JP3471068B2 - Plate support member and plate support holder using the same - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plate member supporting member for supporting plate members such as glass substrates so as not to come into contact with each other, and a plate member holder using the same. More specifically, the present invention relates to a bearing member and a holder devised so that when the plate is housed in the holder, it is washed with pure water and then pulled out from the cleaning tank, the plate is smoothly drained without causing stains or contamination. It is a thing.

[0002]

2. Description of the Related Art Glass substrates for liquid crystal displays, glass substrates for plasma displays, ceramic substrates for hybrid ICs,
In the manufacturing process of various substrates such as a glass substrate for a thermal head, it is necessary to store the substrates in a cassette (or a holder) so as not to contact each other in order to process, wash and dry the substrates.

As one of the cassettes for this purpose, a cassette having a structure in which a plurality of grooved round bars having an abacus-shaped appearance is installed on a frame has been proposed or used. This round bar with a groove is manufactured by cutting a round bar made of resin or metal to form a groove.

The formation of the round bar by cutting has room for improvement in terms of the manufacturing process and the processing accuracy. Among them, the cassette using the resin-made grooved round bar accommodates the substrate therein. When performing cleaning or curing operations, the grooved round bar has a large elongation when heated and does not return to its original length when not heated. There is a problem that distortion occurs, and as a result, it becomes difficult to automatically move the substrate into and out of the cassette.

Therefore, in order to solve such a problem, an improved round bar having a groove has been proposed. That is, Japanese Patent Application Laid-Open No. 3-273664, which is an application of the present applicant,
The through-hole of the heat-resistant resin rod-shaped molded product has a through-hole in the axial direction, a large number of circumferential grooves in the middle part, and grooves for locking at both end sides. There is a disclosure regarding a round bar having a composite structure in which a bar is inserted. When the round bar with a groove is locked to the locking groove at the free end side of the lock angle and fastened to the metal frame via the lock angle to form a cassette, the substrate is accommodated. Even if it is subjected to heat treatment in this state, there is no fear that the groove pitch of the grooved round bar will change or the cassette will be distorted.

A cassette using the above-mentioned conventional grooved round bar or an improved grooved round bar is constituted by a frame on each of the front and back sides, and both side surfaces are erected between the frames with a grooved round bar. The bottom surface or the bottom surface side is configured to be able to receive the substrate by an appropriate stopper means, and the ceiling surface is an open surface for loading and unloading the substrate. The board goes in and out between the corresponding grooves of the grooved round bars on the both side surfaces,
Be accommodated. This cassette is used for processing, treating, cleaning, drying, or in some cases transporting and storing the substrate. When the substrates set in the cassette are loaded one by one by the processing device and processed individually,
In some cases, the entire cassette is loaded and batch processed.

[0007]

Generally, a substrate cassette (holder) is subjected to treatment such as curing of the formed alignment film and curing of the formed transparent electrode while the substrate such as a glass substrate is accommodated therein. Before and after that, cleaning with pure water is performed.

However, in the cassette using the above-mentioned conventional grooved round bar or the improved grooved round bar, the substrate such as the glass substrate is placed in an oblique vertical posture when cleaning with pure water. When pulled out of the cleaning tank, individual water droplets adhering to the underside of each bead of the abacus grooved round bar drip and adhere to the substrate, resulting in stains on the dried substrate. I was not spared the trouble of being able to do it.

[0009] Therefore, the present inventors considered to collect the attached water in the linear portion by connecting the lower portion of the abacus bead-shaped grooved round bar in a linear shape, not in the individual beads. However, the contamination of the substrate due to the dropping of the collected adhered water still could not be resolved.

Under such a background, the present invention does not cause stains or contamination on the plate body when the plate body such as a glass substrate is housed in the holder and is washed with pure water and then withdrawn from the cleaning tank. An object of the present invention is to provide a bearing member devised so that the water drains smoothly, and a holder using the bearing member.

[0011]

[Means for Solving the Problems] In the support member for a plate according to the present invention, a metal rod (1) is included as an insert, and the metal rod (1) is used as a shaft core around which a resin molding (2) is formed. A rod-shaped member having a composite structure integrally formed by injection molding, wherein the resin molded body (2) includes the metal rod (1).
Main body (21) and dorsal fin-like protrusion from the main body (21)
A skirt part (22) and the metal rod
Place (1) horizontally in the left-right direction of the space and
The skirt (22) of the oil molded body (2) should be straight against the metal rod (1).
The posture when placed so that it is in the lower position is the reference posture.
However, when the standard posture is viewed from the left or right,
When viewed from the front side, when viewed from the back side, viewed from the upper side
When viewed from below, side view, front view,
When viewed from the rear, the plan or the bottom, the resin molded body
The body part (21) of (2) is the bulge of the abacus beads that are connected in a front view.
The constricted part (a) and the constricted part of the abacus beads
Abacus-shaped with a series of abacuses that alternate with the groove (b)
The resin molded body (2) has a skirt (2
2) In the standard posture, it becomes thinner toward the lower side.
And the skirt (22) has a standard posture.
In the lower side of the skirt, the adhered liquid that has moved to the lower side is the skirt.
To allow for the left or right transition of part (22)
Being formed on a horizontal inclined side, the support of the plate body is
Groove of the abacus-shaped main body (21) connected to the resin molded body (2)
It is characterized in that the edge of the plate is brought into contact with the portion (b) .

Further, the holder for supporting a plate according to the present invention is a plate member.
Box-shaped or for supporting the
A box-frame-shaped holder, in which a box shape or box frame is formed by using a plurality of the above-mentioned supporting members (3) and a frame (4).
That is, the plurality of support members (3) are connected to the frame (4).
Of the side wall frames (41), (41), which are arranged opposite to each other.
The support and the support of the plate are
The abacus-shaped main body of the resin molding (2) of the member (3)
At least one side edge of the plate in the groove (b) of (21)
It is characterized in that it is made in the form of abutting .

The present invention will be described in detail below.

[0014](Panel support member) In the support member of the plate body of the present invention, the metal rod (1) is used as an insert.
And enclosed and with the metal rod (1) as an axis
Composite with resin molded body (2) integrally formed by injection molding
It consists of a rod-shaped member of the structure.

As the metal rod (1), a metal rod having corrosion resistance such as stainless steel is used. The outer peripheral surface of the metal rod (1) should be knurled, such as flat or twilled, in order to improve the biteability of the resin molded body (2) formed by injection molding and suppress molding shrinkage. Is especially desirable. In the case of flat knurls, it is preferable to provide grooves in some places in the circumferential direction.

As the resin for forming the resin molded body (2), a resin having injection moldability, in particular, polyether ether ketone (PEEK), perfluoroalkoxy-substituted polytetrafluoroethylene (PFA), polyvinylidene fluoride ( PVDF), ethylene-vinyl alcohol copolymer (EVOH), polyketone (PK), etc. are used. In addition, polyetherimide, polyamideimide, polyphenylene sulfide, polyarylate, polysulfone, polyallylsulfone, polyethersulfone, Polybutylene terephthalate, polyacetal, polypropylene, ABS resin, polyphenylene oxide, etc. can also be used. Which resin is selected is determined in consideration of required performances such as dust emission prevention, abrasion resistance, surface tension, heat resistance, chemical resistance, injection moldability, and low shrinkability.

And in the present invention, the above resin molding
The body (2) has a main body (21) containing the above metal rod (1),
A skirt (2) protruding from the body (21) in the form of a dorsal fin.
2) consists of

Now, place the above metal rod (1) in the horizontal direction of the space.
Place it horizontally and make a scar of the above resin molding (2).
So that the contact part (22) is directly below the metal rod (1).
The posture when placed is the reference posture, and the reference posture is
When viewed from the left or right direction, when viewed from the front side,
When viewed from the rear side, when viewed from the upper side, when viewed from the lower side
Side view, front view, rear view, plan view, and bottom view, respectively.
To see.

The main body portion (21) of the above resin molded body (2) is
In plan view, the protruding part (a) that becomes the bulge part of the continuous abacus beads
The grooves (b), which are the constricted parts of the abacus beads, are connected alternately.
Formed to have an abacus bead shape
To do.

It is particularly preferable that the shape of the protruding portion (a) which is a bulge portion in the front view of the main body portion (21) is a quadrangular pyramid-shaped diamond cut shape, but the shape is similar to that. It doesn't matter. The number of the groove portions (b) serving as the constricted portion is not particularly limited, but it is often about 8 to 30.

The main body portion (21) of the resin molded body (2) has a protruding portion (a ') which becomes a bulge portion and a constricted portion even when viewed from the rear.
Ren設So comprising groove and (b ') is provided continuously to the abacus beads form alternately
It is desirable to make the shape of a donkey bead . I mean,
This makes it possible to balance the flow of molten resin during injection molding and the contraction during cooling, so that a precise resin molded body (2) with no distortion can be obtained, and the groove portion (b ') side can b)
This is because it can be used for supporting the plate body similarly to the above, or can be used as a stopper that individually and independently supports the plate body at the lower side. In this case, the shapes of the protrusion (a) and the groove (b) of the main body (21) and the shapes of the protrusion (a ′) and the groove (b ′) may or may not be the same. Good.

The skirt portion (22) of the resin molded body (2) is first
As mentioned above, for the metal rod (1) in the standard posture,
It is formed like a dorsal fin so that it is located directly below.

This skirt portion (22) has a standard posture.
It is formed so that it becomes thinner toward the lower side, and
The lower side of the skirt (22) of the
The adhered liquid that has moved up to the left or right side of the skirt (22)
Formed on non-horizontal sloping sides to allow transition to
It

A skirt portion that becomes thinner toward the lower side
The cross-sectional shape of (22) may be a linearly thin triangular shape, but the car that is concave toward the thicker side as both outer surfaces of the triangular shape become lower.
It is more preferable in terms of the flow of the adhering liquid to draw a negative curve that becomes a curved surface and make it thin.

[0025] The lower side of the skirt portion (22), "to" in front view
It is usual to incline linearly toward both ends of the skirt portion (22) so as to form a V shape. However , when the length of the resin molding (2) in the axial direction is relatively short ,
It may be arched, or may be linearly inclined toward one end in a "/" shape . In the standard posture
If the lower side of the skirt (22) is horizontal,
Since the running-out of the adhered liquid that has moved to
I cannot achieve my purpose.

[0026](Holder for plate support) The holder for plate support of the present invention,Vertically or diagonally
Box-shaped or box-frame-shaped holder for vertical support
AndThe metal rod (1) and the resin molding (2) described above
Multiple bearing members (3) with composite structureWhenFrame (4)
With andIt is formed in a box shape or a box frame.

The plurality of support members (3) are the frame
Between side wall frames (41), (41) that are placed opposite to each other in (4)
Suspended in the plate, the support of the plate is these support members (3)
Grooves of the abacus-shaped main body (21) that are continuous with the resin molded body (2) of
At least one side edge of the plate contacts part (b)
It is done in the form of

The plate body is usually housed in a holder in a straight vertical position and is lifted together with the holder in an oblique vertical position, or is housed in a holder in an oblique vertical position to lift the holder straight. However, in that case, at least one side (usually both sides) of the plate
If necessary, the lower side is supported by the groove portion (b) or the groove portion (b ') of the main body portion (21) of the bearing member (3).

The frame (4) is often a combination of thin frame-shaped or plate-shaped metal members. flame
When (4) is plate-shaped, it is preferable to punch the central region into an appropriate shape to reduce the weight. In this case, it is preferable to chamfer the punched portion so as not to collect liquid.

The plate support holder of the present invention accommodates various glass substrates as well as plate members such as ceramics substrates, plastics substrates, and wafers. The shape of the plate is
It may be prismatic or disc-shaped.

[0031]

In the plate supporting member of the present invention, a metal rod is used.
(1) is included as an insert, and a resin molded body (2) is integrally formed by injection molding around the metal rod (1) as an axis.

The resin molding (2) has a complicated three-dimensional shape, but since it is manufactured by injection molding, it is possible to always obtain a stable and accurate molding once the metal mold is manufactured. Therefore, as compared with the method of extrusion-molding a rod and cutting the rod, it is possible to stably provide a rod having excellent dimensional accuracy and at an extremely low cost. The excellent dimensional accuracy is also advantageous in automating the loading / unloading and lifting of the plate body.

Further , the supporting member is a metal rod (1) and a resin molded body.
Since it is made of a composite structure with (2), the required strength can be obtained by the metal rod (1), and the expansion and contraction due to the temperature change of the resin molded body (2) is significantly suppressed by the metal rod (1).

[0034] Then, in the holder with a bearing member of the present invention, the resin molded body (2) has a unique shape, other sides supporting the supporting plate body (plate body, It can be used as a stopper that supports the bottom of the plate with the support member in the horizontal position) and is suitable not only for the operation of workpieces, but also for adhering water during the cleaning process that is frequently performed in the manufacturing process of glass substrates, etc. Has excellent flowability. That is, the cleaning water adhering to the resin molded body (2) of the support member is smoothly discharged from the protrusions (a), (a ') and the grooves (b), (b') of the main body part (21) of the support member. Skirt part
Immediately after shifting to (22), the skirt (22) is tilted.
It moves to the left or right along the hypotenuse, and it does not affect the plate from the bottom of the skirt (22).
However, usually, it moves to the frame (4) on the side of the cassette and is transmitted to the lower end of the frame (4). As described above, when the bearing member of the present invention is used, the plate water is affected like the side frame (4) without the adhered water dripping.
There is no risk of contaminating a plate such as a glass substrate because it is transmitted to a non-blurred part .

[0035]

EXAMPLES The present invention will be further described with reference to examples.

Example 1(Bearing member (3)) FIG. 1 is a front view showing an example of a bearing member of the present invention, and FIG.
Its plan view, FIG. 3 is its rear view, and FIG. 4 is its side view.
It 5 is an enlarged sectional view taken along line AA of FIG. 2, and FIG. 6 is a portion B of FIG.
FIG. 7 is an enlarged view of portion C in FIG.

As an example of the metal rod (1), insert a 220 mm-long metal rod made of SUS304 (the outer peripheral surface of which is flat knurled and, in some cases, circumferentially grooved). Used as polyetheretherketone (perfluoroalkoxy-substituted polytetrafluoroethylene or polyvinylidene fluoride may be used)
By injection molding, the metal rod (1) is included as an insert, and the resin molding (2) is integrally formed around the metal rod (1) as an axis by injection molding. ) Got It should be noted that each 9 mm of both ends of the metal rod (1) has a male screw structure for suspending it on the frame (4), and the male screw structure is not provided with the resin molding (2) and is bare (reverse). Both ends of the metal rod (1) can have a female screw structure).

The shape of the resin molding (2) is such that the main body is
The skirt (22) extends like a dorsal fin at the lower part of the axial direction of (21).
It has a shape.

Of these, the main body portion (21) is continuously installed in front view.
Connected with the protrusion (a) that becomes the bulge of the bead (that is, protruding toward the front side) It becomes the constriction of the abacus (that is, the back)
It has the shape of a continuous abacus in which groove portions (b retracted to the side ) are alternately arranged in an abacus shape. Protrusion (a)
Is formed into a quadrangular pyramid diamond cut shape. Groove
The number of (b) is 16 in this embodiment.

Also, the main body portion (21) of the resin molded body (2) becomes a bulge portion (that is, it projects toward the front side ) when viewed from the rear.
Was) it becomes and the constricted portion protruding section (a ') (i.e. hit write on the back side
The groove portions (b ') are alternately arranged in an abacus bead shape. This protruding portion (a ') is also formed in a quadrangular pyramid-shaped diamond cut shape, but as shown in FIG.
The height of the mountain is slightly lower than that of (a).

The skirt portion (22) continuously provided on the lower portion of the main body portion (21) in the axial direction has a curl surface concave toward the thicker side as it goes downward.
Negative draw a curve becomes thin and the lower side in the front view that
The shape is an inclined side of the "he" shape .

The dimensions (unit: mm) of the bearing member (3) having the above structure are shown in the drawing.

[0043](holder) FIG. 8 shows an example of a holder using the bearing member of the present invention.
Side view of the suspended state, Figure 9 shows the front of the holder
FIG. 10 and FIG. 10 are plan views of the holder.

The six support members (3) described above are used as a frame.
It was suspended in (4) and formed into a box shape or box frame, which was used as a holder. In this case, two of the four support members (3) were arranged on both sides of the holder so that the protruding portion (a) side faced inward and the skirt portion (22) faced downward.
The remaining two of the support members (3) are arranged so that the protruding portion (a ') side faces upward and the skirt portion (22) faces outward (at this time, the skirt portion (22) is slightly obliquely downward. It is desirable that it should face)) and it was placed at the bottom of the holder.

8 to 10, (41) and (41) are SUS304.
It is a side wall frame made of steel and has a groove (41a) for receiving the supporting member so that it can be used for plates of various sizes, and has large and small punched parts (41b) for weight reduction. . The side wall frames (41), (41) are punched out (41b).
Is chamfered to prevent the accumulation of liquid. Reference numerals (42) and (42) are reinforcing frames each having a U-shape by bending both sides. One is provided on the front side and the other is provided on the back side at different height portions. This reinforcement frame
(42) and (42) also serve as support plates for suspending the entire holder with the plate body (G) accommodated therein. In the figure,
(5) is a holder suspension member.

When the plate body (G) such as a glass substrate is housed in the holder having the above-mentioned structure, the plate is washed with warm pure water and then pulled up from the washing tank, the reinforcing frames (42), (4)
Since (2) is provided at different heights of the side wall frames (41), (41), the holder is lifted in a slanting posture, so that the plate (G) housed in the holder is also slanted vertically. It is lifted in a posture.

The washing water attached to the resin molded body (2) is, as shown by the white arrow in FIGS. 1, 5 and 9, the protruding portion (21) of the main body (21) of the support member (3). a), (a ') apex of the pyramid and grooves (b), (b') move to the lower end of the base of the diamond-cut base of the pyramid, then move to the skirt (22) and immediately the skirt. Flow to both ends of part (22),
Further, the side wall frame (41) of the frame (4) of the cassette moves from both ends of the skirt portion (22) to
It is transmitted to the lower end of (41).

[0048]

As described in the section of the operation, the resin molding (2) in the bearing member of the present invention has a complicated three-dimensional shape, but since it is made by injection molding, once it is made into a mold. It is possible to obtain a molded body which is always stable and has high precision. Therefore, as compared with the method of extrusion-molding a rod and cutting the rod, it is possible to stably provide a rod having excellent dimensional accuracy and at an extremely low cost. The excellent dimensional accuracy is advantageous in automating the loading / unloading and lifting of the plate body. Moreover, since the metal rod (1) and the resin molded body (2) have a composite structure, the metal rod (1) provides the necessary strength, and the resin molded body (2) expands and contracts due to temperature changes. rod
It can be surely suppressed by (1).

[0049] Then, in the holder with a bearing member of the present invention, the resin molded body (2) has a unique shape and fit to support and work operations of the plate body Of course, the flowability of the adhered water during the cleaning process that is frequently performed in the manufacturing process of glass substrates and the like is extremely excellent. That the use of the bearing member of the present invention, the effect on the plate body without adhering water is added dropwise to the plate member
Since it is transmitted to a place where it is not given, there is no risk of contaminating a plate body such as a glass substrate.

[Brief description of drawings]

FIG. 1 is a front view showing an example of a bearing member of the present invention.

2 is a plan view of the bearing member of FIG. 1. FIG.

3 is a rear view of the bearing member of FIG. 1. FIG.

4 is a side view of the support member of FIG. 1. FIG.

5 is an enlarged cross-sectional view taken along the line AA of FIG.

FIG. 6 is an enlarged view of part B in FIG.

FIG. 7 is an enlarged view of portion C of FIG.

FIG. 8 is a side view in a suspended state showing an example of a holder using the support member of the present invention.

9 is a front view of the holder of FIG. 8. FIG.

10 is a plan view of the holder of FIG.

[Explanation of symbols]

(1) ... metal rod, (2) ... Resin molding (21)… Main body, (a), (a ') ... protrusion, (b), (b') ... groove, (22) ... skirt part, (3)… Bearing member, (4)… Frame, (41)… Side wall frame, (41a) ... groove, (41b) ... punched part, (42)… Reinforcement frame, (5)… Holder suspension member, (G) ... Plate

─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) H01L 21/68 H01L 21/304 648

Claims (6)

(57) [Claims] 1. Is the metal rod (1) included as an insert?
One is the metal rod (1) as an axis and the resin molding (2) is around it.
Is a rod-shaped part of a composite structure integrally formed by injection molding
The material,A body in which the resin molded body (2) encloses the metal rod (1)
Section (21) and the dorsal fin-like protrusion from the main body section (21).
Consisting of a cart section (22), The metal rod (1) is placed horizontally in the left-right direction of the space.
In addition, the skirt (22) of the resin molding (2) is made of gold.
When placed so that it is directly below the genus rod (1)
Is used as the reference posture, and that reference posture is used as the left or right
When viewed from the front, when viewed from the front, viewed from the back
When viewed from above, when viewed from below
Side view, front view, rear view, plan view, bottom view
The The main body portion (21) of the resin molded body (2) is connected in series when viewed from the front.
Abacus beads that are connected to the protrusion (a) that is the bulge of the abacus beads
Consecutive slots in which the groove (b) that becomes the
Have a beaded shape, The skirt portion (22) of the resin molded body (2) should be in the standard position.
And becomes thinner as it goes downward.
The lower side of the skirt portion (22) in the reference posture is
The adhered liquid that has moved to the lower side is left on the skirt (22) or
Shaped on non-horizontal sloping sides to allow rightward transition
Is being done, The support of the plate body is the abacus beads that are continuous with the resin molding (2).
With the edge of the plate abutting on the groove (b) of the main body (21) of
What is done A support member for a plate body. 2. The outer surface of the skirt portion (22) becomes thinner by drawing a negative curve that becomes a concave curl surface on the thicker side as it goes downward, and the lower side of the skirt portion (22) is In front view
The bearing member according to claim 1, wherein the bearing member is formed on the inclined side of the "V" shape . 3. The bearing member according to claim 1, wherein the protrusion (a) which is a bulge in a front view of the main body (21) has a quadrangular pyramid diamond cut shape. 4. The main body portion (21) of the resin molded body (2) has a protruding portion (a ') which is a bulge portion and a groove portion (b') which is a constricted portion even in rear view. if abacus continuously provided was continuously to the abacus spherical alternately
The bearing member according to claim 1, wherein the bearing member has a pearl shape . 5. A bearing member according to claim 1, wherein the outer peripheral surface of the metal rod (1) is formed into knurls. 6.Support the plate in a vertical or diagonal vertical position
A box-shaped or box-shaped holder for Plural support members (3) according to claim 1.WhenFrame (4)For and
Have a box shape or box frame, The plurality of support members (3) face each other in the frame (4).
Suspended between the placed side wall frames (41), (41)
And The support of the plate is made of the resin molding (2) of these support members (3).
In the groove part (b) of the abacus-shaped main body part (21),
At least one side edge is abutted
Characterized by Holder for plate support.