HK1096928A1 - Pellicle storage container - Google Patents

Pellicle storage container

Info

Publication number
HK1096928A1
HK1096928A1 HK07103147A HK07103147A HK1096928A1 HK 1096928 A1 HK1096928 A1 HK 1096928A1 HK 07103147 A HK07103147 A HK 07103147A HK 07103147 A HK07103147 A HK 07103147A HK 1096928 A1 HK1096928 A1 HK 1096928A1
Authority
HK
Hong Kong
Prior art keywords
storage container
pellicle storage
pellicle
container
storage
Prior art date
Application number
HK07103147A
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of HK1096928A1 publication Critical patent/HK1096928A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/42—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for ampoules; for lamp bulbs; for electronic valves or tubes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
HK07103147A 2005-03-22 2007-03-23 Pellicle storage container HK1096928A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005081533A JP4391435B2 (en) 2005-03-22 2005-03-22 Pellicle storage container

Publications (1)

Publication Number Publication Date
HK1096928A1 true HK1096928A1 (en) 2007-06-15

Family

ID=37014532

Family Applications (1)

Application Number Title Priority Date Filing Date
HK07103147A HK1096928A1 (en) 2005-03-22 2007-03-23 Pellicle storage container

Country Status (6)

Country Link
US (1) US20060213797A1 (en)
JP (1) JP4391435B2 (en)
KR (1) KR101223967B1 (en)
CN (1) CN100398413C (en)
HK (1) HK1096928A1 (en)
TW (1) TWI293477B (en)

Families Citing this family (38)

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Publication number Priority date Publication date Assignee Title
JP4664746B2 (en) 2005-06-20 2011-04-06 信越化学工業株式会社 Large pellicle container for lithography
JP4963041B2 (en) * 2006-06-16 2012-06-27 旭化成イーマテリアルズ株式会社 Pellicle storage container
US7581372B2 (en) * 2006-08-17 2009-09-01 Microtome Precision, Inc. High cleanliness article transport system
JP4672636B2 (en) * 2006-11-02 2011-04-20 信越化学工業株式会社 Pellicle storage container
JP5052106B2 (en) * 2006-11-22 2012-10-17 旭化成イーマテリアルズ株式会社 How to store the pellicle
JP4796946B2 (en) * 2006-11-30 2011-10-19 信越化学工業株式会社 Pellicle storage container
JP2008216846A (en) * 2007-03-07 2008-09-18 Asahi Kasei Electronics Co Ltd Pellicle storage container
KR100847670B1 (en) 2007-05-03 2008-07-23 비아이 이엠티 주식회사 Composition for mask box and mask box using thereof
JP4955449B2 (en) 2007-05-10 2012-06-20 信越化学工業株式会社 Pellicle storage container
CN101689018B (en) * 2007-07-06 2013-03-20 旭化成电子材料株式会社 Frame of large pellicle and grasping method of frame
JP5051840B2 (en) * 2007-11-22 2012-10-17 信越化学工業株式会社 Method for storing a pellicle in a pellicle storage container
JP2011007827A (en) * 2009-06-23 2011-01-13 Shin Etsu Polymer Co Ltd Storage container for large precision member
JP2011034020A (en) * 2009-08-06 2011-02-17 Shin-Etsu Chemical Co Ltd Pellicle storage container
JP2011164404A (en) * 2010-02-10 2011-08-25 Shin-Etsu Chemical Co Ltd Pellicle storage container
JP5202557B2 (en) * 2010-03-05 2013-06-05 信越化学工業株式会社 Pellicle handling jig
JP5528190B2 (en) * 2010-04-23 2014-06-25 信越化学工業株式会社 Pellicle storage container
JP2012046239A (en) * 2010-08-30 2012-03-08 Shin-Etsu Chemical Co Ltd Corner clip for pellicle container case
JP2012103638A (en) * 2010-11-15 2012-05-31 Shin Etsu Chem Co Ltd Pellicle handling tool
JP5649134B2 (en) * 2011-02-08 2015-01-07 信越化学工業株式会社 Pellicle frame
JP5722760B2 (en) * 2011-02-08 2015-05-27 信越化学工業株式会社 Pellicle manufacturing kit
JP5586559B2 (en) * 2011-10-28 2014-09-10 信越化学工業株式会社 Pellicle container
JP5586560B2 (en) * 2011-10-28 2014-09-10 信越化学工業株式会社 Pellicle container
JP5684752B2 (en) * 2012-03-29 2015-03-18 信越化学工業株式会社 Pellicle storage container
CN102866577A (en) * 2012-09-17 2013-01-09 上海华力微电子有限公司 Mask conveying box and method for reducing mask pollution
KR102460875B1 (en) 2014-04-17 2022-10-31 신에쓰 가가꾸 고교 가부시끼가이샤 Pellicle container
JP6308676B2 (en) * 2014-12-18 2018-04-11 信越化学工業株式会社 Pellicle container for lithography.
JP2016151633A (en) * 2015-02-17 2016-08-22 信越化学工業株式会社 Pellicle-housing container
JP6275067B2 (en) * 2015-02-24 2018-02-07 信越化学工業株式会社 Pellicle storage container
JP6351178B2 (en) 2015-07-13 2018-07-04 信越化学工業株式会社 Pellicle storage container and pellicle removal method
JP6494111B2 (en) * 2015-11-09 2019-04-03 信越化学工業株式会社 Pellicle storage container packaging structure and packaging method thereof
JP6604651B2 (en) * 2016-02-22 2019-11-13 信越化学工業株式会社 Pellicle storage container
KR102172217B1 (en) 2018-07-31 2020-10-30 주식회사 시엠테크놀로지 Pellicle container and particle removing method using the same
KR102172221B1 (en) 2018-07-31 2020-10-30 주식회사 시엠테크놀로지 Pellicle container with diamond like carbon coating layer
KR102172218B1 (en) 2018-07-31 2020-10-30 주식회사 시엠테크놀로지 Pellicle container
KR20200044262A (en) * 2018-10-18 2020-04-29 삼성디스플레이 주식회사 Tray for carrying disply panel
KR101987741B1 (en) * 2019-01-17 2019-06-12 피엠씨글로벌 주식회사 Photo mask keeping box
JP2021184068A (en) * 2020-05-22 2021-12-02 旭化成株式会社 Pellicle case, holding unit and release film
JP2021189303A (en) * 2020-05-29 2021-12-13 旭化成株式会社 Pellicle case, tray and pellicle holding method

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US4842136A (en) * 1987-02-13 1989-06-27 Canon Kabushiki Kaisha Dust-proof container having improved construction for holding a reticle therein
US5042655A (en) * 1989-09-27 1991-08-27 E. I. Du Pont De Nemours & Co. Pellicle packaging and handling system
US5239261A (en) * 1992-01-27 1993-08-24 Tektronix, Inc. Probe apparatus for testing electronic circuits immersed in a liquid cryogen
JP3200776B2 (en) * 1992-08-06 2001-08-20 大日本印刷株式会社 PCB holding case
JPH06230561A (en) * 1993-01-29 1994-08-19 Shin Etsu Chem Co Ltd Production of pellicle for lithography
JP3143337B2 (en) * 1994-10-12 2001-03-07 信越ポリマー株式会社 Pellicle storage container
JPH08133382A (en) * 1994-11-09 1996-05-28 Shin Etsu Polymer Co Ltd Pillicle container
JPH09204039A (en) * 1996-01-25 1997-08-05 Shin Etsu Chem Co Ltd Pellicle frame holder
US5976307A (en) * 1998-03-13 1999-11-02 Dupont Photomasks, Inc. Method and apparatus for removing a pellicle frame from a photomask plate
JP4458310B2 (en) * 1999-09-28 2010-04-28 旭化成イーマテリアルズ株式会社 Pellicle storage container and foreign object inspection method thereof
US6693061B2 (en) * 2000-11-24 2004-02-17 Ricoh Company, Ltd. Light-permeable thermosensitive recording material
JP4345881B2 (en) * 2003-06-04 2009-10-14 旭化成イーマテリアルズ株式会社 Large pellicle storage method
JP2004361705A (en) * 2003-06-05 2004-12-24 Asahi Kasei Electronics Co Ltd Method for housing large pellicle
US6882408B2 (en) * 2003-06-25 2005-04-19 Powerchip Semiconductor Corp. Reticle transferring support and transferring method thereof
JP4236535B2 (en) * 2003-07-31 2009-03-11 旭化成エレクトロニクス株式会社 Large pellicle storage container

Also Published As

Publication number Publication date
KR101223967B1 (en) 2013-01-18
TWI293477B (en) 2008-02-11
KR20060102264A (en) 2006-09-27
TW200634909A (en) 2006-10-01
CN100398413C (en) 2008-07-02
JP4391435B2 (en) 2009-12-24
CN1836988A (en) 2006-09-27
US20060213797A1 (en) 2006-09-28
JP2006267179A (en) 2006-10-05

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20220228