JPH08133382A - Pillicle container - Google Patents

Abstract

PURPOSE: To contain and hold two different kinds of pellicle frames in a same container and use them at the same time. CONSTITUTION: This container is composed of a container body 1 surrounding a right square peripheral wall 10 and having a placing part 11 of a pellicle frame formed as a unit at the inner bottom and a cover body 2 having a fitting edge 20 to be fitted to the peripheral wall of the container body 1. Inclined pellicle frame contact faces 5, 5, 6, 6 having vertically different angles to be oppositely positioned against the inside face of the top plate of the cover body 2 are arranged to mount and hold the pellicle 4 through the pellicle frame 3, in the placing part 11 of the pellicle frame. As the result, since the cover body can be fitted to the container body in different directions to hold the pellicle frame, two different kinds of pellicle frames can be retained and hence two different kinds of pellicle frames can be contained at the same time in the same container and different metal molds are not required when molding resin for forming container cover bodies and further, the production cost can be reduced and the containers are standardized and simplified in handling.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a semiconductor IC or LSI.
The present invention relates to a pellicle storage container that stores a pellicle used as a protective film to prevent foreign matter from adhering to the surface of a photomask or reticle (generally referred to as a mask) used during manufacturing.

[0002]

2. Description of the Related Art Generally, in a semiconductor manufacturing process,
When transferring the circuit pattern drawn on the mask onto the wafer by ultraviolet rays, if there is even a small amount of foreign matter on the mask, it will be transferred to the wafer along with the circuit pattern and cause defects, so there is no foreign matter on the mask. However, a dustproof film called a pellicle has been developed and used for this purpose. This pellicle is made of nitrocellulose, etc., and has a thickness of several microns to several tens of microns. It is adhered to a pellicle frame made of aluminum or the like, and when mounted on the mask, foreign matter will not adhere to the mask. It becomes possible to prevent it. This pellicle is highly transparent, and even if foreign matter is present on the pellicle, it will not be transferred onto the wafer because the focus position of ultraviolet rays will shift during transfer, but the pellicle will not adhere to the mask. Since it is used for the purpose of preventing the above, it is required that the pellicle itself has no foreign matter attached. Therefore, during transportation and the like, the pellicle is hermetically housed in the pellicle container to prevent foreign matter from adhering to the pellicle.

As shown in FIG. 12, a conventional pellicle storage container has a rectangular mounting shape having a size corresponding to a pellicle frame d in which a pellicle c is adhered to a central portion of a container body b into which a lid a is fitted. The part e is bulged, and locking pieces f are provided on the upper peripheral edge of the mounting part e so as to be spaced apart. The inner surface of the lid a has a stepped tapered pressing portion g that abuts against the pellicle frame d.
The pellicle frame d to which is adhered is mounted on the mounting portion e of the container body b.
The pellicle frame d is restrained by the pressing portion g in a state where it is placed on the inside of the locking piece f and the lid a is fitted and attached on the container body b to prevent rattling. It can be stored.

[0004]

However, when the pellicle c is taken out together with the pellicle frame d from the pellicle storage container and the pellicle c is mounted on the mask, it is necessary to make the transfer surfaces of the mask the same. Therefore, the mounting method depends on the thickness of the mask. Is different. That is, in the case of a thick mask, the pellicle frame may be mounted so that the pellicle contacts only the pattern surface side of the mask. This is because on the side opposite to the pattern side of the mask, the focus position of the ultraviolet rays is shifted due to the thickness of the mask, so that even if foreign matter such as dust adheres to the scale, it is not likely to be transferred to the wafer. is there. However, when the mask is thin, if foreign matter such as dust adheres to the side opposite to the pattern side of the mask,
Since the focus position is almost unchanged and it is transferred to the wafer, pellicle must be mounted on both sides of the mask, and the height of the pellicle frame on both sides is adjusted so that the distance from the pattern surface is the same. I have no choice but to produce it. Therefore, pellicle frames with different heights are used for thick or thin masks.
Although the container main body is used in common, the lid body is a dedicated one according to the height of the pellicle frame.As a result, a separate mold device is required to mold the lid body. However, the manufacturing cost is high, and it is inconvenient to use unless it is a dedicated container. The present invention is intended to eliminate these conventional drawbacks, is a container having a common pellicle frame with different dimensions, can be safely stored without rattling, and can be used for resin molding of the lid,
An object of the present invention is to provide a pellicle storage container that can be manufactured with a common mold apparatus to reduce manufacturing costs and simplify handling.

[0005]

According to the present invention, there is provided a container body surrounding a regular square peripheral wall, and a pellicle frame mounting portion integrally formed on an inner bottom portion thereof, and a lid capable of being fitted to the peripheral wall of the container main body. A pellicle container comprising a body and holding and holding a pellicle on the pellicle frame mounting portion via a pellicle frame, facing the inner surface of the top plate of the lid body and tilting at different angles or heights in the vertical direction. The pellicle frame contacting surface is provided.

[0006]

[Function] The pellicle frame to which the pellicle is bonded is fitted and mounted on the pellicle frame mounting portion of the container body inside the locking piece, and the lid body is fitted on the container body and the pellicle frame is pressed. Although held, this lid has a pellicle frame contacting surface facing the inner surface of the top plate and having an inclined surface at different angles or heights in the vertical direction, so that the pellicle has the same inner and outer dimensions but different heights. The two types of frames can be accurately stored and held on the pellicle frame mounting portion of the container main body simply by changing the mounting direction of the lid body by 90 degrees and fitting them into the container main body. There is no need to separately manufacture lids that press against each other, one lid can be used as a single unit, pellicle storage and handling is simple, and the molding die device for the lid can be shared, and the manufacturing cost is also wide. Can be reduced to Can.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the examples of FIGS. 1 to 7. A container body 1 surrounding a peripheral wall 10 of a square shape, and a pellicle frame mounting portion 11 integrally formed on the inner bottom thereof, and And a lid body 2 having a fitting edge portion 20 that can be fitted to the peripheral wall 10 of the container body 1.
In order to mount and hold the pellicle 4 via the pellicle frame 3, the pellicle frame contact surfaces 5, 5 of the inclined surfaces facing the inner surface of the top plate of the lid body 2 at different angles in the vertical direction,
6 and 6 are deployed.

The container body 1 and the lid body 2 in this pellicle container are molded by injection molding from an antistatic resin such as polypropylene type, polystyrene type, acrylic type or acrylonitrile-butadiene-styrene type. The pellicle frame contact surfaces 5, 5 holding the short sides of the rectangular frame-shaped pellicle frame 3 on the inner surface of the
Are arranged opposite to each other with a slanted surface (small angle), and the pellicle frame contact surfaces 6, 6 for holding the long sides of the pellicle frame 3 are slanted surfaces (larger angle) different from the angle of the slanted surface. When the pellicle frame 3 placed on the pellicle frame mounting portion 11 is arranged to face each other and has a large thickness (t ₁ having a high height), the pellicle frame contact surfaces 5 and 5 press the pellicle frame 3 against each other. , And the pellicle frame contact surfaces 6 and 6 for a small thickness (a low height t ₂ ).
It is formed so that you can hold it down with.

That is, as shown in FIG. 7 (A), the pellicle frame contact surfaces 5 and 5 for holding the short sides of the rectangular frame-shaped pellicle frame 3 are arranged opposite to each other with an inclined surface at an angle α. In FIG. 7B, the pellicle frame abutting surfaces 6 and 6 that hold the short side portions of the pellicle frame 3 are arranged opposite to each other with inclined surfaces having an angle β (α> β), and are placed on the pellicle frame mounting portion 11. If the pellicle frame 3 placed on the surface of the pellicle frame 3 has a large thickness (t ₁ having a high height), the pellicle frame abutment surfaces 5 and 5 hold the pellicle frame 3 and a pellicle frame having a small thickness (a pellicle frame having a low height). It is formed so that it can be pressed against t ₂ ) by the pellicle frame contact surfaces 6 and 6. Further, in this case, as shown in FIG. 8A, on the inner surface of the top plate of the lid body 2, the contact lines of the pellicle frame contact surfaces 5 and 5 for holding the short sides of the rectangular frame-shaped pellicle frame 3 are held. The height of the contact line 6 ₁ of the pellicle frame contact surfaces 6 and 6 that are arranged opposite to each other on the inclined surface having a high height of 5 ₁ and further hold the short side portion of the pellicle frame 3 as shown in FIG. 8B. Can also be formed so as to accommodate the pellicle frames having different thicknesses as described above, by arranging the abutting portions 5 ₁ opposite to each other with inclined surfaces different from the height of the inclined surfaces (lower in height). In this example, the angles (α, β) of the pellicle frame contact surfaces 5, 6 may be equal.

In this case, the long side of the pellicle frame 3 is configured so that the pellicle frame contact surfaces 5 and 5 of the lid 2 do not come into contact with each other so that there is no hindrance to the storage. The pellicle frame 3 has a short side portion and a long side portion which does not hold the pellicle frame 3, and the pellicle frame 3 has a short side portion and a long side portion, respectively. The pellicle frame contact surfaces 5 and 6 can also be used. To this end, it is considered that the pellicle frame contact surfaces 5 and 6 are provided with different heights of the inner surfaces of two pairs of inclined surfaces orthogonal to the inner surface of the top plate of the lid body 2.

The pellicle 4 is stretched and adhered to a frame-shaped pellicle frame 3, has a size corresponding to the pellicle frame 3, and has a flat rectangular shape formed in the central portion of the container body 1. It is stored on the mounting portion 11 of. The container body 1 is provided with a peripheral wall 10 on the entire circumference of the container body 1, a concave surface portion 12 is formed on a central bottom surface, and a pellicle frame mounting portion 11 bulged upward is provided. A plurality of locking pieces 13 are provided on the upper peripheral edge at a plurality of intervals so as to project.
The pellicle frame 3 is fitted on the inner side of the base plate 3 so that the pellicle frame 3 can be stored and set without rattling.
4 is projected. Further, as the lid body 2, a fitting edge portion 20 which is bent in a substantially U shape is formed around the lid body 2, and is fitted to the container body 1 and is attachable / detachable to a corner portion (not shown), For example, the pellicle 4 can be completely housed together with the pellicle frame 3 by sealingly holding it by a resin fitting ring or a holding member.

Then, as shown in FIGS. 1 to 4, the pellicle 4 is housed in a state in which the pellicle frame 3 is mounted on the pellicle frame mounting portion 11 of the container body 1, and the lid body 2 is covered from above. If the pellicle frame 3 is pushed over and held by pressing the pellicle frame 3 against the pellicle frame contact surfaces 5 and 5, the pellicle frame 3 including the pellicle frame 3 does not rattle during transportation and dust is not generated inside. It can be transported or stored safely and cleanly without fear. In addition, as shown in FIGS. 5 to 7, this pellicle storage container has a low height if the lid body 2 is rotated 90 degrees in a horizontal state to cover it according to the height of the pellicle frame 3 to be stored. Since the pellicle frame 3 can be pressed and held from above by the facing pellicle frame contact surfaces 6 and 6, two different types of pellicle frames can be stored and stored together in the same container.
The resin molding of the container lid does not require a separate mold device, the manufacturing cost is reduced, the containers are unified, and the handling is simplified.

In the embodiment described above, the pellicle frame 3
Although the pellicle storage container is configured for items with the same inner and outer dimensions but different heights, the pellicle storage container has the same inner and outer dimensions but the same height, or the inner, outer and height dimensions. Even if all are different, the locking piece 13 of the container body 1
Since the protrusions are provided so as to match the pellicle frame 3 placed inside, the contact surfaces 5 and 6 should be provided in common for the different pellicle frames 3 even if the container body is different. You can Further, the plane shape of the lid body 2 is made to travel at a corner portion to form a cross shape and the pellicle frame contact surfaces 5, 5 and 6, 6 which are opposed to each other are connected to each other. Interface 5,
9 and 10 show connection parts at corners 5 and 6,6.
It can also be configured in a shape as in the example.

Further, although the pellicle frame mounting portion 11 of the container body 1 is formed in a rectangular shape in plan view, it can be used for commonization by forming it in a cross-shaped plan shape as shown in FIG. It is possible.

[0015]

Industrial Applicability The present invention comprises a container body which surrounds a regular square peripheral wall and has an inner bottom portion integrally formed with a pellicle frame mounting portion, and a lid which can be fitted to the peripheral wall of the container main body. In a pellicle storage container for mounting and holding a pellicle on the pellicle frame mounting portion via a pellicle frame, a pellicle facing the inner surface of the top plate of the container lid and having inclined surfaces at different angles or heights in the vertical direction. By disposing the frame contact surfaces, the heights of the contact lines facing each other are made different, and the pellicle frames are accommodated in different directions so as to cover the container main body in different directions. It can be stored in each pellicle without any play and can be stored safely without affecting the pellicle storage, so two different pellicle frames can be stored and stored together in the same container. It does not separate require mold apparatus during resin molding of the container lid can handling also simplify manufacturing cost have been made unification reduced vessel.

[Brief description of drawings]

FIG. 1 is a partially cutaway plan view showing an embodiment of the present invention.

FIG. 2 is a vertical sectional view taken along line XX of FIG.

FIG. 3 is a vertical cross-sectional view showing the separated state of FIG.

FIG. 4 is a perspective view of the example of FIG.

5 is a partially cutaway plan view showing another usage state of the example of FIG. 1. FIG.

6 is a vertical cross-sectional view taken along line YY of FIG.

FIG. 7 is an enlarged vertical sectional view of a contact surface of a pellicle frame,
(A) is an enlarged view of the S portion of FIG. 2 and (B) is an enlarged view of the S ₁ portion of FIG.

8 an enlarged longitudinal sectional view when a high height of the pellicle frame contact surface, (A) is S unit B is an enlarged view of a portion corresponding to _one part S.

FIG. 9 is a partially cutaway plan view of another embodiment of the present invention.

FIG. 10 is a partially cutaway plan view of still another embodiment of the present invention.

FIG. 11 is a partially cutaway plan view of still another embodiment of the present invention.

FIG. 12 is a partially cutaway plan view of a conventional pellicle storage container, and FIG. 12B is a vertical cross-sectional view taken along line ZZ in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Container body 2 Lid body 3 Pellicle frame 4 Pellicle 5,6 Pellicle frame contact surface 10 Peripheral wall 11 Pellicle frame mounting portion 12 Concave surface portion 13 Locking piece 14 Leg portion 20 Fitting edge portion

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Office reference number FI technical display location H01L 21/027 21/68 U

Claims (2)

[Claims] 1. A pellicle frame, comprising a container body surrounding a square wall and a pellicle frame mounting portion integrally formed on an inner bottom thereof, and a lid body that can be fitted to the peripheral wall of the container body. In a pellicle storage container for mounting and holding a pellicle via a pellicle frame, a pellicle frame abutting surface of an inclined surface at a different angle in the vertical direction is provided facing the inner surface of the top plate of the lid in the mounting portion. Pelkle storage container characterized by. 2. A pellicle frame, which comprises a container body surrounding a square wall and a pellicle frame mounting portion integrally formed on an inner bottom thereof, and a lid which can be fitted to the peripheral wall of the container body. In a pellicle storage container for mounting and holding a pellicle via a pellicle frame, a pellicle frame contact surface of an inclined surface having a different inner surface height in the up-down direction is provided facing the inner surface of the top plate of the lid in the mounting portion. A pellicle storage container characterized by the above.