JPH0864665A - Substrate container and transferring method for substrate - Google Patents

Abstract

PURPOSE: To obtain a container for containing a plurality of wafers at the time of storage or transfer in a manufacturing facility of semiconductor device in which the container is provided with a butter function for absorbing the impact being applied to a substrate at the time of storage or transfer. CONSTITUTION: An outer box 1 is made of a resin having mechanical strength sufficient for the external force being applied thereto at the time of storage or transfer. An inner box 2 to be fitted in the outer box 1 has a plurality of partition walls 24 arranged at a predetermined gap and bearing a substrate 3 fitted in the gap at the circumferential fringe part thereof. The inner box 2 is made of a soft resin exhibiting buffer function for absorbing the impact being applied to the substrate 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device manufacturing facility for a container for storing a plurality of wafers during storage and transportation, and in particular, it is possible to prevent damage to the wafers by absorbing impact applied from the outside. Substrate storage container.

Generally, a semiconductor device is manufactured continuously from the wafer processing step to the semiconductor device assembly in the same factory. However, as the production amount increases, the wafer processing step and the semiconductor device assembly step are different from each other. It is becoming divided into factories.

However, such division of labor of the manufacturing process requires the transfer of wafers between plants using an airplane or an automobile as a transfer means, and the transfer by an airplane or an automobile causes a great impact even if it is stored or stored in a dedicated container. Are often applied to the wafer.

As a result, when the wafer is housed in a container having no cushioning function, the wafer may be broken during the transportation due to an impact. Therefore, there is a demand for the development of a substrate storage container having a buffer function that absorbs a shock applied to a wafer during storage or transportation.

[0005]

2. Description of the Related Art FIG. 1 is a perspective view showing a substrate storage container to which the present invention is applied. The substrate storage container targeted by the present invention is a container for storing a wafer, a glass plate or the like (hereinafter abbreviated as a substrate) at the time of storage or transportation, and is attached to the outer box 1 as shown in the figure.
It is composed of an inner box 2 which is fitted into an outer box 1 so as to be detachable and which has a substrate supporting mechanism inside.

The outer box 1 is made of a resin having a sufficient mechanical strength against the force applied from the outside when the substrate 3 is stored or transported, and the inner box 2 is fitted at least inside the opposing side plates 11. It is provided with a plurality of ridges 12 which are fitted and guided in the grooves of the inner box 2 when inserted.

On the other hand, in the inner box 2 which is installed in the outer box 1 and can be attached / detached, at least the longitudinal side plates 21 facing each other are bent in a bellows shape, and when the outer box 1 is attached to the outer box 1, Ridge
12 are configured to fit in the grooves 22 on the outside of the side plate 21 that are bent in a bellows shape.

When the inner box 2 is attached to the outer box 1, a plurality of partition walls 24 are formed inside the inner box 12 with gaps 23 into which the substrate 3 is inserted and arranged. The ridge 12 formed on the side plate 11 is reinforced by being fitted into the groove 22 opening to the outside of the side plate 21.

That is, a plurality of substrates 3 inserted into the gap 23 one by one during storage or transportation are supported by the partition wall 24 so as not to contact each other, and external force is applied by the outer case 1 made of resin having sufficient mechanical strength. The substrate 3 is protected from being damaged even when a voltage is applied.

In the conventional substrate storage container, the inner box 2 which is housed in the outer box 1 is made of polyvinyl chloride which has a relatively low dust generation property, and a gap 23 sandwiched by partition walls 24.
Provides a sufficient margin for the thickness of the substrate 3 so as not to damage the substrate 3 during insertion.

[0011]

However, in the conventional substrate storage container, since the gap has a sufficient margin with respect to the thickness of the substrate, when the substrate moves in the gap during transfer and an impact is applied. There was a problem that the substrate was damaged by colliding with an inner box made of polyvinyl chloride having no buffer function.

An object of the present invention is to provide a substrate storage container having a cushioning function for absorbing a shock applied to a substrate during storage or transportation.

[0013]

The above-mentioned problem is a container which comprises an outer box and an inner box which is housed in the outer box and which accommodates a plurality of substrates during storage or transportation. The outer box is applied from the outside. The inner box is formed of a resin having sufficient mechanical strength against a force, and the inner box is provided with a plurality of partition walls arranged at least through a predetermined gap and supporting the peripheral edge portion of the substrate fitted in the gap. This is achieved by the substrate storage container of the present invention formed of a flexible resin having a cushioning function of absorbing a shock applied to the substrate.

[0014]

The outer box is made of a resin having a sufficient mechanical strength against the external force applied during the storage or transportation of the substrate, and the inner box is provided with a plurality of partition walls for supporting the substrate inserted in the gap. By forming the box using a flexible resin that has a cushioning function, it is possible to scratch the board during insertion without giving a sufficient margin to the thickness of the board in the gap sandwiched by the partition walls. There is no. As a result, it is possible to reduce an accident in which the substrate moves between the partition walls when the shock is applied and collides with the partition walls to be damaged.

Further, since the inner box having the partition wall is formed of a flexible resin having a cushioning function, it is absorbed by the inner box even when a shock is applied, and is applied like a conventional substrate storage container. The board that is inserted into the gap and sandwiched between the partition walls by the impact is not damaged.

That is, it is possible to realize a substrate container having a cushioning function for absorbing a shock applied to a substrate during storage or transportation.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In FIG. 1, a substrate container according to the present invention is used as a cushioning material having a cushioning function for absorbing an impact applied to a substrate 3 in an inner box 2, for example, a cushioning material excellent in dust generation. It is made of silicone rubber, polyurethane, soft polyethylene or the like.

Unlike the conventional inner box made of polyvinyl chloride, in the case of the inner box 2 of the present invention which is made of a flexible resin having a cushioning function, the inner boxes 2 are arranged through a predetermined gap 23, and the gaps 23 are arranged one by one. A plurality of partition walls 24 for supporting the board 3 inserted in the
It is difficult to maintain the dimensional accuracy of.

However, by inserting the ridges 12 formed on the outer case 1 into the grooves 22 that open to the outside of the side plate 21, the partition wall 24 is reinforced and the accuracy in forming the outer case 1 is increased. As a result, the dimensional accuracy of the inner box 2 made of a flexible resin can be maintained.

As described above, the outer box is made of a resin having a sufficient mechanical strength against the external force applied during the storage or transportation of the substrate, and a plurality of partition walls for supporting the substrate fitted in the gap are provided. By forming the inner box using a flexible resin with a cushioning function, the board is scratched during insertion without giving a sufficient margin to the thickness of the board in the gap sandwiched by the partition walls There is no such thing. As a result, it is possible to reduce an accident in which the substrate moves between the partition walls when the shock is applied and collides with the partition walls to be damaged.

Further, since the inner box having the partition wall is made of a flexible resin having a cushioning function, it is absorbed by the inner box even when a shock is applied, and is applied like a conventional substrate storage container. The board that is inserted into the gap and sandwiched between the partition walls by the impact is not damaged.

That is, it is possible to realize a substrate container having a cushioning function for absorbing a shock applied to a substrate during storage or transportation.

[0023]

As described above, according to the present invention, it is possible to provide a substrate storage container having a cushioning function for absorbing a shock applied to a substrate during storage or transportation.

[Brief description of drawings]

FIG. 1 is a perspective view showing a substrate storage container targeted by the present invention.

[Explanation of symbols]

 1 Outer box 2 Inner box 3 Substrate 11 Side plate 12 Convex strip 21 Side plate 22 Groove 23 Gap 24 Partition wall

Claims (2)

[Claims] 1. A container, which comprises an outer box and an inner box that is internally mounted in the outer box, and stores a plurality of substrates during storage or transportation, the outer box against a force applied from the outside. The substrate is formed of a resin having sufficient mechanical strength, and the inner box includes a plurality of partition walls arranged at least through a predetermined gap and supporting the peripheral edge of the substrate fitted in the gap. A substrate storage container formed of a flexible resin having a cushioning function of absorbing a shock applied to the substrate storage container. 2. A substrate transfer method for storing and transferring a plurality of substrates in the substrate storage container according to claim 1.