JP3540390B2 - Storage case for mask protection device - Google Patents

Description

[0001]
[Industrial applications]
The present invention relates to a case for accommodating a mask protection device used for the purpose of preventing dust and the like from adhering to a mask or a reticle (hereinafter, referred to as a “mask”). The present invention relates to a storage case for a mask protection device including an upper lid and clips for fixing the upper lid to a case body at four corners.
[0002]
[Prior art]
In a photolithography process in an integrated circuit manufacturing process, when dust or the like adheres to a mask, it is projected on a semiconductor wafer and tends to be a defective product. In order to solve this problem and prevent foreign substances from adhering to the mask, a transparent thin film is stretched on one side of the frame having a size surrounding the mask pattern, and the other end face is made of an adhesive tape or the like on the mask. A mask protection device has been provided in which a mask is adhered by an adhesive means so as to cover the mask with a certain interval with a thin film.
[0003]
Such a mask protection device is usually stored in a storage case and transported so that dust and the like do not adhere until it is shipped and used.
FIG. 1 shows a storage case of this type which has been conventionally used. A case body 3 in which a base 2 on which a mask protection device 1 is positioned and mounted is formed in a central portion in a protruding shape, and a case body is provided on the case body. The upper cover 5 is provided with a pressing portion 4 formed thereon for holding the peripheral edge of the frame of the mask protection device. When the upper cover 5 is fixed to the case main body 3, a clip 6 as shown in FIG. As shown in FIG. 3, these were fitted and attached to the four corners of the case body 3 and the upper lid 5 covering the case body 3, respectively. In the figure, reference numeral 7 denotes a stopper which is pushed in by the clip and is prevented from coming off by the rib 8 on the periphery of the lid.
[0004]
[Problems to be solved by the invention]
When storing or transporting the case, the case in which the mask protection device is stored is usually in a state in which a convex portion 9 formed in a stepped shape on the upper lid 5 is fitted into a concave portion 10 formed by the base 2 as shown in FIG. However, if the number of steps increases, the lower lid 5 may bend due to its own weight and come into contact with the thin film of the mask protection device to be stored.
[0005]
The present invention provides a storage case for a mask protection device that can be stacked at a certain interval so that the upper lid does not bend due to its own weight and does not contact the mask protection device even when stacked in multiple stages. With the goal.
[0006]
[Means for solving the problem]
Therefore, the storage case of the present invention has a rectangular case main body on which the mask protection device is positioned and mounted, and a rectangular upper lid formed with a pressing portion that is mounted over the case main body and presses the peripheral edge of the frame of the mask protection device. And in the storage case of the mask protection device having a trapezoidal clip which is inserted into the upper lid and the case main body which are attached to the case main body at the four corners and connects the two, is stacked on at least one of the upper and lower sides of the clip A spacer forming a ridge for forming a gap between the storage cases.
[0007]
It is also desirable that the spacers be provided above and below the clips so that when the storage cases are stacked, the upper and lower spacers engage to prevent displacement. As such a thing, a ridge formed in a C shape along the oblique side of the clip is a preferred example.
[0008]
[Action]
When the upper lid is mounted on the case body and the storage cases fixed by clips at the four corners are stacked, the spacers keep the storage cases at a constant interval and do not directly contact the storage cases. Moreover, since the spacer is provided at a relatively rigid corner of the storage case, deformation of the storage case due to weight from above is less likely to occur.
[0009]
Also by that the spacer ribs, increased stability when stacked plastic case, if the pair formed along each oblique side of the clip, stability is further improved. In addition, if the ridges formed along each hypotenuse of the clip are provided above and below the clip, the ridges of the clips at the four corners can be fitted to the ridges of the clip below the four corners. The displacement of the storage case overlapped with the above can be restricted to eliminate the displacement, or the displacement can be kept within a certain range. In this case, in order not to impair the fixing function of the clip, it is necessary to change the position of the ridge up and down so that the upper ridge engages the lower ridge from inside or outside. . In order to provide the ridge with the function of preventing displacement, one of the upper and lower ridges only needs to be shaped so as to be able to simply engage with the other ridge, so that the other has the function as a spacer. It is desirable that the height be lower than the ridge, and a short pin may be used instead of the ridge.
[0010]
【Example】
The clip 11 shown in FIGS. 4 to 6 is made of resin and has a trapezoidal shape as viewed from above and below, similar to the above-described clip 6, and is located on the upper side, inside the lower ridge 12 adjacent to the hypotenuse. High protruding ridges 13 are formed at each location, and a tapered protruding stopper 7 is formed downward on the short side, and a low protruding portion 15 is formed at a position facing the stopper 7. When fixing the case main body 3 shown in FIG. 1 and the upper lid 5 attached to the main body 3 as in the conventional example, the case 11 is pushed into the corner of the case main body 3 and the upper lid 5 from the long side of the clip 11. . Then, while the clip 11 is deformed, the stopper 7 rides over the rib 8 on the peripheral edge of the lid, fits inside the rib 8 to prevent it from falling off, and the projection 15 is pressed against the case body 3 from below to be stopped. It has become.
[0011]
FIG. 7 shows the clips when the storage cases A are stacked, and the clips 11 are supported on the lower clips by the projections 13 hitting the lower clips 11, whereby the storage cases A are removed. It is designed to be supported at regular intervals. The fitting of the ridge 13 between the ridges 12 prevents the storage case A from being displaced.
[0012]
According to the present embodiment, when the storage case A in which the case body and the upper lid are stopped by the clips is stacked, the clips 11 at the four corners are supported on the clips on the lower side with the positional shift prevented. That is, the storage cases A can be supported at regular intervals without contacting each other and without causing a positional shift.
Moreover, the weight from above acts on the clip, and the clip is attached to the corner of the storage case, which is relatively rigid due to the overlap of the case body and the top lid and is strong by the rib 8, so that the clip is stored by the weight from above. Does not deform the case.
[0013]
【The invention's effect】
The present invention is configured as described above, and has the following effects.
According to the storage case according to the first aspect, when stacked, the spacers keep a fixed distance between the storage cases so that the storage cases do not directly contact each other, and the weight of the storage case from above acts on the clip portion. Therefore, there is no possibility that the upper lid will bend and come into contact with the mask protection device.
[0014]
The storage case, since it is supported linearized by ridges, to increase the stability of the time a stack of storage case. As in claim 2, wherein the storage case, by providing a pair along the ridges to each hypotenuse of the clip, stability is further improved. As in the case of the storage case according to claim 3 , when the interval between the ridges of the clips is changed vertically, the upper and lower protrusions of the stacked storage cases are engaged from the inside or the outside, thereby displacing the position of the storage case. Thus, the storage cases can be stacked without being tilted or twisted.
[0015]
As in the case of the storage case according to the fourth aspect, it is possible to provide the function of preventing displacement by simply lowering one of the upper and lower ridges or using a short pin, and requires processing accuracy in the height direction. Disappears.
[Brief description of the drawings]
FIG. 1 is a front view when storage cases are stacked.
FIG. 2 is a perspective view of a conventional clip.
FIG. 3 is a plan view of a storage case in which a case body and an upper lid are clipped.
FIG. 4 is a plan view of the clip according to the present invention.
FIG. 5 is a sectional view taken along line AA of FIG. 4;
FIG. 6 is a perspective view of the clip.
FIG. 7 is a front view of the clips when the storage cases are stacked.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Mask protection device 3 ... Case main body 5 ... Upper lid 7 ... Stopper 8 ... Rib 11 ... Clip 12, 13 ... Protrusion 15 ... Protrusion

Claims (4)

A rectangular case body on which the mask protection device is positioned and mounted, a rectangular upper lid that is mounted over the case body and has a holding part that presses the peripheral edge of the mask protection device, and mounted on the case body at four corners In the storage case of the mask protection device provided with a trapezoidal clip which is inserted into the upper lid and the case body to be connected to each other, a gap is formed between the storage cases stacked on at least one of the upper and lower sides of the clip. A storage case for a mask protection device, characterized in that a spacer forming a ridge for protruding is provided . Storage case of the mask protective device of the ridges is claim 1, wherein the pair formed along the hypotenuse of the clip. 3. The storage case for a mask protection device according to claim 2 , wherein the ridges are formed above and below the clip with different intervals between the ridges. 4. The storage case for a mask protection device according to claim 3 , wherein one of the upper and lower ridges is formed to be low or a short pin is formed.

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