JPH07231035A - Holding member of plate body, and plate-body holder using the same - Google Patents

Abstract

PURPOSE:To provide the holding member of such a plate body as a glass board which is so devised that the plate body is subjected smoothly to the removal of water therefrom and is prevented from the generations of both its spotting and contamination when the plate body is cleaned by pure water, etc., in its stored state in a holder and thereafter the holder is drawn up from inside a cleaning vessel, and to provide the holder using these holding members. CONSTITUTION:In a rod-like holding member having a composite structure, a metallic rod 1 is included as an insert, and around the rod 1 of its shaft center, a resin molded body 2 is injection formed integrally with the rod 1. Also, a plurality of rod-like holding members 1 are suspended on a frame, and thereby, a box type or box-frame type plate-body holding holder is formed. Further, in the elevation view of the shape of a main body part 21 of the resin molded body 2, frontward protruded protrusive parts (a) and backward recessed groove parts (b) are arranged alternately abacus-bead- wise. Moreover, in the lower part of the main body part 21, a skirt part 22 is formed in its shaft direction. The shape of the skirt part 22 is made thinner as it approaches the low end of the part 22 and is made wider as it approaches the one longitudinal end or both the longitudinal ends of the part 22.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plate member supporting member for supporting plate members such as glass substrates so as not to come into contact with each other, and a plate member holder using the same. More specifically, the present invention relates to a bearing member and a holder devised so that when the plate is housed in the holder, it is washed with pure water and then pulled out from the cleaning tank, the plate is smoothly drained without causing stains or contamination. It is a thing.

[0002]

2. Description of the Related Art Glass substrates for liquid crystal displays, glass substrates for plasma displays, ceramic substrates for hybrid ICs,
In the manufacturing process of various substrates such as a glass substrate for a thermal head, it is necessary to store the substrates in a cassette (or a holder) so as not to contact each other in order to process, wash and dry the substrates.

As one of the cassettes for this purpose, a cassette having a structure in which a plurality of grooved round bars having an abacus-shaped appearance is installed on a frame has been proposed or used. This round bar with a groove is manufactured by cutting a round bar made of resin or metal to form a groove.

The formation of the round bar by cutting has room for improvement in terms of the manufacturing process and the processing accuracy. Among them, the cassette using the resin-made grooved round bar accommodates the substrate therein. When performing cleaning or curing operations, the grooved round bar has a large elongation when heated and does not return to its original length when not heated. There is a problem that distortion occurs, and as a result, it becomes difficult to automatically move the substrate into and out of the cassette.

Therefore, in order to solve such a problem, an improved round bar having a groove has been proposed. That is, Japanese Patent Application Laid-Open No. 3-273664, which is an application of the present applicant,
The through-hole of the heat-resistant resin rod-shaped molded product has a through-hole in the axial direction, a large number of circumferential grooves in the middle part, and grooves for locking at both end sides. There is a disclosure regarding a round bar having a composite structure in which a bar is inserted. When the round bar with a groove is locked to the locking groove at the free end side of the lock angle and fastened to the metal frame via the lock angle to form a cassette, the substrate is accommodated. Even if it is subjected to heat treatment in this state, there is no fear that the groove pitch of the grooved round bar will change or the cassette will be distorted.

A cassette using the above-mentioned conventional grooved round bar or an improved grooved round bar is constituted by a frame on each of the front and back sides, and both side surfaces are erected between the frames with a grooved round bar. The bottom surface or the bottom surface side is configured to be able to receive the substrate by an appropriate stopper means, and the ceiling surface is an open surface for loading and unloading the substrate. The board goes in and out between the corresponding grooves of the grooved round bars on the both side surfaces,
Be accommodated. This cassette is used for processing, treating, cleaning, drying, or in some cases transporting and storing the substrate. When the substrates set in the cassette are loaded one by one by the processing device and processed individually,
In some cases, the entire cassette is loaded and batch processed.

[0007]

Generally, a substrate cassette (holder) is subjected to treatment such as curing of the formed alignment film and curing of the formed transparent electrode while the substrate such as a glass substrate is accommodated therein. Before and after that, cleaning with pure water is performed.

However, in the cassette using the above-mentioned conventional grooved round bar or the improved grooved round bar, the substrate such as the glass substrate is placed in an oblique vertical posture when cleaning with pure water. When pulled out of the cleaning tank, individual water droplets adhering to the underside of each bead of the abacus grooved round bar drip and adhere to the substrate, resulting in stains on the dried substrate. I was not spared the trouble of being able to do it.

[0009] Therefore, the present inventors considered to collect the attached water in the linear portion by connecting the lower portion of the abacus bead-shaped grooved round bar in a linear shape, not in the individual beads. However, the contamination of the substrate due to the dropping of the collected adhered water still could not be resolved.

Under such a background, the present invention does not cause stains or contamination on the plate body when the plate body such as a glass substrate is housed in the holder and is washed with pure water and then withdrawn from the cleaning tank. An object of the present invention is to provide a bearing member devised so that the water drains smoothly, and a holder using the bearing member.

[0011]

[Means for Solving the Problems] In the support member for a plate according to the present invention, a metal rod (1) is included as an insert, and the metal rod (1) is used as a shaft core around which a resin molded body (2) is A rod-shaped member having a composite structure integrally formed by injection molding, wherein the resin molded body (2) has a protruding portion (a) protruding toward the front side and a groove portion (b) retracted toward the rear side in a front view. In the axial lower part of the main body part (21) in which and are alternately arranged in abacus beads,
It is characterized in that it is formed in a shape in which a skirt portion (22) which becomes thinner as it goes downward and becomes wider as it goes to one end or both ends is formed.

Further, in the holder for plate support of the present invention, a plurality of the above-mentioned support members (3) are suspended on the frame (4) to form a box shape or a box frame, and the plate is supported by these support members (3). It is designed to support the body.

The present invention will be described in detail below.

The plate supporting member of the present invention has a metal rod (1) as an insert, and the resin rod (2) is integrally formed by injection molding around the metal rod (1) as an axis. It is composed of a rod-shaped member having a composite structure.

As the metal rod (1), a metal rod having corrosion resistance such as stainless steel is used. The outer peripheral surface of the metal rod (1) should be knurled, such as flat or twilled, in order to improve the biteability of the resin molded body (2) formed by injection molding and suppress molding shrinkage. Is especially desirable. In the case of flat knurls, it is preferable to provide grooves in some places in the circumferential direction.

As the resin for forming the resin molded body (2), a resin having injection moldability, in particular, polyether ether ketone (PEEK), perfluoroalkoxy-substituted polytetrafluoroethylene (PFA), polyvinylidene fluoride ( PVDF), ethylene-vinyl alcohol copolymer (EVOH), polyketone (PK), etc. are used. In addition, polyetherimide, polyamideimide, polyphenylene sulfide, polyarylate, polysulfone, polyallylsulfone, polyethersulfone, Polybutylene terephthalate, polyacetal, polypropylene, ABS resin, polyphenylene oxide, etc. can also be used. Which resin is selected is determined in consideration of required performances such as dust emission prevention, abrasion resistance, surface tension, heat resistance, chemical resistance, injection moldability, and low shrinkability.

In the present invention, the resin molded body (2) is formed into an abacus shape in which the protruding portion (a) protruding toward the front side and the groove portion (b) recessed toward the rear side are alternately arranged in a front view. A skirt portion (22) is formed in the axially lower part of the main body portion (21) having a continuous shape, the skirt portion (22) being thinner toward the lower side and wider toward one end side or both end sides.

It is particularly desirable that the shape of the protruding portion (a) protruding toward the front side of the main body portion (21) in the front view is a quadrangular pyramid-shaped diamond cut shape, but the shape is similar to that. It doesn't matter. The number of groove portions (b) is not particularly limited, but it is often about 8 to 30.

In the body part (21) of the resin molded body (2), the protruding part (a ') protruding toward the front side and the groove part (b') recessed in the rear side are alternately arranged in an abacus even when viewed from the rear. It is desirable to form the beads in a bead shape. This makes it possible to balance the flow of molten resin during injection molding and the shrinkage during cooling, so that a precise resin molded body (2) with no distortion can be obtained, and the groove (b ') This is because the side can be used for supporting the plate like the groove (b), or can be used as a stopper that individually supports the plate at the lower side. In this case, the shapes of the protrusion (a) and the groove (b) of the main body (21) and the shapes of the protrusion (a ′) and the groove (b ′) may or may not be the same. Good.

As described above, the skirt portion (22) formed in the lower portion of the main body portion (21) in the axial direction is made thinner as it goes downward and becomes wider as it goes to one end or both ends. . The cross-sectional shape of the skirt (22), which is thinner toward the bottom, may be a linearly thin triangle,
It is more preferable in terms of the flow of the adhering liquid to draw a negative curve and make it thinner as it goes downward. When the skirt (22) is made wider toward both ends, the lower side of the skirt (22) is usually linearly inclined toward both sides in a "F" shape when viewed from the front. Is. However, when the length of the resin molding (2) in the axial direction is relatively short, the width may become wider by drawing a negative curve toward the both ends, and it may be shaped like a "/" toward one end. You may make it linearly incline.

In the holder for plate support of the present invention, a plurality of support members (3) having a composite structure of the metal rod (1) and the resin molding (2) described above are suspended on the frame (4). Then, it is formed in a box shape or a box frame.

The plate body is usually housed in a holder in a straight vertical position and is lifted together with the holder in an oblique vertical position, or is housed in a holder in an oblique vertical position to lift the holder straight. However, at that time, at least one side and the lower side of the plate are supported by the groove (b) or the groove (b ') of the main body (21) of the supporting member (3). .

The frame (4) is often a combination of thin frame-shaped or plate-shaped metal members. flame
When (4) is plate-shaped, it is preferable to punch the central region into an appropriate shape to reduce the weight. In this case, it is preferable to chamfer the punched portion so as not to collect liquid.

The plate support holder of the present invention accommodates various glass substrates as well as plates such as ceramics substrates, plastics substrates, and wafers. The shape of the plate is
It may be prismatic or disc-shaped.

[0025]

In the plate supporting member of the present invention, a metal rod is used.
(1) is included as an insert, and a resin molded body (2) is integrally formed by injection molding around the metal rod (1) as an axis.

The resin molded body (2) has a complicated three-dimensional shape, but since it is manufactured by injection molding, it is possible to always obtain a stable and accurate molded body once the metal mold is manufactured. Therefore, as compared with the method of extrusion-molding a rod and cutting the rod, it is possible to stably provide a rod having excellent dimensional accuracy and at an extremely low cost. The excellent dimensional accuracy is also advantageous in automating the loading / unloading and lifting of the plate body.

The bearing member is a metal rod (1) and a resin molded body.
Since it is made of a composite structure with (2), the required strength can be obtained by the metal rod (1), and the expansion and contraction due to the temperature change of the resin molded body (2) is significantly suppressed by the metal rod (1).

In the holder using the bearing member of the present invention, since the resin molded body (2) has a unique shape, the plate body is supported (in addition to the side edge support of the plate body, the support body is supported). (It can also be used as a stopper that supports the bottom of the plate body in a horizontal position) and is suitable for the operation of workpieces, as well as water that adheres during the cleaning process that is frequently performed in the manufacturing process of glass substrates, etc. It has excellent flowability. That is, the resin molded body of the support member
The cleaning water adhering to (2) smoothly flows from the protrusions (a), (a ') and the grooves (b), (b') of the main body (21) of the bearing member (2).
2) and immediately toward the end of the skirt (22), and further from the end of the skirt (22) to the frame (4) on the side of the cassette.
(4) It falls down toward the lower end. As described above, when the support member of the present invention is used, the adhered water is transmitted to the side frame (4) without dripping, so that the plate body such as the glass substrate is not contaminated.

[0029]

EXAMPLES The present invention will be further described with reference to examples.

Embodiment 1 Bearing Member (3) FIG. 1 is a front view showing an example of the bearing member of the present invention, FIG. 2 is its plan view, FIG. 3 is its rear view, and FIG. 4 is its side view. 5 is an enlarged cross-sectional view taken along line AA of FIG. 2, FIG. 6 is an enlarged view of portion B of FIG. 1, and FIG. 7 is an enlarged view of portion C of FIG.

As an example of the metal rod (1), insert a 220 mm-long SUS304 metal rod (the outer peripheral surface of which is flat knurled and, in some places, circumferentially grooved). Used as polyetheretherketone (perfluoroalkoxy-substituted polytetrafluoroethylene or polyvinylidene fluoride may be used)
By injection molding, the metal rod (1) is included as an insert, and the resin molding (2) is integrally formed around the metal rod (1) as an axis by injection molding. ) Got It should be noted that each 9 mm of both ends of the metal rod (1) has a male screw structure for suspending it on the frame (4), and the male screw structure is not provided with the resin molding (2) and is bare (reverse). Both ends of the metal rod (1) can have a female screw structure).

The shape of the resin molded body (2) is such that a skirt portion (22) is provided on the lower portion of the main body portion (21) in the axial direction.

Of these, the main body portion (21) has a shape in which a protruding portion (a) protruding toward the front side and a groove portion (b) retracted toward the rear side are alternately arranged in an abacus shape in a front view. ing. Protrusion
(a) is formed in a quadrangular pyramid diamond cut shape. The number of grooves (b) is 16 in this embodiment.

Also, in the body portion (21) of the resin molded body (2), the protruding portion (a ') protruding toward the front side and the groove portion (b') recessed toward the rear side are alternately arranged in an abacus even in rear view. It is formed in a bead shape. The protrusion (a ') is also formed in a quadrangular pyramid diamond cut shape, but the height of the peak is slightly lower than that of the protrusion (a) as shown in FIG.

The skirt portion (22) connected to the lower portion of the main body portion (21) in the axial direction has a shape in which a negative curve is drawn downward and becomes thinner, and the width becomes wider toward both ends.

The dimensions (unit: mm) of the support member (3) having the above structure are shown in the drawing.

Holder FIG. 8 is a side view of an example of a holder using the support member of the present invention in a suspended state, FIG. 9 is a front view of the holder, and FIG. 10 is a plan view of the holder.

The above-mentioned six support members (3) are attached to the frame.
It was suspended in (4) and formed into a box shape or box frame, which was used as a holder. In this case, two of the four support members (3) were arranged on both sides of the holder so that the protruding portion (a) side faced inward and the skirt portion (22) faced downward.
The remaining two of the support members (3) are arranged so that the protruding portion (a ') side faces upward and the skirt portion (22) faces outward (at this time, the skirt portion (22) is slightly obliquely downward. It is desirable that it should face)) and it was placed at the bottom of the holder.

8 to 10, (41) and (41) are SUS304.
It is a side wall frame made of steel and has a groove (41a) for receiving the supporting member so that it can be used for plates of various sizes, and has large and small punched parts (41b) for weight reduction. . The side wall frames (41), (41) are punched out (41b).
Is chamfered to prevent the accumulation of liquid. Reference numerals (42) and (42) are reinforcing frames each having a U-shape by bending both sides. One is provided on the front side and the other is provided on the back side at different height portions. This reinforcement frame
(42) and (42) also serve as support plates for suspending the entire holder with the plate body (G) accommodated therein. In the figure,
(5) indicated by a chain line is a holder suspension member.

When the plate body (G) such as a glass substrate is housed in the holder having the above-described structure, the plate is washed with warm pure water and then pulled out from the washing tank, the reinforcing frames (42), (4)
Since (2) is provided at different heights of the side wall frames (41), (41), the holder is lifted in a slanting posture, so that the plate (G) housed in the holder is also slanted vertically. It is lifted in a posture.

The washing water attached to the resin molded body (2) is, as shown by the white arrow in FIGS. 1, 5 and 9, the protruding portion (21) of the main body (21) of the support member (3). a), (a ') apex of the pyramid and grooves (b), (b') move to the lower end of the base of the diamond-cut base of the pyramid, then move to the skirt (22) and immediately the skirt. Flow to both ends of part (22),
Further, the side wall frame (41) of the frame (4) of the cassette moves from both ends of the skirt portion (22) to
It is transmitted to the lower end of (41).

[0042]

As described in the section of the operation, the resin molding (2) in the bearing member of the present invention has a complicated three-dimensional shape, but since it is made by injection molding, once it is made into a mold. It is possible to obtain a molded body which is always stable and has high precision. Therefore, as compared with the method of extrusion-molding a rod and cutting the rod, it is possible to stably provide a rod having excellent dimensional accuracy and at an extremely low cost. The excellent dimensional accuracy is advantageous in automating the loading / unloading and lifting of the plate body. Moreover, since the metal rod (1) and the resin molded body (2) have a composite structure, the metal rod (1) provides the necessary strength, and the resin molded body (2) expands and contracts due to temperature changes. rod
It can be surely suppressed by (1).

In the holder using the support member of the present invention, since the resin molded body (2) has a unique shape, it is suitable not only for supporting the plate body but for operating the work. In addition, the flowability of the adhered water during the cleaning process that is frequently performed in the manufacturing process of glass substrates and the like is extremely excellent. That is, when the support member of the present invention is used, the adhered water is transmitted without dripping, so there is no risk of contaminating a plate body such as a glass substrate.

[Brief description of drawings]

FIG. 1 is a front view showing an example of a bearing member of the present invention.

2 is a plan view of the bearing member of FIG. 1. FIG.

3 is a rear view of the bearing member of FIG. 1. FIG.

4 is a side view of the support member of FIG. 1. FIG.

5 is an enlarged cross-sectional view taken along the line AA of FIG.

FIG. 6 is an enlarged view of part B in FIG.

FIG. 7 is an enlarged view of portion C of FIG.

FIG. 8 is a side view in a suspended state showing an example of a holder using the support member of the present invention.

9 is a front view of the holder of FIG. 8. FIG.

10 is a plan view of the holder of FIG.

[Explanation of symbols]

 (1) ... metal rod, (2) ... resin molded body, (21) ... body part, (a), (a ') ... protruding part, (b), (b') ... groove part, (22) ... skirt Part, (3) ... Support member, (4) ... Frame, (41) ... Side wall frame, (41a) ... Groove, (41b) ... Stamped part, (42) ... Reinforcement frame, (5) ... Holder suspension member , (G)… Plate

Claims (6)

[Claims] 1. A resin molded body (2) having a metal rod (1) as an insert and having the metal rod (1) as an axial core around the metal rod (1).
Is a rod-shaped member of a composite structure integrally formed by injection molding, and the resin molded body (2) has a protruding portion (a) protruding toward the front side and a groove portion (b) retracted toward the rear side in a front view. ) And a skirt part (22) that is thinner in the lower part and wider in one end or both ends is provided at the lower part in the axial direction of the main part (21) in the shape of an abacus. A support member for a plate body, which is formed into a curved shape. 2. The bearing member according to claim 1, wherein the skirt portion (22) is provided so that it becomes thinner by drawing a negative curve downward and becomes wider toward both ends. 3. The bearing member according to claim 1, wherein the projecting portion (a) projecting toward the front side of the main body portion (21) has a quadrangular pyramid diamond cut shape. 4. The body portion (21) of the resin molded body (2) has a protruding portion (a ') protruding toward the front side and a groove portion (b') recessed toward the rear side alternately in the rear view. The support member according to claim 1, wherein the support member has a shape in which the abacus is connected in a spherical shape. 5. A bearing member according to claim 1, wherein the outer peripheral surface of the metal rod (1) is formed into knurls. 6. A plurality of support members (3) according to claim 1 are suspended in a frame (4) to form a box shape or a box frame, and the plate member is supported by these support members (3). Holder for plate support.