KR100818003B1 - 에어 부상 유닛, 반송방법, 및 에어 부상 반송장치 - Google Patents

에어 부상 유닛, 반송방법, 및 에어 부상 반송장치 Download PDF

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Publication number
KR100818003B1
KR100818003B1 KR1020060010747A KR20060010747A KR100818003B1 KR 100818003 B1 KR100818003 B1 KR 100818003B1 KR 1020060010747 A KR1020060010747 A KR 1020060010747A KR 20060010747 A KR20060010747 A KR 20060010747A KR 100818003 B1 KR100818003 B1 KR 100818003B1
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KR
South Korea
Prior art keywords
air
floating
flat substrate
unit
air floating
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KR1020060010747A
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English (en)
Korean (ko)
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KR20060090585A (ko
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켄스케 스즈키
야스요시 키타자와
Original Assignee
신꼬오덴끼가부시끼가이샤
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Publication of KR20060090585A publication Critical patent/KR20060090585A/ko
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Publication of KR100818003B1 publication Critical patent/KR100818003B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
    • B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
    • B09B5/00—Operations not covered by a single other subclass or by a single other group in this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
    • B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
    • B09B3/00—Destroying solid waste or transforming solid waste into something useful or harmless
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12M—APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
    • C12M23/00—Constructional details, e.g. recesses, hinges
    • C12M23/02—Form or structure of the vessel
    • C12M23/06—Tubular
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00—Technologies for solid waste management
    • Y02W30/20—Waste processing or separation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00—Technologies for solid waste management
    • Y02W30/40—Bio-organic fraction processing; Production of fertilisers from the organic fraction of waste or refuse

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  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Organic Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Zoology (AREA)
  • Biomedical Technology (AREA)
  • Sustainable Development (AREA)
  • Microbiology (AREA)
  • Biochemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Genetics & Genomics (AREA)
  • Biotechnology (AREA)
  • Clinical Laboratory Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Coating Apparatus (AREA)
KR1020060010747A 2005-02-09 2006-02-03 에어 부상 유닛, 반송방법, 및 에어 부상 반송장치 KR100818003B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005033040A JP4501713B2 (ja) 2005-02-09 2005-02-09 エア浮上搬送装置
JPJP-P-2005-00033040 2005-02-09

Publications (2)

Publication Number Publication Date
KR20060090585A KR20060090585A (ko) 2006-08-14
KR100818003B1 true KR100818003B1 (ko) 2008-03-31

Family

ID=36918018

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060010747A KR100818003B1 (ko) 2005-02-09 2006-02-03 에어 부상 유닛, 반송방법, 및 에어 부상 반송장치

Country Status (4)

Country Link
JP (1) JP4501713B2 (zh)
KR (1) KR100818003B1 (zh)
CN (2) CN1817767A (zh)
TW (1) TWI294867B (zh)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4842746B2 (ja) * 2006-09-20 2011-12-21 オリンパス株式会社 基板搬送装置
JP2008130892A (ja) * 2006-11-22 2008-06-05 Shinko Electric Co Ltd エア浮上搬送装置、およびエア搬送方法
KR101470660B1 (ko) * 2006-11-22 2014-12-09 신포니아 테크놀로지 가부시키가이샤 에어 부상 반송장치 및 에어 반송방법
CN101200105B (zh) * 2006-12-17 2013-03-06 软控股份有限公司 轮胎成型机的气力输送装置及其方法
KR101463909B1 (ko) * 2007-05-31 2014-11-26 주식회사 케이씨텍 기판 부상패드 및 이를 이용한 대면적 기판 부상장치
JP5396695B2 (ja) * 2007-06-29 2014-01-22 株式会社Ｉｈｉ 浮上ユニット及び浮上搬送装置
JP5152477B2 (ja) * 2007-08-22 2013-02-27 Ｂｅｌｌｍａｔｉｃ株式会社 フィルム状物等の浮揚装置
WO2009113066A2 (en) 2008-03-11 2009-09-17 Coreflow Ltd. Method and system for locally controlling support of a flat object
CN102083720B (zh) * 2008-07-10 2016-03-02 翁令司工业股份有限公司 涡流形成体和非接触式运送装置
JP5170839B2 (ja) * 2008-07-31 2013-03-27 日本電気硝子株式会社 ガラス基板の搬送方法
JP2010036999A (ja) * 2008-07-31 2010-02-18 Nippon Electric Glass Co Ltd ガラス基板の搬送ユニット、及びガラス基板の搬送装置、並びにガラス基板の搬送方法
JP5406852B2 (ja) * 2008-11-18 2014-02-05 オイレス工業株式会社 非接触搬送装置
TWI465313B (zh) * 2009-04-07 2014-12-21 Kromax Internat Corp 非接觸式定位平臺與定位方法
JP2011219209A (ja) * 2010-04-07 2011-11-04 Ihi Corp 浮上搬送装置、方向転換装置、及び浮上ユニット
KR101259929B1 (ko) * 2010-06-24 2013-05-02 파나소닉 주식회사 부상 반송 방법 및 부상 반송 장치
KR101276064B1 (ko) * 2011-02-15 2013-06-17 박봉선 비접촉 평판 이송장치
JP5502788B2 (ja) * 2011-03-16 2014-05-28 東京エレクトロン株式会社 浮上式塗布装置
KR20140040724A (ko) * 2011-07-26 2014-04-03 오일레스고교 가부시키가이샤 비접촉 반송 장치
JP6076606B2 (ja) * 2012-02-14 2017-02-08 オイレス工業株式会社 浮上搬送装置および浮上搬送方法
JP6147521B2 (ja) * 2013-02-14 2017-06-14 オイレス工業株式会社 浮上搬送装置、搬送レール、および浮上搬送方法
JP2015020808A (ja) * 2013-07-16 2015-02-02 オイレス工業株式会社 非接触搬送装置及び非接触搬送方法
JP6368508B2 (ja) * 2014-03-17 2018-08-01 東レエンジニアリング株式会社 基材浮上装置
CN104150181B (zh) * 2014-07-24 2017-02-15 昆山龙腾光电有限公司 一种支撑座及支撑装置
CN104555348A (zh) * 2014-11-28 2015-04-29 祥鑫科技股份有限公司 气吹浮起式输料带
KR102510962B1 (ko) * 2016-08-22 2023-03-16 세메스 주식회사 기판 이송 장치 및 기판 이송 방법
CN108502543B (zh) 2017-02-28 2020-01-24 上海微电子装备（集团）股份有限公司 一种基板传输装置及方法
CN108657821A (zh) * 2018-05-03 2018-10-16 拓卡奔马机电科技有限公司 裁片气浮输送装置
CN115289786A (zh) * 2022-01-25 2022-11-04 无锡佰特尔工业设备有限公司 烘箱用90°/180°气浮转向器

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH098108A (ja) * 1995-06-22 1997-01-10 Nec Corp 半導体基板加熱ホルダ
JP2000100896A (ja) 1998-09-21 2000-04-07 Rohm Co Ltd ウェハ搬送装置およびウェハ搬送方法
KR20020016969A (ko) * 2000-08-28 2002-03-07 길형보 에어 플로팅 테이블의 원판 소재 이동장치
JP2002151571A (ja) 2000-11-15 2002-05-24 Fuji Photo Film Co Ltd 基板加熱エア浮上搬送装置及びそれを用いた基板搬送方法
JP2002151570A (ja) 2000-11-15 2002-05-24 Fuji Photo Film Co Ltd 基板搬送システム及びそれを用いた基板搬送方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3505256A1 (de) * 1985-02-15 1986-08-28 Otto Junker Gmbh, 5107 Simmerath Vorrichtung zum beruehrungsfreien fuehren von warenbahnen, insbesondere metallbaendern, mittels eines gasmediums
JPH06193746A (ja) * 1992-12-22 1994-07-15 Hitachi Ltd ゲートバルブ
JPH0891623A (ja) * 1994-09-28 1996-04-09 Fujitsu Ltd 基板搬送方法及び基板搬送装置
JP2001010724A (ja) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk 浮上搬送装置
JP4229670B2 (ja) * 2002-09-30 2009-02-25 株式会社日本設計工業 薄板状材の搬送方法及び装置
JP4183525B2 (ja) * 2003-02-14 2008-11-19 シーケーディ株式会社 薄板の搬送用支持装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH098108A (ja) * 1995-06-22 1997-01-10 Nec Corp 半導体基板加熱ホルダ
JP2000100896A (ja) 1998-09-21 2000-04-07 Rohm Co Ltd ウェハ搬送装置およびウェハ搬送方法
KR20020016969A (ko) * 2000-08-28 2002-03-07 길형보 에어 플로팅 테이블의 원판 소재 이동장치
JP2002151571A (ja) 2000-11-15 2002-05-24 Fuji Photo Film Co Ltd 基板加熱エア浮上搬送装置及びそれを用いた基板搬送方法
JP2002151570A (ja) 2000-11-15 2002-05-24 Fuji Photo Film Co Ltd 基板搬送システム及びそれを用いた基板搬送方法

Also Published As

Publication number Publication date
TWI294867B (en) 2008-03-21
JP4501713B2 (ja) 2010-07-14
KR20060090585A (ko) 2006-08-14
TW200642935A (en) 2006-12-16
CN101913501A (zh) 2010-12-15
CN1817767A (zh) 2006-08-16
JP2006222209A (ja) 2006-08-24

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