TWI367850B - Substrate container, mask blank package, and transfer mask package and film-coated glass substrate container - Google Patents

Substrate container, mask blank package, and transfer mask package and film-coated glass substrate container

Info

Publication number
TWI367850B
TWI367850B TW095143912A TW95143912A TWI367850B TW I367850 B TWI367850 B TW I367850B TW 095143912 A TW095143912 A TW 095143912A TW 95143912 A TW95143912 A TW 95143912A TW I367850 B TWI367850 B TW I367850B
Authority
TW
Taiwan
Prior art keywords
package
substrate container
film
mask
coated glass
Prior art date
Application number
TW095143912A
Other languages
Chinese (zh)
Other versions
TW200728168A (en
Inventor
Hideto Arai
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Publication of TW200728168A publication Critical patent/TW200728168A/en
Application granted granted Critical
Publication of TWI367850B publication Critical patent/TWI367850B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D77/00—Packages formed by enclosing articles or materials in preformed containers, e.g. boxes, cartons, sacks or bags
    • B65D77/22—Details
    • B65D77/24—Inserts or accessories added or incorporated during filling of containers
    • B65D77/26—Elements or devices for locating or protecting articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
    • B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67353—Closed carriers specially adapted for a single substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Packages (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
TW095143912A 2005-11-30 2006-11-28 Substrate container, mask blank package, and transfer mask package and film-coated glass substrate container TWI367850B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005345272A JP4801981B2 (en) 2005-11-30 2005-11-30 Substrate storage container, glass substrate storage body with film, mask blank storage body, and transfer mask storage body

Publications (2)

Publication Number Publication Date
TW200728168A TW200728168A (en) 2007-08-01
TWI367850B true TWI367850B (en) 2012-07-11

Family

ID=38207282

Family Applications (2)

Application Number Title Priority Date Filing Date
TW095143912A TWI367850B (en) 2005-11-30 2006-11-28 Substrate container, mask blank package, and transfer mask package and film-coated glass substrate container
TW101105610A TWI526376B (en) 2005-11-30 2006-11-28 Substrate container, mask blank package, transfer mask package and film-coated glass substrate container

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW101105610A TWI526376B (en) 2005-11-30 2006-11-28 Substrate container, mask blank package, transfer mask package and film-coated glass substrate container

Country Status (3)

Country Link
JP (1) JP4801981B2 (en)
KR (3) KR100955983B1 (en)
TW (2) TWI367850B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5153399B2 (en) * 2008-03-19 2013-02-27 三洋電機株式会社 Substrate case and processing method
WO2014136247A1 (en) * 2013-03-07 2014-09-12 ミライアル株式会社 Substrate storage receptacle

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59113442A (en) * 1982-12-18 1984-06-30 Konishiroku Photo Ind Co Ltd Storing method of photomask raw material
JPH0135474Y2 (en) * 1986-05-30 1989-10-30
JPH04116193A (en) * 1990-09-05 1992-04-16 Nkk Corp Multilayered electrolytic chromate treated steel plate having excellent corrosion resistance and weldability
JPH04116193U (en) * 1991-03-28 1992-10-16 ホーヤ株式会社 Mounting stand for board storage case
JPH06204328A (en) * 1992-12-25 1994-07-22 Mitsubishi Materials Corp Wafer case
JP2552625B2 (en) * 1993-11-09 1996-11-13 淀川化成株式会社 Box for transporting glass substrates
KR20000014678U (en) * 1998-12-30 2000-07-25 김영환 Mask Carrier Box of Semiconductor Device
JP2001240179A (en) * 2000-02-29 2001-09-04 Shin Etsu Polymer Co Ltd Precision substrate storing container
JP2003300583A (en) * 2002-04-09 2003-10-21 Sekisui Plastics Co Ltd Carry box for platelike object
JP2004059075A (en) * 2002-07-29 2004-02-26 Nissho Iwai Plastic Corp Box for carrying glass base plate
JP4363114B2 (en) * 2003-07-25 2009-11-11 凸版印刷株式会社 Plate processing rack
JP3995049B2 (en) * 2003-08-20 2007-10-24 旭平硝子加工株式会社 Glass substrate transport box
JP4675601B2 (en) * 2003-11-18 2011-04-27 株式会社 ネットプラスチック Sealed container for large precision sheet products and semi-finished products
KR20050057889A (en) * 2003-12-11 2005-06-16 김성모 Store box for substrate using flat panel display device

Also Published As

Publication number Publication date
KR101067200B1 (en) 2011-09-22
TW200728168A (en) 2007-08-01
KR100955983B1 (en) 2010-05-04
KR20070057028A (en) 2007-06-04
KR101141484B1 (en) 2012-05-04
TWI526376B (en) 2016-03-21
JP2007145397A (en) 2007-06-14
TW201233605A (en) 2012-08-16
JP4801981B2 (en) 2011-10-26
KR20100004906A (en) 2010-01-13
KR20110026450A (en) 2011-03-15

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