TW200630580A - Working-beam heat treatment apparatus - Google Patents

Working-beam heat treatment apparatus

Info

Publication number
TW200630580A
TW200630580A TW094146139A TW94146139A TW200630580A TW 200630580 A TW200630580 A TW 200630580A TW 094146139 A TW094146139 A TW 094146139A TW 94146139 A TW94146139 A TW 94146139A TW 200630580 A TW200630580 A TW 200630580A
Authority
TW
Taiwan
Prior art keywords
working
heat treatment
treatment apparatus
substrate
stationary
Prior art date
Application number
TW094146139A
Other languages
Chinese (zh)
Other versions
TWI361879B (en
Inventor
Yoshiaki Takaba
Takashi Iwata
Original Assignee
Noritake Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Noritake Co Ltd filed Critical Noritake Co Ltd
Publication of TW200630580A publication Critical patent/TW200630580A/en
Application granted granted Critical
Publication of TWI361879B publication Critical patent/TWI361879B/zh

Links

Landscapes

  • Tunnel Furnaces (AREA)
  • Reciprocating Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention is to provide a working-beam heat treatment apparatus preventing the dislocation and falling of a substrate conveyed by the cooperation of a first beam and a second beam suitably. According to a working-beam heat treatment apparatus, a stationary beam located outside among the stationary beam (first beam) and a movable beam (second beam) for conveying a common substrate in cooperation is provided with a lateral direction guide projection guiding the substrate through engagement with the side edge of the substrate supported by the stationary beam. Thus, the dislocation and falling of the substrate conveyed by the cooperation of the stationary beam and the movable beam is suitably prevented.
TW094146139A 2005-02-14 2005-12-23 Working-beam heat treatment apparatus TW200630580A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005036939A JP4447482B2 (en) 2005-02-14 2005-02-14 Walking beam heat treatment equipment

Publications (2)

Publication Number Publication Date
TW200630580A true TW200630580A (en) 2006-09-01
TWI361879B TWI361879B (en) 2012-04-11

Family

ID=36923180

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094146139A TW200630580A (en) 2005-02-14 2005-12-23 Working-beam heat treatment apparatus

Country Status (3)

Country Link
JP (1) JP4447482B2 (en)
CN (1) CN1821694B (en)
TW (1) TW200630580A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4738372B2 (en) 2007-04-03 2011-08-03 株式会社ノリタケカンパニーリミテド Walking beam heat treatment equipment
JP4387432B2 (en) * 2007-10-01 2009-12-16 株式会社石井表記 Coating film drying equipment
KR101378049B1 (en) * 2007-10-03 2014-03-27 이시이 효키 가부시키가이샤 Drying device for coated film
CN102706142A (en) * 2012-01-16 2012-10-03 苏州工业园区姑苏科技有限公司 Limiting device for preventing workpieces from shifting

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1983003785A1 (en) * 1982-04-30 1983-11-10 Koyo Chuki Co., Ltd Molten metal filling table in molding machine
DE3331341C2 (en) * 1983-08-31 1986-07-10 Rolf Dipl.-Ing. 5828 Ennepetal Peddinghaus Device for the transverse transport of a profile rod for profile rod processing lines with longitudinal transport roller table

Also Published As

Publication number Publication date
CN1821694B (en) 2010-05-26
JP4447482B2 (en) 2010-04-07
JP2006222401A (en) 2006-08-24
TWI361879B (en) 2012-04-11
CN1821694A (en) 2006-08-23

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees