JPH09301484A - Flat panel carrier and assembling method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily and rapidly produce a panel silicon wafer carrier with specified optional dimensions, by providing a structure in which the constituting members can be easily exchanged by use of connecting parts forming a square frame structure by the connection with rails. SOLUTION: A carrier 20 for flat panels is provided with the first and the second mutually and parallelly stretching planes 22, 24 of the upper and lower sides, the third and the fourth vertically stretching planes 26, 28 oppositely positioned at the front and the rear sides and further, a receiving end 30 at the opened front face and a retaining end. Also the carrier is provided with module type adjustable frame structure 36 and a number of panel joints 38. A number of horizontal panel slots 40 are formed in the panel joints 38. The frame structure 36 is provided with connectors 50 and rails 52 and seven vertical columns 54 are interposed between the first and the second planes 22, 24. Respective columns 54 are constituted of a number of segments 64 and rail parts 66 fitting to the segments 64.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel carrier for a flat panel such as a silicon wafer and a method for assembling the same, and more particularly to a modular flat panel carrier and a method for assembling the same.

[0002]

BACKGROUND OF THE INVENTION Panels of silicon wafers are processed and segmented into flat panel displays such as laptop computers. When performing such processing,
It is important to keep as few particles and contaminants as possible that can ruin the flat panel display unit. The problems encountered with particles and contaminants when processing flat panel displays are very similar, if not the same, when processing silicon wafers into integrated circuit chips. Wafer carriers are generally formed from injection molded plastic. The size of the flat panel carrier causes difficulties in warping and distortion, resulting in non-uniform or non-reproducible carrier shape. Most of the flat panel processing is done by robotic devices, so the tolerances are very small. While standardization of carrier slots has been done, standardization of flat panel dimensions and wafer carrier dimensions has not yet been done. Flat panel wafer processors often order carriers of unique dimensions to hold a specified number of wafers.

[0003]

Therefore, there is a need for a means by which a panel silicon wafer carrier of any particular size can be provided easily and quickly. Such carriers generally must be robust, have uniform and reproducible dimensions, be lightweight and have low particle generation.

[0004]

SUMMARY OF THE INVENTION To solve the above problems, the present invention provides a modular flat panel carrier that is readily assembled in a dimensionally flexible and flexible manner. The flat panel carrier of the present invention utilizes a connector portion that engages the rail portion to form a rectangular framework. The flat panel engaging portion is assembled with a suitable rail portion to form a slot for receiving the flat panel. A handle is attached to the framework in the forward position to hold the flat panel within the carrier as the carrier is carried. Each of the engaging portions has a panel support surface where contact is suppressed as much as possible, a panel edge stop portion that forms a portion on which the panel rests, and an oblique guide-in portion provided above the edge stop portion. in) has a surface. A feature of the present invention is that the use of replaceable members allows the formation of carriers of a variety of different sizes while maintaining rigidity and making the carriers lighter. Another feature of the invention is that although each carrier is assembled individually, the size and dimensions of the carriers are very reproducible. Another advantage and feature of the present invention is that due to its modular construction,
It is possible for the carrier to be composed of a variety of different materials. The material can be selected according to the properties required for the individual parts.

[0005]

Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 shows a carrier for a flat panel W in a fully loaded state. The carrier is designated by the reference numeral 20. The carrier 20 mainly includes an upper horizontal first surface portion 22.
And a lower horizontal second surface portion 24 that is parallel to and faces the first surface portion 22 and a vertical third surface portion 2.
6, a fourth surface portion 28 in the up-down direction facing this, an opening front end 30 for opening, and a holding end 34. The carrier 20 is generally box-shaped and has a modular adjustable framework 36 and a number of panel engagement portions 38. The panel engaging portion 38 forms a large number of panel slots 40 in the horizontal direction.
The adjustable framework 36 can be configured to configure the carrier 20 to fit a particular size flat panel or a particular number of flat panels by selecting its size.

The carrier 20 includes a pair of handles 44,
Has 46. The handles 44 and 46 are the carrier 2
It can be attached to the upper first face 22 for carrying zeros. The handles 44 and 46 are located in front of the balance line 47 of the carrier 20 with the flat panel loaded. As a result, the carrier 20 tends to tilt rearward naturally when carried by the handles 44, 46. This helps hold the flat panel in place.

2 to 11 show the details of the structure of the framework 36 which constitutes the modular carrier 20.
FIG. 2 shows the carrier 20 without the handles 44 and 46 installed and the flat panel not loaded. The panel engagement portion 38 is divided into several sets of engagement portions as shown. In the drawing, it is divided into seven sets of engagement parts, which are designated by the reference numeral 48. Each set is arranged in a substantially horizontal plane 49. The framework 36 generally comprises a connector portion 50, a rail 52, and a panel engaging portion 38. Seven vertical columns 54 are provided between the upper horizontal first surface portion 22 and the lower horizontal second surface portion 24. These vertical columns 5
4 is a first column 56, a second column 57, a third column
Column 58, the fourth column 59, and the fifth column 6
It has 0, a sixth column 61, and a seventh column 62. Each of the columns includes a large number of segments 64 of the panel engaging portion 38 and vertical rail portions 66 that engage with the segments 64.

Each of the vertical columns extends between the first surface portion 22 and the second surface portion 24, and is connected to the first surface portion 22 and the second surface portion 24 by the connector portion 50. The first surface portion 22 has a corner connector portion 70, a surface portion central connector portion 72, and an end portion central connector portion 73. Similarly, the lower horizontal second surface portion 24
Has four corner connector portions 74, a surface central connector portion 76, and an end central connector portion 78. The column is suitably attached to the connector portion by press-fit engagement and / or screws 80. The screw 80 extends through the rail and into the connector section, or vice versa. These screws 80 are screwed into either or both of the rail and the connector part. Other suitable fastening means may include rivets, adhesives, or welding the components together.

A suitable construction of the connector portion is shown in FIGS. FIG. 4 shows the corner connector portion. FIG. 5 shows the end center connector portion 73. FIG.
Shows a face portion central connector portion 76 having a structure suitable for the lower horizontal second face portion 24. FIG. 8 shows an end center connector section 78 suitable for the lower horizontal second surface section 24. Each of the connector parts has a number of rail receiving slots. Each of the rail receiving slots has an axis indicated by the dotted line represented by the letter A. Each slot 84 is a pair of engaging members 8
6 and 87. These engaging members 8
6, 87 and slot 84 are shaped to securely engage the rail. A "slot" is defined herein to mean any kind of recess, groove, or opening, and is not considered to be limited to a C-shaped slot as shown in the drawing structure. I won't.

FIG. 3 shows the first horizontal surface 22 of the carrier 20 in particular. The surface portion 22 has a corner connector portion 70, a surface portion central connector portion 72, an end portion central connector portion 73, and an upper horizontal rail portion 90. Each of the rail portions 90 has opposite end portions 92 and 94. End 9 that engages a corner portion
2 and 94 are diagonal joints 96 inside the corner connector section.
Is formed into a shape that forms a. The longitudinally extending rail portion extends through the face center connector portion 72, as shown by the dotted line 97, or forms an abutment joint 98. The dotted lines in FIGS. 4-8 show a suitable joint 100 for the ends 92, 94 of the rail section.

FIGS. 9, 10 (a) and 10 (b) show detailed views of one structure of the segment 64 of the panel engaging portion 38. As shown in FIG. The segment 64 is composed of a large number of panel engaging portions 38 aligned in position. Panel engaging portion 38
Are arranged in the vertical column 65. Each panel engaging portion 38 has a rail slot 103, a convex teardrop-shaped protrusion 101, an oblique guide-in surface or ramp 106, and a shelf 108. Protrusion 101
Has an engagement point 104. The ramp 106 helps guide the flat panel into position. A teardrop-shaped protrusion 101 is arranged on the shelf 108. FIG. 10B shows the front panel edge stop portion 111 formed as the stop tab 110. The stop tab 110 is used when the segment 64 is adjacent the open front receiving end 30.
The segment 64 has a node 112. Knots 112 engage openings 114 to help align panel engagement portion 38 between one segment 64 and the next segment 64. The segment 64 may also have a single panel engaging portion 38, as shown by the dashed line 115 in FIG. In this case, the columns of the engaging portion are formed by stacking the separated individual parts.

FIG. 11 shows a rail 90 having one suitable shape. The rail 90 may be of any suitable construction that engages the connector slot 84 or the engagement members 86,87. The illustrated rail 90, when inserted into the slot of the panel engaging portion or the connector portion, has C1, C2, C3, C4, C5.
Touch at five points represented by. Due to these distinct and localized contact points, contaminants and fluid pools are minimized, such as after cleaning.

FIG. 12 shows another embodiment of the panel engaging portion 38 and the segment 64. In this embodiment, instead of using the slot of the panel engaging portion 38, the engaging member 1 formed as a protruding portion and extending outwardly.
22 and 124 are used. Engaging members 122, 12
4 engages in the C-shaped rail 120 shown in FIG. Another connector portion suitable for use with such a C-shaped rail 120 is shown in FIGS. It should be noted that the connector portion can insert a C-shaped rail 120 into the slot 130 or engage around a male engagement member 132. It is also within the scope of the present invention to integrate the rail with the panel engaging portion without making the panel engaging portion separate from the rail.

FIG. 16 shows the construction of a suitable handle 44 which is attached to the longitudinal rail of the upper first face 22. Referring again to FIGS. 1 and 2, the carrier 20 can be constructed and used to fit flat panels of any size. It can also accommodate any number of desired or specific panels. In other words, the panel carrier 20 is adjustable in the X, Y, and Z axis directions represented by the axis group 150 in FIG. The connector portion is formed by injection molding, machining, or any other suitable method of molding aluminum. Similarly, the rail portion is formed from extruded or injection molded plastic, aluminum or the like. Ideally, the panel engaging portion is made of a plastic having abrasion resistance and antistatic property such as carbon fiber filled with PEEK.

The operation of the present invention is as follows. The structure of FIG. 1 with no flat panel loaded is installed in the manufacturing facility. Generally, the carrier 20 is loaded and unloaded with panels one by one using a robot. As best shown in FIG. 10 (b), the flat panel W is inserted into one of the panel slots 40 above the ramp and then lowered down to rest on the engagement point 104. In the structure of FIGS. 1 and 2, a total of seven engagement points 104 are provided, one for each vertical column 54. When the panel W is lowered and placed on the engagement points 104, if the wafer is slightly off-center, the lamp 106 will guide the panel W into place. Once in place, the stop tab 110 shown in FIG. 9 helps hold the panel W when the carrier 20 is moved or pushed. The stop tabs 110 also prevent longitudinal movement when the panel engages the engagement points 104 and minimizes particle generation due to rubbing. When the flat panel W needs further processing or other requirements, the robot arm is extended below the panel to lift the panel,
Raise the panel up past the stop tab 110 and ramp 106. The panel W is then removed from the open front receiving end 30.

The assembly of the flat panel carrier 20 shown in the figures involves engaging rail portions of selected dimensions into the connector sections and prior to assembling these rail sections 66 into the connector sections. The vertical rail portion 66 is engaged with the panel engaging portion 38. The rails can be secured to the connector portion using a variety of means such as screws, adhesives, welding, or any other suitable mechanical fastening means. The connector portion and rails can be shaped appropriately so that when assembled they form an interference fit for added rigidity and fixation.

With the modular assembly described above, the carrier manufacturing facility need only stock parts, connectors, panel engagements, cut rails or long rails and handles. It will be. When a carrier of a particular size is ordered, the manufacturer or assembler will ask the manufacturer to assemble an appropriate connector section, a rail with the appropriate dimensions, or a rail cut to the appropriate dimensions and a panel maker of the appropriate dimensions. Select the joint. The assembler simply assembles these parts into the designated carrier.

In FIGS. 17, 18, 19 and 20,
Another embodiment of the invention is shown. In this embodiment, the C-shaped rail shown in FIG. 13 and the rails shown in FIGS.
17 is used to form a rectangular modular box-shaped carrier as shown in FIG. The rails are attached to the connector portion primarily by press fit friction engagement. Then, each engagement described in connection with the embodiment of FIG. 2 is fixed by reinforcing by using fixing means such as screws, adhesives or welding of materials. This embodiment also
It has an open front receiving end 30 and two vertical rails 140,142. Further, this embodiment is also characterized in that it has a front panel edge stop portion 146 which is integrally connected to a vertical panel stop portion 148.

18, 19 and 20 show details of the embodiment of FIG. In particular, FIG. 19 and FIG.
0 indicates a feature relating to the engagement of the panel W. Each of the panel engaging portions 38 has an upwardly facing panel engaging surface 152 of the protrusion 101. When the panel is placed in the condition shown by the dotted line at 158 in FIG. 19, the panel engagement surface 152 causes the edge 153 of the bottom surface 155 of the panel W to engage the engagement point 104.
Support on. Such engagement results in a very small contact point.

The front panel edge stop portion 146 is provided in a substantially vertical direction and faces the inward front panel restraining surface 1.
It has 62. The front panel restraining surface 162 contacts the front end 164 of the panel. Vertical panel stop 1
48 is connected to the segment 64 of the panel engaging portion by a connecting member 170. The front panel edge stop portion 146 is connected to the C-shaped rail 120 by the above-mentioned connecting member 170, the wafer engaging portion segment 64, and the engaging member 130. In the embodiment shown in FIGS. 17, 18, 19 and 20,
Front panel edge stop portion 146, connecting member 170,
The panel engaging portion 38 and the engaging member 130 are all integrated to form a vertical panel engaging column 171.

Engagement member 130 is engaged in C-shaped rail 120 using T-shaped member 174 and node 176. Knots 176 have opposite surfaces 178. The surface 178 contacts the inner wall 182 of the C-shaped rail 120. The interior 184 of the generally C-shaped rail is sized to closely engage the engagement member 130. Vertical members 190 extend between adjacent engaging members 130. Each of the panel engaging portions 38 has a panel edge restraining member 196. The panel edge restraining member 196 has an inwardly facing surface 198 provided substantially vertically and an obliquely inwardly facing upward guide-in surface 200 provided on the lamp 201. The surface 198 faces the panel edge. The guide-in surface 200 helps properly position the inserted panel in the laid-down state when lowered by the robot arm.

As can be seen with particular reference to FIG. 19, removal of the panel from the carrier requires raising the panel to at least the level of the dotted line indicated by reference numeral 208. Panel carriers generally have insert and release levels. This insertion and removal level is limited by the upper surface 212 of the four panel edge stops and the lower surface 214 of the next adjacent panel stop. This insertion and removal level is indicated by reference numeral 21 in FIG.
It is represented by the dotted line indicated by 6.

Note that in this embodiment, the panel engagement portion 38 has a shelf 212 that is generally tongue-shaped. This shelf 212 facilitates manufacturing, facilitates optimal support, and uses as little material as possible. The present invention can be embodied in other forms without departing from its spirit and essence. Therefore, the above-described embodiments are merely for the purpose of explanation, and do not limit the invention. For the scope of this invention,
Reference should be made to the claims, rather than the description set forth above.

[Brief description of drawings]

FIG. 1 is a perspective view showing a modular flat panel carrier according to the present invention in a loaded state.

FIG. 2 is a perspective view of the modular flat panel carrier in an unloaded condition.

FIG. 3 is a plan view of a modular flat panel carrier.

FIG. 4 is a perspective view of a corner connector portion.

FIG. 5 is a perspective view of a retainer end central connector portion.

FIG. 6 is a perspective view of an upper horizontal surface portion central connector portion.

FIG. 7 is a perspective view of a lower surface central connector portion.

FIG. 8 is a perspective view of a lower end central connector portion.

FIG. 9 is a perspective view showing a segment of a flat panel engaging portion.

FIG. 10 (a) is an elevational view showing a segment of a flat panel engaging portion, and (b) is a sectional view of 10b-10b of FIG.
It is a detailed sectional view of a flat panel engagement part in a line.

11 is a perspective view of a rail portion suitable for engaging the segment of FIG. 9 and the connector portion of FIGS. 4-8.

FIG. 12 is a perspective view showing another embodiment of the segment of the flat panel engagement portion.

13 is a perspective view of another embodiment of a C-shaped rail portion suitable for use in conjunction with the segment shown in FIG.

FIG. 14 is a perspective view of another embodiment of a connector portion utilizing a C-shaped slot for receiving the rail portion shown in FIG.

FIG. 15 is a perspective view of another embodiment of the connector portion, also showing a male engagement member coupled to the rail portion of the structure as shown in FIG.

FIG. 16 is a perspective view of a mounting handle. The handle is configured to attach to a rail portion as shown in FIG.

FIG. 17 is a perspective view of a flat panel carrier assembled with C-shaped rails as shown in FIG.

FIG. 18 is a perspective view showing a rail insertion member having a panel engaging member segment and a front panel stop.

FIG. 19 is a detailed elevational view of the panel engagement member and front panel stop engaged with a C-shaped rail as shown in FIG.

FIG. 20 is a sectional view taken along line 20-20 of FIG. 19;

[Explanation of symbols]

 20 carrier 22, 24, 26, 28 surface part 30 front end receiving end 34 holding end 36 frame 38 panel engaging part 40 slot 44, 46 handle 47 balance line 48 panel engaging part 49 flat surface 50 connector part 52 rail 54 Vertical column 56, 57, 58, 59, 60, 61, 62 Column 64 segment 65 Vertical vertical column 66 Rail part 70 Corner connector part 72 Face center connector part 73 End center connector part 74 Corner connector part 76 Face center connector Part 78 End central connector part 80 Screw 84 Slot 86,87 Engaging member 90 Rail part 92,94 End part 101 Protrusion part 103 Rail slot 104 Engaging point 106 Guide-in surface 120 Rail 122,124 Engaging member 130 Slot 132 engaging members 140, 142 vertically rails

Claims (33)

[Claims] 1. A modular flat panel carrier for holding a plurality of vertically stacked flat panels, comprising: a) four corners and corner connector portions arranged at each corner. Then, each of the corner connector portions has an upper horizontal first surface portion having an engaging member, and b) has four corners and also has corner connector portions arranged at each corner, Each of the corner connector portions has a lower horizontal second surface portion having an engaging member, and c) first and second vertical columns, each of which is Extending between the first surface portion and the second surface portion and connected to the first surface portion and the second surface portion by using a corresponding engaging member of each corner connector,
In addition, each of these columns has a vertical third surface portion having a plurality of panel engaging portions arranged in the vertical direction and facing inward, and d) third and fourth vertical direction surface portions. A column, each of which extends between the first face and the second face and which uses a corresponding engaging member of each corner connector to connect the first face and the second face. Is connected to the surface of
In addition, each of these columns has a vertical fourth surface portion that has a plurality of panel engaging portions that are arranged in the vertical direction and face inward, and e) the third and fourth upper and lower surfaces. A plurality of panel slots formed by panel engaging portions arranged on the surface portion and arranged in the vertical direction and having a panel mounting portion; and f) a receiving end portion for inserting and removing the panel. Having a flat panel carrier. 2. The flat panel carrier according to claim 1, wherein each of the vertical columns has vertical rails that can be separated from the panel engaging portion. 3. Each of the panel engaging portions has a slot having a vertical axis, and vertical rails have dimensions suitable for the slot so that they can be inserted into the slots. The flat panel carrier according to claim 2, wherein 4. The first surface portion has at least four upper horizontal rail portions arranged in a rectangular shape, each of the rails having opposite ends, and
Each of the four connector parts provided on the surface of the
4 rail-engaging slots, each rail-engaging slot having a horizontal axis, the slots having 4
A flat panel carrier as claimed in claim 1 having dimensions adapted to the two upper horizontal rail sections and adapted to be connected to the rail sections. 5. The second surface portion has at least four upper horizontal rail portions arranged in a square shape, each of the rails having an end portion facing each other, and
Each of the four connector parts provided on the surface of the
4 rail-engaging slots, each rail-engaging slot having a horizontal axis, the slots having 4
5. A flat panel carrier as claimed in claim 4, having dimensions adapted to the two lower horizontal rail sections and adapted to be connected to the rail sections. 6. A vertical end is provided substantially parallel to the receiving end, and a fifth vertical column is provided, and the fifth vertical column is aligned. A plurality of panel engaging portions that are aligned with the slots to further support each panel. 6. The flat panel carrier according to claim 5, wherein the flat panel carrier is arranged so as not to pass through the edges. 7. The flat panel carrier of claim 1 wherein each of said engagement portions has a convex surface facing upwards to minimize contact points. 8. The flat panel carrier according to claim 7, wherein the panel engaging portion provided in the vertical rails at the same position is a panel engaging portion including a plurality of segments. 9. The flat panel carrier of claim 8, wherein each of said segments comprises a single panel engaging portion. 10. The first surface portion has at least four upper horizontal rail portions arranged in a square shape, each of the rails having opposite ends, and
Each of the four connector portions provided on the surface of the rail has two rail engaging slots, the rail engaging slots having a horizontal axis, and the slots having four upper horizontal rails. It has a size that fits the part,
Connected to rail portions, the second surface portion having at least four upper horizontal rail portions arranged in a square shape, each of the rails having opposite ends, Each of the four connector parts provided on the second face part further has two rail engaging slots, and the rail engaging slots have horizontal axes, and these slots have four lower horizontal directions. A flat panel carrier as claimed in claim 2 having a size adapted to the rail portion of said and connected to said rail portion. 11. The flat panel carrier according to claim 10, wherein the upper horizontal rail, the lower horizontal rail, and the vertical rail all have the same cross-sectional shape. 12. A plurality of front panel edge stops connected to the framework are provided, the front panel edge stops being arranged substantially vertically at a receiving end, the front panel edge stops One of the sections is located forward of the panel rest position in each slot, thereby preventing the panel from moving forward when the panel is in its rest position.
The described flat panel carrier. 13. A flat panel carrier comprising: a) a substantially square first face portion having four corners; b) a substantially square second face portion having four corners; and c) the first face portion. Rails for four spans extending between four corners of a surface portion and four corners of the second surface portion, each rail having opposing ends and perpendicular to the first surface portion and the second surface portion. D) four corner connector parts provided on the first surface part and four corner connector parts provided on the second surface part, wherein the first surface part And each of the corners of the second surface portion, each having a rail engaging slot, the rail engaging slot having an axis perpendicular to the plane of the first surface portion and the second surface portion. Have each slot for the span Have suits dimensions Lumpur, adapted to engage with one of said span rail,
A corner connector portion, and e) a plurality of panel engaging portions that are provided in alignment with each of the span rails and have contact portions that engage with the respective panels, and that receive a plurality of panels. A panel engaging portion forming a plurality of parallel slots in the carrier for retaining, a flat panel carrier. 14. The first surface portion has at least four rail portions arranged in a rectangular shape, each of the rails has an opposite end portion, and each of the four connector portions further includes two rail portions. 14. The flat panel carrier of claim 13, wherein the flat panel carrier has three rail engaging slots, the rail engaging slots are sized to fit the four rail portions and adapted to be coupled to the rail portions. 15. The second surface portion has at least four rail portions arranged in a rectangular shape, each of the rails has an opposite end portion, and each of the four connector portions further includes two rail portions. 15. The flat panel carrier of claim 14 having one rail engaging slot, the rail engaging slot being sized to fit the four rail portions for coupling to the rail portions. 16. A front end receiving end and a holding end are provided, the front end receiving end being open to receive a flat panel, and the first end at the holding end. Is provided with a holding rail that extends from the surface portion to the second surface portion, and the holding rail has a plurality of panel engaging portions whose positions are aligned, and the panel engaging portions are aligned with the slots. 14. The flat panel carrier of claim 13, wherein the flat panel carrier is positioned to further support each panel and the retaining rails are positioned to retain the panel in the panel receiving slot therein. . 17. The panel engaging portion provided on each of the span rails at the same position includes a first surface portion and a second surface portion.
14. The flat panel carrier of claim 13 slidably engaged with the span rail between the face portions of the. 18. The flat panel carrier according to claim 17, wherein the panel engaging portion provided on each of the span rails in a uniform position comprises a plurality of panel engaging portion segments. 19. The flat panel carrier of claim 18, wherein each of said segments comprises a single panel engaging portion. 20. The span rail includes a first span rail, a second span rail, a third span rail, and a fourth span rail. Two span rails are disposed on the third surface of the carrier, and the third and fourth span rails are disposed on the fourth surface of the carrier, the first and second spans It is arranged between these rails and parallel to them.
And a first intermediate span rail extending between the first and second face portions, the first intermediate span rail being disposed parallel to the first and third span rails. 17. The flat panel carrier of claim 16, further comprising a second intermediate span rail extending between the two faces. 21. A plurality of aligned panel engaging portions are provided on each of the intermediate span rails.
21. The flat panel carrier as claimed in claim 20, wherein the plurality of panel engaging portions whose positions are aligned are arranged in alignment with the panel slots to further support each panel. 22. The flat panel carrier according to claim 13, wherein each of said rails has two ends, and each of these ends is connected by a fixing means at a connector part. 23. The flat panel carrier of claim 22, wherein the securing means comprises a screw extending through the connector portion to engage an end of the rail. 24. The flat panel carrier according to claim 22, wherein said fixing means is made of an adhesive agent that joins each rail end portion to each connector portion. 25. An upper surface portion, a front surface receiving end portion, and a holding end portion are provided, and a balance line of the carrier when the plurality of panels are loaded in the panel slot of the carrier is an upper surface portion. A handle is attached to the upper surface between the balance line and the front receiving end so that the carrier is moved toward the holding end when carrying a loaded carrier with the handle. 14. The flat panel carrier of claim 13, which is adapted to tilt. 26. The flat panel carrier of claim 13, wherein the span rail length is selected to fit the dimensions of the carrier having a particular number of slots. 27. The flat panel carrier of claim 15, wherein the length of the horizontal rails is selected to match the size of the carrier for a particular size panel. 28. The flat panel carrier of claim 13, wherein each of the panel engaging portions has a contact point. 29. A flat panel carrier, comprising: a) a substantially square first surface portion having four corners; and b) four corners, parallel to and facing the first surface portion. A substantially quadrangular second surface part, and c) four span rails extending between the four corners of the first surface part and the four corners of the second surface part, the ends facing each other. And has the first
Rails for spans arranged at right angles to the surface portion and the second surface portion, and d) four corner connector portions provided on the first surface portion and four corner connector portions provided on the second surface portion. And each of the corners of the first surface portion and the second surface portion is provided with a rail engaging slot, and the rail engaging slot of the first surface portion and the second surface portion is provided. A corner connector portion having an axis perpendicular to a plane, each slot having a dimension adapted to the span rail and adapted to engage one of the span rails; ) A plurality of panel engaging portions which are provided in aligned positions on each of the span rails, have a uniform size, and have contact portions which engage with the respective panels, and which receive a plurality of panels. To hold Forming a plurality of parallel slots in the rear, the length of the span rail,
A flat panel carrier having a particular number of panel engaging portions, and thus panel engaging portions selected to fit a particular number of slots. 30. A flat panel carrier comprising: a) a first corner, a second corner, a third corner and a fourth corner.
At least four rail portions arranged in a quadrangular shape having four corners, each having opposite ends, and two rails each provided at each corner and connected to the four rail portions. 4 with engaging member
A first face portion having two connector portions; b) a first corner, a second corner, a third corner and a fourth corner.
At least four rail portions arranged in a quadrangular shape having four corners, each having opposite ends, and two rails each provided at each corner and connected to the four rail portions. 4 with engaging member
A second surface portion that has two connector portions and is parallel to and opposite to the first surface portion; and c) at the first and second corners of the first surface portion to the first surface portion. Connected and said second
A third surface portion connected to the second surface portion at a first corner and a second corner of the first surface portion, and a first surface portion at a third corner and a fourth corner of the first surface portion. A fourth surface portion that is connected to the second surface portion and that is connected to the second surface portion at a third corner and a fourth corner of the second surface portion, and that is parallel to and opposed to the third surface portion. D) a plurality of aligned panel engaging portions forming two parallel rows extending along the third surface and two parallel rows extending along the fourth surface. Form,
A rail having a first dimension and a second dimension, comprising a plurality of aligned panel engaging portions, forming a plurality of slots for receiving a panel and holding a plurality of panels, A flat panel carrier having a plurality of panel engaging portions which can be selected to fit the dimensions of the carrier for a particular size panel. 31. A method for assembling a flat panel carrier of a specific size having a specific number of panel slots, comprising the steps of: a) maintaining an inventory of connector parts; and b) engaging the connector parts. A step of maintaining an inventory of rails having a structure to be connected thereto, a step of maintaining an inventory of panel engaging portions that can be assembled with the rails, and a step of attaching a connector portion for assembling with a connector portion. Taking the dimensions of the rails selected from stock, and e) obtaining from stock the required number of flat panel engagements for a particular number of flat panel slots, and f) selecting. Assembling the vertical rail and the panel engaging part of the specified dimensions, and g) assembling the vertical rail and the horizontal rail with the connector part, and having a specific number of slots. Method of assembling a flat panel carrier having a phase, the forming of the carrier dimensions. 32. A method for assembling a wafer carrier of a particular size having a particular slot, comprising the steps of: a) maintaining an inventory of the connector portion; and b) engaging and being coupled to the connector portion. To maintain inventory of horizontal rails having such a structure, c) to maintain inventory of vertical columns that can be assembled with connector parts and have panel engaging parts, and d) connectors The appropriate size of the horizontal rails to be assembled with the parts from the stock, e) the suitable size of the vertical columns with the panel engaging parts from the stock, and f) the horizontal Assembling the rail and the vertical column with the connector part to form a flat panel carrier of a specific size. 33. A flat panel carrier, comprising: a) a first horizontal upper surface portion, b) a second lower horizontal surface portion, and c) two vertically disposed surface portions. A third surface portion in the up-down direction, which has a panel engaging portion facing inward of the row and extends between the first surface portion and the second surface portion, and d) is arranged in the up-down direction. A fourth surface portion in the up-down direction, which has panel engaging portions facing inward of at least two rows, extends between the first surface portion and the second surface portion, and opposes the third surface portion. And e) each of said panel engaging portions has a single contact point for engaging a panel, said contact point comprising a plurality of horizontal slots for receiving a plurality of flat panels. Forming a flat panel carrier.