CN106353967A - Dust-preventing film assembly storage container and method for taking out dust-preventing film assembly - Google Patents
Dust-preventing film assembly storage container and method for taking out dust-preventing film assembly Download PDFInfo
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- CN106353967A CN106353967A CN201610537309.3A CN201610537309A CN106353967A CN 106353967 A CN106353967 A CN 106353967A CN 201610537309 A CN201610537309 A CN 201610537309A CN 106353967 A CN106353967 A CN 106353967A
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- Prior art keywords
- pin
- film component
- dustproof film
- lid
- vessel
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7096—Arrangement, mounting, housing, environment, cleaning or maintenance of apparatus
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Packaging Frangible Articles (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
There is provided a dust-preventing film assembly storage container for accommodating and / or releasing a needle in a state where a cover is fitted to a container body, wherein the dust-preventing film assembly storage container has a simple structure and can be easily produced in mass. The dust-preventing film assembly storage container includes a container body for accommodating a dust-preventing film assembly, and a stopper cover is fitted on the container body, wherein a needles which is arranged in a recess portion and of which the horizontally movable front end portion can be inserted in side surface of a dust-preventing film assembly frame and a needle support device are arranged on the container body. The needle is provided with a needle operation portion extending towards the opening portion of the needle body, and the needle operation portion and the upper portion are fixed by a sticky sheet for sealing an opening portion.
Description
Technical field
The present invention relates to using as cleaner unit when semiconductor device, printed base plate or liquid crystal panel etc. manufacture
Pellicle for lithogrAN_SNhy carries out receiving, takes care of, transport Pellicle container kit and from this dustproof film group
The method that dustproof film component is taken out by part accommodating container.
Background technology
In the semiconductor manufacturing or liquid crystal panel etc. such as lsi, super lsi manufacture, semiconductor wafer or liquid crystal be used
Raw sheet carries out light irradiation to carry out pattern making, now as attached in photomask used or middle photomask (hereinafter referred to as photomask)
Dust, this dust is absorbed by light or makes bendingof light, cause the pattern deformation of transfer, front portion uneven, additionally can make substrate
Dirty etc., also make the impaired problem such as size, quality, outward appearance.
Therefore, such operation is carried out generally in dust free room, even if so it is also difficult to always be to maintain the clear of photomask
Clean, therefore, using as dust excluder dustproof film component be attached to photomask surface after carry out exposure.In this occasion
Under, foreign body will not be attached directly to the surface of photomask, and is attached on dustproof film component, as long as will so in photoetching
The pattern of focus alignment of photomask, the foreign body on dustproof film component is just irrelevant with transfer.
Typically it is thusly-formed described dustproof film component, by by the good celluloid of printing opacity, cellulose acetate or fluorine
The transparent dust-proof film assembly film of the compositions such as resin attaches or then dust-proof in compositions such as aluminum, rustless steel, resin composite materials
The upper surface of film assembly framework.In addition, the lower end of dustproof film component framework is arranged to install the polybutene tree of photomask
The adhesion coating of the compositions such as fat, polyvinyl acetate base resin, acrylic resin, silicones, and in order to protect the release layer of adhesion coating
(separating sheet).
Such dustproof film component is although outside foreign body internally to the closing space being formed after mask attaches
Preventing of invading is effective, but, during dustproof film component attachment foreign body itself, due to the inside in closing space, thus difficult
It is attached to photomask in preventing foreign body.Therefore, also require that the abrasive of dustproof film component itself, thus in keeping, transporting
In the also Pellicle container kit of use to be maintained spatter property.Specifically it is desirable to anti-charging property is excellent, in swiping
When the also few material of dust, and the construction that can extremely prevent the contact between dustproof film component and the part of composition occur
Construction with the distortion-free high rigidity when applying external force.
Generally, such Pellicle container kit can with the resin injection molding forming such as abs, pmma, pc or
Vacuum forming is manufacturing.The reasons why using such manufacturing process be have smooth surface, foreign body attachment and dust occur can
Energy property is little, integrally formed, dust in seam and allotrylic probability is little, complicated shape object also easy to manufacture, amount
The excellent, low cost and other advantages of producing property.
For example, the length of side for quasiconductor and the profile of the accommodating container of the dustproof film component of printed base plate is about
200mm-300mm, is generally manufactured using injection molding forming.So the length of side is the dustproof film component receipts of 200mm-300mm
Receive container, due to there is the spatter property that can keep Pellicle container kit, applying the height that is also difficult to during external force deform
Rigidity, such as small-sized when be easy to guarantee rigidity, in addition, in injection molding forming due to thickness be easy to local change and to wall
Thickness carries out reinforcement, therefore stiff problem is few.
On the other hand, the dustproof film component, the length of side that are mainly used in liquid crystal panel are large-scale dust-proof thin more than 500mm
Membrane module accommodating container generally carries out vacuum forming with synthetic resin sheets such as abs, pmma and manufactures.Because, will at 1 or
Mouth at number is long to the flow distance of resin in the injection molding forming of high speed resin by injection in mould, difficult in preparation method.?
Under vacuum-formed occasion, cover the resin sheet of heating in mould, only carry out vacuum attraction and be easy with forming large-scale product,
But the article of wall thickness can not be shaped although the reinforcement of rib bone degree can be carried out, but it substantially only will have phase
With the piece bending of thickness of slab, so having the problem being difficult to make high rigidity thing.
In the occasion of Pellicle container kit, in addition to stiff problem as described above, also have dust-proof thin
The problem how membrane module is received by Pellicle container kit.For example, patent document 1 discloses that in dustproof film component
When mounting table is supported with support and loads, the contact site of the lid inner face upper surface to dustproof film component framework
Carry out pressing the accommodation method to keep fixing dustproof film component not carry out up and down and move horizontally.The method has dust-proof
Each portion phase mutual friction of film assembly and container and produce the advantage that probability is few, number of components is also few of dust, so typically
Used in small-sized in the dustproof film component of quasiconductor.
But, in the occasion of this accommodation method, lid and Pellicle container kit body will shape in high precision,
Therefore can not be used in being more than the large-scale Pellicle container kit for liquid crystal of 500mm in the length of side.Because,
It is difficult to obtain the good shaping of precision in the occasion of vacuum forming manufacture of such large-scale Pellicle container kit
Product, are also difficult to ensure that the deformation that is rigid, being difficult to avoid that the accommodating container in process and conveyance of accommodating container itself, at this
Close in fact it could happen that the swiping of container and dustproof film component framework, occur dust occur, low quality.
Therefore, the length of side is more than to the accommodation method of the large-scale dustproof film component of 500mm, patent document 2 discloses that
An a kind of part for the lining making mask adhesion layer is protected projects laterally, and is fixed in container originally with adhesive tape
Accommodation method on body.But, in the occasion of this accommodation method, have and must carry out operation with staff, be difficult to cleaning
State is maintained at the problem on disk.In addition, also having when band is peeled off taking-up, there is staff near dustproof film component framework
Thus there being the worry of foreign body attachment.
In addition, patent document 3 discloses that one kind inserts pin thus inciting somebody to action in dustproof film component framework lateral surface setting recess
The fixing accommodation method on vessel of dustproof film component.The occasion of this accommodation method, due to handling when staff less
Close to dustproof film component, the probability of the foreign body attachment being caused by operating personnel is little, but has and will persistently maintain in transport
The problem of the on position of pin.In order to solve this problem, patent document 4 discloses that the side that pin is fixed with position
Method, according to the method, it is possible to use simply constructs and in transport, pin is carried out firm fixation.
Further, patent document 5 discloses that in order that the foreign body attachment when pin unloads reduces, further in the lid of container
Body be close in the state of, from the outside of container, to dustproof film component, fixing pin operates so that dustproof film component from
The Pellicle container kit that vessel unloads.In the occasion of this Pellicle container kit, due to dust-proof thin
The releasing operation that membrane module foreign body adheres to the big pin of probability is to carry out in the state of lid is closed, and from accommodating container
Outside is operated, so preventing the foreign body that operating personnel brings in the solution division operation of pin to be attached to dustproof film component
Problem.
In addition, in this Pellicle container kit, beating after releasing dustproof film component is from vessel
Uncap body, then dustproof film component taken out using processing fixture etc., thus operating personnel close to dustproof film component when
Between will shorten, therefore, the probability of foreign body that operating personnel brings attachment will be greatly lowered.In addition, if first by pin
Release, then open lid and the apparatus for workization that dustproof film component takes out just is become easier to, particularly, use automaton
The taking-up operation of dustproof film component will be become suitable.
Prior art literature
Patent documentation
Patent documentation 1: Japanese Patent Publication 6-45965
Patent documentation 2: Japanese Unexamined Patent Publication 2004-36164
Patent documentation 3: Japan Patent 4391435
Patent documentation 4: Japan Patent 5586559
Patent documentation 5: Japan Patent 5586560
But, patent document 1 discloses that Pellicle container kit, particularly dustproof film component fixed part 18
Complicated structure.For example, in dustproof film component fixed part 18, as the rotation preventing portion being prevented the rotation of pin 28
Part, the projecting columnar part 44 being made up of the rearward end of pin 28 and the retainer of concavo-convex stop, so have guaranteeing this turn
Manufacture in the case of the dynamic installation accuracy preventing part and the problem of utilization.In addition, pin 28 and pin loading protion 32 etc. and
Rotation-preventing member is installed by the peristome 14a of the side setting of the big lid of foozle, so there being the elder generation to pin 28
The difficult problem that the positional precision of end is managed.Therefore, under the occasion of Pellicle container kit volume production, be to each
Pellicle container kit enters the position adjustment operation of the hand-manipulating of needle 28 and rotation-preventing member etc., has operational difficulties in volume production
Problem.
Therefore, in view of the problems referred to above of Pellicle container kit, the present invention is to Pellicle container kit
Improved, it is an object of the invention to provide a kind of facilitation of the manufacture to Pellicle container kit and mass production are fitted
Suitable simple structure, even if can also being fitted together to pin in the state of lid is chimeric on vessel and/or being released
Pellicle container kit, in addition, also provide one kind to take dustproof film component from Pellicle container kit
Reduce the removing method of the dustproof film component of foreign body attachment when going out.
In order to reach above-mentioned purpose, present inventor has performed abundant study, the dustproof film component of prior art is fixed
The pin in portion is improved, while arranging the pin operating portion that may enter the chimeric of the hand-manipulating of needle and/or releasing, to this pin operating portion
Then device improved, consequently, it is possible to making the simple of the complicated structure of dustproof film component fixed part of prior art
Change.
Content of the invention
The present invention provide a kind of by the vessel that dustproof film component is received and cover vessel on and
Its circumference be fitted together to stop lid constitute Pellicle container kit it is characterised in that: on vessel load
Movable in the horizontal direction, its leading end portion is inserted the pin in the recess of dustproof film component frame facet setting and this pin is entered
Device supported by the fixing pin of row, and setting on lid penetrates into the peristome within vessel, and described needle set has from pin body
The pin operating portion extending to the direction of the peristome of lid, described pin operating portion is pasted for airtight peristome by end thereon
Attached adhesive sheet is fixed.
In addition, the pin of the present invention preferably passes through the revolution operation centered on needle shank thus support chimeric on device in pin
Fixing, more preferably on described pin, with pin, the jut of setting supports that the notch part arranging on device is fitted and fixed with.
Further, the present invention provide a kind of removing method of dustproof film component it is characterised in that: will be described dust-proof
The adhesive sheet that the peristome of the lid of film assembly container attaches is peeled off, and after peristome is open, is holding in lid
In the state of chimeric stop on device body, from the outside of lid, pin operating portion is operated, by the tip of the pin of insertion recess
Portion extracts, and fixing dustproof film component on vessel is released, then unloads lid, dustproof film component is taken
Go out.
Invention effect
According to the present invention, there is provided a kind of dustproof film component storage with simple construction being suitable for mass production is held
The high Pellicle container kit of device, reliability, will be firm for the pin of dustproof film component fixed part fixing while, have
The breakage of dustproof film component received inside it and foreign body is had to be attached to the probability of dustproof film component.In addition, anti-
When dirt film assembly takes out, the adhesive sheet of lid is peeled off, peristome opens, by the recess of insertion dustproof film component framework
The leading end portion of pin is extracted, in the state of lid is intactly fitted together in vessel, can be calm by dustproof film component
Device body easily takes out, and therefore, is reduced with the attachment taking out the foreign body that operation is brought into by operating personnel.
Brief description
Fig. 1 is the axonometric chart of embodiments of the present invention.
Fig. 2 is the plane graph of embodiments of the present invention.
Fig. 3 is the plane graph (lid perspective) of embodiments of the present invention.
Fig. 4 is the aa sectional drawing of Fig. 3 of embodiments of the present invention.
Fig. 5 is the b portion enlarged drawing (dustproof film component fixed part) of Fig. 4 of embodiments of the present invention.
Fig. 6 is the axonometric chart of the pin support device of another embodiment of the present invention.
Fig. 7 is the axonometric chart of the pin with jut of another embodiment of the present invention.
Fig. 8 has the pin of jut for another embodiment of the present invention and the axonometric chart after device combination supported by pin.
Fig. 9 be another embodiment of the present invention there is the pin of jut and pin support device notch part combination dust-proof
The axonometric chart of film assembly fixed part.
Figure 10 is the axonometric chart of the dustproof film component fixed part of comparative example.
Specific embodiment
Below according to accompanying drawing, embodiments of the present invention are described in detail.The present invention is particularly receiving for storage
The length of side is more than 500mm, is mainly used in the accommodating container that panel manufactures the dustproof film component of large-scale dustproof film component of purposes
Occasion effect big, however, it is possible to be suitable for the length of side be 150mm for semiconductor manufacturing or the length of side be being used for of 300mm
The dustproof film component that printed base plate manufactures, its purposes is not limited by size.
As shown in figure 1, Pellicle container kit 10 is by vessel 11 He loading dustproof film component 20
The lid 12 being fitted together in circumference while vessel 11 is covered is constituted.Lid 12 and vessel 11 preferably use clip
(not shown) or hasp (not shown) are concluded, or preferably use adhesive tape (not shown) to paste.
Vessel 11 and lid 12 pass through injection molding forming or vacuum forming system by resins such as abs, pc, pmma, pvc
Make, in order to improve attachment foreign body be easy to discoverys degree, vessel 11 be black, for ease of confirming to inside, lid
12 is preferably transparent.In addition, for the attachment preventing foreign body, preferably carrying out to resin material incorporation conductive materials or on surface
Coating powered prevents function to give.
It is more than in the especially large-scale accommodating container of 1000mm in the length of side of dustproof film component, in order to ensure rigidity, hold
The outside of device body 11 can be installed by the reinforcing body of the making such as metal and fiber-reinforced plastic, but, dustproof film component is received
The body itself of container 10 received can also make of light metals such as aluminium alloys.
As shown in figure 3, pin supports that device 14 is installed in vessel 11 everywhere with bolt (not shown), insert wherein
Enter needle shank 13a of pin 13, thus can form gap that is less inclined and can smoothly extracting.
Pin 13 epoxy resin, the resin such as abs, pps, pe, peek are with the one such as injection molding forming or transfer moudling
Shape and to make.As needed, preferentially fillers such as glass fibre etc. are mixed into improve intensity.In addition, in order to ensure pin 13
The rigidity of needle shank 13a, can be constituted with metals such as rustless steels, be preferably pressed into resin making pin body 13b or with
It is then constituted.
Device 14 supported by pin, preferably as pin 13, passes through injection with the resin such as epoxy resin, abs, pps, pe, peek
Mould-forming or transfer moudling etc. integrally formed making.The number of the pin 13 fixed with dustproof film component framework 21 is at this
It is at 4 in embodiment, but, more numbers are for example can also to be in the length of side in the dustproof film component framework especially grown
At 6 or at 8.In addition, in the present embodiment, pin can be arranged it is also possible to arrange on minor face on long side, in addition also may be used
With long side and minor face both on arrange.
Stage portion 13c is set in the leading end portion of pin 13, elastomer 15 is embedded on this stage portion 13c, preferably dust-proof thin
The recess 22 of membrane module framework 21 is not directly contacted with needle part, so can prevent dust.Stage portion be shaped as
Ring shown in Fig. 5 embeds the small diameter part of pin tip, in addition, stage portion itself can also form elastomer and install (not showing
Go out).The material of elastomer 15 can be nitrile rubber, ethylene propylene rubber, silicone rubber, fluorubber etc..
Fig. 5 is the axonometric chart of the embodiment of dustproof film component fixed part of the present invention.Dustproof film component 20 such as Fig. 5
In the shown recess 22 being arranged by the adjacent corner in dustproof film component framework 21, insertion pin 13 to be supported, pin 13 is by container originally
Pin on body 11 supports device 14 to support.Here, the pin operating portion being extended to lid 12 from pin body 13b is arranged on pin 13
13d.Pin operating portion 13d can carry out integrally formed it is also possible to arrange at pin body 13b with identical resin all with pin 13
Hole, is constituted or then the bar-shaped part press-in being formed by metals such as rustless steels.
As shown in figure 5, in the lid 12 near the surface of adjacent pin operating portion 13d, setting is opened with internal run-through
Oral area 12a, and peristome 12a is airtight by attaching adhesive sheet 12b.Peristome 12a machining after lid 12 shaping
And formed, in order to the rigid step-down of lid 12 is limited in minimum, peristome 12a is preferably sized to make the behaviour of pin operating portion 13d
Size as necessary irreducible minimum.In addition, the shape of peristome 12a can be circular, ellipse, rectangle etc., but from
From the perspective of improving cleannes, preferably acerous shape, and scope is in about 20mm × 20mm 40mm × 40mm.
The pin operating portion 13d extending from pin body 13b, its length is that its tip reaches and the medial plane of lid 12 is same
The position of one plane, it contacts (then) with the adhesive sheet 12b attaching in order to peristome 12a is airtight and fixes.
When dustproof film component 20 takes out, adhesive sheet 12b is peeled off, while peristome 12a occurs, pin operating portion
The fixation of 13d is released from.Then, due to the back operation of pin operating portion 13d, will from the recess 22 of dustproof film component framework 21
The leading end portion of pin 13 is extracted, by the fixing releasing of the dustproof film component 20 on vessel 11.
In addition, before lid 12 unloads, Pellicle container kit 10 passes through the inside and outside ventilation of peristome 12a, so
Will not make to be changed into negative pressure in container due to unloading of lid 12, in addition to being easy to unload, be also prevented from being involved in of foreign body.
For the dustproof film component 20 of the present invention, except recess 22 will be arranged in the side of dustproof film component framework 21
Outside, have no particular limits.In addition, recess 22 is fitted together to and ease of processing due to the leading end portion with pin 13, preferably diameter
It is the circular hole of 1mm-5mm, but can also be other shapes for 0.5mm-4mm, depth.
Dustproof film component framework 21 is made up of the metal headed by aluminium alloy, resin or resin composite materials etc., at it
In can arrange passage (not shown) and install by its surface cover filter (not shown).In addition, for the ease of processing,
Its side also can be in each set ditch and recess etc..
As shown in figure 5, forming mask adhesion layer 23 on a face of dustproof film component framework 21, its surface is installed
The separating sheet 24 of protection.Dustproof film component framework 21 is generally rectangular cross-section, but can also be the other such as polygon, circle
Shape.If being masked the protection of adhesion coating 23 if there are the other devices replacing, separating sheet 24 can also be omitted.Separately
Outward, dustproof membrane following layer 25 is arranged on the face of the opposition side of mask adhesion layer 23, dustproof film 26 is arranged on it with being tauted
On.
The embodiment of the dustproof film component fixed part shown in Fig. 5, pin support the pin 13 on device 14 solid only according to
Then, there is the not enough place of reliability in bad adhesive sheet 12b and needle operation means 13d.
Therefore, in order that pin 13 is more securely fixed, with being adopted as of another embodiment shown in Fig. 6 and Fig. 7
Good.Jut 13e is arranged on a part for pin 13, supports to be also provided with the breach chimeric with jut 13e in device 14 in pin
Portion 14c.In this embodiment, by the revolution operation centered on needle shank 13a, making chimeric and/or releasing that be changed into can
Can, it is also provided with the operating portion 13d extending from pin body 13b, such combination, such as by if turning round operation and making pin 13 fixing,
Become the embodiment of the dustproof film component fixed part shown in Fig. 8.
Fig. 9 is that the dustproof film component shown in external Fig. 8 then of adhesive sheet 12b and needle operation means 13d is fixed
The axonometric chart of another embodiment of the more firm fixation of pin 13 on device 14 supported by pin by portion.
In another embodiment shown in Fig. 9, pin supports that device 14 has the pin insertion section for hole as shown in Figure 6
14a and trench introduction part 14b of the u font opening to another aspect, in a part for introduction part 14b, are arranged further
Notch part 14c.As shown in figure 8, pin 13 is being inserted until when colliding in the depths of introduction part 14b of supporting device 14 with pin, institute
The setting stating jut 13e is for chimeric with notch part 14c when so that it is turned round.Then, can be grasped by revolution by this composition
So that pin is fitted together to and/or release.Revolution work angle now, from the viewpoint of operability and chimeric fixing, preferably
For 30 degree -180 degree, more preferably 45 degree -90 degree.
The embodiment that pin operating portion 13d is as shown in Figure 5 is the same, and it is same that its length will reach with the outside of lid 12
The position of plane, will be airtight for peristome 12a, contacts (then) with the adhesive sheet 12b attaching and is fixed.In addition, described another
In one embodiment, as shown in figure 9, by pin is supported the jut 13e of the notch part 14c of device 14 and pin 13 be fitted together to
So that the position of pin 13 is fixed, thus, pin operating portion 13d further by contacting (then) with the adhesive sheet 12b on lid 12 and
Fix it is possible to more securely fix the position of pin 13.
In embodiment shown in Fig. 5 and Fig. 9 of the present invention, lid 12 is not provided with any position keeping pin 13
The mechanical part put, the foozle of each part and the accumulation of assembly error are few.In addition, the fixation of pin 13 and from outside operation
Reached by the simple composition of the combination of the peristome 12a and adhesive sheet 12b of setting on pin operating portion 13d, lid 12,
Big to the permission of scale error, thus extremely suitable mass production.
In addition, in the embodiment shown in fig. 9, its operational approach and the embodiment shown in Fig. 5 do not have big difference, only
Add the spinning movement of pin 13.The adhesive sheet 12b attaching on lid 12 is peeled off, after peristome 12a is open, from lid
The operation of pin operating portion 13d revolution is entered to exercise with can engaging with pin or similar instrument in 12 outside, so that pin 13 and pin is supported
The chimeric releasing of device 14, then makes it retreat, by the tip of the pin 13 of insertion in the recess 22 of dustproof film component framework 21
Portion extracts, and so that vessel 11 and the conclusion of dustproof film component 20 is released.Then, lid 12 is unloaded, with processing fixture (not
Illustrate) etc. dustproof film component 20 is taken out.
Therefore, even if the handss of operating personnel that release with pin of the embodiment shown in Fig. 9 are close with dustproof film component
But dustproof film component 20 is the state being covered by lid 12, so the attachment of the foreign body brought into by operating personnel can be significantly
Ground reduces.
Embodiment
Hereinafter embodiments of the invention are described in detail.In an embodiment, first, using resin sheet by vacuum
Shape and make the vessel 11 of shape and the lid 12 chimeric with it shown in Fig. 1, Fig. 2, Fig. 3 and Fig. 4.Fig. 1 is both
The shown axonometric chart of the state of combination, this outside dimension is 1080mmx960mm, highly for 92mm.Vessel 11 is black, thickness
Spend the fire retardant abs for 5mm..Lid 12 is the transparent fire retardant pmma that thickness is 5mm, carry out after such shaping powered prevent apply
Dress (trade name: seplegyda, SHIN-ETSU HANTOTAI's polymer (strain) is made).
Then, abs injection molding forming is made pin and support that pps injection molding forming is made pin 13 by device 14.Fig. 6 with
And Fig. 7 respectively shows that the axonometric chart of the detail shape of device 14 and pin 13 supported by pin, Fig. 8 is the shape that both combine
The axonometric chart of state.
Pin 13 is made up of needle shank 13a, pin body 13b, pin operating portion 13d, jut 13e as shown in Figure 7.Needle shank
13a is carried out machine cut and made by sus304 rustless steel, and press-in carries out the pin body 13b of injection molding forming with pps resin
In.In addition, pin operating portion 13d similarly uses the cutting of sus304 stainless steel machinery to make, it is pressed into setting on pin body 13b
Hole.Further, the tip in needle shank 13a arranges stage portion 13c, wherein by the annular resilient of the fluorubber of thick 0.5mm
Body 15 embeds.
On the other hand, pin supports that device 14 is made up of pin insertion section 14a, introduction part 14b, notch part 14c as shown in Figure 6.
Then, needle shank 13a of pin 13 inserts the pin insertion section 14a that device 14 supported by pin, when to 45 degree of revolutions of right rotation, jut
With pin, 13e supports that the breach 14c of device is chimeric, become pin 13 as shown in Figure 8 and the assembled state of device 14 supported by pin.
Then, the part of the assembled state shown in Fig. 8 is placed on vessel 11, as shown in Figure 9, to pin 13
Nested position in the recess 22 of dustproof film component framework 21 setting is adjusted, from the outside bolt of stainless steel
(not shown) is installed.In addition, when lid 12 is embedded in vessel 11, in the adjacent surface of pin operating portion 13d
Region arranges corner apertures 12a of 20mmx30mm size by machining.
Then, 10 volume productions of Pellicle container kit 20 of so assembling, dustproof film component 20 is received
Receive, installment state confirmed, learn and all there is no parts swap and adjust if necessary again, 20 all can untouched not
Use dynamicly.
Then, this Pellicle container kit 10 moves into 10 grades of dust free room, is being entered with surfactant and pure water
Row is completely dried after well cleaning.Then, in order to evaluate to this Pellicle container kit 10, will be dust-proof
Film assembly 20 is received, and has carried out transporting test.
The outside dimension of the dustproof film component 20 that this test uses is 937.5mmx756mm, and inside dimension is
925.5mmx740mm, is highly about 7.2mm.In addition, the dustproof film component framework 21 using is the a5052 aluminium alloy of black
Make, and carried out oxygen film process, its outside dimension is 937.5mmx756mm, inside dimension is 925.5mmx740mm, is highly
5.8mm.Further, its corner is outside r5, and inner side is r2, with 100mm interval setting 4 in each long side
Passage (not shown) and with 850mm interval setting 2The recess 22 of x depth 1.8mm.By made with ptfe
Sheet of filter acrylic acid sticker is arranged in passage.
Mask adhesion layer 23 uses the silicon sticker (SHIN-ETSU HANTOTAI's chemical industry (strain) system) of thickness about 1.2mm so that surface is protected
Shield, separating sheet 24 uses the pet piece of mould release coating thickness 0.1mm.The following layer 25 of pellicle film 26 carries out thickness
Silicon sticker (SHIN-ETSU HANTOTAI's chemical industry (strain) system) coating of about 0.1mm, is then carried out to pellicle film 26 above here
Fluorine resin (trade name cytop, Asahi Glass (strain) is made) coating that 3.0 μm of thickness.
Then, dustproof film component 20 is moved in darkroom, carry out inspection of foreign substance with light harvesting lamp, in above-mentioned dustproof film group
While mounting on the vessel 111 of part accommodating container 10, pin 13 leading end portion is inserted dustproof film component framework 21 side
Recess 22, revolution operation makes jut 13e support that the notch part 4c of device 14 is chimeric with pin.Subsequently, lid 12 is closed, opening
Oral area 12a attaches the adhesive sheet 12b that the adhesive tape made with pet makes, when peristome 12 is sealed so as to from peristome
The end of the pin operating portion 13d that 12a occurs is then.
In addition, the adhesive tape (not shown) patch that the circumference of vessel 11 and lid 12 is made with the pet of wide cut 35mm
After attached fixation, the powered bag 2 preventing pvc from making of inside cleaning washing is packed again, internally there is the strengthening of fender
Concha Arcae paper made package box (not shown) is received.
By the Pellicle container kit 10 of such packaging on truck, carry out about 1000 kilometers of transport.Then,
Pellicle container kit 10 after transport moves into 10 grades of dust free room, and inside is confirmed, learns that lid 12 attaches
Adhesive sheet 12b be keep sealing state.
In addition, peeling off adhesive sheet 12b, container inside is visually observed, the jut 13e of pin 12 is in and is propped up with pin
Hold the state that the notch part 14c of device 14 is fitted together to, the leading end portion of pin 13 is also in the recess 22 of dustproof film component framework 21
Chimeric state.
Then, there is the needle assembly (not shown) of rubber with tip, so that pin 13 is turned round by operating portion 13d, carry out about backward
After the movement of 10mm degree, lid 12 is unloaded, inside is confirmed it can be seen that dustproof film component 20 is in vessel
On 11, it is in carrying state without exceptionly.Then, make in this condition dimmed around, with light harvesting lamp to vessel 11 and anti-
Dirt film assembly 20 irradiates, and surface is observed, and does not see the attachment of foreign body.
Dustproof film component 20 when pin 13 is extracted, the operational period that releases from vessel 11 in dustproof film component 20
Between, due to the covering of lid 12, so there is no need to worry have foreign body to be attached to dustproof film component 20 from the handss of operating personnel
On, this operation can very easily be carried out.In addition, when lid 12 unloads, can be from peristome 12a ventilation, can be by lid 12
Successfully pick up.
Finally, the dustproof film component 20 releasing from vessel 11 is transported to darkroom with dedicated processes fixture (not shown)
Interior, with light harvesting lamp, the foreign body of surface attachment is checked, dustproof film component 20 does not have the attachment of foreign body completely, be in extremely clear
Clean state.
Comparative example
Figure 10 is the axonometric chart of the dustproof film component fixed part 30 making to compare.In this comparative example, dust-proof
By pin 31 and pin, film assembly fixed part 30 supports that device 14 is constituted, in the recess of dustproof film component framework, pin is inserted into
And fixing mode is same as the previously described embodiments, but as shown in Figure 10, suitable with the pin operating portion 13d of embodiment in pin 31
Different from embodiment on the point that device is not set.Thus, pin supports that device 14 is identical with embodiment, arranges jut 31e.
The pin 31 of comparative example is made up of needle shank 31a, pin body 31b, jut 31e, is by pps resin injection molding
Needle shank 31a of sus304 rustless steel making is pressed on the pin body 31b shaping and constitutes.In addition, the composition of jut 31e is
In order that during pin 31 revolution and pin supports that the notch part 14c of device 14 is fitted together to, by lid 12 in the state of pin 31 revolution is fixing
During covering, the height of this jut 31e will reach the height with the inner faces contact of lid 12.Further, pin body 31b's
The hexagonal cave 31f of end setting operation, installs fluorubber elastomer 15 in stage portion 31c of the tip of needle shank 31a.
This comparative example is identical with embodiment, receives the dustproof film component 20 with embodiment identical specification in vessel
After receiving, lid is fitted together to by this vessel, thus Pellicle container kit group is assembled, does not have in this lid 12
The parts suitable with the peristome 12a and adhesive sheet 12b of embodiment are set.
Then, the Pellicle container kit of so assembling, when carrying out identical transport test, will transport
Pellicle container kit afterwards moves into 10 grades of dust free room, subsequently unloads lid from vessel, carries out internal true
Recognize, dustproof film component 20 is in the state securely fixed on vessel by pin 31.
After the washing in addition, the handss of operating personnel are dried well, carefully die nut insertion is located at pin 31
The hexagonal cave 31f of rear end in, will this revolution release chimeric while, pin 31 is moved rearwards by, extracts from recess 22.So
Afterwards, keep this state to make dimmed around, with light harvesting light irradiation, the surface of vessel and dustproof film component 20 observed,
The face cleaning of dustproof film component 20, but find that size is with the periphery of dustproof film component fixed part 30 on vessel
5-20 μm of several scattering foreign matters.
Further, in this comparative example, the releasing operation of pin 31 is in the state unloading lid from vessel, that is,
Pellicle film is cautiously carried out in the state of showing out very much, but, if with lid as embodiment in container
The releasing operation that body is carried out in the state of being fitted together to is compared, and the time that it needs is about 1.5 times.
Finally, the dustproof film component 20 being released from from vessel moves into darkroom with special process fixture (not shown)
Interior, with light harvesting lamp, the foreign body of surface attachment is checked, find to have in pellicle film one of 10-20 μm of diameter different
Thing adheres to.This foreign body can utilize pressure 2kgf/cm2Blowing be dispensed, but when observing to vessel, prevent
The face of dirt film assembly 20 be cleaning it is possible to deduce dustproof film component 20 removing from vessel 11 when hold
Foreign body on device body is rolled-up and is attached on dust-proof face.
Description of reference numerals
10 Pellicle container kits
11 vessels
12 lids
12a peristome
12b adhesive sheet
13 pins
13a needle shank
13b pin body
13c stage portion
13d pin operating portion
13e jut
Device supported by 14 pins
14a pin insertion section
14b introduction part
14c notch part
15 elastomers
20 dustproof film components
21 dustproof film component frameworks
22 recesses
23 mask adhesion layer
24 separating sheet
25 pellicle film following layers
26 pellicle film
30 dustproof film component fixed parts (comparative example)
31 pins
31a needle shank
31b pin body
31c stage portion
31e jut
31f hexagonal cave
Claims (4)
1. a kind of Pellicle container kit, comprising: the vessel of storage dustproof film component and the described container of covering
Body is simultaneously fitted together to the lid of stop it is characterised in that to be placed with horizontal direction on described vessel movable in its circumference
Leading end portion insert the pin of recess of dustproof film component frame facet setting and device supported by pin that described pin is fixed,
In described lid, setting penetrates into the peristome within described vessel, arranges from pin body to described lid in described pin
The pin operating portion that the direction of the peristome of body extends, described pin operating portion and end thereon are in order to will be airtight for described peristome
The adhesive sheet attaching contacts and is then fixed.
2. Pellicle container kit according to claim 1 is it is characterised in that described pin is by with needle shank being
The revolution operation at center is fixed in described pin and supports device.
3. Pellicle container kit according to claim 2 is it is characterised in that described pin is by setting in described pin
The jut put and described pin are supported that the notch part of setting on device is chimeric and are fixed.
4. a kind of removing method of dustproof film component, is that the dustproof film component any one of from claims 1 to 3 is received
Method that dustproof film component is taken out by container of receiving is it is characterised in that the described adhesive sheet that attaches the peristome of described lid
Peel off, after described peristome is open, in the state of the chimeric stop on vessel of described lid, from described lid
Outside operates to described pin operating portion, and the leading end portion inserting the pin of described recess is extracted, will be solid on described vessel
Fixed dustproof film component releases, and subsequently unloads described lid, dustproof film component is taken out.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-139398 | 2015-07-13 | ||
| JP2015139398A JP6351178B2 (en) | 2015-07-13 | 2015-07-13 | Pellicle storage container and pellicle removal method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106353967A true CN106353967A (en) | 2017-01-25 |
| CN106353967B CN106353967B (en) | 2019-12-03 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610537309.3A Active CN106353967B (en) | 2015-07-13 | 2016-07-08 | The removing method of Pellicle container kit and dustproof film component |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6351178B2 (en) |
| KR (1) | KR102610556B1 (en) |
| CN (1) | CN106353967B (en) |
| TW (1) | TWI588598B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11183410B2 (en) * | 2017-04-24 | 2021-11-23 | Photronics, Inc. | Pellicle removal tool |
| CN107512472B (en) * | 2017-09-14 | 2023-02-10 | 国网吉林省电力有限公司电力科学研究院 | Dust-free filter membrane storage box for dust sampling and using method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101995764A (en) * | 2009-08-06 | 2011-03-30 | 信越化学工业株式会社 | Dustproof thin film assembly accepting container |
| JP2013097047A (en) * | 2011-10-28 | 2013-05-20 | Shin Etsu Chem Co Ltd | Pellicle storage container |
| JP2014085433A (en) * | 2012-10-22 | 2014-05-12 | Shin Etsu Chem Co Ltd | Container for housing pellicle |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03117692U (en) * | 1990-02-15 | 1991-12-05 | ||
| JPH0640482A (en) * | 1991-12-25 | 1994-02-15 | Hitachi Ltd | Carrying tray |
| JPH0645965A (en) | 1992-07-24 | 1994-02-18 | Nec Corp | Decoder |
| JP4497845B2 (en) | 2003-06-04 | 2010-07-07 | 旭化成イーマテリアルズ株式会社 | Large pellicle storage method |
| JP4391435B2 (en) * | 2005-03-22 | 2009-12-24 | 信越化学工業株式会社 | Pellicle storage container |
| JP4649363B2 (en) * | 2006-04-19 | 2011-03-09 | 信越化学工業株式会社 | Pellicle storage container |
| JP5051840B2 (en) * | 2007-11-22 | 2012-10-17 | 信越化学工業株式会社 | Method for storing a pellicle in a pellicle storage container |
| JP5528190B2 (en) * | 2010-04-23 | 2014-06-25 | 信越化学工業株式会社 | Pellicle storage container |
| JP5586559B2 (en) | 2011-10-28 | 2014-09-10 | 信越化学工業株式会社 | Pellicle container |
-
2015
- 2015-07-13 JP JP2015139398A patent/JP6351178B2/en active Active
-
2016
- 2016-06-27 KR KR1020160080136A patent/KR102610556B1/en active IP Right Grant
- 2016-07-07 TW TW105121476A patent/TWI588598B/en active
- 2016-07-08 CN CN201610537309.3A patent/CN106353967B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101995764A (en) * | 2009-08-06 | 2011-03-30 | 信越化学工业株式会社 | Dustproof thin film assembly accepting container |
| JP2013097047A (en) * | 2011-10-28 | 2013-05-20 | Shin Etsu Chem Co Ltd | Pellicle storage container |
| JP2014085433A (en) * | 2012-10-22 | 2014-05-12 | Shin Etsu Chem Co Ltd | Container for housing pellicle |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106353967B (en) | 2019-12-03 |
| KR102610556B1 (en) | 2023-12-07 |
| JP6351178B2 (en) | 2018-07-04 |
| JP2017021229A (en) | 2017-01-26 |
| TW201704854A (en) | 2017-02-01 |
| TWI588598B (en) | 2017-06-21 |
| KR20170008154A (en) | 2017-01-23 |
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