JPS638902Y2 - - Google Patents

Description

[Detailed description of the invention] The present invention relates to a cleaning jig, and is particularly useful for cleaning plate-like objects such as transparent substrates for photomasks, photomask blanks, photomasks, glass wafers, and semiconductor wafers. The present invention relates to a cleaning jig that can clean plate-like objects.

Conventionally, there has been a cleaning jig shown in FIG. That is, it is an integrally molded product by injection molding using a corrosion-resistant plastic such as fluorine resin. Reference numeral 1 denotes a cylindrical cleaning jig main body, in which an appropriate number of V-shaped grooves 4 are formed at predetermined intervals on the inner surfaces of opposing side walls 2 and 3. Reference numeral 5 denotes a support rod which extends parallel to the side walls 2 and 3 at the bottom of the opening, and has a V-shaped groove 6 corresponding to the groove 4 formed on its upper surface.

A method for cleaning a plate-like object using this cleaning jig is to first move a plate-like object 7 of a size that can be held between the grooves 4 of the side walls 2 and 3 onto the support rod 5 along the grooves 4. Insert until it is supported by the groove 6. Next, this cleaning jig is installed in a cleaning device such as a known ultrasonic cleaning device and cleaned.

However, as described above, the cleaning jig described above is only used for plate-shaped objects having dimensions that are held between the respective grooves 4 of the side walls 2 and 3.
That is, for example, various sizes currently used as transparent substrates for photomasks (for example, 4
It was impossible to simultaneously clean plate-like objects of 1.5-inch, 5-inch, and 6-inch sizes. For this reason, there was a drawback that a wide variety of small quantities of plate-like objects could not be efficiently cleaned.

The present invention was made in order to eliminate the above-mentioned drawbacks, namely, to provide an inner jig for cleaning (hereinafter referred to as "inner jig") that is easily assembled and can accommodate plate-like objects of several sizes. ) and an outer cleaning jig (hereinafter referred to as the "outer jig") having a U-shaped, V-shaped, etc. groove into which the inner jig is inserted.
It is an object of the present invention to enable cleaning of at least two types of plate-like objects at the same time by providing a cleaning jig consisting of the following.

The present invention is characterized by a cleaning jig consisting of an inner jig and an outer jig, in which the inner jig has two opposing rectangular, circular, etc. plates that can be fitted into the outer jig. , at least three V-shaped, U-shaped, etc. grooves and a plate-like object support rod (hereinafter referred to as "support rod") provided with means for fitting into this plate, and each of the above-mentioned Three or more through holes having two or more recesses for holding the support rods are provided in the plate, corresponding to the number of the support rods, and each through hole is provided with the same number of recesses. Further, two of the through-holes are provided in the upper part, another through-hole is provided in a lower part than the two through-holes, and two of the three or more support rods are provided in the upper part. are respectively fitted into through holes provided in the upper part of the plate, and another support rod is provided in the lower part of the plate with the groove of this support rod facing the direction of the two support rods. The outer jig is fitted into the through hole, and two opposing side walls of the outer jig are provided with grooves into which the plate is inserted.

An embodiment of the present invention will be described in detail with reference to FIGS. 2 to 5. Note that FIGS. 2a, b, and c are respectively perspective views, front views, and plan views of the support rod forming the inner jig of this embodiment, and FIG. 3 is a plate forming the inner jig of this embodiment. 4a and 4b are respectively perspective views and front views of the inner jig of this embodiment, and FIG. 5 is a perspective view of the main parts of this embodiment consisting of an inner jig and an outer jig. It is.

First, three support rods 8 for holding a plate-shaped photomask glass substrate made of, for example, soda lime glass are prepared. This support rod 8 has a groove 81 for holding the plate-shaped object, and a concave groove 82 provided at both ends of the support rod 8 as a means for fitting into a recess of a through hole provided in the plate to be described later. Further, both ends of the support rod 8 are formed with convex portions 83 for firmly holding an inner jig to be described later (FIG. 2). Next, two 6-inch rectangular plates 9 are prepared, which are installed at both ends of the support rod 8 and fitted into an outer jig to be described later. This plate 9 is provided with three through holes 91 for holding the support rods 8, and is also suitable for three types of plate-like objects such as glass substrates (for example, 5 inches, 4 inches, and 3 inches). There is also a recess 92 into which the support rod 8 is fitted.
are provided at three locations in each through hole 91 (FIG. 3). The material of the support rods 8 and 9 is Teflon, which has chemical resistance.

Next, an inner jig 10 formed from a support rod 8 and a plate 9 is shown in FIG. That is, in order to hold the 5-inch glass substrate 11 in this inner jig 10, the support rods 8 are fitted into the outermost recesses 92 of the through holes 91 of the two plates 9, respectively. At this time, the two support rods 8 fitted on the upper part of the plate 9 are
The support rods 8 are fitted so that the grooves 81 face each other, and the support rods 8 are fitted to the lower part of the plate 9 with the grooves 81 facing upward. This support rod 8 and through hole 9
In order to fit the first recess 92, the recessed grooves 82 provided at both ends of the support rod 8 are fitted into the bottom of the recess 92. Furthermore, since the support rod 8 is provided with convex portions 83 at both ends, the support rod 8 and the plate 9 are firmly held together.

Next, the cleaning jig 13 of this embodiment, which is composed of the inner jig 10 and the outer jig 12, will be explained with reference to FIG. First, the outer jig 12 is a jig that can accommodate a 6-inch glass substrate 14, and opposing side walls 122, 122 each have a glass substrate 14 therein.
4 is provided with an outer groove 123 for fitting thereinto. The plate 9 of the inner jig 10 is inserted along this outer groove 123, and the inner jig 10 is accommodated in the outer jig 12.

According to this embodiment, a 5-inch glass substrate 11 is housed in the inner jig 10, and a 6-inch glass substrate 1 is housed in the outer jig 12.
4, and then the cleaning jig 13 of this embodiment
is placed in a known ultrasonic cleaning device and cleaned. By cleaning in this manner, 5-inch and 6-inch glass substrates can be cleaned at the same time.

Further, in order to clean a 4-inch glass substrate using the inner jig 10, the support rod 8 may be fitted into the recess 92 at the center of each through hole 91 provided in the plate 9.

The present invention is not limited to the above-mentioned embodiment, but also includes preparing several inner jigs, and furthermore, by changing the positions of the recesses of the through holes provided in these inner jigs, one
By fitting several inner jigs into one outer jig, it is possible to clean several different sizes of plate-like objects at the same time. Next, the number of through holes is not limited to the above embodiment,
Two through holes may be provided at the bottom of the plate to further stably hold the plate-like object. Further, holes other than the through holes may be provided in the plate in order to improve drainage of the cleaning liquid during cleaning.

As described above, according to the present invention, plate-like objects of several sizes can be cleaned at the same time, and furthermore, since the inner jig is easy to assemble, the three support rods and
By preparing several plates having several types of through holes, it is possible to efficiently clean a wide variety of small quantities of plate-like objects.

[Brief explanation of the drawing]

Figure 1 is a perspective view of a conventional cleaning jig;
Figures a, b, and c are perspective views, front views, and plan views showing support rods forming the inner jig of one embodiment, respectively, and Fig. 3 is a front view of a plate forming the inner jig of one embodiment. FIGS. 4a and 4b are a perspective view and a front view showing an inner jig of one embodiment, respectively, and FIG. 5 is a perspective view of the main parts of an embodiment consisting of an inner jig and an outer jig. 8...Support rod, 9...Plate, 10...Inner jig,
12... Outer jig, 13... Cleaning jig, 81...
...Groove, 82...Concave groove, 83...Protrusion, 91...
Through hole, 92... recess, 122... side wall, 123
...outer groove.

Claims (1)

[Scope of utility model registration request] In a cleaning jig consisting of an inner cleaning jig and an outer cleaning jig, the inner cleaning jig has two opposing rectangular, circular, etc. pieces that can be fitted into the outer cleaning jig. a plate and at least three V-shapes;
It consists of a U-shaped groove or the like and a plate-shaped object support rod provided with a means to fit into the plate, and a recess for holding the plate-shaped object support rod is provided in the two plates. Three or more through holes having two or more are provided corresponding to the number of the plate-shaped object support rods, and each through hole is provided with the same number of the recesses, and further, two of the through holes are provided with the same number of recesses. Another through hole is provided in the upper part of the plate, and another through hole is provided below the two through holes, and two of the three or more plate-like object support rods are provided in the upper part of the plate. Another plate-like object support rod is provided at the lower part of the plate with the groove of the plate-like object support rod facing the direction of the two plate-like object support rods. The outer cleaning jig is fitted with a through hole formed in the cleaning outer jig, and two opposing side walls of the outer cleaning jig are provided with grooves for fitting the plate into the outer cleaning jig. A cleaning jig characterized by: