1294867· (1) 九、發明說明 【發明所屬之技術領域】 本發明，是有關於半導體基板、液晶基板等的薄板的 搬運裝置，特別是有關於藉由空氣之浮起而可無破損或刮 傷地搬運的氣浮單元、搬運方法及氣浮搬運裝置。 本案是主張2005年2月9日申請的曰本國專利申請 第2 005-03 3 040號的優先權，那些的內容將在此被援用。 【先前技術】 一般已被提案各種供將液晶基板等的薄的平面基板以 氣浮的方式搬運的裝置。 例如，如第4圖所示的氣浮搬運裝置，具備朝向平面 基板1的下面噴出空氣的複數噴嘴2的氣浮單元3是以具 有預定的間隔的方式被配置。在這種結構的氣浮搬運裝置 ，藉由圖外的送出機構將平面基板1朝箭頭A方向搬運時 ，平面基板1的剛性較小的情況時，如圖所示在氣浮單元 3的不連續部的空氣未噴出處會發生撓曲 T。因此，平面 基板1移動於氣浮單元3的間隙時，會與氣浮單元3干渉 ，可能會破損或弄傷平面基板1。 且，如第5圖所示在被複數配置的氣浮單元3的高度 調整不充分且高度偏離Η存在的情況時，或平面基板1的 剛性夠大而撓曲幾乎不會產生的情況，平面基板1及氣浮 單元3仍有干渉的可能。 _ 在此’爲了消解這些的缺點，考慮如第6圖所示的氣 -4- (2) 1294867 浮搬運裝置。此氣浮搬運裝置，是考慮平面基板]的撓曲 量T或高度偏離Η，爲了使平面基板1整體的浮起量變大 ，而將從噴嘴2的空氣噴出量設定較大。 又，例如，在日本特開2003-292153號公報、日本特 開2002-]5]571號公報、日本特開2002- 1 51570號公報中 ’揭示有關連於上述技術的先行技術。 g 但是，在藉由將從這些習知的噴嘴的空氣噴出量設定 較大，來加大平面基板整體的浮起量的氣浮搬運裝置中， 會產生空氣消耗量會顯著增加的問題。 【發明內容】 本發明，是鑑於上述課題而提案者，其目的爲提供： 可以抑制空氣消耗量的增加，防止因平面基板的撓曲、或 氣浮單元的高度位置偏離所導致的平面基板及氣浮單元之 _ 間的干渉的氣浮單元、搬運方法及氣浮搬運裝置。 本發明，是一種氣浮單元，是從搬運面噴出空氣使被 浮起物浮起，其特徵爲：設有噴嘴，可從單元的搬運面朝 向被浮起物的下面及從單元端部朝向中央部噴出空氣。 且本發明，是一種搬運方法，對於從搬運面噴出空氣 使被浮起物浮起之氣浮單元，其特徵爲：從氣浮單元的搬 運面朝向被浮起物的下面及從氣浮單元端部朝向中央部噴 出空氣，並搬運被浮起物。 且本發明，是一種氣浮搬運裝置，是從配置於平面基 板的下方及/或是側方的氣浮單元噴出空氣使平面基板浮 -5- (3) 1294867 起，並藉由送出機構朝前方移送，其特徵爲：在位置於前 述平面基板的搬運方向的先端的氣浮單元的下流端附近， 設有使前述平面基板的浮起量變大的機構。 且本發明，前述浮起量變大的機構，是空氣噴出量大 的噴嘴。 且本發明，前述浮起量變大的機構，是具有與前述平 面基板的搬運方向逆方向的流動成分的噴嘴。 前述浮起量變大的機構，是從氣浮單元的下流端朝向 中央噴出空氣的噴嘴。 前述浮起量變大的機構，是設在氣浮單元的下流端附 近的分開形成的噴出噴嘴。 且本發明，前述氣浮單元是複數設置，該浮起單元的 任一的浮起力是與其他的浮起單元的浮起力不同。 本發明因爲是由上述結構組成，所以可以達成如以下 說明的效果。 依據本發明，因爲從配置於平面基板的下方的氣浮單 元噴出空氣使平面基板浮起，藉由送出機構朝前方移送的 氣浮搬運裝置，在位置於前述平面基板的搬運方向的先端 的氣浮單元的下流端附近設有前述平面基板的浮起量變大 的機構，所以可防止因平面基板的撓曲，或氣浮單元的高 度偏離而使平面基板及氣浮單元相互干渉而損瘍。且，可 以抑制空氣消耗量的增加。 且在本發明中，前述浮起量變大的機構，因爲是空氣 噴出量大的噴嘴，所以平面基板的先端部會較大浮起而不 -6 - (4) 1294867 會因氣浮單元之間的間隙而接觸下一個氣浮單元，平面基 板就沒有破損的可能。 且，在本發明中，前述浮起量變大的機構，因爲具有 與前述平面基板的搬運方向逆方向的流動成分的噴嘴，所 以藉由與平面基板的進行方向逆方向的空氣，使先端部較 大浮起而不會因氣浮單元之間的間隙而接觸下一個氣浮單 元。且，噴嘴的空氣消耗量也不會增加。 且，在本發明中，前述浮起量變大的機構，因爲是從 氣浮單元的下流端朝向中央噴出空氣的噴嘴，所以平面基 板的先端附近的空氣的排出被妨害，使滯溜之空氣量增加 而使平面基板的浮起量增加。 且，從噴嘴的空氣消耗量不會增加。且，前述浮起量 變大的機構，因爲是設在氣浮單元的下流端附近的分開形 成的噴出噴嘴，所以不需改變氣浮單元本身的構造，就可 以防止因平面基板的撓曲，或氣浮單元的高度偏離所導致 的平面基板及氣浮單元之間的干渉而損塲。進一步，藉由 使氣浮單元的浮起力相互不同，當由可撓性的素材構成的 被搬運物的情況時，可將其變形成所期的形狀的方式進行 搬運或支撐。 因爲在位置於平面基板的搬運方向的先端的氣浮單元 的下流端附近，設有平面基板的浮起量變大的機構，所以 可以達成防止因平面基板的撓曲，或氣浮單元的高度位置 偏離所導致的平面基板及氣浮單元之間干渉而損揚的目的 (5) 1294867 本行業者，可從顯示於添付圖面及請求的範圍的本發 明的實施例，明白本發明的上述目的、或其他的目的 '特 徵、優點等。 【實施方式】 以下，依據實施例所示的圖面詳細說明本發明。 (第1實施例） 第1圖，是顯示本發明的氣浮搬運裝置的第1實施例 的說明圖。在此，氣浮搬運裝置，是從配置於平面基板10 下方的氣浮單元11噴出空氣使平面基板10浮起，並藉由 圖外的送出機構朝前方移送，在位置於平面基板1 0的搬 運方向A的先端的氣浮單元1 1的下流端附近1 1 a，設有 使平面基板10的浮起量變大的機構也就是具有與平面基 板1〇的搬運方向A逆方向的流動成分的傾斜噴嘴12。 在本實施例中，氣浮單元11是具有向上開口的複數 垂直噴嘴1 3。空氣是總括地從空氣供給管1 4往垂直噴嘴 1 3供給。且，被設置於氣浮單元1 1的下流端附近1 1 a的 傾斜噴嘴1 2也同樣從空氣供給管1 4被供給空氣。傾斜噴 嘴12，是從氣浮單元11的下流端朝向中央部噴出空氣。 接著說明，如以上結構的氣浮搬運裝置的動作及搬運 方法。首先，因爲如第1圖所示在氣浮單元Π的下流端 設置傾斜噴嘴]2，所以朝平面基板]0的搬運方向a的空 氣的流動被阻止，並且藉由逆方向的空氣流，增加滯溜於 -8- (6) 1294867 附近的空氣量，使平面基板1 〇的先端只被抬起L的距離 。因此，即使平面基板1 〇的剛性小而產生撓曲，或氣浮 單元1]的高度調整不充分，當平面基板10移動於氣浮單 元之間的間隙時，也不會接觸氣浮單元1 1而破損。且， 從傾斜噴嘴1 2的空氣噴出量，因爲與從垂直噴嘴1 3的空 氣噴出量相同，所以不會導致裝置整體的空氣消耗量的增 加。 (第2實施例） 且，第2圖是顯示本發明的氣浮搬運裝置的第2實施 例的說明圖。在此實施例，如第2圖所示在平面基板1 〇 的浮起量變大的機構也就是分開形成的噴出噴嘴1 5是設 置於氣浮單元21的下流。噴出噴嘴15，是從氣浮單元21 的下流端朝向中央部噴出空氣。 即使如以上結構的氣浮搬運裝置，從氣浮單元21的 下流端朝向中央部噴出空氣，阻止朝平面基板1 0的搬運 方向A的空氣的流動，並且藉由逆方向的空氣流使平面基 板1 〇的先端只被抬起L距離。因此，即使平面基板1 0的 剛性小而產生撓曲，或氣浮單元2 1的高度調整不充分， 當平面基板10移動於氣浮單元之間的間隙時也不會接觸 氣浮單元21而破損。且，從噴出噴嘴15的空氣噴出量， 因爲與從垂直噴嘴13的空氣噴出量幾乎相同，所以不會 導致空氣消耗量的增加。 進一步，噴出噴嘴]5因爲被分開形成，所以可自由 -9- (7) !294867 地調整噴出方向及噴出量。 (第3實施例） 第3圖，是顯示本發明的氣浮搬運裝置的第3實施例 的說明圖。 在此實施例，浮起量變大的機構，是設在氣浮單元31 的下流端附近的空氣噴出量大的噴嘴3 0。噴嘴3 0，是與 配置於氣浮單元3〗的空氣供給管3 2連通，垂直地噴出空 氣。且，垂直噴嘴13也各別連通空氣供給管32。又，可 取代空氣噴出量大的噴嘴3 0，而增加垂直噴嘴1 3的配置 密度，來增加噴出空氣量也可以。 接著，如以上結構的氣浮搬運裝置，因爲在氣浮單元 3 1的下流端的噴出空氣量會增加，所以平面基板1 0的先 端只被抬起L距離。因此，即使平面基板1 〇的剛性小而 產生撓曲，或氣浮單元21的高度調整不充分，當平面基 板10移動於氣浮單元之間的間隙時也不會接觸氣浮單元 2 1而破損。 且，與藉由增加氣浮單元整體的空氣噴出量來使平面 基板】〇的浮起量整體變大的方法相比，可以減少空氣消 耗量。 又’對於本發明的第2實施例，分開形成的噴出噴嘴 是垂直噴出空氣的噴出空氣量大的噴嘴也可以。 (第4實施例） -10- 12948671294867 (1) EMBODIMENT OF THE INVENTION [Technical Field] The present invention relates to a thin plate transporting device such as a semiconductor substrate or a liquid crystal substrate, and particularly relates to a non-destructive or scraping by floating of air. Air flotation unit, handling method and air flotation handling device that are transported in the injured area. This case is a priority of the Japanese Patent Application No. 2 005-03 3 040 filed on February 9, 2005, the contents of which are hereby incorporated. [Prior Art] Various devices for transporting a thin planar substrate such as a liquid crystal substrate by air float have been proposed. For example, in the air flotation conveying device shown in Fig. 4, the air floating unit 3 including the plurality of nozzles 2 that discharge air toward the lower surface of the flat substrate 1 is disposed at a predetermined interval. In the air-floating conveying device having such a configuration, when the planar substrate 1 is conveyed in the direction of the arrow A by the feeding mechanism outside the drawing, when the rigidity of the planar substrate 1 is small, the air floating unit 3 is not shown in the drawing. The deflection T occurs when the air in the continuous portion is not ejected. Therefore, when the planar substrate 1 moves to the gap of the air floating unit 3, it may dry up with the air floating unit 3, and the planar substrate 1 may be damaged or damaged. Further, as shown in FIG. 5, when the height adjustment of the plurality of air floating units 3 is insufficient and the height is deviated from the Η, or the rigidity of the planar substrate 1 is large enough, the deflection hardly occurs, and the plane is not generated. The substrate 1 and the air floating unit 3 are still likely to dry up. _ Here, in order to eliminate these shortcomings, consider the gas -4- (2) 1294867 floating handling device as shown in Fig. 6. In the air-floating conveying device, in consideration of the deflection amount T or the height deviation 平面 of the planar substrate, the amount of air ejection from the nozzle 2 is set large in order to increase the amount of floating of the entire planar substrate 1. In the prior art, the prior art related to the above technique is disclosed in Japanese Laid-Open Patent Publication No. 2003-292153, Japanese Patent Application Laid-Open No. Hei No. Hei. However, in the air-floating conveying device in which the amount of air ejection from the conventional nozzles is set to be large to increase the amount of floating of the entire planar substrate, there is a problem that the amount of air consumption is remarkably increased. SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems, and an object of the present invention is to provide an image substrate and a planar substrate which can be prevented from being deflected by a flat substrate or a height position of an air floating unit, and an increase in air consumption. A dry air flotation unit, a transport method, and an air flotation device between the air float unit. The present invention is an air floating unit that ejects air from a conveying surface to float the object to be floated, and is characterized in that a nozzle is provided from the conveying surface of the unit toward the lower surface of the object to be floated and toward the end of the unit. The central part ejects air. Further, the present invention is a conveying method, in which an air floating unit that ejects air from a conveying surface to float a floating object is characterized in that the conveying surface of the air floating unit faces the lower surface of the object to be floated and the air floating unit. The end portion discharges air toward the center portion and carries the floated object. Furthermore, the present invention is an air flotation conveying device that ejects air from an air floating unit disposed below and/or to a side of a planar substrate to float the planar substrate by -5 (1) 1294867, and by means of a feeding mechanism The forward transfer is characterized in that a mechanism for increasing the amount of floating of the planar substrate is provided in the vicinity of the downstream end of the air floating unit positioned at the tip end of the transport direction of the planar substrate. Further, in the present invention, the means for increasing the amount of floating is a nozzle having a large amount of air ejection. Further, in the present invention, the means for increasing the amount of floating is a nozzle having a flow component in a direction opposite to the conveyance direction of the flat substrate. The mechanism in which the amount of floating is increased is a nozzle that ejects air from the downstream end of the air floating unit toward the center. The mechanism for increasing the amount of floating is a separately formed discharge nozzle provided near the downstream end of the air floating unit. Further, in the present invention, the air floating unit is provided in plural, and the floating force of any of the floating units is different from the floating force of the other floating unit. Since the present invention is composed of the above structure, the effects as explained below can be achieved. According to the present invention, the air is discharged from the air floating unit disposed below the planar substrate to float the planar substrate, and the air floating transport device that is transported forward by the feeding mechanism is positioned at the tip end of the planar substrate in the transport direction. In the vicinity of the downstream end of the floating unit, the mechanism for increasing the amount of floating of the planar substrate is provided. Therefore, it is possible to prevent the planar substrate and the air floating unit from drying out due to the deflection of the planar substrate or the height deviation of the air floating unit. Moreover, an increase in the amount of air consumption can be suppressed. Further, in the present invention, since the mechanism for increasing the amount of floating is a nozzle having a large amount of air ejection, the tip end portion of the planar substrate is largely floated without -6 - (4) 1294867 due to the air floating unit. The gap is in contact with the next air floating unit, and the flat substrate is not damaged. Further, in the present invention, since the means for increasing the amount of floating has a nozzle having a flow component in a direction opposite to the conveyance direction of the planar substrate, the tip end portion is made by the air opposite to the direction in which the planar substrate is moved. The large floating device does not contact the next air floating unit due to the gap between the air floating units. Moreover, the air consumption of the nozzle does not increase. Further, in the present invention, since the mechanism for increasing the amount of floating is a nozzle that ejects air from the downstream end of the air floating unit toward the center, the discharge of air near the tip end of the planar substrate is impaired, and the amount of air that is stagnant is caused. The increase increases the amount of floating of the planar substrate. Moreover, the amount of air consumed from the nozzle does not increase. Further, since the mechanism for increasing the amount of floating is a separately formed discharge nozzle provided in the vicinity of the downstream end of the air floating unit, it is possible to prevent the deflection of the planar substrate without changing the structure of the air floating unit itself, or The height of the air floating unit is deviated from the dryness between the planar substrate and the air floating unit. Further, when the floating force of the air floating unit is different from each other, when the object to be transported is made of a flexible material, it can be transported or supported so as to be deformed into a desired shape. Since the mechanism for increasing the amount of floating of the planar substrate is provided in the vicinity of the downstream end of the air floating unit at the tip end of the transport direction of the planar substrate, it is possible to prevent the deflection of the planar substrate or the height position of the air floating unit. The purpose of the present invention is to understand the above object of the present invention from the embodiment of the present invention shown in the appended drawings and the scope of the request. , or other purposes, characteristics, advantages, etc. [Embodiment] Hereinafter, the present invention will be described in detail based on the drawings shown in the embodiments. (First Embodiment) Fig. 1 is an explanatory view showing a first embodiment of the air flotation conveying device of the present invention. Here, the air-floating conveying device ejects air from the air floating unit 11 disposed below the planar substrate 10 to float the planar substrate 10, and is transported forward by the feeding mechanism outside the drawing, and is positioned at the position of the planar substrate 10 In the vicinity of the downstream end of the air floating unit 1 1 in the conveyance direction A, a mechanism for increasing the amount of floating of the planar substrate 10, that is, a flow component having a flow direction opposite to the conveyance direction A of the planar substrate 1 is provided. The nozzle 12 is tilted. In the present embodiment, the air floating unit 11 is a plurality of vertical nozzles 13 having an upward opening. Air is supplied from the air supply pipe 14 to the vertical nozzle 13 in a collective manner. Further, the inclined nozzle 1 2 provided near the downstream end of the air floating unit 1 1 is also supplied with air from the air supply pipe 14. The inclined nozzle 12 ejects air from the downstream end of the air floating unit 11 toward the center portion. Next, the operation and transportation method of the air flotation conveying device configured as above will be described. First, since the inclined nozzles 2 are provided at the downstream end of the air floating unit 如 as shown in Fig. 1, the flow of air toward the conveying direction a of the planar substrate 0 is prevented, and is increased by the air flow in the reverse direction. The amount of air stagnation near -8- (6) 1294867 causes the tip end of the flat substrate 1 只 to be lifted by only a distance of L. Therefore, even if the rigidity of the planar substrate 1 is small and the deflection occurs, or the height adjustment of the air floating unit 1] is insufficient, when the planar substrate 10 moves to the gap between the air floating units, the air floating unit 1 is not contacted. 1 and broken. Further, since the amount of air discharged from the inclined nozzle 12 is the same as the amount of air discharged from the vertical nozzle 13, the amount of air consumption of the entire apparatus is not increased. (Second Embodiment) Fig. 2 is an explanatory view showing a second embodiment of the air flotation conveying device of the present invention. In this embodiment, as shown in Fig. 2, the mechanism for increasing the amount of floating of the flat substrate 1 也, that is, the ejection nozzles 15 which are separately formed, is disposed downstream of the air floating unit 21. The discharge nozzle 15 ejects air from the downstream end of the air floating unit 21 toward the center. Even in the air-floating conveying device having the above configuration, air is ejected from the downstream end of the air floating unit 21 toward the center portion, the flow of air toward the conveying direction A of the planar substrate 10 is prevented, and the planar substrate is made by the air flow in the reverse direction. The tip of the 1 只 is only lifted by the L distance. Therefore, even if the rigidity of the planar substrate 10 is small and the deflection is caused, or the height adjustment of the air floating unit 21 is insufficient, the planar substrate 10 does not contact the air floating unit 21 when it moves to the gap between the air floating units. damaged. Further, since the amount of air discharged from the discharge nozzle 15 is almost the same as the amount of air discharged from the vertical nozzle 13, the amount of air consumption does not increase. Further, since the discharge nozzles 5 are formed separately, the discharge direction and the discharge amount can be adjusted freely -9-(7)!294867. (Third embodiment) Fig. 3 is an explanatory view showing a third embodiment of the air flotation conveying device of the present invention. In this embodiment, the mechanism for increasing the amount of floating is the nozzle 30 provided in the vicinity of the downstream end of the air floating unit 31 and having a large air discharge amount. The nozzle 30 is in communication with the air supply pipe 3 2 disposed in the air floating unit 3, and the air is vertically discharged. Further, the vertical nozzles 13 are also connected to the air supply pipe 32, respectively. Further, instead of the nozzle 30 having a large amount of air ejection, the arrangement density of the vertical nozzles 13 may be increased to increase the amount of discharged air. Next, in the air flotation conveying device of the above configuration, since the amount of the discharged air at the downstream end of the air floating unit 3 1 increases, the leading end of the planar substrate 10 is lifted by only the L distance. Therefore, even if the rigidity of the planar substrate 1 is small and the deflection occurs, or the height adjustment of the air floating unit 21 is insufficient, the planar substrate 10 does not contact the air floating unit 21 when it moves to the gap between the air floating units. damaged. Further, the amount of air consumption can be reduced as compared with a method of increasing the amount of floating of the flat substrate by increasing the amount of air discharged from the entire air floating unit. Further, in the second embodiment of the present invention, the discharge nozzles formed separately may be nozzles having a large amount of air to be ejected vertically. (Fourth embodiment) -10- 1294867
第7圖，是顯示本發明的第4實施例。 在此第4實施例中，在平面基板]〇的周圍的4方向 各別設置氣浮單元3 1 ’從這些的氣浮單元3 ]且從平面基 板I 0的下面的外側朝向內側噴出空氣。 此第4實施例，也可以藉由被噴出的空氣讓平面基板 10浮起。 又，在上述第〗〜第4實施例中，藉由使複數氣浮單 元的空氣的浮起力（空氣的風量及/或是壓力）強弱不同，例 如將由可撓性的素材形成的被搬運物以預定形狀的撓曲狀 態進行搬運也可以。 以上，雖參照特定的實施例詳細地揭示及圖示本發明 ，但是該揭示未有限定解釋的意思。即，所揭示的實施例 的各式各樣的變更或本發明的其他的實施例，本行業者可 藉由參照本案說明書而了解。因此，在不脫離如本案的請 求的範圍揭示的本案發明的範圍內，可以進行各種變更。 【圖式簡單說明】 第1圖’是顯示本發明的氣浮搬運裝置的第1實施例 的立體圖。 第2圖’是顯示同氣浮搬運裝置的第2實施例的立體 圖。 第3圖，是顯示同氣浮搬運裝置的第3實施例的立體 圖。 第4圖，是顯示由氣浮搬運裝置搬運剛性小的平面基 -11 - 1294867 Ο) 板的情況的說明圖。 第5圖，是顯示由氣浮搬運裝置進行高度調整不充分 的情況的說明圖。 第6圖，是顯示對於氣浮搬運裝置增加從全噴嘴的空 氣吐出量的情況的說明圖。 第7圖，是顯示本發明的氣浮搬運裝置的第4實施例 的立體圖。 [主要元件符號說明】 A :搬運方向 Η :高度偏離 Τ :撓曲量 1 :平面基板 2 :噴嘴 3 :氣浮單元 ® 1 〇 :平面基板 1 1 :氣浮單元 1 1 a :下流端附近 1 2 :傾斜噴嘴 13 :垂直噴嘴 1 4 :空氣供給管 15 :噴出噴嘴 21 :氣浮單元 3 0 :噴嘴 -12- (10) 1294867 3 1: 32 : 氣浮單元 空氣供給管Fig. 7 is a view showing a fourth embodiment of the present invention. In the fourth embodiment, the air floating unit 3 1 ' is provided in each of the four directions around the planar substrate 〇 from the air floating unit 3 ], and the air is ejected from the outer side of the lower surface of the planar substrate I 0 toward the inside. In the fourth embodiment, the planar substrate 10 can be floated by the air to be ejected. Further, in the above-described fourth to fourth embodiments, the floating force of the air of the plurality of air floating units (the air volume and/or the pressure of the air) is different, for example, the conveyance of the flexible material is carried out. The object may be conveyed in a flexed state of a predetermined shape. The present invention has been disclosed and illustrated in detail above with reference to the specific embodiments. That is, various modifications of the disclosed embodiments or other embodiments of the present invention can be understood by those skilled in the art by referring to the description herein. Therefore, various modifications can be made without departing from the scope of the invention as disclosed in the scope of the claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a first embodiment of the air flotation conveying device of the present invention. Fig. 2 is a perspective view showing a second embodiment of the same air-floating conveying device. Fig. 3 is a perspective view showing a third embodiment of the same air-floating conveying device. Fig. 4 is an explanatory view showing a state in which a plane base -11 - 1294867 Ο plate having a small rigidity is conveyed by an air flotation conveying device. Fig. 5 is an explanatory view showing a state in which the height adjustment by the air flotation conveying device is insufficient. Fig. 6 is an explanatory view showing a state in which the air discharge amount from the full nozzle is increased for the air flotation conveying device. Fig. 7 is a perspective view showing a fourth embodiment of the air flotation conveying device of the present invention. [Description of main component symbols] A: conveying direction Η : height deviation Τ : deflection amount 1: plane substrate 2 : nozzle 3 : air floating unit ® 1 〇: flat substrate 1 1 : air floating unit 1 1 a : near the downstream end 1 2 : inclined nozzle 13 : vertical nozzle 1 4 : air supply pipe 15 : discharge nozzle 21 : air floating unit 3 0 : nozzle 12 - (10) 1294867 3 1: 32 : air floating unit air supply pipe
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