TW200642935A - Air-floating unit, transporting method, and air-floating type transporting apparatus - Google Patents

Air-floating unit, transporting method, and air-floating type transporting apparatus

Info

Publication number
TW200642935A
TW200642935A TW095103926A TW95103926A TW200642935A TW 200642935 A TW200642935 A TW 200642935A TW 095103926 A TW095103926 A TW 095103926A TW 95103926 A TW95103926 A TW 95103926A TW 200642935 A TW200642935 A TW 200642935A
Authority
TW
Taiwan
Prior art keywords
air
floating
base plate
transporting
planar base
Prior art date
Application number
TW095103926A
Other languages
Chinese (zh)
Other versions
TWI294867B (en
Inventor
Kensuke Suzuki
Yasuyoshi Kitazawa
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Publication of TW200642935A publication Critical patent/TW200642935A/en
Application granted granted Critical
Publication of TWI294867B publication Critical patent/TWI294867B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
    • B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
    • B09B5/00—Operations not covered by a single other subclass or by a single other group in this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B09—DISPOSAL OF SOLID WASTE; RECLAMATION OF CONTAMINATED SOIL
    • B09B—DISPOSAL OF SOLID WASTE NOT OTHERWISE PROVIDED FOR
    • B09B3/00—Destroying solid waste or transforming solid waste into something useful or harmless
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12M—APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
    • C12M23/00—Constructional details, e.g. recesses, hinges
    • C12M23/02—Form or structure of the vessel
    • C12M23/06—Tubular
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00—Technologies for solid waste management
    • Y02W30/20—Waste processing or separation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00—Technologies for solid waste management
    • Y02W30/40—Bio-organic fraction processing; Production of fertilisers from the organic fraction of waste or refuse

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Organic Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Zoology (AREA)
  • Biotechnology (AREA)
  • Sustainable Development (AREA)
  • Microbiology (AREA)
  • Clinical Laboratory Science (AREA)
  • Biochemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Genetics & Genomics (AREA)
  • Biomedical Technology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Coating Apparatus (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Advancing Webs (AREA)

Abstract

An air-floating-type transporting apparatus, including an air-floating unit which is disposed below a movement path of a planar base plate and jets air toward the planar base plate to float up the planar base plate being transported by a feeder, and including a mechanism for enlarging the height of floating of the planar base plate, the enlarging mechanism being provided at aportion of or an upstream side of the air-floating unit in the planar base plate transporting direction.
TW095103926A 2005-02-09 2006-02-06 Air-floating unit, transporting method, and air-floating-type transporting apparatus TWI294867B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005033040A JP4501713B2 (en) 2005-02-09 2005-02-09 Air levitation transfer device

Publications (2)

Publication Number Publication Date
TW200642935A true TW200642935A (en) 2006-12-16
TWI294867B TWI294867B (en) 2008-03-21

Family

ID=36918018

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095103926A TWI294867B (en) 2005-02-09 2006-02-06 Air-floating unit, transporting method, and air-floating-type transporting apparatus

Country Status (4)

Country Link
JP (1) JP4501713B2 (en)
KR (1) KR100818003B1 (en)
CN (2) CN101913501A (en)
TW (1) TWI294867B (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4842746B2 (en) * 2006-09-20 2011-12-21 オリンパス株式会社 Substrate transfer device
CN102267630B (en) * 2006-11-22 2013-12-25 翔风技术有限公司 Air floatation conveyance device and method of conveyance using air
JP2008130892A (en) * 2006-11-22 2008-06-05 Shinko Electric Co Ltd Air float carrying apparatus and air carrying method
CN101200105B (en) * 2006-12-17 2013-03-06 软控股份有限公司 Pneumatic conveying device of tyre forming machine and method thereof
KR101463909B1 (en) * 2007-05-31 2014-11-26 주식회사 케이씨텍 Substrate levitation pad and large area substrate levitation device using the same
JP5396695B2 (en) * 2007-06-29 2014-01-22 株式会社Ｉｈｉ Levitation unit and levitating transfer device
JP5152477B2 (en) * 2007-08-22 2013-02-27 Ｂｅｌｌｍａｔｉｃ株式会社 Flotation device for film-like materials
KR20100130991A (en) * 2008-03-11 2010-12-14 코아 플로우 리미티드 Method and system for locally controlling support of a flat object
WO2010004800A1 (en) * 2008-07-10 2010-01-14 オイレス工業株式会社 Swirl flow forming body and non-contact conveying device
JP2010036999A (en) * 2008-07-31 2010-02-18 Nippon Electric Glass Co Ltd Conveying unit for glass substrate, conveying device for glass substrate, and conveying method for glass substrate
JP5170839B2 (en) * 2008-07-31 2013-03-27 日本電気硝子株式会社 Glass substrate transfer method
KR101663257B1 (en) * 2008-11-18 2016-10-06 오일레스고교 가부시키가이샤 Non-contact conveying device
TWI465313B (en) * 2009-04-07 2014-12-21 Kromax Internat Corp Non-contact platform for locating a panel and method for the same
JP2011219209A (en) * 2010-04-07 2011-11-04 Ihi Corp Floating conveying device, direction changing device, and floating unit
KR101259929B1 (en) * 2010-06-24 2013-05-02 파나소닉 주식회사 A conveying method using floating conveyor and an apparatus for the method
KR101276064B1 (en) * 2011-02-15 2013-06-17 박봉선 Non-contact Plate Transferring Device
JP5502788B2 (en) * 2011-03-16 2014-05-28 東京エレクトロン株式会社 Floating coating device
CN103717517B (en) * 2011-07-26 2016-11-02 翁令司工业股份有限公司 Noncontact vehicle
JP6076606B2 (en) * 2012-02-14 2017-02-08 オイレス工業株式会社 Levitation conveyance device and levitation conveyance method
JP6147521B2 (en) * 2013-02-14 2017-06-14 オイレス工業株式会社 Levitation conveyance device, conveyance rail, and levitation conveyance method
JP2015020808A (en) * 2013-07-16 2015-02-02 オイレス工業株式会社 Non-contact conveyance apparatus, and non-contact conveyance method
JP6368508B2 (en) * 2014-03-17 2018-08-01 東レエンジニアリング株式会社 Substrate floating device
CN104150181B (en) * 2014-07-24 2017-02-15 昆山龙腾光电有限公司 Supporting seat and supporting device
CN104555348A (en) * 2014-11-28 2015-04-29 祥鑫科技股份有限公司 Air-blowing floatation conveying belt
KR102510962B1 (en) * 2016-08-22 2023-03-16 세메스 주식회사 Apparatus for transferring a substrate and Method for transferring a substrate
CN108502543B (en) * 2017-02-28 2020-01-24 上海微电子装备（集团）股份有限公司 Substrate transmission device and method
CN108657821A (en) * 2018-05-03 2018-10-16 拓卡奔马机电科技有限公司 Cut-parts air flotation conveying device
CN115289786A (en) * 2022-01-25 2022-11-04 无锡佰特尔工业设备有限公司 90/180 air-float steering gear for oven

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3505256C2 (en) * 1985-02-15 1987-01-29 Otto Junker Gmbh, 5107 Simmerath Device for the contact-free guiding of material webs, in particular metal strips, by means of a gas medium
JPH06193746A (en) * 1992-12-22 1994-07-15 Hitachi Ltd Gate valve
JPH0891623A (en) * 1994-09-28 1996-04-09 Fujitsu Ltd Method and device for carrying substrate
JP2647061B2 (en) * 1995-06-22 1997-08-27 日本電気株式会社 Semiconductor substrate heating holder
JP2000100896A (en) 1998-09-21 2000-04-07 Rohm Co Ltd Method and device for carrying wafer
JP2001010724A (en) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk Floating carrier device
KR20020016969A (en) * 2000-08-28 2002-03-07 길형보 Plate works moving device of air floating table
JP3834469B2 (en) 2000-11-15 2006-10-18 富士写真フイルム株式会社 Substrate transfer system and substrate transfer method using the same
JP3851077B2 (en) 2000-11-15 2006-11-29 富士写真フイルム株式会社 Substrate air levitation transfer device and substrate transfer method using the same
JP4229670B2 (en) * 2002-09-30 2009-02-25 株式会社日本設計工業 Method and apparatus for conveying thin plate material
JP4183525B2 (en) * 2003-02-14 2008-11-19 シーケーディ株式会社 Thin plate support device

Also Published As

Publication number Publication date
CN1817767A (en) 2006-08-16
CN101913501A (en) 2010-12-15
TWI294867B (en) 2008-03-21
JP2006222209A (en) 2006-08-24
KR100818003B1 (en) 2008-03-31
JP4501713B2 (en) 2010-07-14
KR20060090585A (en) 2006-08-14

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees