TW202036764A - Substrate accommodating container - Google Patents

Substrate accommodating container Download PDF

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Publication number
TW202036764A
TW202036764A TW108145108A TW108145108A TW202036764A TW 202036764 A TW202036764 A TW 202036764A TW 108145108 A TW108145108 A TW 108145108A TW 108145108 A TW108145108 A TW 108145108A TW 202036764 A TW202036764 A TW 202036764A
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Taiwan
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wall
pressing portion
container body
opening
pressing
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TW108145108A
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Chinese (zh)
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TWI816950B (en
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佐藤恭兵
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日商未來兒股份有限公司
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67366—Closed carriers characterised by materials, roughness, coatings or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Abstract

Provided is a substrate accommodating container 1 in which a container body 2 has a wall part 20 having a back wall 22, an upper wall 23, a lower wall 24, and a pair of lateral walls. The other end of the wall part 20 is closed by the back wall 22, and a container body opening part is formed by one end of the upper wall 23, one end of the lower wall 24, and one ends of the lateral walls 25 and 26. The lower wall 24 is provided with a positioning part 50 that positions an object RP to be accommodated with respect to the container body 2. The upper wall 23 is provided with a downward pressing part 60 that presses an upper part of the object RP to be accommodated toward the lower wall 24. A lid body 3, when closing the container body opening part, causes the downward pressing part 60 to press the upper part of the object RP to be accommodated toward the lower wall 24.

Description

基板收納容器Substrate storage container

本發明涉及對中間光罩（reticule pod）進行收納、保管、搬運、輸送等時使用的基板收納容器。The present invention relates to a substrate storage container used when storing, storing, transporting, conveying, etc., a reticule pod.

已知有用於對中間光罩盒進行收納並搬運等的容器，該中間光罩盒用於收納在半導體製造中使用的中間光罩（例如參照專利文獻1、專利文獻2）。A container for storing and transporting an intermediate photomask box for storing an intermediate photomask used in semiconductor manufacturing is known (for example, refer to Patent Document 1 and Patent Document 2).

容器主體的一端部具有形成有容器主體開口部的開口周緣部。容器主體的另一端部具有封閉的盒狀的壁部。在容器主體內形成有盒收納空間。盒收納空間由壁部包圍而形成，能夠收納中間光罩盒。蓋體能夠相對於開口周緣部拆裝，並能夠封閉容器主體開口部。在容器主體的內部設置有用於將中間光罩盒固定於容器主體的盒固定部件，在透過盒固定部件將中間光罩盒相對於容器主體固定的狀態下，容器收納中間光罩盒。One end of the container body has an opening peripheral edge portion in which an opening of the container body is formed. The other end of the container body has a closed box-shaped wall. A box storage space is formed in the container body. The box accommodating space is formed by being surrounded by the wall, and can accommodate the intermediate mask box. The lid can be attached to and detached from the periphery of the opening and can close the opening of the container body. A box fixing member for fixing the intermediate mask box to the container body is provided inside the container body, and the container accommodates the intermediate mask box in a state where the intermediate mask box is fixed to the container body through the box fixing member.

在以往的容器中收納中間光罩盒時，設為將蓋體從容器主體的開口周緣部卸下的狀態，將中間光罩盒插入盒收納空間，在透過固定部件將中間光罩盒相對於容器主體固定之後，透過蓋體封閉容器主體開口部。但是，優選更順暢地進行這樣的中間光罩盒向容器收納的步驟。When storing the intermediate mask box in a conventional container, set the lid body to be removed from the opening periphery of the container body, insert the intermediate mask box into the box storage space, and place the intermediate mask box relative to the container through the fixing member. After the container body is fixed, the opening of the container body is closed through the lid. However, it is preferable to perform such a step of storing the intermediate mask box in the container more smoothly.

專利文獻1：日本專利公開公報特開2018-30632號Patent Document 1: Japanese Patent Publication No. 2018-30632

專利文獻2：美國專利申請公開第2018/0102269號說明書Patent Document 2: U.S. Patent Application Publication No. 2018/0102269 Specification

本發明目的在於提供一種能夠更順暢地進行中間光罩盒向容器收納的步驟的基板收納容器。An object of the present invention is to provide a substrate storage container that can more smoothly carry out the step of storing the intermediate mask box into the container.

本發明的基板收納容器具備：容器主體，在內部形成有能夠收納被收納物的盒收納空間，在一端部具有形成有與所述盒收納空間連通的容器主體開口部的開口周緣部；蓋體，能夠相對於所述開口周緣部拆裝，且能夠以由所述開口周緣部包圍的位置關係封閉所述容器主體開口部；以及密封部件，安裝於所述蓋體，能夠與所述蓋體和所述開口周緣部抵接，透過夾設在所述開口周緣部與所述蓋體之間並與所述開口周緣部和所述蓋體緊密地抵接，與所述蓋體一起封閉所述容器主體開口部，所述容器主體具有壁部，該壁部具有後壁、上壁、下壁和一對側壁，透過所述後壁封閉所述壁部的另一端部，透過所述上壁的一端部、所述下壁的一端部和所述側壁的一端部形成所述容器主體開口部，在所述下壁設置有定位部，該定位部將所述被收納物相對於所述容器主體定位，在所述上壁設置有下方按壓部，該下方按壓部將所述被收納物的上部向所述下壁的方向按壓，所述蓋體當封閉所述容器主體開口部時，使所述下方按壓部將所述被收納物的上部向所述下壁的方向按壓。The substrate storage container of the present invention includes: a container body in which a box storage space capable of accommodating objects to be stored is formed, and an opening peripheral portion formed with an opening of the container body communicating with the box storage space at one end; a lid body , Detachable with respect to the opening peripheral portion, and capable of closing the opening of the container body in a positional relationship surrounded by the opening peripheral portion; and a sealing member that is attached to the lid and can be connected to the lid Abuts against the peripheral edge of the opening, by being sandwiched between the peripheral edge of the opening and the cover and tightly abutting against the peripheral edge of the opening and the cover, and closes the space together with the cover The container main body opening, the container main body has a wall, the wall has a rear wall, an upper wall, a lower wall, and a pair of side walls, the other end of the wall is closed through the rear wall, and the upper One end of the wall, one end of the lower wall, and one end of the side wall form the container body opening, and the lower wall is provided with a positioning portion that positions the stored object relative to the The container body is positioned, and the upper wall is provided with a lower pressing part that presses the upper part of the stored object in the direction of the lower wall. When the lid body closes the opening of the container body, The lower pressing part is made to press the upper part of the stored object in the direction of the lower wall.

此外，優選所述蓋體具有能夠與所述下方按壓部卡合的按壓部被卡合部，當封閉所述容器主體開口部時，所述按壓部被卡合部與所述下方按壓部卡合，使所述下方按壓部將所述被收納物的上部向所述下壁的方向按壓。In addition, it is preferable that the cover body has a pressing portion engaged portion capable of engaging with the lower pressing portion, and when the opening of the container body is closed, the pressing portion is engaged with the lower pressing portion. Closely, the lower pressing part presses the upper part of the to-be-contained object toward the lower wall.

此外，優選所述蓋體的所述按壓部被卡合部以及與所述按壓部被卡合部卡合的所述下方按壓部的驅動部卡合部具有相互卡合的鉤形狀。In addition, it is preferable that the engaging portion of the pressing portion of the cover body and the driving portion engaging portion of the lower pressing portion engaged with the engaging portion of the pressing portion have a hook shape that engages with each other.

此外，優選所述下方按壓部具備：前端部按壓部，與所述被收納物的上部抵接而將所述被收納物向所述下壁的方向按壓；按壓部驅動部，與所述前端部按壓部連結，能夠伴隨著所述蓋體的移動而移動；以及施力部件，當所述蓋體未封閉所述容器主體開口部時，對所述按壓部驅動部進行施力以使所述前端部按壓部成為從被收納物離開的狀態。In addition, it is preferable that the lower pressing portion includes: a front end pressing portion that abuts against the upper portion of the stored object to press the stored object in the direction of the lower wall; and a pressing portion driving portion that interacts with the front end The pressing portion is connected and can move along with the movement of the lid; and an urging member that urges the pressing portion driving portion when the lid does not close the opening of the container body The tip pressing portion is in a state of being separated from the stored object.

此外，優選所述下方按壓部具備：前端部按壓部，與所述被收納物的上部抵接而將所述被收納物向所述下壁的方向按壓；以及按壓部驅動部，與所述前端部按壓部連結，能夠伴隨著所述蓋體的移動而移動，所述按壓部驅動部當所述蓋體向所述後壁的方向移動時，能夠朝相對於水平方向成規定的角度的斜上方向移動。In addition, it is preferable that the lower pressing portion includes: a front end pressing portion that abuts against the upper portion of the stored object to press the stored object in the direction of the lower wall; and a pressing portion driving portion that interacts with the The front end pressing portion is connected and can move along with the movement of the cover, and the pressing portion driving portion can move toward a predetermined angle with respect to the horizontal when the cover moves in the direction of the rear wall. Move diagonally upward.

此外，優選所述前端部按壓部的上部由所述按壓部驅動部向所述後壁的方向按壓，由此，所述前端部按壓部的下部從所述後壁側向容器主體開口部側移動並與所述被收納物的上部抵接，將所述被收納物的上部向所述下壁的方向按壓。In addition, it is preferable that the upper portion of the front end portion pressing portion is pressed by the pressing portion driving portion toward the rear wall, whereby the lower portion of the front end portion pressing portion extends from the rear wall side to the container body opening side Move and abut on the upper part of the stored object, and press the upper part of the stored object in the direction of the lower wall.

此外，優選構成所述壁部的材料由環烯烴聚合物構成。此外，優選具有能夠將所述盒收納空間與所述容器主體的外部的空間連通的通氣路。In addition, it is preferable that the material constituting the wall portion is made of a cycloolefin polymer. In addition, it is preferable to have an air passage capable of communicating the cassette storage space with a space outside the container body.

根據本發明，能夠提供一種能夠更順暢地進行中間光罩盒向容器收納的步驟的基板收納容器。According to the present invention, it is possible to provide a substrate storage container that can more smoothly perform the step of storing the intermediate mask box in the container.

以下，參照附圖說明本實施方式的基板收納容器1。Hereinafter, the substrate storage container 1 of this embodiment will be described with reference to the drawings.

圖1是表示基板收納容器1的主視圖。圖2是表示基板收納容器1的俯視圖。圖3是表示在基板收納容器1中，中間光罩盒RP固定於容器主體2的狀態的側方剖視圖（沿著圖2的A-A線的側方剖視圖）。圖4是表示在基板收納容器1中，中間光罩盒RP固定於容器主體2的狀態的剖面立體圖（沿著圖2的A-A線的剖面立體圖）。FIG. 1 is a front view showing the substrate storage container 1. FIG. 2 is a plan view showing the substrate storage container 1. 3 is a side cross-sectional view (a side cross-sectional view along the line A-A of FIG. 2) showing a state in which the intermediate mask RP is fixed to the container body 2 in the substrate storage container 1. 4 is a cross-sectional perspective view showing a state in which the intermediate mask RP is fixed to the container body 2 in the substrate storage container 1 (a cross-sectional perspective view along the line A-A in FIG. 2 ).

此處，為了便於說明，將從後述的容器主體2朝向蓋體3的方向（圖2中的從上朝下的方向）定義為前方向D11，將其相反的方向定義為後方向D12，將它們合併起來定義為前後方向D1。此外，將從後述的下壁24朝向上壁23的方向（圖1中的上方向）定義為上方向D21，將其相反的方向定義為下方向D22，將它們合併起來定義為上下方向D2。此外，將從後述第二側壁26朝向第一側壁25的方向（圖1中的從右朝左的方向）定義為左方向D31，將其相反的方向定義為右方向D32，將它們合併起來定義為左右方向D3。在主要的附圖中圖示了表示這些方向的箭頭。Here, for the convenience of description, the direction from the container body 2 to the lid 3 (the direction from top to bottom in FIG. 2) described later is defined as the front direction D11, and the opposite direction is defined as the rear direction D12. They are combined and defined as the front and rear direction D1. In addition, the direction (upward direction in FIG. 1) from the lower wall 24 to the upper wall 23 mentioned later is defined as the upper direction D21, the opposite direction is defined as the lower direction D22, and these are combined and defined as the up-down direction D2. In addition, the direction from the second side wall 26 to the first side wall 25 described later (the direction from right to left in FIG. 1) is defined as the left direction D31, and the opposite direction is defined as the right direction D32, and these are combined to define For the left and right direction D3. Arrows indicating these directions are illustrated in the main drawings.

此外，收納於基板收納容器1的中間光罩盒RP用於收納一個或多個在半導體製造中為了進行曝光處理而使用的中間光罩，如圖3所示，中間光罩盒RP的整體的外形形狀為大致長方體形狀，構成為中央部具有比周圍的部分更厚的厚度的形狀。In addition, the intermediate reticle box RP stored in the substrate storage container 1 is used to contain one or more intermediate reticles used for exposure processing in semiconductor manufacturing. As shown in FIG. 3, the entire intermediate reticle box RP The outer shape is a substantially rectangular parallelepiped shape, and the central part has a thicker thickness than the surrounding parts.

此外，基板收納容器1的容器主體2能夠與蓋體3一起用於收納基板，基板是圓盤狀的矽晶片、玻璃晶片、藍寶石晶片等，是在工業上使用的薄基板。本實施方式中的能夠收納於容器主體2和蓋體3的基板是直徑300mm的矽晶片。In addition, the container body 2 of the substrate storage container 1 can be used together with the lid 3 for storing substrates. The substrates are disc-shaped silicon wafers, glass wafers, sapphire wafers, etc., which are thin substrates used in industry. The substrate that can be housed in the container body 2 and the lid 3 in this embodiment is a silicon wafer with a diameter of 300 mm.

即，如圖1所示，基板收納容器1的容器主體2和蓋體3用作收納具有基於SEMI規格的結構且由上述的矽晶片構成的基板並在工廠內的工序中搬運的工序內容器，或者用作透過陸運方式、空運方式、海運方式等的輸送方式輸送基板的發貨容器。That is, as shown in FIG. 1, the container body 2 and the lid 3 of the substrate storage container 1 are used as a process inner container for storing a substrate having a structure based on the SEMI standard and consisting of the above-mentioned silicon wafer and transporting it in a process in a factory , Or used as a shipping container to transport substrates by land, air, or sea transportation.

容器主體2具有在一端部形成有容器主體開口部21且另一端部被封閉的筒狀的壁部20。在容器主體2內形成盒收納空間27。盒收納空間27由壁部20包圍而形成。在壁部20的部分且形成盒收納空間27的部分，配置有作為定位部的盒載置部50和下方按壓部60。如圖3等所示，在盒收納空間27能夠收納一個作為被收納物的中間光罩盒RP。在盒載置部50載置中間光罩盒RP，從而該中間光罩盒RP在盒收納空間27中相對於容器主體2定位。下方按壓部60將中間光罩盒RP的上部朝盒載置部50的方向按壓。The container body 2 has a cylindrical wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed. A box storage space 27 is formed in the container body 2. The box storage space 27 is surrounded and formed by the wall portion 20. In the portion of the wall portion 20 that forms the cassette storage space 27, a cassette placement portion 50 as a positioning portion and a lower pressing portion 60 are arranged. As shown in FIG. 3 etc., one intermediate mask box RP as an object to be stored can be stored in the cassette storage space 27. The intermediate photomask RP is placed on the cartridge placing portion 50 so that the intermediate photomask RP is positioned relative to the container body 2 in the cartridge storage space 27. The lower pressing part 60 presses the upper part of the intermediate mask box RP in the direction of the box mounting part 50.

蓋體3能夠相對於形成容器主體開口部21的開口周緣部28（圖1等）拆裝，能夠封閉容器主體開口部21。The lid body 3 can be attached to and detached from the opening peripheral edge portion 28 (FIG. 1 etc.) forming the container body opening portion 21, and can close the container body opening portion 21.

基板收納容器1由塑膠材質等的樹脂構成，作為該材料的樹脂，例如可舉出聚碳酸酯、環烯烴聚合物、聚醚醯亞胺、聚醚酮、聚對苯二甲酸丁二醇酯、聚醚醚酮、液晶聚合物這樣的熱塑性樹脂和它們的合金等。在對這些成形材料的樹脂賦予導電性的情況下，選擇性地添加碳纖維、碳粉、奈米碳管、導電性聚合物等的導電性物質。此外，為了提高剛性也可以添加玻璃纖維、碳纖維等。在本實施方式中，容器主體2使用低吸水材料即COP（環烯烴聚合物）。此外，在容器主體2上施加有抗靜電材料。The substrate storage container 1 is made of resin such as a plastic material. Examples of the resin of this material include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, and polybutylene terephthalate. , Polyetheretherketone, Liquid Crystal Polymer and other thermoplastic resins and their alloys. When imparting conductivity to the resin of these molding materials, conductive materials such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers are selectively added. In addition, in order to increase rigidity, glass fiber, carbon fiber, etc. may be added. In this embodiment, the container body 2 uses COP (Cycloolefin Polymer) which is a low water absorption material. In addition, an antistatic material is applied to the container body 2.

以下，對各部分進行詳細說明。Hereinafter, each part will be described in detail.

如圖1～圖4所示，容器主體2的壁部20具有後壁22、上壁23、下壁24、第一側壁25和第二側壁26。後壁22、上壁23、下壁24、第一側壁25和第二側壁26由上述的材料構成，並一體成形而構成。As shown in FIGS. 1 to 4, the wall portion 20 of the container body 2 has a rear wall 22, an upper wall 23, a lower wall 24, a first side wall 25 and a second side wall 26. The rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the above-mentioned materials and are integrally formed.

第一側壁25與第二側壁26對置，上壁23與下壁24對置。上壁23的後端、下壁24的後端、第一側壁25的後端以及第二側壁26的後端全部與後壁22連接。上壁23的前端、下壁24的前端、第一側壁25的前端以及第二側壁26的前端構成開口周緣部28，該開口周緣部28形成呈大致長方形狀的容器主體開口部21。The first side wall 25 and the second side wall 26 are opposed to each other, and the upper wall 23 is opposed to the lower wall 24. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25 and the rear end of the second side wall 26 are all connected to the rear wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 constitute an opening peripheral edge portion 28 that forms a container main body opening portion 21 having a substantially rectangular shape.

開口周緣部28設置於容器主體2的一端部，後壁22位於容器主體2的另一端部。由壁部20的外表面形成的容器主體2的外形為箱狀。壁部20的內表面、即後壁22的內表面、上壁23的內表面、下壁24的內表面、第一側壁25的內表面以及第二側壁26的內表面形成由它們包圍的盒收納空間27。形成於開口周緣部28的容器主體開口部21與由壁部20包圍且形成於容器主體2的內部的盒收納空間27連通。The opening peripheral edge 28 is provided at one end of the container body 2, and the rear wall 22 is located at the other end of the container body 2. The outer shape of the container main body 2 formed by the outer surface of the wall part 20 is a box shape. The inner surface of the wall portion 20, that is, the inner surface of the rear wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 form a box surrounded by them Storage space 27. The container main body opening 21 formed in the opening peripheral edge portion 28 communicates with a box storage space 27 surrounded by the wall 20 and formed inside the container main body 2.

在上壁23和下壁24的部分且開口周緣部28的附近的部分，形成有朝向盒收納空間27的外側凹陷的未圖示的閂鎖卡合凹部。閂鎖卡合凹部在上壁23和下壁24的左右兩端部附近各形成1個，共計形成4個。In the parts of the upper wall 23 and the lower wall 24 and in the vicinity of the opening peripheral edge 28, a latch engagement recess (not shown) recessed toward the outside of the box storage space 27 is formed. The latch engagement recesses are formed one each in the vicinity of the left and right end portions of the upper wall 23 and the lower wall 24, and a total of four are formed.

如圖1所示，在上壁23的外表面，與上壁23一體成形地設置有肋235。肋235提高容器主體2的剛性。此外，在上壁23的中央部固定有頂部凸緣236。頂部凸緣236是在AMHS（自動晶片輸送系統）、PGV（晶片基板輸送台車）等中懸吊基板收納容器1時成為在基板收納容器1中被勾掛而懸吊的部分的部件。As shown in FIG. 1, a rib 235 is formed integrally with the upper wall 23 on the outer surface of the upper wall 23. The ribs 235 increase the rigidity of the container body 2. In addition, a top flange 236 is fixed to the center of the upper wall 23. The top flange 236 is a member that becomes a part that is hooked and suspended in the substrate storage container 1 when the substrate storage container 1 is suspended in AMHS (Automatic Wafer Transport System), PGV (wafer substrate transport vehicle), or the like.

如圖3所示，在下壁24固定有底板244。底板244具有與構成下壁24的外表面的下表面的大致整個面對置配置的大致長方形狀的板狀，固定於下壁24。As shown in FIG. 3, a bottom plate 244 is fixed to the lower wall 24. The bottom plate 244 has a substantially rectangular plate shape arranged to face substantially the entire surface of the lower surface constituting the outer surface of the lower wall 24 and is fixed to the lower wall 24.

在下壁24的四角形成有兩個種類的貫通孔亦即未圖示的供氣孔和排氣孔。在本實施方式中，下壁24的前部的2處貫通孔是用於將容器主體2的內部的氣體排出的排氣孔，後部的2處貫通孔是用於向容器主體2內部供給氣體的供氣孔。At the four corners of the lower wall 24, two types of through holes, namely, air supply holes and exhaust holes, which are not shown, are formed. In this embodiment, the two through holes at the front of the lower wall 24 are exhaust holes for discharging the gas inside the container body 2, and the two through holes at the rear are for supplying gas into the container body 2. The air supply hole.

在作為供氣孔的貫通孔中配置有作為附加部件的未圖示的供氣用過濾部，在作為排氣孔的貫通孔中配置有未圖示的排氣用過濾部。即，供氣用過濾部和排氣用過濾部內部的氣體的流路構成能夠將盒收納空間27與容器主體2外部的空間連通的通氣路的一部分。此外，供氣用過濾部和排氣用過濾部配置於壁部20，在供氣用過濾部和排氣用過濾部中，氣體能夠通過容器主體2的外部的空間與盒收納空間27之間。供氣用過濾部構成為與氣體噴出噴嘴部8的內部空間連通，透過氣體噴出噴嘴部8的內部空間供給到供氣用過濾部的吹掃氣體向盒收納空間27供給。A filter part for air supply, not shown, as an additional component, is arranged in the through hole as the air supply hole, and a filter part for exhaust gas, not shown, is arranged in the through hole as the air discharge hole. In other words, the flow path of the gas inside the air supply filter unit and the exhaust filter unit constitute a part of the air path that can communicate the cartridge storage space 27 and the space outside the container body 2. In addition, the air supply filter section and the exhaust filter section are arranged on the wall portion 20. In the air supply filter section and the exhaust filter section, the gas can pass between the space outside the container body 2 and the cartridge storage space 27 . The air supply filter portion is configured to communicate with the internal space of the gas ejection nozzle portion 8, and the purge gas supplied to the air supply filter portion through the internal space of the gas ejection nozzle portion 8 is supplied to the cartridge storage space 27.

盒載置部50具有在中央部分形成有貫通孔的板形狀，固定於下壁24。盒載置部50具有向上方突出的凸部52，以貫通盒載置部50的凸部52的部分的方式設置共計3個銷部件基部53。另外，在圖3、圖4中，分別僅呈現1個銷部件基部53。The cassette mounting portion 50 has a plate shape with a through hole formed in the center portion, and is fixed to the lower wall 24. The cartridge mounting portion 50 has a convex portion 52 protruding upward, and a total of three pin member base portions 53 are provided so as to penetrate through the convex portion 52 of the cartridge mounting portion 50. In addition, in FIGS. 3 and 4, only one pin member base 53 is shown respectively.

在銷部件基部53的上部以覆蓋銷部件基部53的上部的方式設置有運動銷（kinematic pin）55。運動銷55從凸部52向上方向突出，共計設置3個。另外，在圖3、圖4中，分別僅呈現1個運動銷55。如圖3等所示，在盒載置部50載置中間光罩盒RP，透過在形成於中間光罩盒RP的底面的運動銷卡合槽中卡合運動銷55，中間光罩盒RP相對於容器主體2被定位。在運動銷55上施加有抗靜電材料，與如上所述在容器主體2上施加有抗靜電材料相結合，構成為使靜電從中間光罩盒RP的內部的中間光罩通過。A kinematic pin 55 is provided on the upper part of the pin member base 53 so as to cover the upper part of the pin member base 53. The movement pins 55 protrude upward from the convex portion 52, and a total of three are provided. In addition, in FIGS. 3 and 4, only one movement pin 55 is shown respectively. As shown in FIG. 3 and the like, the intermediate reticle box RP is placed on the cartridge placing portion 50, and the moving pin 55 is engaged with the moving pin engaging groove formed on the bottom surface of the intermediate reticle box RP, and the intermediate reticle box RP It is positioned relative to the container body 2. An antistatic material is applied to the moving pin 55, and in combination with the antistatic material applied to the container body 2 as described above, it is configured to allow static electricity to pass through the intermediate photomask inside the intermediate photomask box RP.

在上壁23固定設置有按壓部支承部61。在按壓部支承部61固定有板簧611。板簧611的上部固定於按壓部支承部61，板簧611朝下方向延伸，在中途朝後方向直角折彎，板簧611的前端部具有朝下方向D22突出的前端凸部6111。在按壓部支承部61支承有下方按壓部60，下方按壓部60具備前端部按壓部63、按壓部驅動部64、作為施力部件的未圖示的彈簧。A pressing portion support portion 61 is fixedly provided on the upper wall 23. A leaf spring 611 is fixed to the pressing portion support portion 61. The upper portion of the leaf spring 611 is fixed to the pressing portion support portion 61, the leaf spring 611 extends downward and is bent at a right angle in the rear direction midway, and the front end portion of the leaf spring 611 has a front end convex portion 6111 protruding in the downward direction D22. The lower pressing part 60 is supported by the pressing part support part 61, and the lower pressing part 60 includes a front end pressing part 63, a pressing part driving part 64, and a spring (not shown) as an urging member.

前端部按壓部63由滑動性和耐磨損性高的超高分子量PE（聚乙烯）樹脂構成，具有大致四稜柱形狀。在前端部按壓部63的上端部形成有貫通孔，銷部件612貫通於貫通孔。從比貫通孔靠下端部的前端部按壓部63的部分，形成有沿著前端部按壓部63的長邊方向延伸的長孔632，構成按壓部支承部61的銷部件613貫通長孔632。銷部件613能夠在長孔632中相對地移動，由此，前端部按壓部63能夠以銷部件613作為旋轉軸轉動且能夠相對於銷部件613滑動。前端部按壓部63的下端部具有能夠與中間光罩盒RP的上部抵接的板狀抵接部615。板狀抵接部615與中間光罩盒RP的上部抵接，前端部按壓部63將中間光罩盒RP朝下壁24的方向按壓。The tip pressing portion 63 is made of an ultra-high molecular weight PE (polyethylene) resin with high slidability and abrasion resistance, and has a substantially quadrangular prism shape. A through hole is formed in the upper end of the tip pressing portion 63, and the pin member 612 penetrates through the through hole. An elongated hole 632 extending along the longitudinal direction of the tip pressing portion 63 is formed from a portion of the tip pressing portion 63 lower end than the through hole, and the pin member 613 constituting the pressing portion support portion 61 penetrates the elongate hole 632. The pin member 613 can relatively move in the long hole 632, and thereby the tip portion pressing portion 63 can rotate about the pin member 613 as a rotation axis and can slide relative to the pin member 613. The lower end of the tip pressing portion 63 has a plate-shaped abutting portion 615 that can abut the upper portion of the intermediate mask box RP. The plate-shaped abutting portion 615 abuts against the upper portion of the intermediate reticle box RP, and the front end pressing portion 63 presses the intermediate reticle box RP in the direction of the lower wall 24.

按壓部驅動部64由滑動性和耐磨損性高的超高分子量PE（聚乙烯）樹脂構成，具有大致四稜柱形狀。在按壓部驅動部64的後端部形成有貫通孔，貫通前端部按壓部63的上端部的銷部件612貫通於貫通孔。由此，按壓部驅動部64相對於前端部按壓部63能夠轉動地連結。從比貫通孔靠前方向的按壓部驅動部64，形成有沿著按壓部驅動部64的長邊方向延伸的長孔642，構成按壓部支承部61的兩個銷部件616貫通長孔642。銷部件616能夠在長孔642中相對地移動，由此，按壓部驅動部64能夠相對於銷部件616朝相對於與水平方向平行的前後方向D1成規定的角度傾斜的斜上方向滑動。The pressing portion driving portion 64 is made of ultra-high molecular weight PE (polyethylene) resin with high slidability and abrasion resistance, and has a substantially quadrangular prism shape. A through hole is formed in the rear end of the pressing portion driving portion 64, and the pin member 612 penetrating the upper end of the front end pressing portion 63 penetrates through the through hole. Thereby, the pressing portion driving portion 64 is rotatably connected to the tip portion pressing portion 63. An elongated hole 642 extending along the longitudinal direction of the pressing portion driving portion 64 is formed from the pressing portion driving portion 64 in the forward direction than the through hole, and the two pin members 616 constituting the pressing portion support portion 61 penetrate the elongated holes 642. The pin member 616 can relatively move in the long hole 642, and thereby, the pressing portion driving portion 64 can slide relative to the pin member 616 in an obliquely upward direction inclined at a predetermined angle with respect to the front-rear direction D1 parallel to the horizontal direction.

在按壓部驅動部64的上部形成有前側凹部644和後側凹部645。透過板簧611的前端凸部6111與前側凹部644卡合，如圖3所示，按壓部驅動部64在前端部按壓部63的板狀抵接部615與中間光罩盒RP上部抵接而將中間光罩盒RP朝下壁24的方向按壓的位置處，被臨時固定成不能沿著大致前後方向D1移動。此外，透過板簧611的前端凸部6111與後側凹部645卡合，如圖5所示，按壓部驅動部64在前端部按壓部63的板狀抵接部615從中間光罩盒RP的上部朝後斜上側離開而能夠相對於盒載置部50載置或卸下中間光罩盒RP的位置處，被臨時固定成不能沿著大致前後方向D1移動。A front side recessed portion 644 and a rear side recessed portion 645 are formed on the upper portion of the pressing portion driving portion 64. The front-end convex portion 6111 of the leaf spring 611 is engaged with the front-side concave portion 644, as shown in FIG. The position where the intermediate mask box RP is pressed in the direction of the lower wall 24 is temporarily fixed so as not to move in the substantially front-rear direction D1. In addition, the front end convex portion 6111 of the leaf spring 611 is engaged with the rear concave portion 645. As shown in FIG. 5, the pressing portion driving portion 64 is in the front end portion of the plate-shaped abutting portion 615 of the pressing portion 63 from the middle reticle box RP. The position where the upper part is separated obliquely upward to the rear and where the intermediate mask case RP can be mounted or removed with respect to the cassette mounting portion 50 is temporarily fixed so as not to move in the substantially front-rear direction D1.

另外，在圖5、圖6等的剖面圖中，省略了中間光罩盒RP的剖面的圖示。In addition, in the cross-sectional views of FIGS. 5, 6 and the like, illustration of the cross-section of the intermediate mask box RP is omitted.

更具體而言，如後所述，在蓋體3朝後壁22的方向移動時，按壓部驅動部64能夠伴隨著該移動而朝相對於水平方向成規定的角度的斜上方向移動。按壓部驅動部64的前端部具有構成驅動部卡合部的鉤形狀部647。More specifically, as described later, when the lid body 3 moves in the direction of the rear wall 22, the pressing portion driving portion 64 can move in an obliquely upward direction at a predetermined angle with respect to the horizontal direction in accordance with the movement. The front end portion of the pressing portion driving portion 64 has a hook-shaped portion 647 constituting a driving portion engaging portion.

未圖示的彈簧以使前端部按壓部63成為從中間光罩盒RP離開的狀態的方式，更具體而言，以使按壓部驅動部64朝大致前方向D11移動的方式，與按壓部驅動部64卡合而設置，對按壓部驅動部64施力。The spring, not shown, drives the front end pressing portion 63 in a state separated from the intermediate mask case RP, more specifically, so that the pressing portion driving portion 64 moves in the substantially forward direction D11, and drives the pressing portion The portion 64 is engaged and provided to urge the pressing portion driving portion 64.

如圖1等所示，蓋體3具有與容器主體2的開口周緣部28的形狀大致一致的大致長方形狀。蓋體3能夠相對於容器主體2的開口周緣部28拆裝，透過在開口周緣部28安裝蓋體3，蓋體3能夠封閉容器主體開口部21。在蓋體3的內表面（圖1所示的蓋體3的裡側的面）、且是與蓋體3封閉容器主體開口部21時在緊隨開口周緣部28的後方向D12的位置形成的臺階的部分的面（密封面281）對置的面，安裝有環狀的密封部件4。密封部件4由能夠彈性變形的聚酯類、聚烯烴類等各種熱塑性彈性體、氟橡膠製品、矽橡膠製品等構成。密封部件4配置成圍繞蓋體3的外周邊緣部一周。As shown in FIG. 1 and the like, the lid 3 has a substantially rectangular shape that substantially matches the shape of the opening peripheral edge portion 28 of the container body 2. The lid 3 is detachable from the opening peripheral edge portion 28 of the container body 2, and by attaching the lid body 3 to the opening peripheral edge portion 28, the lid body 3 can close the container body opening portion 21. It is formed on the inner surface of the lid 3 (the back surface of the lid 3 shown in FIG. 1) and is formed at a position D12 immediately behind the opening peripheral edge portion 28 when the opening 21 of the container body is closed with the lid 3 The surface of the stepped portion (seal surface 281) facing the surface has an annular sealing member 4 attached. The sealing member 4 is composed of various thermoplastic elastomers such as polyesters and polyolefins, fluororubber products, silicone rubber products, and the like that can be elastically deformed. The sealing member 4 is arranged so as to surround the outer peripheral edge portion of the cover 3 once.

當將蓋體3安裝於開口周緣部28時，密封部件4由密封面281和蓋體3的內表面夾持而彈性變形，蓋體3將容器主體開口部21以密閉的狀態封閉。透過從開口周緣部28卸下蓋體3，能夠相對於容器主體2內的盒收納空間27存取中間光罩盒RP。When the lid 3 is attached to the opening peripheral edge portion 28, the sealing member 4 is sandwiched between the sealing surface 281 and the inner surface of the lid 3 to elastically deform, and the lid 3 closes the container body opening 21 in a sealed state. By removing the lid body 3 from the opening peripheral edge portion 28, the intermediate mask box RP can be accessed from the box storage space 27 in the container body 2.

在蓋體3中設置有閂鎖機構。閂鎖機構設置於蓋體3的左右兩端部附近，如圖5所示，具備能夠從蓋體3的上邊向上方向D21突出的兩個上側閂鎖部32A、以及能夠從蓋體3的下邊向下方向D22突出的兩個下側閂鎖部32B。兩個上側閂鎖部32A、32A配置在蓋體3的上邊的左右兩端附近，兩個下側閂鎖部32B、32B配置在蓋體3的下邊的左右兩端附近。A latch mechanism is provided in the cover 3. The latch mechanism is provided near the left and right ends of the cover 3, and as shown in FIG. 5, it has two upper latches 32A that can protrude from the upper side of the cover 3 in the upward direction D21, and the lower side of the cover 3 Two lower latches 32B protruding in the downward direction D22. The two upper latch portions 32A, 32A are arranged near the left and right ends of the upper side of the cover 3, and the two lower latch portions 32B, 32B are arranged near the left and right ends of the lower side of the cover 3.

如圖1等所示，在蓋體3的外表面設置有操作部33。透過從蓋體3的前側操作操作部33，能夠使上側閂鎖部32A、下側閂鎖部32B從蓋體3的上邊、下邊突出，此外，能夠形成為使之不從上邊、下邊突出的狀態。透過上側閂鎖部32A從蓋體3的上邊向上方向D21突出，並與容器主體2的未圖示的閂鎖卡合凹部卡合，且透過下側閂鎖部32B從蓋體3的下邊向下方向D22突出，並與容器主體2的未圖示的閂鎖卡合凹部卡合，由此，將蓋體3固定於容器主體2的開口周緣部28。As shown in FIG. 1 etc., an operation part 33 is provided on the outer surface of the cover 3. By operating the operating portion 33 from the front side of the cover 3, the upper latch portion 32A and the lower latch portion 32B can protrude from the upper and lower sides of the cover 3, and can be formed so as not to protrude from the upper and lower sides. status. The upper latch portion 32A protrudes from the upper side of the lid body 3 in the upward direction D21, and engages with the not-shown latch engagement recess of the container body 2, and passes through the lower latch portion 32B from the lower side of the lid body 3 toward It protrudes in the downward direction D22 and engages with a latch engagement recess (not shown) of the container main body 2, thereby fixing the lid 3 to the opening peripheral edge portion 28 of the container main body 2.

在蓋體3的內側形成有向盒收納空間27的外側凹陷的凹部301。在凹部301固定設置有按壓部被卡合部303。A recessed portion 301 recessed to the outside of the box storage space 27 is formed on the inside of the lid 3. A pressing portion engaged portion 303 is fixedly provided in the concave portion 301.

按壓部被卡合部303固定於蓋體3的上部的凹部301的部分。如圖5所示，按壓部被卡合部303由在前後方向D1具有厚度的部件構成，按壓部被卡合部303的下端部具有構成按壓部被卡合部303的鉤形狀部304。按壓部被卡合部303的鉤形狀部304能夠與按壓部驅動部64的鉤形狀部647卡合。The pressing portion is fixed to the portion of the recess 301 in the upper portion of the cover 3 by the engaging portion 303. As shown in FIG. 5, the pressing portion engaged portion 303 is formed of a member having a thickness in the front-rear direction D1, and the lower end of the pressing portion engaged portion 303 has a hook-shaped portion 304 constituting the pressing portion engaged portion 303. The hook-shaped portion 304 of the engaging portion 303 of the pressing portion can be engaged with the hook-shaped portion 647 of the pressing portion driving portion 64.

以下對向以上結構的基板收納容器1收納中間光罩盒RP的情況進行說明。The case where the intermediate mask RP is accommodated in the substrate storage container 1 having the above structure will be described below.

圖5是表示在基板收納容器1中，中間光罩盒RP未固定於容器主體2的狀態的側方剖視圖。圖6是表示在基板收納容器1中，中間光罩盒RP未固定於容器主體2上的狀態的剖面立體圖。5 is a side sectional view showing a state in which the intermediate mask RP is not fixed to the container main body 2 in the substrate storage container 1. FIG. 6 is a cross-sectional perspective view showing a state in which the intermediate mask RP is not fixed to the container body 2 in the substrate storage container 1.

首先，將蓋體3設為從形成容器主體開口部21的開口周緣部28卸下的狀態。接著，將中間光罩盒RP向盒收納空間27插入，透過使運動銷55的前端部與形成於中間光罩盒RP的底面的運動銷卡合槽卡合，將中間光罩盒RP相對於容器主體2定位。First, the lid body 3 is placed in a state of being removed from the opening peripheral edge portion 28 forming the opening portion 21 of the container body. Next, insert the intermediate reticle box RP into the box storage space 27, and by engaging the front end of the moving pin 55 with the moving pin engaging groove formed on the bottom surface of the intermediate reticle box RP, the intermediate reticle box RP is opposed to The container body 2 is positioned.

接下來，使蓋體3接近容器主體2。於是，如圖5、圖6所示，按壓部被卡合部303的鉤形狀部304與按壓部驅動部64的鉤形狀部647卡合。然後，當進一步使蓋體3接近容器主體2時，按壓部驅動部64被蓋體3按壓，按壓部驅動部64克服未圖示的彈簧的作用力向大致後方向D12移動，伴隨於此，前端部按壓部63的上部被按壓部驅動部64向後壁22的方向按壓，由此，前端部按壓部63的下部從後壁22側向容器主體開口部21側移動，與中間光罩盒RP的上部抵接，將中間光罩盒RP的上部向下壁24的方向按壓。由此，在中間光罩盒RP成為固定於容器主體2的狀態的同時，容器主體開口部21被蓋體3封閉。然後，透過操作蓋體3的操作部33，使上側閂鎖部32A、下側閂鎖部32B與容器主體2的未圖示的閂鎖卡合凹部卡合，將蓋體3固定於容器主體2的開口周緣部28。Next, the lid 3 is brought close to the container body 2. Then, as shown in FIGS. 5 and 6, the pressing portion is engaged with the hook-shaped portion 304 of the engaging portion 303 and the hook-shaped portion 647 of the pressing portion driving portion 64. Then, when the lid 3 is further brought closer to the container main body 2, the pressing portion driving portion 64 is pressed by the lid 3, and the pressing portion driving portion 64 moves in the substantially rear direction D12 against the urging force of a spring not shown, and accompanying this, The upper part of the front end pressing part 63 is pressed by the pressing part driving part 64 in the direction of the rear wall 22, whereby the lower part of the front end pressing part 63 moves from the rear wall 22 side to the container main body opening 21 side, and interacts with the intermediate mask RP Abuts against the upper part of the middle reticle box RP and presses the upper part of the intermediate mask box RP in the direction of the lower wall 24. Thereby, while the intermediate mask case RP is in a state of being fixed to the container body 2, the container body opening 21 is closed by the lid 3. Then, by operating the operating portion 33 of the lid 3, the upper latch portion 32A and the lower latch portion 32B are engaged with the not-shown latch engaging recesses of the container body 2 to fix the lid 3 to the container body 2的开peripheral portion 28.

當從基板收納容器1取出中間光罩盒RP時，首先，透過操作蓋體3的操作部33，將上側閂鎖部32A、下側閂鎖部32B設為不與容器主體2的未圖示的閂鎖卡合凹部卡合的狀態。接著，使蓋體3從容器主體開口部21離開。伴隨於此，按壓部被卡合部303的鉤形狀部304與按壓部驅動部64的鉤形狀部647卡合，因此，按壓部驅動部64被蓋體3拖拽，朝相對於前方向D11成規定的角度的下方向傾斜移動。然後，當蓋體3從容器主體2的開口周緣部28離開規定的距離以上時，蓋體3水平地朝前方向D11移動，因此，按壓部驅動部64的鉤形狀部647位於相比按壓部被卡合部303的鉤形狀部304靠下側的位置，按壓部驅動部64的鉤形狀部647與按壓部被卡合部303的鉤形狀部304的卡合被解除，蓋體3成為從按壓部驅動部64分離的狀態，將蓋體3從容器主體2卸下。When taking out the intermediate mask RP from the substrate storage container 1, first, through the operating portion 33 of the operating lid 3, the upper latch portion 32A and the lower latch portion 32B are not connected to the container body 2 not shown. The latch is engaged with the recessed portion. Next, the lid 3 is separated from the container main body opening 21. Along with this, the pressing portion is engaged by the hook-shaped portion 304 of the engaging portion 303 and the hook-shaped portion 647 of the pressing portion driving portion 64, and therefore, the pressing portion driving portion 64 is dragged by the cover 3 to move toward the front direction D11. Move obliquely downward at a predetermined angle. Then, when the lid 3 is separated from the opening peripheral edge portion 28 of the container body 2 by more than a predetermined distance, the lid 3 moves horizontally in the forward direction D11. Therefore, the hook-shaped portion 647 of the pressing portion driving portion 64 is located more than the pressing portion At the position below the hook-shaped portion 304 of the engaged portion 303, the engagement between the hook-shaped portion 647 of the pressing portion driving portion 64 and the hook-shaped portion 304 of the pressing portion engaged portion 303 is released, and the cover 3 becomes With the pressing portion driving portion 64 separated, the lid 3 is removed from the container body 2.

根據上述結構的本實施方式所涉及的基板收納容器1，能夠得到以下的效果。According to the substrate storage container 1 according to the present embodiment having the above structure, the following effects can be obtained.

如上所述，在下壁24設置有作為定位部的盒載置部50，該盒載置部50將作為被收納物的中間光罩盒RP相對於容器主體2定位，在上壁23設置有將中間光罩盒RP的上部向下壁24的方向按壓的下方按壓部60，蓋體3當封閉容器主體開口部21時，使下方按壓部60將中間光罩盒RP的上部向下壁24的方向按壓。As described above, the lower wall 24 is provided with a cassette placement portion 50 as a positioning portion. The cassette placement portion 50 positions the intermediate mask box RP as an object to be stored relative to the container body 2, and the upper wall 23 is provided with The lower pressing part 60 that presses the upper part of the intermediate reticle box RP in the direction of the downward wall 24. When the lid 3 closes the container body opening 21, the lower pressing part 60 pushes the upper part of the intermediate reticle box RP down the wall 24. Directional press.

根據上述結構，透過利用蓋體3封閉容器主體開口部21，能夠容易地將中間光罩盒RP固定於容器主體2，能夠更順暢地進行中間光罩盒RP向基板收納容器1收納的步驟。此外，由於在基板收納容器1中收納中間光罩盒RP，因此能抑制在中間光罩盒RP的外表面附著顆粒。其結果是，當從中間光罩盒RP取出中間光罩時，能夠抑制顆粒附著於中間光罩使致使該中間光罩被污染，從而能夠抑制晶片的電路不良的產生。特別是近年來，設計規則精細化，需要更嚴格地進行顆粒管理，對此也能夠充分地應對。According to the above configuration, by closing the container main body opening 21 with the lid 3, the intermediate mask RP can be easily fixed to the container main body 2, and the step of storing the intermediate mask RP in the substrate storage container 1 can be performed more smoothly. In addition, since the intermediate reticle case RP is accommodated in the substrate storage container 1, it is possible to suppress adhesion of particles on the outer surface of the intermediate reticle case RP. As a result, when the intermediate photomask is taken out from the intermediate photomask box RP, it is possible to prevent particles from adhering to the intermediate photomask to contaminate the intermediate photomask, and to suppress the occurrence of circuit defects of the wafer. Particularly in recent years, design rules have become more refined, requiring stricter particle management, which can also be adequately addressed.

此外，由於使用基板收納容器1作為收納中間光罩盒RP的容器，所以作為收納中間光罩盒RP的容器的尺寸也適合，用於搬運基板收納容器1的自動搬運裝置也標準地存在，因此能夠順暢地投入到搬運中間光罩盒RP的工序中。In addition, since the substrate storage container 1 is used as a container for accommodating the intermediate mask box RP, the size of the container for accommodating the intermediate mask box RP is also suitable, and an automatic transport device for carrying the substrate storage container 1 also exists as a standard. It can be smoothly put into the process of conveying the intermediate mask RP.

此外，蓋體3具有能夠與下方按壓部60卡合的按壓部被卡合部303，當容器主體開口部21封閉時，按壓部被卡合部303與構成下方按壓部60的按壓部驅動部64的鉤形狀部647卡合，使下方按壓部60將作為被收納物的中間光罩盒RP的上部向下壁24的方向按壓。並且，蓋體3的按壓部被卡合部303以及與按壓部被卡合部303卡合的下方按壓部60的驅動部卡合部具有彼此相互卡合的鉤形狀部304、647。根據該結構，伴隨著蓋體3的移動，能夠透過下方按壓部60的前端部按壓部63按壓中間光罩盒RP。In addition, the lid 3 has a pressing portion engaging portion 303 that can be engaged with the lower pressing portion 60. When the container main body opening 21 is closed, the pressing portion is engaged with the engaging portion 303 and the pressing portion driving portion constituting the lower pressing portion 60 The hook-shaped portion 647 of the 64 engages, so that the lower pressing portion 60 presses the upper portion of the intermediate mask box RP as an object to be stored in the direction of the lower wall 24. In addition, the pressing portion engaging portion 303 of the cover 3 and the driving portion engaging portion of the lower pressing portion 60 engaged with the pressing portion engaging portion 303 have hook-shaped portions 304 and 647 that engage with each other. According to this structure, with the movement of the lid body 3, the intermediate mask box RP can be pressed through the front end pressing portion 63 of the lower pressing portion 60.

此外，下方按壓部60具備作為施力部件的未圖示的彈簧，當蓋體3未封閉容器主體開口部21時，該彈簧對按壓部驅動部64施力以使前端部按壓部63成為從中間光罩盒RP離開的狀態。根據該結構，當中間光罩盒RP未收納於容器主體2且蓋體3未封閉容器主體開口部21時，能夠使前端部按壓部63位於從中間光罩盒RP離開的狀態的位置，換言之，能夠相對於盒載置台載置中間光罩盒RP的狀態的位置。In addition, the lower pressing portion 60 is provided with a spring not shown as a urging member. When the lid 3 does not close the container main body opening 21, the spring urges the pressing portion driving portion 64 so that the tip portion pressing portion 63 becomes a slave The state of the middle reticle box RP away. According to this structure, when the intermediate reticle box RP is not housed in the container body 2 and the lid 3 does not close the container body opening 21, the tip pressing portion 63 can be located at a position separated from the intermediate reticle box RP, in other words , The position where the intermediate mask RP can be placed on the cassette mounting table.

此外，按壓部驅動部64當蓋體3向後壁22的方向移動時，能夠朝相對於水平方向成規定的角度的斜上方向移動。根據該結構，當使蓋體3向後壁22的方向移動時，按壓部被卡合部303的鉤形狀部304能夠與按壓部驅動部64的鉤形狀部647卡合。此外，在使蓋體3向容器主體開口部21的方向移動時，能夠使按壓部被卡合部303的鉤形狀部304與按壓部驅動部64的鉤形狀部647的卡合自動地解除。In addition, when the cover 3 is moved in the direction of the rear wall 22, the pressing portion driving portion 64 can move in an obliquely upward direction at a predetermined angle with respect to the horizontal direction. According to this structure, when the cover 3 is moved in the direction of the rear wall 22, the hook-shaped portion 304 of the engaging portion 303 of the pressing portion can be engaged with the hook-shaped portion 647 of the pressing portion driving portion 64. In addition, when the lid 3 is moved in the direction of the container body opening 21, the engagement between the hook-shaped portion 304 of the engaging portion 303 of the pressing portion and the hook-shaped portion 647 of the pressing portion driving portion 64 can be automatically released.

然後，透過前端部按壓部63的上部由按壓部驅動部64向後壁22的方向按壓，前端部按壓部63的下部從後壁22側向容器主體開口部21側移動，與中間光罩盒RP的上部抵接，將中間光罩盒RP的上部向下壁24的方向按壓。根據該結構，當從開口周緣部28卸下蓋體3時，能夠成為能夠容易地將中間光罩盒RP載置於盒載置部50的狀態。Then, the upper part of the forward end pressing portion 63 is pressed by the pressing portion driving portion 64 toward the rear wall 22, and the lower part of the forward end pressing portion 63 moves from the rear wall 22 side to the container body opening 21 side, and interacts with the intermediate mask RP Abuts against the upper part of the middle reticle box RP and presses the upper part of the intermediate mask box RP in the direction of the lower wall 24. According to this configuration, when the lid 3 is removed from the opening peripheral edge portion 28, the intermediate mask cartridge RP can be easily placed on the cartridge mounting portion 50.

此外，構成壁部20的材料由環烯烴聚合物構成。根據該結構，能夠抑制水分從作為低吸水材料的COP向盒收納空間的內部放出，能夠抑制盒收納空間內的濕度上升。In addition, the material constituting the wall portion 20 is made of cycloolefin polymer. According to this configuration, it is possible to suppress the release of moisture from the COP, which is a low water absorption material, into the inside of the box storage space, and it is possible to suppress the increase in humidity in the box storage space.

此外，具有能夠將盒收納空間27與容器主體2的外部空間連通的通氣路。根據該結構，能夠透過吹掃氣體吹掃盒收納空間27的氣體。In addition, it has an air passage that can communicate the cartridge storage space 27 with the external space of the container body 2. According to this structure, the gas in the cassette storage space 27 can be purged by the purge gas.

本發明並不限定於上述的實施方式，能夠在申請專利範圍所記載的範圍內進行各種變形。The present invention is not limited to the above-mentioned embodiments, and various modifications can be made within the scope described in the scope of the patent application.

例如，在本實施方式中，容器主體、蓋體分別由能夠收納直徑300mm的矽晶片的基板收納容器的容器主體2、蓋體3構成，但是並不限定於此。只要能夠收納中間光罩盒RP便可以是任何容器，例如可以由模仿基板收納容器的結構的容器、即在一端部形成有與盒收納空間連通的容器主體開口部且另一端部被封閉的結構的容器構成。For example, in this embodiment, the container body and the lid body are each composed of the container body 2 and the lid body 3 of the substrate storage container capable of accommodating a silicon wafer with a diameter of 300 mm, but they are not limited to this. Any container may be used as long as the intermediate mask box RP can be accommodated. For example, a container that imitates the structure of the substrate storage container, that is, a structure in which an opening of the container body communicating with the cartridge storage space is formed at one end and the other end is closed The container composition.

此外，在本實施方式中，被收納物為中間光罩盒RP，但是並不限定於此。In addition, in this embodiment, the to-be-stored object is the intermediate mask box RP, but it is not limited to this.

此外，基板收納容器的各部的結構並不限定於本實施方式中的基板收納容器1的各部的結構。In addition, the structure of each part of the board|substrate storage container is not limited to the structure of each part of the board|substrate storage container 1 in this embodiment.

此外，在本實施方式中，下壁24的前部的2處貫通孔是用於排出容器主體2的內部的氣體的排氣孔，後部的2處貫通孔是用於向容器主體2的內部供給氣體的供氣孔，但是並不限定於該結構。例如，也可以將下壁的前部的2處貫通孔中的至少1個設為用於向容器主體內部供給氣體的供氣孔。In addition, in this embodiment, the two through-holes at the front of the lower wall 24 are exhaust holes for discharging the gas inside the container body 2, and the two through-holes at the rear are for venting to the inside of the container body 2. The gas supply hole for supplying gas is not limited to this structure. For example, at least one of the two through holes at the front of the lower wall may be used as a gas supply hole for supplying gas into the container body.

1:基板收納容器 2:容器主體 3:蓋體 4:密封部件 8:氣體噴出噴嘴部 20:壁部 21:容器主體開口部 22:後壁 23:上壁 24:下壁 25:第一側壁 26:第二側壁 27:盒收納空間 28:開口周緣部 32A:上側閂鎖部 32B:下側閂鎖部 33:操作部 50:盒載置部（定位部） 52:凸部 53:銷部件基部 55:運動銷 60:下方按壓部 61:按壓部支承部 63:前端部按壓部 64:按壓部驅動部 235:肋 236:頂部凸緣 244:底板 281:密封面 301:凹部 303:按壓部被卡合部 304:鉤形狀部 611:板簧 612:銷部件 613:銷部件 615:板狀抵接部 616:銷部件 632:長孔 642:長孔 644:前側凹部 645:後側凹部 647:鉤形狀部 6111:前端凸部 RP:中間光罩盒 D11:前方向 D12:後方向 D1:前後方向 D21:上方向 D22:下方向 D2:上下方向 D31:左方向 D32:右方向 D3:左右方向1: substrate storage container 2: container body 3: cover 4: Sealing parts 8: Gas ejection nozzle 20: Wall 21: Container body opening 22: back wall 23: upper wall 24: lower wall 25: first side wall 26: second side wall 27: Box storage space 28: Perimeter of the opening 32A: Upper side latch 32B: Lower side latch 33: Operation Department 50: Box placement part (positioning part) 52: Convex 53: Pin part base 55: Sports pin 60: Lower pressing part 61: Pressing part support part 63: Front end pressing part 64: Pressing part drive part 235: rib 236: Top flange 244: bottom plate 281: sealing surface 301: recess 303: The pressing part is engaged 304: hook shape part 611: Leaf Spring 612: Pin Parts 613: Pin Parts 615: Plate abutment 616: Pin Parts 632: Long Hole 642: Long Hole 644: Front side recess 645: Rear side recess 647: hook shape part 6111: Front end convex RP: Intermediate mask box D11: Forward direction D12: Rear direction D1: front and rear direction D21: Upward D22: down direction D2: Up and down direction D31: Left direction D32: Right direction D3: Left and right direction

圖1是表示本發明的一實施方式的基板收納容器1的主視圖。 圖2是表示本發明的一實施方式的基板收納容器1的俯視圖。 圖3是表示在本發明的一實施方式的基板收納容器1中，中間光罩盒RP固定於容器主體2的狀態的側方剖視圖。 圖4是表示在本發明的一實施方式的基板收納容器1中，中間光罩盒RP固定於容器主體2的狀態的剖面立體圖。 圖5是在表示本發明的一實施方式的基板收納容器1中，中間光罩盒RP未固定於容器主體2的狀態的側方剖視圖。 圖6是表示在本發明的一實施方式的基板收納容器1中，中間光罩盒RP未固定於容器主體2的狀態的剖面立體圖。Fig. 1 is a front view showing a substrate storage container 1 according to an embodiment of the present invention. Fig. 2 is a plan view showing a substrate storage container 1 according to an embodiment of the present invention. 3 is a side cross-sectional view showing a state in which the intermediate mask box RP is fixed to the container main body 2 in the substrate storage container 1 according to the embodiment of the present invention. 4 is a cross-sectional perspective view showing a state in which the intermediate mask box RP is fixed to the container body 2 in the substrate storage container 1 according to the embodiment of the present invention. FIG. 5 is a side cross-sectional view showing a state in which the intermediate mask box RP is not fixed to the container body 2 in the substrate storage container 1 according to the embodiment of the present invention. 6 is a cross-sectional perspective view showing a state in which the intermediate mask box RP is not fixed to the container body 2 in the substrate storage container 1 according to one embodiment of the present invention.

1:基板收納容器 1: substrate storage container

2:容器主體 2: container body

3:蓋體 3: cover

20:壁部 20: Wall

22:後壁 22: back wall

23:上壁 23: upper wall

24:下壁 24: lower wall

25:第一側壁 25: first side wall

27:盒收納空間 27: Box storage space

28:開口周緣部 28: Perimeter of the opening

32A:上側閂鎖部 32A: Upper side latch

32B:下側閂鎖部 32B: Lower side latch

50:盒載置部(定位部) 50: Box placement part (positioning part)

55:運動銷 55: Sports pin

60:下方按壓部 60: Lower pressing part

61:按壓部支承部 61: Pressing part support part

63:前端部按壓部 63: Front end pressing part

64:按壓部驅動部 64: Pressing part drive part

236:頂部凸緣 236: Top flange

244:底板 244: bottom plate

301:凹部 301: recess

303:按壓部被卡合部 303: The pressing part is engaged

304:鉤形狀部 304: hook shape part

611:板簧 611: Leaf Spring

612:銷部件 612: Pin Parts

613:銷部件 613: Pin Parts

615:板狀抵接部 615: Plate abutment

616:銷部件 616: Pin Parts

632:長孔 632: Long Hole

642:長孔 642: Long Hole

644:前側凹部 644: Front side recess

645:後側凹部 645: Rear side recess

647:鉤形狀部 647: hook shape part

6111:前端凸部 6111: Front end convex

RP:中間光罩盒 RP: Intermediate mask box

Claims (8)

一種基板收納容器，其中， 所述基板收納容器具備： 一容器主體，在內部形成有能夠收納一被收納物的一盒收納空間，在一端部具有形成有與所述盒收納空間連通的一容器主體開口部的一開口周緣部； 一蓋體，能夠相對於所述開口周緣部拆裝，且能夠以由所述開口周緣部包圍的位置關係封閉所述容器主體開口部；以及 一密封部件，安裝於所述蓋體，能夠與所述蓋體和所述開口周緣部抵接，透過夾設在所述開口周緣部與所述蓋體之間並與所述開口周緣部和所述蓋體緊密地抵接，與所述蓋體一起封閉所述容器主體開口部， 所述容器主體具有一壁部，該壁部具有一後壁、一上壁、一下壁和一對側壁，透過所述後壁封閉所述壁部的另一端部，透過所述上壁的一端部、所述下壁的一端部和所述側壁的一端部形成所述容器主體開口部， 在所述下壁設置有一定位部，該定位部將所述被收納物相對於所述容器主體定位， 在所述上壁設置有一下方按壓部，該下方按壓部將所述被收納物的一上部向所述下壁的方向按壓， 所述蓋體當封閉所述容器主體開口部時，使所述下方按壓部將所述被收納物的所述上部向所述下壁的方向按壓。A substrate storage container, wherein the substrate storage container includes: A container body, in which a box storage space capable of accommodating an item to be stored is formed, and an opening peripheral portion formed with an opening of the container body communicating with the box storage space at one end; A lid body that can be detached and detached with respect to the periphery of the opening and can close the opening of the container body in a positional relationship surrounded by the periphery of the opening; A sealing member, mounted on the cover body, capable of contacting the cover body and the opening peripheral edge portion, is interposed between the opening peripheral edge portion and the cover body and with the opening peripheral edge portion and The lid body tightly abuts and closes the opening of the container body together with the lid body, The container body has a wall with a rear wall, an upper wall, a lower wall and a pair of side walls, the other end of the wall is closed through the rear wall, and one end of the upper wall is passed through Part, one end of the lower wall and one end of the side wall form the container body opening, A positioning portion is provided on the lower wall, and the positioning portion positions the stored object relative to the container body, A lower pressing part is provided on the upper wall, and the lower pressing part presses an upper part of the stored object in the direction of the lower wall, When the lid body closes the opening of the container body, the lower pressing portion presses the upper portion of the stored object in the direction of the lower wall. 如請求項1所述的基板收納容器，其中， 所述蓋體具有能夠與所述下方按壓部卡合的一按壓部被卡合部，當封閉所述容器主體開口部時，所述按壓部被卡合部與所述下方按壓部卡合，使所述下方按壓部將所述被收納物的所述上部向所述下壁的方向按壓。The substrate storage container according to claim 1, wherein the lid has a pressing portion engaged portion capable of engaging with the lower pressing portion, and when the opening of the container body is closed, the pressing portion The engaged portion is engaged with the lower pressing portion so that the lower pressing portion presses the upper portion of the stored object in the direction of the lower wall. 如請求項2所述的基板收納容器，其中， 所述蓋體的所述按壓部被卡合部以及與所述按壓部被卡合部卡合的所述下方按壓部的一驅動部卡合部具有相互卡合的一鉤形狀。The substrate storage container according to claim 2, wherein the pressing portion of the lid body is engaged with a driving portion of the lower pressing portion that is engaged with the pressing portion engaged portion The parts have a hook shape that engages with each other. 如請求項1所述的基板收納容器，其中， 所述下方按壓部具備： 一前端部按壓部，與所述被收納物的所述上部抵接而將所述被收納物向所述下壁的方向按壓； 一按壓部驅動部，與所述前端部按壓部連結，能夠伴隨著所述蓋體的移動而移動；以及 一施力部件，當所述蓋體未封閉所述容器主體開口部時，對所述按壓部驅動部進行施力以使所述前端部按壓部成為從所述被收納物離開的狀態。The substrate storage container according to claim 1, wherein the lower pressing portion includes: A front end pressing portion that abuts against the upper portion of the stored object to press the stored object in the direction of the lower wall; A pressing part driving part connected to the front end pressing part and capable of moving along with the movement of the cover; and An urging member that urges the pressing portion driving portion so that the tip portion pressing portion is separated from the storage object when the lid body does not close the opening of the container body. 如請求項1至4中任一項所述的基板收納容器，其中， 所述下方按壓部具備： 一前端部按壓部，與所述被收納物的所述上部抵接而將所述被收納物向所述下壁的方向按壓；以及 一按壓部驅動部，與所述前端部按壓部連結，能夠伴隨著所述蓋體的移動而移動， 所述按壓部驅動部當所述蓋體向所述後壁的方向移動時，能夠朝相對於水平方向成規定的角度的斜上方向移動。The substrate storage container according to any one of claims 1 to 4, wherein the lower pressing portion includes: A front end pressing portion that abuts against the upper portion of the stored object to press the stored object in the direction of the lower wall; and A pressing part driving part connected to the tip pressing part and capable of moving in accordance with the movement of the cover body, When the cover body moves in the direction of the rear wall, the pressing section driving section can move in an obliquely upward direction that forms a predetermined angle with respect to the horizontal direction. 如請求項5所述的基板收納容器，其中， 所述前端部按壓部的一上部由所述按壓部驅動部向所述後壁的方向按壓，由此，所述前端部按壓部的一下部從所述後壁側向所述容器主體開口部側移動並與所述被收納物的所述上部抵接，將所述被收納物的所述上部向所述下壁的方向按壓。The substrate storage container according to claim 5, wherein an upper portion of the front end pressing portion is pressed toward the rear wall by the pressing portion driving portion, whereby a lower portion of the front end pressing portion Move from the rear wall side to the opening side of the container body and abut the upper part of the storage object, and press the upper part of the storage object in the direction of the lower wall. 如請求項1至4、6中任一項所述的基板收納容器，其中， 構成所述壁部的材料由環烯烴聚合物構成。The substrate storage container according to any one of claims 1 to 4, 6, wherein the material constituting the wall portion is made of cycloolefin polymer. 如請求項1至4中任一項所述的基板收納容器，其中， 具有能夠將所述盒收納空間與所述容器主體的外部的空間連通的一通氣路。The substrate storage container according to any one of claims 1 to 4, which has a vent passage capable of communicating the cassette storage space with a space outside the container body.
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