KR100783027B1 - 박막 형성 장치 - Google Patents

박막 형성 장치 Download PDF

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Publication number
KR100783027B1
KR100783027B1 KR1020000059931A KR20000059931A KR100783027B1 KR 100783027 B1 KR100783027 B1 KR 100783027B1 KR 1020000059931 A KR1020000059931 A KR 1020000059931A KR 20000059931 A KR20000059931 A KR 20000059931A KR 100783027 B1 KR100783027 B1 KR 100783027B1
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KR
South Korea
Prior art keywords
organic
substrate
nozzles
thin film
film forming
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Expired - Fee Related
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KR1020000059931A
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English (en)
Korean (ko)
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KR20010071141A (ko
Inventor
야마자키순페이
야마모토쿠니타카
히로키마사아키
후쿠나가다케시
Original Assignee
가부시키가이샤 한도오따이 에네루기 켄큐쇼
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Publication of KR20010071141A publication Critical patent/KR20010071141A/ko
Application granted granted Critical
Publication of KR100783027B1 publication Critical patent/KR100783027B1/ko
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/114—Poly-phenylenevinylene; Derivatives thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/141—Organic polymers or oligomers comprising aliphatic or olefinic chains, e.g. poly N-vinylcarbazol, PVC or PTFE
    • H10K85/146—Organic polymers or oligomers comprising aliphatic or olefinic chains, e.g. poly N-vinylcarbazol, PVC or PTFE poly N-vinylcarbazol; Derivatives thereof

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Coating Apparatus (AREA)
KR1020000059931A 1999-10-13 2000-10-12 박막 형성 장치 Expired - Fee Related KR100783027B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11-291685 1999-10-13
JP29168599 1999-10-13

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020050093305A Division KR100812293B1 (ko) 1999-10-13 2005-10-05 반도체장치 제작방법

Publications (2)

Publication Number Publication Date
KR20010071141A KR20010071141A (ko) 2001-07-28
KR100783027B1 true KR100783027B1 (ko) 2007-12-07

Family

ID=17772097

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000059931A Expired - Fee Related KR100783027B1 (ko) 1999-10-13 2000-10-12 박막 형성 장치

Country Status (7)

Country Link
US (3) US7115434B2 (https=)
EP (2) EP1705692A3 (https=)
JP (1) JP4827290B2 (https=)
KR (1) KR100783027B1 (https=)
CN (2) CN1266985C (https=)
DE (1) DE60028492T2 (https=)
TW (1) TW471011B (https=)

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CN112599585A (zh) 2020-12-30 2021-04-02 深圳市华星光电半导体显示技术有限公司 显示面板、显示母板及显示装置
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JP2001185355A (ja) 2001-07-06
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CN1734746A (zh) 2006-02-15
US20060283384A1 (en) 2006-12-21
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US7494837B2 (en) 2009-02-24
JP4827290B2 (ja) 2011-11-30
TW471011B (en) 2002-01-01
CN1293530A (zh) 2001-05-02
CN100468696C (zh) 2009-03-11
CN1266985C (zh) 2006-07-26
US20030196597A1 (en) 2003-10-23
US20090186439A1 (en) 2009-07-23
US7115434B2 (en) 2006-10-03
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