KR100949600B1 - 전극이 장착된 투명 기판, 상기 기판을 사용하는 방법 및 상기 기판을 포함하는 태양 전지 - Google Patents
전극이 장착된 투명 기판, 상기 기판을 사용하는 방법 및 상기 기판을 포함하는 태양 전지 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 85
- 238000000034 method Methods 0.000 title claims description 12
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 41
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000011733 molybdenum Substances 0.000 claims abstract description 36
- 239000011521 glass Substances 0.000 claims abstract description 32
- 239000002994 raw material Substances 0.000 claims abstract description 16
- 230000004888 barrier function Effects 0.000 claims description 41
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 34
- 229910052751 metal Inorganic materials 0.000 claims description 28
- 239000002184 metal Substances 0.000 claims description 28
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 25
- 150000004767 nitrides Chemical class 0.000 claims description 18
- 229910052757 nitrogen Inorganic materials 0.000 claims description 17
- 238000000576 coating method Methods 0.000 claims description 16
- 239000011248 coating agent Substances 0.000 claims description 13
- 230000000153 supplemental effect Effects 0.000 claims description 13
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 10
- 239000003989 dielectric material Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 230000004044 response Effects 0.000 claims description 6
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- 229910052783 alkali metal Inorganic materials 0.000 claims description 3
- 150000001340 alkali metals Chemical class 0.000 claims description 3
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 3
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical compound [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052951 chalcopyrite Inorganic materials 0.000 claims description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 2
- 229910052735 hafnium Inorganic materials 0.000 claims description 2
- 229910001120 nichrome Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 154
- 238000012360 testing method Methods 0.000 description 15
- 239000011669 selenium Substances 0.000 description 11
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 10
- 229910052711 selenium Inorganic materials 0.000 description 10
- 230000007547 defect Effects 0.000 description 9
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 238000001000 micrograph Methods 0.000 description 7
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 239000011593 sulfur Substances 0.000 description 6
- 229910052717 sulfur Inorganic materials 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 229910000906 Bronze Inorganic materials 0.000 description 4
- 239000010974 bronze Substances 0.000 description 4
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000002542 deteriorative effect Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- AZUYLZMQTIKGSC-UHFFFAOYSA-N 1-[6-[4-(5-chloro-6-methyl-1H-indazol-4-yl)-5-methyl-3-(1-methylindazol-5-yl)pyrazol-1-yl]-2-azaspiro[3.3]heptan-2-yl]prop-2-en-1-one Chemical compound ClC=1C(=C2C=NNC2=CC=1C)C=1C(=NN(C=1C)C1CC2(CN(C2)C(C=C)=O)C1)C=1C=C2C=NN(C2=CC=1)C AZUYLZMQTIKGSC-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- MUTDXQJNNJYAEG-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]-3-(dimethylamino)pyrazol-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C=1C(=NN(C=1)CC(=O)N1CC2=C(CC1)NN=N2)N(C)C MUTDXQJNNJYAEG-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910016001 MoSe Inorganic materials 0.000 description 1
- 238000006124 Pilkington process Methods 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
Description
예 | R/□(1) | R/□(2) | 결함 | R/□(3) |
예 1 Si3N4/Mo | 0.37 | 0.37 | 없음 | 0 내지 5% |
예 1a Si3N4/Mo | 0.98 | 0.96 | 없음 | 0. 내지 3% |
예 2 Si3N4/Ag/Mo | 0.42 | 0.42 | 없음 | - 17% |
예 3 Si3N4/Al/Mo | 0.36 | 0.34 | 없음 | - |
예 4 Si3N4/Cu/TiN/Mo | 0.45 | 0.45 | 없음 | - 9% |
예 5 Si3N4/Cu/TiN/Mo | 0.44 | 0.44 | 없음 | - 10% |
예 6 Si3N4/Ag/TiN/Mo | 0.44 | 0.44 | 없음 | - 12% |
예 7 Si3N4/Al/TiN/Mo | 0.38 | 0.36 | 없음 | - |
예 | a* | b* | R/□ (ohm/스퀘어) |
예 8 | - 8.6 | 19.4 | 0.44 |
예 8a | - 9.2 | 1.5 | 0.38 |
예 8b | - 11.6 | - 3.6 | 0.35 |
예 | a* | b* | R/□ (ohm/스퀘어) |
예 9 | - 8.1 | 22.5 | 0.34 |
예 9a | - 10.6 | - 8.3 | 0.38 |
예 9b | - 14.0 | 5.5 | 0.35 |
예 | a* | b* | R/□ (ohm/스퀘어) |
예 10 | - 14 | - 0.5 | 0.29 |
예 10a | - 10.6 | - 9.2 | 0.37 |
예 10b | - 17.6 | - 0.9 | 0.42 |
예 | a* | b* | R/□ (ohm/스퀘어) |
예 11 | 0.3 | - 7.6 | 0.34 |
예 11a | 2.8 | - 10.3 | 0.33 |
예 11b | 8.8 | - 14.2 | 0.28 |
예 | a* | b* | R/□ (ohm/스퀘어) |
예 12 | - 4.1 | - 6.3 | 0.28 |
Claims (48)
- 투명 기판으로서,몰리브덴(Mo)을 원료로 하며, 두께가 20nm 이상이고 500nm 이하인 전도층을 포함한 태양전지용 전극을 구비하고,상기 기판과 상기 전극 사이에 삽입되는 장벽층을 구비하며, 상기 장벽층은 화합물, 즉 규소 질화물 또는 옥시질화물, 알루미늄 질화물 또는 옥시질화물, 규소 산화물 또는 옥시질화물 중 적어도 하나로부터 선택된 유전체 물질을 원료로 하고, 상기 장벽층은 굴절률이 서로 다른 적어도 두 개의 유전체 물질 층으로 구성된 광학적인 목적의 다층 코팅 부분을 형성하는 것을 특징으로 하는, 투명 기판.
- 삭제
- 삭제
- 삭제
- 제 1항에 있어서, 상기 장벽층의 두께는 두께가 20nm 이상이고 250nm 이하인 것을 특징으로 하는, 투명 기판.
- 제 1항에 있어서, 상기 전극은 몰리브덴을 원료로 한 상기 층과는 다른 보충 전도층을 포함하는 것을 특징으로 하는, 투명 기판.
- 제 6항에 있어서, 상기 보충 전도층, 또는 두 개가 있을 경우 이들 중 하나의 전도층의 두께는 10nm 이상이고 300nm 이하인 것을 특징으로 하는, 투명 기판.
- 제 6항에 있어서, 상기 전극은 Cu, Ag, Al, Ta, Ni, Cr, NiCr, 강철의 금속 또는 합금 중 하나로부터 선택된 금속 또는 금속 합금을 원료로 한 적어도 하나의 보충 전도층(M)을 포함하는 것을 특징으로 하는, 투명 기판.
- 제 6항에 있어서, 상기 전극은 상기 몰리브덴을 원료로 한 전도층(Mo) 밑에 금속 또는 금속 합금을 원료로 한 보충 전도층(M)을 포함하는 것을 특징으로 하는, 투명 기판.
- 제 9항에 있어서, 상기 전극은 Ta, Zr, Nb, Ti, Mo, Hf와 같은 금속 중 적어도 하나의 금속의 질화물을 원료로 한 보충 전도층(M'N)을 포함하고, 상기 질화물은 질소에 대해 부화학량론적(substoichiometric), 화학량론적(stoichiometric) 또는 초화학량론적(superstoichiometric)인 것을 특징으로 하는, 투명 기판.
- 제 10항에 있어서, 상기 질화물을 원료로 한 보충 전도층(M'N)은 상기 몰리브덴을 원료로 한 전도층(Mo) 아래 또는 위에 있는 것을 특징으로 하는, 투명 기판.
- 제 10항에 있어서, 상기 질화물을 원료로 한 보충 전도층(M'N)은 상기 금속을 원료로 한 보충 전도층(M)과 상기 몰리브덴을 원료로 한 전도층(Mo) 사이에 위치하는 것을 특징으로 하는, 투명 기판.
- 제 10항에 있어서, 상기 전극은 다음 순서의 층, 즉 M/Mo/M'N, M/M'N/Mo, M/Mo, M'N/Mo, Mo/M'N 중 하나를 포함하는 것을 특징으로 하는, 투명 기판.
- 제 1항에 있어서, 상기 전극의 상기 전도층 두께의 전체 합은 20nm 이상이고 600nm 이하인 것을 특징으로 하는, 투명 기판.
- 제 1항에 있어서, 상기 전극의 스퀘어 당 저항 (R/□)은 0.28Ω/□ 이상이고 2Ω/□ 이하인 것을 특징으로 하는, 투명 기판.
- 삭제
- 제 1항에 있어서, 1.9 내지 2.3의 굴절률이 높은 층과, 1.4 내지 1.7의 굴절률이 낮은 층이 교대로 되어 있는 것을 포함하는 것을 특징으로 하는, 투명 기판.
- 제 1항 또는 제 17항에 있어서, 상기 광학 코팅의 조성물은 반사시 상기 기판의 비색 반응(colorimetric response)을 부분 또는 전체적으로 조절하는 것을 특징으로 하는, 투명 기판.
- 제 10항에 있어서, 상기 질화물 층(M'N)의 상기 질소 화학량론(nitrogen stoichiometry)은 반사시 상기 기판의 비색 반응을 부분 또는 전체적으로 조절하는 것을 특징으로 하는, 투명 기판.
- 제 1항에 있어서, 가시 광선을 흡수하고, 두께가 2 내지 15nm인 박층은 상기 장벽층과 상기 전극 사이에 삽입되어, 반사시 상기 기판의 비색 반응을 부분 또는 전체적으로 조절하는 것을 특징으로 하는, 투명 기판.
- 제 1항에 있어서, 상기 전극 상부에 흡수성 황동광(chalcopyrite) 층을 포함하는 것을 특징으로 하는, 투명 기판.
- 태양전지 전극으로서 투명 기판을 사용하는 방법으로서,투명 기판을 제공하는 단계로서, 상기 투명 기판은, 몰리브덴(Mo)을 원료로 하며, 두께가 20nm 이상이고 500nm 이하인 전도층을 포함한 전극과, 상기 기판과 상기 전극 사이에 삽입되는 장벽층을 구비하며, 상기 장벽층은 화합물, 즉 규소 질화물 또는 옥시질화물, 알루미늄 질화물 또는 옥시질화물, 규소 산화물 또는 옥시질화물 중 적어도 하나로부터 선택된 유전체 물질을 원료로 하고, 상기 장벽층은 굴절률이 서로 다른 적어도 두 개의 유전체 물질 층으로 구성된 광학적인 목적의 다층 코팅 부분을 형성하는, 투명 기판을 제공하는 단계를포함하는 것을 특징으로 하는, 태양전지 전극으로서 투명 기판을 사용하는 방법.
- 태양 전지를 제조하기 위해 투명 기판을 사용하는 방법으로서,투명 기판을 제공하는 단계로서, 상기 투명 기판은, 몰리브덴(Mo)을 원료로 하며, 두께가 20nm 이상이고 500nm 이하인 전도층을 포함한 전극과, 상기 기판과 상기 전극 사이에 삽입되는 장벽층을 구비하며, 상기 장벽층은 화합물, 즉 규소 질화물 또는 옥시질화물, 알루미늄 질화물 또는 옥시질화물, 규소 산화물 또는 옥시질화물 중 적어도 하나로부터 선택된 유전체 물질을 원료로 하고, 상기 장벽층은 굴절률이 서로 다른 적어도 두 개의 유전체 물질 층으로 구성된 광학적인 목적의 다층 코팅 부분을 형성하는, 투명 기판을 제공하는 단계를포함하는 것을 특징으로 하는, 태양 전지를 제조하기 위해 투명 기판을 사용하는 방법.
- 태양전지로서,투명 기판으로서, 상기 투명 기판은, 몰리브덴(Mo)을 원료로 하며, 두께가 20nm 이상이고 500nm 이하인 전도층을 포함한 전극과, 상기 기판과 상기 전극 사이에 삽입되는 장벽층을 구비하며, 상기 장벽층은 화합물, 즉 규소 질화물 또는 옥시질화물, 알루미늄 질화물 또는 옥시질화물, 규소 산화물 또는 옥시질화물 중 적어도 하나로부터 선택된 유전체 물질을 원료로 하고, 상기 장벽층은 굴절률이 서로 다른 적어도 두 개의 유전체 물질 층으로 구성된 광학적인 목적의 다층 코팅 부분을 형성하는, 투명 기판을포함하는 것을 특징으로 하는, 태양전지.
- 제 1항에 있어서, 유리로 제조되는 것을 특징으로 하는, 투명 기판.
- 제 1항에 있어서, 상기 전도층의 두께는 50 nm 이상이고 400nm 이하인 것을 특징으로 하는, 투명 기판.
- 삭제
- 제 1항에 있어서, 상기 장벽층은 알칼리 금속에 대한 장벽으로 작용하는 것을 특징으로 하는, 투명 기판.
- 제 5항에 있어서, 상기 장벽층의 두께는 100nm 이상이고 300nm 이하인 것을 특징으로 하는, 투명 기판.
- 삭제
- 제 7항에 있어서, 상기 보충 전도층, 또는 두 개가 있을 경우 이들 중 하나의 전도층의 두께는 40nm 이상이고 300nm 이하인 것을 특징으로 하는, 투명 기판.
- 제 7항에 있어서, 상기 보충 전도층, 또는 두 개가 있을 경우 이들 중 하나의 전도층의 두께는 50 내지 200nm인 것을 특징으로 하는, 투명 기판.
- 제 10항에 있어서, 상기 층(M'N)은 상기 몰리브덴을 원료로 한 층(Mo) 아래 및 위에 있는 것을 특징으로 하는, 투명 기판.
- 제 14항에 있어서, 상기 전극의 상기 전도층 두께의 전체 합은 20nm 이상이고 500nm 이하인 것을 특징으로 하는, 투명 기판.
- 제 15항에 있어서, 상기 전극의 스퀘어 당 저항 (R/□)은 0.28Ω/□ 이상이고 1Ω/□이하인 것을 특징으로 하는, 투명 기판.
- 제 15항에 있어서, 상기 전극의 스퀘어 당 저항 (R/□)은 0.28Ω/□ 이상이고 0.50Ω/□이하인 것을 특징으로 하는, 투명 기판.
- 제 17항에 있어서, Si3N4/SiO2 또는 Si3N4/SiO2/Si3N4 순서를 포함하는 것을 특징으로 하는, 투명 기판.
- 제 18항에 있어서, 상기 비색 반응은 a*와 b* 값이 음인 청록색으로, 또는 a* 값이 양이고 b* 값이 음인 분홍색으로 조절되는 것을 특징으로 하는, 투명 기판.
- 제 19항에 있어서, 상기 비색 반응은 a*와 b* 값이 음인 청록색으로, 또는 a* 값이 양이고 b* 값이 음인 분홍색으로 조절되는 것을 특징으로 하는, 투명 기판.
- 제 20항에 있어서, 상기 박층은 TiN으로 제조되는 것을 특징으로 하는, 투명 기판.
- 제 20항에 있어서, 상기 비색 반응은 a*와 b* 값이 음인 청록색으로, 또는 a* 값이 양이고 b* 값이 음인 분홍색으로 조절되는 것을 특징으로 하는, 투명 기판.
- 제 1항에 있어서, 상기 장벽층의 두께는 두께가 20nm 이상이고 200nm 이하인 것을 특징으로 하는, 투명 기판.
- 제 1항에 있어서, 상기 전도층의 두께는 50nm 이상이고 300nm 이하인 것을 특징으로 하는, 투명 기판.
- 제 1항에 있어서, 상기 전도층의 두께는 50nm 이상이고 200nm 이하인 것을 특징으로 하는, 투명 기판.
- 제 1항에 있어서, 상기 전도층의 두께는 80nm 이상이고 400nm 이하인 것을 특징으로 하는, 투명 기판.
- 제 1항에 있어서, 상기 전도층의 두께는 80nm 이상이고 300nm 이하인 것을 특징으로 하는, 투명 기판.
- 제 1항에 있어서, 상기 전도층의 두께는 80nm 이상이고 200nm 이하인 것을 특징으로 하는, 투명 기판.
- 제 15항에 있어서, 상기 전극의 스퀘어 당 저항 (R/□)은 0.28Ω/□ 이상이고 0.45Ω/□이하인 것을 특징으로 하는, 투명 기판.
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PCT/FR2002/000274 WO2002065554A1 (fr) | 2001-01-31 | 2002-01-23 | Sustrat transparent muni d'une electrode |
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