TW200630580A - Working-beam heat treatment apparatus - Google Patents
Working-beam heat treatment apparatusInfo
- Publication number
- TW200630580A TW200630580A TW094146139A TW94146139A TW200630580A TW 200630580 A TW200630580 A TW 200630580A TW 094146139 A TW094146139 A TW 094146139A TW 94146139 A TW94146139 A TW 94146139A TW 200630580 A TW200630580 A TW 200630580A
- Authority
- TW
- Taiwan
- Prior art keywords
- working
- heat treatment
- treatment apparatus
- substrate
- stationary
- Prior art date
Links
Landscapes
- Tunnel Furnaces (AREA)
- Reciprocating Conveyors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention is to provide a working-beam heat treatment apparatus preventing the dislocation and falling of a substrate conveyed by the cooperation of a first beam and a second beam suitably. According to a working-beam heat treatment apparatus, a stationary beam located outside among the stationary beam (first beam) and a movable beam (second beam) for conveying a common substrate in cooperation is provided with a lateral direction guide projection guiding the substrate through engagement with the side edge of the substrate supported by the stationary beam. Thus, the dislocation and falling of the substrate conveyed by the cooperation of the stationary beam and the movable beam is suitably prevented.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005036939A JP4447482B2 (en) | 2005-02-14 | 2005-02-14 | Walking beam heat treatment equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200630580A true TW200630580A (en) | 2006-09-01 |
TWI361879B TWI361879B (en) | 2012-04-11 |
Family
ID=36923180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094146139A TW200630580A (en) | 2005-02-14 | 2005-12-23 | Working-beam heat treatment apparatus |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4447482B2 (en) |
CN (1) | CN1821694B (en) |
TW (1) | TW200630580A (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4738372B2 (en) | 2007-04-03 | 2011-08-03 | 株式会社ノリタケカンパニーリミテド | Walking beam heat treatment equipment |
JP4387432B2 (en) * | 2007-10-01 | 2009-12-16 | 株式会社石井表記 | Coating film drying equipment |
KR101378049B1 (en) * | 2007-10-03 | 2014-03-27 | 이시이 효키 가부시키가이샤 | Drying device for coated film |
CN102706142A (en) * | 2012-01-16 | 2012-10-03 | 苏州工业园区姑苏科技有限公司 | Limiting device for preventing workpieces from shifting |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1983003785A1 (en) * | 1982-04-30 | 1983-11-10 | Koyo Chuki Co., Ltd | Molten metal filling table in molding machine |
DE3331341C2 (en) * | 1983-08-31 | 1986-07-10 | Rolf Dipl.-Ing. 5828 Ennepetal Peddinghaus | Device for the transverse transport of a profile rod for profile rod processing lines with longitudinal transport roller table |
-
2005
- 2005-02-14 JP JP2005036939A patent/JP4447482B2/en not_active Expired - Fee Related
- 2005-12-23 TW TW094146139A patent/TW200630580A/en not_active IP Right Cessation
-
2006
- 2006-02-14 CN CN 200610007486 patent/CN1821694B/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1821694B (en) | 2010-05-26 |
JP4447482B2 (en) | 2010-04-07 |
JP2006222401A (en) | 2006-08-24 |
TWI361879B (en) | 2012-04-11 |
CN1821694A (en) | 2006-08-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |