KR100890295B1 - 애블레이션을 위한 방법 및 장치 - Google Patents

애블레이션을 위한 방법 및 장치 Download PDF

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Publication number
KR100890295B1
KR100890295B1 KR1020067026294A KR20067026294A KR100890295B1 KR 100890295 B1 KR100890295 B1 KR 100890295B1 KR 1020067026294 A KR1020067026294 A KR 1020067026294A KR 20067026294 A KR20067026294 A KR 20067026294A KR 100890295 B1 KR100890295 B1 KR 100890295B1
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KR
South Korea
Prior art keywords
area
dem
debris
substrate
ablation
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Expired - Fee Related
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KR1020067026294A
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English (en)
Korean (ko)
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KR20070039493A (ko
Inventor
네일 사이키스
요시나리 사사키
히데히사 무라세
나오키 야마다
코세이 아소
Original Assignee
엑사이텍 리미티드
소니 가부시끼 가이샤
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Publication of KR20070039493A publication Critical patent/KR20070039493A/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
KR1020067026294A 2004-06-11 2005-06-13 애블레이션을 위한 방법 및 장치 Expired - Fee Related KR100890295B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0413029.0 2004-06-11
GB0413029A GB2414954B (en) 2004-06-11 2004-06-11 Process and apparatus for ablation
PCT/GB2005/002326 WO2005120763A2 (en) 2004-06-11 2005-06-13 Process and apparatus for ablation

Publications (2)

Publication Number Publication Date
KR20070039493A KR20070039493A (ko) 2007-04-12
KR100890295B1 true KR100890295B1 (ko) 2009-03-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067026294A Expired - Fee Related KR100890295B1 (ko) 2004-06-11 2005-06-13 애블레이션을 위한 방법 및 장치

Country Status (6)

Country Link
US (2) US8344285B2 (enExample)
JP (2) JP2008501531A (enExample)
KR (1) KR100890295B1 (enExample)
CN (1) CN101018639B (enExample)
GB (1) GB2414954B (enExample)
WO (1) WO2005120763A2 (enExample)

Cited By (2)

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KR101256430B1 (ko) * 2011-03-15 2013-04-18 삼성에스디아이 주식회사 레이저 용접 장치
WO2017135552A1 (ko) * 2016-02-02 2017-08-10 학교법인 한동대학교 표면개질용 빔균질기

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JP5094535B2 (ja) * 2008-05-07 2012-12-12 富士フイルム株式会社 凹部形成方法、凹凸製品の製造方法、発光素子の製造方法および光学素子の製造方法
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JP5501099B2 (ja) * 2010-06-03 2014-05-21 株式会社ディスコ レーザ加工装置
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JP2015134364A (ja) * 2014-01-16 2015-07-27 株式会社デンソー レーザ加工装置およびレーザ加工方法
JP5663776B1 (ja) * 2014-03-27 2015-02-04 福井県 吸引方法及び吸引装置並びにレーザ加工方法及びレーザ加工装置
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WO2017135552A1 (ko) * 2016-02-02 2017-08-10 학교법인 한동대학교 표면개질용 빔균질기
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Also Published As

Publication number Publication date
US20130140287A1 (en) 2013-06-06
US8809732B2 (en) 2014-08-19
GB2414954B (en) 2008-02-06
WO2005120763A3 (en) 2006-02-23
JP2012254482A (ja) 2012-12-27
WO2005120763A2 (en) 2005-12-22
JP5389236B2 (ja) 2014-01-15
KR20070039493A (ko) 2007-04-12
GB2414954A (en) 2005-12-14
CN101018639B (zh) 2010-04-21
JP2008501531A (ja) 2008-01-24
CN101018639A (zh) 2007-08-15
US20080041832A1 (en) 2008-02-21
GB0413029D0 (en) 2004-07-14
US8344285B2 (en) 2013-01-01

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