JP2526151B2 - Substrate cassette - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a substrate cassette for separately supporting glass substrates and other various substrates so as not to contact each other.

Conventional technology <Structure of cassette> In the manufacturing process of various substrates such as glass substrate for liquid crystal display, glass substrate for plasma display body, ceramic substrate for hybrid IC, glass substrate for thermal head, etc.
In order to process, process, clean, transport, and store the substrates, it is necessary to move the substrates into and out of the cassette so that they do not contact each other.

As the substrate cassette for this purpose, a cassette assembled from a frame and a grooved side plate is used.

7 to 10 show an example of a conventional substrate cassette. FIG. 7 is a plan view, FIG. 8 is a front view, FIG. 9 is a side view, and FIG. It is a BB sectional view.

In this cassette, a pair of side surfaces facing each other is composed of frames (1) and (1), and another pair of side surfaces facing each other has a plurality of grooved side plates (2) having grooves (g) directed in the vertical direction. ), (2), the bottom surface or the bottom surface side is configured to be able to receive the substrate, and the ceiling surface is an open surface for loading and unloading the substrate. (3) is a receiving rod as an example of stopper means for receiving and holding the substrate, and (4) is a protrusion for chucking.

The substrate is put in and taken out between the corresponding grooves (g) of the grooved side plates (2), (2) facing each other.

There are various shapes and designs of the grooved side plate (2), but basically each has a shape in which a large number of rib-shaped shelf pieces (2b) are projected from the back meat part (2a). ing. The gap between adjacent rib-shaped shelf pieces (2b) and (2b) is a groove (g).
That is, the substrate goes in and out and is housed here. In the above, one pair of opposite side surfaces
Although the grooved side plates (2) are used, it is often the case that the pair of opposite side surfaces is formed of a plurality of grooved side plates (2).

The substrate cassette is usually used with the open surface facing sideways when the substrate is loaded or unloaded, and with the open surface facing upward when the substrate is transported. Although it can be arbitrarily selected, in the present specification, the reference posture is defined as a case where the open surface faces upward and the grooved side plates (2) are arranged on the left and right.

<Processing of Substrate> Next, the process of processing a substrate will be described by taking a case of using a cassette for a glass substrate used in the field of liquid crystal panel manufacturing as an example.

In a cassette for glass substrates, a side plate with grooves (2) having about 10 to 40 grooves (g) is used, and usually all the grooves (g) are filled with glass substrates. Set to.

There are two types of set glass substrates, one by one being loaded by the processing device and processed individually, and the other being loaded by the cassette and batch processed. The batch processing relevant to this case will be described. .

13 to 14 are schematic views of a batch-type chemical liquid treatment device which is usually used in the semiconductor manufacturing field, FIG. 13 is a front view and FIG. 14 is a plan view.

When the cassette filled with the glass substrate is set in the loader (5), the transfer robot (6) chucks the protruding portion (4) of the cassette to convey the cassette to the chemical solution tank (7), and The substrate is dipped and processed in the chemical bath (7). After the chemical solution treatment, the transfer robot (6) takes out the cassette from the chemical solution tank (7), conveys it to the next primary water washing tank (8), and immerses it in the primary water washing tank (8).
Is washed with water. In the same way, the next final washing tank (9) is once again washed with water, followed by a dryer (1
It is dried at 0). After drying, the cassette is unloaded (1
Set to 1), which completes chemical treatment and cleaning.

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention However, when the conventional cassette described above is used for processing in a batch type chemical liquid treatment device, when the cassette moves from the chemical liquid tank (7) to the primary washing tank (8). The liquid of the above-mentioned chemical liquid is poorly drained, and a large amount of the chemical liquid is inevitably brought into the primary washing tank (8) while being attached to the cassette. In addition, when moving from the primary washing tank (8) to the final washing tank (9), the washing water is brought into the final washing tank (9), and further, from the final washing tank (9) to the dryer (10). ), A large amount of pure water remains in the cassette and is brought into the dryer (10). This leads to a reduction in cleaning efficiency and drying efficiency.

In addition to the problem of lack of liquid running out, the conventional cassette has a problem that dust easily adheres to the cassette during transportation and storage in a clean room.

The present inventors believe that the occurrence of such a problem may be caused by the square shape of the frame (1) and the grooved side plate (2) of the conventional cassette, and have conducted earnest studies from this viewpoint. As a result, the present invention has been reached.

It is an object of the present invention to resist a substrate cassette that can well be drained in a chemical solution treatment step and a cleaning step and can effectively suppress dust adhesion during transportation and storage.

Means for Solving the Problems In the substrate cassette of the present invention, a pair of side surfaces facing each other is composed of frames (1) and (1), and
The side surfaces of the pair are composed of grooved side plates (2), (2) having a large number of grooves (g) directed in the up-down direction, and the bottom surface or the bottom surface side is configured to be able to receive the substrate, and the ceiling surface is for the substrate loading / unloading. Is an open surface of the substrate, and the substrate is moved in and out between the corresponding grooves (g) of the grooved side plates (2) and (2) facing each other.
In the cassette that can be accommodated, the individual columnar portions of the frames (1), (1) are formed in a round shape with no angulation in a cross-sectional view perpendicular to the center line direction thereof, and the groove is formed. Both side edges of the attached side plates (2) and (2) are also formed in a round shape with no corners.

 The present invention will be described in detail below.

Like the conventional cassette, the substrate cassette of the present invention has a pair of opposite side surfaces formed by the frames (1) and (1), and the other pair of opposite side surfaces face a large number of vertical directions. It is composed of grooved side plates (2) and (2) having grooves (g).

The bottom surface or the bottom surface side is configured to be able to receive the substrate by installing stopper means (3) such as a receiving rod or a cauldron.

 The ceiling surface will be an open surface for board entry and exit.

In addition, it is desirable that the cassette is provided with a protrusion (4) for chucking.

Substrates are the above-mentioned grooved side plates (2), (2) facing each other.
Are put in and taken out between the corresponding grooves (g).

In the above, the frame (1) is usually formed in a grid pattern.

The grooved side plate (2) may be formed as one sheet per surface, or a plurality of sheets (for example, 2 to 5 sheets) may be installed at one surface with an interval. This grooved side plate (2)
As a rib-shaped shelf piece (2
A shape in which b) is projected in the front and back direction is preferably used. This is because if the shelf piece (2b) is projected from the back meat part (2a) in only one direction, distortion or deformation may occur during molding or during use under high temperature conditions. Each shelf piece (2b) may be provided in the entire vertical direction of one grooved side plate (2) in a non-divided manner or may be provided in a divided manner. The gap between the adjacent shelf pieces (2b) and (2b) becomes the groove (g).

The resin forming the frame (1), grooved side plate (2), and stopper means (3) can be melt-molded with the required strength, heat resistance, solvent resistance, and acid / alkali resistance depending on the purpose of use. The resin is selected, for example, polyimide, polyether imide, polyamide imide, polyether ether ketone, polyphenylene sulfide,
Perfluoroalkoxy-substituted polytetrafluoroethylene, polyarylate, polysulfone, polyallylsulfone, polyethersulfone, modified polyphenylene oxide, polyetheramide, polypropylene, etc., or glass fiber, carbon fiber, aramid fiber, ceramic fiber, metal fiber A fiber reinforced thermoplastic resin containing the above is used. As the melt molding method, an injection molding method, an extrusion molding method, a transfer molding method, or the like is adopted. Fillers, stabilizers, lubricants, and other additives may be blended in the melt molding.

And in the present invention, the frame (1),
The individual columnar parts of (1) are formed in a round shape without angling in a cross-sectional view perpendicular to the center line direction, and both side edges of the grooved side plates (2), (2) are also angled. Form in a round shape without tension. When a receiving rod is used as the stopper means (3), the receiving rod also has a round shape such as a round rod.

The round sectional shape of the frame (1) is the fifth
Illustrative examples include elliptical shapes such as (a), (b), and (c) in the figure, and oval shapes such as (d) in which both ends have semicircular shapes, and cross-sectional shapes close to these are also possible. Comparing the elliptical shape with the elliptical shape, the former, which is excellent in liquid drainage, is more preferable.
In particular, of the individual columnar portions of the frame (1), the columnar portion (1a) that is horizontal in the posture with the open surface of the cassette facing upward is preferably elliptical rather than oval. The columnar portion (1b), which is in the vertical direction when the cassette has the open surface facing upward, preferably has an elliptical shape, but may have an oval shape. Although the cross-sectional shape of FIG. 11 has rounded corners, it is unsuitable for the purpose of the present invention.

As a round cross-sectional shape of both side edges of the grooved side plate (2), a semi-elliptical shape as shown in (a) of FIG. 6 and a semi-circular shape as shown in (b) of FIG. 6 are exemplified, and a cross-sectional shape close to these is also possible. it can. Since both side edges of the grooved side plate (2) are in a vertical direction in the liquid draining posture, a semi-elliptical shape is preferable, but a semi-elliptical shape is practically inferior. The sectional shape of FIG. 12 has rounded corners, which is not suitable for the purpose of the present invention.

Various substrates such as a glass substrate, a ceramic substrate, a metal core substrate, a composite substrate, and a silicon substrate are used as the substrate to be accommodated in the cassette having the above structure.

In the chemical treatment process of a substrate such as a glass substrate, the substrate is stored in a cassette, for example, the chemical treatment →
It goes through a series of steps such as primary washing → final washing → drying. When the process is transferred from one process to the next process, if the liquid is not sufficiently drained, the liquid of the previous process is brought into the next process.

However, in the cassette of the present invention, the individual columnar portions of the frames (1) and (1) constituting the cassette are formed into a round shape without angling in a cross-sectional view perpendicular to the center line direction. Since both side edges of the grooved side plates (2) and (2), which are also constituent members of the cassette, are formed in a round shape with no corners, they are attached to the cassette taken out from the liquid tank in the preceding step. The liquid immediately flows down,
The amount of liquid brought into the next process is significantly reduced.

Further, by forming the frames (1), (1) and the grooved side plates (2), (2) in a round shape without corners in this way, it is possible to store them in a cassette during transportation and storage in a clean room. Dust deposition is also significantly reduced.

EXAMPLE FIG. 1 is a plan view showing an example of a substrate cassette of the present invention, FIG. 2 is a front view thereof, FIG. 3 is a side view thereof, and FIG. 4 is a sectional view taken along line AA of FIG. Is.

Each member constituting the cassette was obtained by injection molding a heat resistant resin (for example, polyetherimide or polyetheretherketone).

(1) is a frame made of a pair of "king" -shaped lattices.

Of the individual columnar parts of the frame (1), the columnar part (1a) which is horizontal in the posture with the open surface of the cassette facing upward is an ellipse in a sectional sectional view perpendicular to the center line direction. Shaped and vertical column part (1b)
Also, the cross section taken in a direction perpendicular to the center direction is elliptical.

(2) is a grooved side plate, which has a shape in which a predetermined number of rib-shaped shelf pieces (2b) are projected in both directions from the back meat part (2a) except for the regions having flat surfaces (2c) on both left and right ends thereof. Have. (G) is a groove.

Both side edges of the grooved side plates (2), (2) are formed in a semi-elliptical shape in a sectional view.

(3) is a receiving rod as an example of stopper means,
It consists of a cylindrical round bar.

Reference numeral (4) is a protrusion, which is attached to both ends near the upper ends of the grooved side plates (2) and (2).

The frames (1) and (1) are arranged to face each other to form a pair of side surfaces, and the grooved side plates (2) and (2) are also arranged to face each other to form another pair of side surfaces. Frame (1),
The (1) and the grooved side plates (2) and (2) are integrally fastened near the upper end and near the lower end by unillustrated screws. The two receiving rods (3) and (3) are installed between the lower sides of the frames (1) and (1).

The chemical liquid processing operation using the above cassette will be described in the case of using the chemical liquid processing device shown in FIGS. 13 to 14 described in the section of the prior art.

Grooved side plates (2) facing each other of the cassette having the above structure,
When the substrate is inserted into the corresponding groove (g) of (2) and set in the loader (5) of the chemical treatment device, the transfer robot (6) chucks the protrusion (4) of the cassette to place the chemical in the cassette. The substrate is carried to the bath (7) and immersed therein, and the substrate is processed in the chemical bath (7).

After the chemical solution treatment, the transfer robot (6) takes out the cassette from the chemical solution tank (7), conveys it to the next primary washing tank (8) and immerses it in the primary washing tank (8). Be seen. At that time, the individual columnar portions of the cassette frames (1) and (1) are formed into round shapes with no corners, and the side edges with grooves (2) and (2) are also rounded without corners. Since it is formed into a shape, the chemical solution is well drained when the cassette is transferred to the primary washing tank (8), and thus the washing efficiency of the substrate in the primary washing tank (8) is improved, and the QD
R (normally, in primary water washing, all pure water mixed with chemicals is drained, new pure water is added and washed, and after washing for a certain period of time, drained again and new pure water is added) Can be reduced (usually 3-4 times).

When the primary water washing is completed, the water is washed again in the next final water washing tank (9) in the same manner, but the drainage property in this case is also excellent.

Then, the glass substrate and the cassette are dried by the dryer (10). As a drying method, various methods such as a method of substituting with vapor of isopropyl alcohol for drying and a method of drying with hot air are adopted. For example, when the hot air drying method is adopted, the cassette is removed from the final cleaning tank (9) from the cassette. If the amount of pure water attached to the product is small, the drying time will be that short, which is advantageous in terms of productivity and heat energy.

After drying, the cassette is set in the unloader (11),
This completes the chemical treatment and cleaning.

Although the cassette is used for the purpose of storing glass substrates, the use of the cassette of the present invention also suppresses dust adhesion during storage, so that adverse effects on products such as liquid crystal panels can be minimized. .

EFFECTS OF THE INVENTION When a substrate is housed in the cassette of the present invention and subjected to chemical solution treatment, the solution is well drained and cleaning efficiency is greatly improved, so that the reliability of the semiconductor device to be processed is improved. In addition, the amount of pure water used in washing can be reduced, which is economically advantageous. Further, since the amount of pure water brought into the dryer is reduced, the drying time is shortened, the throughput is increased, and the cost is superior. In addition, since dust is unlikely to adhere to the cassette, the amount of dust adhering to the substrate is reduced, the reliability of the semiconductor device is improved, and the yield of non-defective products is also improved.

[Brief description of drawings]

1 is a plan view showing an example of a substrate cassette of the present invention, FIG. 2 is a front view thereof, FIG. 3 is a side view thereof, and FIG. 4 is a sectional view taken along line AA of FIG. FIG. 5 is a sectional view showing an example of the sectional shape of the frame (1). FIG. 6 is a sectional view showing an example of a sectional shape of both side edges of the grooved side plate (2). 7 to 10 show an example of a conventional substrate cassette. FIG. 7 is a plan view, FIG. 8 is a front view, FIG. 9 is a side view, and FIG. It is a BB sectional view. FIG. 11 is a cross-sectional view showing an example of the cross-sectional shape of the frame (1) that does not conform to the present invention. FIG. 12 is a cross-sectional view showing an example of a cross-sectional shape of both side edges of the grooved side plate (2) not conforming to the present invention. 13 to 14 are schematic views of a batch-type chemical liquid treatment device which is usually used in the semiconductor manufacturing field, FIG. 13 is a front view and FIG. 14 is a plan view. (1) …… frame, (1a) …… horizontal column part, (1b) …… vertical column part, (2) …… grooved side plate, (2a) …… back meat part , (2b) …… shelf piece, (2c) …… flat surface, (3) …… stopper means, receiving rod, (4) …… protrusion, (5) …… loader, (6) …… transport robot , (7) …… Chemical solution tank, (8) …… Primary washing tank, (9) …… Final washing tank, (10) …… Dryer, (11) …… Unloader, (g) …… Groove

Front Page Continuation (72) Inventor Toshiaki Muratani 22-22 Nagaikecho, Abeno-ku, Osaka City, Osaka Prefecture Sharp Corporation (72) Inventor Morio Ikebayashi 22-22 Nagaike-cho, Abeno-ku, Osaka City, Osaka Prefecture Sharp Corporation

Claims (1)

(57) [Claims] 1. A pair of side surfaces facing each other is a frame (1),
A grooved side plate (2), which is formed of (1) and has a pair of opposite side surfaces having a large number of grooves (g) directed in the vertical direction;
(2), the bottom surface or the bottom surface side is configured to be able to receive the substrate, and the ceiling surface is an open surface for loading and unloading the substrate.
In a cassette in which a substrate can be put in and taken out between the corresponding grooves (g), the individual columnar portions of the frames (1), (1) are cut in a cross-sectional view perpendicular to the center line direction. A cassette for substrates, characterized in that it is formed into a round shape with no corners, and both side edges of the grooved side plates (2) and (2) are also formed into a round shape without corners.