of the above problems, and an object of the present invention is to provide a pellicle assembly storage container which is hard to ignite even if a resin containing a flame retardant is used as a raw material of a pellicle assembly container. The agent and the resin are not deteriorated by ultraviolet rays, and the stored pellicle can be kept clean for a long period of time.

The present invention relates to a pellicle assembly container that houses at least one pellicle assembly having a side length of more than 500 mm, wherein the pellicle assembly container is a pellicle assembly on which a pellicle assembly is placed. The storage container body is configured by a lid body that is fitted and sealed with a peripheral portion thereof, and at least the lid body is made of a resin that is vacuum-molded or compression-molded, and the resin material contains a flame retardant and a blackened material, and is opaque and black.

Further, in the present invention, the content of the blackening material is preferably from 0.5% to 3% by weight based on the weight of the resin material, and the content of the flame retardant is preferably from 5% to 25% by weight of the resin material. The flame retardant is preferably a bromine compound, and the resin material is preferably an ABS resin.

According to the present invention, the flame retardant added to the raw material of the pellicle container storage container can be minimized by ultraviolet rays, and the cleanliness of the stored pellicle can be maintained for a long period of time.

10‧‧‧Plastic membrane assembly storage container

11‧‧‧Plastic membrane module storage container body

12‧‧‧ Cover

13‧‧‧ needle

14‧‧‧needle support device

20‧‧‧Pneumatic film assembly

21‧‧‧Plastic membrane assembly frame

22‧‧‧ Covering Adhesive Layer

23‧‧‧Separator

24‧‧‧Dust film adhesive layer

25‧‧‧Dust film

A, B‧‧‧ hatching

Fig. 1 is a schematic plan view showing a pellicle container storage container of the present invention.

Fig. 2 is a cross-sectional view taken along line AA of Fig. 1 of the pellicle assembly container of the present invention.

Fig. 3 is a cross-sectional view taken along line BB of Fig. 1 of the pellicle assembly container of the present invention.

Fig. 4 is a plan view showing the cover of the pellicle container storage container of the present invention removed.

Fig. 5 is a perspective view of the dust-proof membrane module storage container of the present invention.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings, but the present invention is not limited thereto.

The pellicle assembly container 10 of the present invention accommodates at least one pellicle having a side length of more than 500 mm, and is composed of the pellicle assembly container body 11 and the lid 12. The pellicle film storage container main body 11 is placed with the pellicle film assembly 20, and the lid body 12 is fitted and sealed at the peripheral edge portion of the pellicle film container housing main body 11. The pellicle assembly 20 is protected from external dust. Further, the pellicle film assembly 20 placed on the pellicle container storage container main body 11 passes through the needle 13 inserted through a non-penetrating hole (not shown) provided on the side surface of the frame, and the needle supporting device 14 for supporting the needle. The fixing device is fixed to the pellicle assembly container body 11.

The pellicle assembly container body 11 and the lid body 12 are formed by vacuum molding or compression molding of a resin sheet containing a flame retardant having a thickness of 2 to 8 mm, and are excellent in quality, cost, and flame retardancy. In addition, from the viewpoint of having a charging prevention function and reducing foreign matter adhesion, it is preferable to add a conductive material to the pellicle assembly container main body 11 and the lid body 12 and to apply a surface.

In the pellicle container storage container 10 of the present invention, at least the lid body 12 is opaque and black while adding a flame retardant to the raw material resin. A typical cover is composed of a transparent or translucent resin material. The lid body 12 is made opaque and black, and it is possible to prevent ultraviolet rays from intruding into the interior of the resin material. Therefore, it is possible to prevent the constituent resin of the pellicle assembly container 10, in particular, the deterioration of the flame retardant in the resin in the vicinity of the surface, and the occurrence of the gaseous substance caused by the deterioration of the flame retardant is suppressed, and therefore, the pellicle assembly container The internal and contained pellicle components are not contaminated.

In the present invention, in order to make the resin material opaque and black, it is preferable to contain a blackened material such as carbon black in an amount of 0.5% to 3% by weight of the resin. If it is less than 0.5%, the degree of black is shallow and insufficient; however, if it is added more than 3%, the effect is not different. As a blackening material, in addition to carbon black, it can also be exemplified by dioxide. Titanium, triiron tetroxide, etc.

The resin material used in the pellicle container storage container 10 can be various, and in particular, an ABS resin is preferable. The reason for this is that the balance between the rigidity and the formability is good, and since the degree of absorption of ultraviolet rays is large, the ultraviolet rays reaching the inside of the material are further reduced, and the deterioration of the contained flame retardant can be suppressed. In addition, if it is set to black, it is preferable to prevent deterioration of the appearance due to yellowing or fading of the ABS resin itself.

On the other hand, the acrylic resin (PMMA) which is generally used for the pellicle container storage container is hard to ignite by the addition of the flame retardant. However, since the ultraviolet transmittance of the resin itself is high, it is easy to promote the difficulty contained therein. The aging of the fuel is not good. Further, although it is not necessary to add a flame retardant if the resin material itself is a flame retardant resin material, for example, when a polyvinyl chloride resin (PVC) is used, it is difficult to obtain a large-sized material and disposal. Difficult problem. Further, when a polycarbonate resin (PC) is used, since the molding temperature is extremely high, there is a problem that vacuum forming or compression molding is difficult when a large-sized product is produced, and it is difficult to use it.

Among the types of the flame retardant added to the resin, as the organic flame retardant, Tetrabromobisphenol A (TBBA), Decabromodiphenyl ether (DBDE), and Hexabromocyclohexane can be exemplified. A bromine-based compound such as a Hexabromo cyclododecane (HBCD), a phosphorus-based compound, a chlorine-based compound or the like. In addition, examples of the inorganic flame retardant include aluminum hydroxide and a hydrate of magnesium hydroxide, an anthraquinone such as antimony trioxide, and a boron compound. As a non-halogen organic compound, in addition to melamine cyanurate, An anthrone-based compound or the like is also being developed.

The flame retardant used in the present invention may be used singly or in combination of several or more, and the content thereof is preferably about 5% to 25% by weight of the resin material. If the amount of the flame retardant is less than 5%, the effect of the flame retardancy cannot be sufficiently exerted, but if it exceeds 25%, the influence on the physical properties of the resin material is excessively large, which is not preferable.

Further, in recent years, some of the flame retardants have become a controlled substance due to environmental problems, and therefore it is preferable to select this point as well. Further, the target of the degree of flame retardancy can be set according to the requirements of the storage location of the pellicle container storage container, but it is preferable to achieve at least the grade V of the plastic flammability standard (UL94) issued by Underwriters Laboratories, USA. -1.

According to the present invention, various flame retardants described above can be used, but it is preferred to contain a bromine-based compound. The bromine-based compound has a high flame retarding effect, and the effect is also high when other flame retardants are used in combination. In particular, a combination of a bromine-based compound and antimony trioxide has a high flame retarding effect, and is therefore preferred.

Further, although the bromine-based compound has a drawback that it is easily deteriorated by ultraviolet rays, the resin material can be made opaque and black, so that the aged region can stay on the surface, and the aging of the bromine-based compound can be substantially prevented. For examples of suitable bromine-based compounds, examples of suitable bromine-based compounds include tetrabromobisphenol A (TBBPA) and tetrabromobisphenol BA oligomer (epoxy-based, carbonate-based). Bromo polystyrene (BPS) and the like. The content of these is preferably in the range of 5% to 25% from the viewpoint of ensuring the flame retardancy and maintaining the physical properties of the resin.

The pellicle assembly container body 11 and the cover 12 of the present invention are rooted If necessary, a reinforcing structure such as a rib or the like may be provided, and a reinforcing means made of metal or resin, a handle for operation, and a buckle for fixing the cover may be provided.

Further, in the case where the rigidity of the ultra-thin pellicle container storage container having a side length of the pellicle of more than 1500 mm is particularly required, and further improving the flame retardancy, it is particularly preferable to use only the cover 12 The above resin is produced, and the pellicle assembly container body 11 is made of metal. However, when the pellicle container storage container main body 11 is made of metal, it is disadvantageous in weight point as compared with the case where all of the pellicle film container body 11 is made of a resin, but since it is not necessary to manually open and close like the lid body 12, it is not necessary to manually open and close the lid body 12 There are no substantive problems.

In the case of using a metal, in addition to a lightweight material such as an aluminum alloy or a magnesium alloy, a highly rigid material such as iron or stainless steel can be used. In such a case, the casting method may be employed in addition to molding using a forming process, a sheet bending process, a stamping, a welding, or the like. It is preferable to carry out rust-proof and dust-proof coating on the surface thereof, and it is particularly preferable to provide blackness in addition to the charging prevention performance and to improve visibility of adhering foreign matter.

In the pellicle container storage container 10 of the present invention, as a fixing means for fixing the pellicle film assembly 20 to the pellicle assembly container main body 11, various known methods can be used. In the embodiment shown in FIG. 4, the needle supporting device 14 is provided on the pellicle container housing body 11, and the needle 13 supported by the needle supporting device 14 is inserted into the side of the pellicle frame 21 to be non-penetrated. The pellicle assembly 20 is fixed by means of a hole (not shown), but other known methods may be used.

Further, in the embodiment shown in FIG. 4, the lower end surface of the pellicle frame 21 is provided with a cover adhesive layer 22, and a separator 23 for protecting the cover adhesive layer 22 is provided underneath, but if The means for supporting the pellicle frame 21 or the like may be provided so as not to bring the cover adhesive layer 22 into contact with the pellicle assembly container body 11, and the separator may be omitted.

[Examples]

Hereinafter, embodiments of the invention will be described in detail.

In the embodiment, first, the pellicle assembly container body 11 and the lid body 12 are manufactured by vacuum forming using an ABS resin sheet having a thickness of 5 mm. The pellicle container storage container 10 has a size of an outer dimension of 940 x 1060 x and a height of 90 mm.

The ABS resin sheet used in this example was mixed with a bromine-based flame retardant (trade name: Framecut, manufactured by Tosoh Corporation) 20 wt%, antimony trioxide (trade name: Patos) (PATOX), manufactured by Nippon Concentrate Co., Ltd., 2 wt%, and carbon black (trade name: SUNBLACK, manufactured by Asahi Carbon Co., Ltd.), 1 wt%, and an opaque black product obtained by extrusion molding.

Then, the pellicle assembly container body 11 and the lid body 12 are subjected to a modification process of cutting by an NC grooving machine after vacuum forming. Thereafter, the pellicle unit storage container body 11 is attached to the needle supporting device 14 by bolting (not shown) from the outside.

On the other hand, the pellicle film assembly 20 housed in the pellicle container storage container 10 is manufactured to the following specifications. That is, mechanical cutting with A5052 aluminum alloy, the outer dimensions of 756x940mm, inner dimensions of 740x928mm, height The 5.8 mm pellicle frame 21 is subjected to a black alumite treatment. Further, a vent hole 4 having a diameter of 1.5 mm (not shown) was opened near the center of each long side, and a non-penetrating jig hole (not shown) having a diameter of 2.5 mm was provided in the vicinity of the corner of each side.

Then, on the lower end surface of the pellicle frame 21, a 1.3 mm thick ketone adhesive (trade name: KR-3700, Shin-Etsu Chemical Co., Ltd.) was formed as the cover adhesive layer 22, and the surface thereof was coated with A release agent, and a separator 23 composed of a PET film. Further, a filter (not shown) made of a porous PTFE membrane is attached to the vent hole on the side surface of the pellicle frame 21 by an acrylic adhesive. Further, the upper end surface of the pellicle frame 21 is used as a pellicle film adhesion layer 24, and an anthrone adhesive (trade name: KR-3700, manufactured by Shin-Etsu Chemical Co., Ltd.) is coated thereon, and the tension is set by fluorine. A pellicle film 25 having a thickness of about 4.5 μm composed of a resin (trade name: CYTOP, manufactured by Asahi Glass Co., Ltd.).

The pellicle film assembly 20 thus produced is subjected to foreign matter inspection, and then fixed to the pellicle film container body 11 by the needle 13 and the needle supporting device 14, and then sealed by the lid body 12. Thereafter, the periphery of the fitting portion was sealed with an adhesive tape made of PVC, and the PE-preventing bag was stored with a thickness of 0.1. Further, when the pellicle film assembly 20 is housed, the pellicle film container 10 is cleaned and dried by a surfactant and pure water in a 10-stage clean room.

Finally, the pellicle container storage container 10 in which the pellicle film assembly 20 is housed is placed in an air-conditioned room having a room temperature of 22 to 28 ° C and a humidity of 30 to 55%, and stored for one year. In addition, after the pellicle container storage container 10 is placed, it is placed in an environment in which sunlight is transmitted through the glass window for one year.

After one year, the pellicle film assembly 20 stored in the dust-proof membrane module storage container 10 is taken out in the clean room of the class 10, and the appearance and foreign matter are inspected. No foreign matter or damage is observed in the pellicle film assembly 20, and the cleaning is maintained. status. Further, the pellicle assembly container 10 itself does not have a significant change in appearance.

[Comparative example]

<Comparative Example 1>

In the first comparative example, the pellicle film container was produced in the same manner as in the first embodiment. However, the material of the pellicle container container lid is different from that of the above embodiment. In other words, the sheet material used for the lid body is a product obtained by extrusion molding of ABS resin, and the material thereof is 20% by weight of a bromine-based flame retardant (trade name: Framecut, manufactured by Tosoh Corporation). And antimony trioxide (trade name: PATOX, manufactured by Nippon Concentrate Co., Ltd.) 2 wt%, but no carbon black for blackening was added, and the appearance was white and transparent.

Then, the pellicle container storage container is cleaned and dried with a surfactant and pure water in a clean room of class 10, and then the foreign matter is inspected and stored in the pellicle film module having the same specifications as those of the embodiment. Then, it was left to stand for 1 year in the same environment as the example.

Then, one year later, the dust-proof film module was taken out from the dust-proof membrane module storage container in the clean room of the class 10, and the appearance and foreign matter inspection were performed, and the film surface of the dust-proof film module to be stored was found to be large. The foreign matter adheres, but a large amount of foreign matter of about 0.5 to 3 μm adheres. Furthermore, in some places, you can see attached foreign objects. The density is high, turbid and dirty, and products in this state are usually not usable. Further, the lid of the pellicle container storage container is yellow-white opaque, and is an unusable appearance as a product.

<Comparative Example 2>

In Comparative Example 2, the pellicle film container was produced in the same manner as in the examples and the comparative example 1, and the material of the lid of the pellicle container storage container was different from that of the above-described examples and the comparative example 1. That is, the sheet material used for the lid body is a product obtained by extrusion molding of ABS resin, and the material thereof is 35 wt% of an inorganic flame retardant magnesium hydroxide to replace the bromine-based flame retardant, and no carbon for blackening is added. Black, the appearance is white and opaque.

Then, the pellicle film container was cleaned and dried with a surfactant and pure water in a clean room of a class 10, and then the pellicles of the same specifications as those of the examples and the comparative examples were subjected to foreign matter inspection and storage. Then, it was left to stand still for 1 year in the same environment as in the examples and the comparative example 1.

Then, one year later, the dust-proof film module was taken out from the dust-proof membrane module storage container in the clean room of the dust-proof membrane module, and the appearance and foreign matter inspection were carried out, and it was found that the dust-proof film module contained therein was free from foreign matter and remained. The state of use, however, the cover of the pellicle container storage container is white opaque, and there are many places on the outside that turn yellow, and it is not usable as a product.

10‧‧‧Plastic membrane assembly storage container

11‧‧‧Plastic membrane module storage container body

12‧‧‧ Cover

20‧‧‧Pneumatic film assembly

21‧‧‧Plastic membrane assembly frame

22‧‧‧ Covering Adhesive Layer

23‧‧‧Separator

24‧‧‧Dust film adhesive layer

25‧‧‧Dust film

Claims (5)

A pellicle assembly container that houses at least one pellicle having a side length of more than 500 mm, characterized in that it is a pellicle assembly container body on which the pellicle is placed, and a cover body in which a peripheral edge portion of the pellicle container storage container body is fitted and sealed; at least the cover body is made of a vacuum-formed or compression-molded resin material; the resin material contains a flame retardant and a blackened material , opaque and black. The pellicle container storage container according to claim 1, wherein the content of the blackening material is 0.5% to 3% by weight of the resin material. The pellicle container storage container according to the above aspect, wherein the content of the flame retardant is 5% to 25% by weight of the resin material. The pellicle container storage container according to claim 3, wherein the flame retardant is a bromine-based compound. The pellicle container storage container according to claim 1, wherein the resin material is ABS resin.