KR100743872B1 - 에칭율의 균일성을 개선하기 위한 기술 - Google Patents

에칭율의 균일성을 개선하기 위한 기술 Download PDF

Info

Publication number
KR100743872B1
KR100743872B1 KR1020017016518A KR20017016518A KR100743872B1 KR 100743872 B1 KR100743872 B1 KR 100743872B1 KR 1020017016518 A KR1020017016518 A KR 1020017016518A KR 20017016518 A KR20017016518 A KR 20017016518A KR 100743872 B1 KR100743872 B1 KR 100743872B1
Authority
KR
South Korea
Prior art keywords
edge ring
substrate
wafer
chuck
edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020017016518A
Other languages
English (en)
Korean (ko)
Other versions
KR20020041340A (ko
Inventor
존이. 도허티
네일 벤자민
제프 보거트
바히드 바헤디
데이빗 쿠퍼버그
알렌 밀러
요코 야마구치
Original Assignee
램 리써치 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 램 리써치 코포레이션 filed Critical 램 리써치 코포레이션
Publication of KR20020041340A publication Critical patent/KR20020041340A/ko
Application granted granted Critical
Publication of KR100743872B1 publication Critical patent/KR100743872B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0418—Apparatus for fluid treatment for etching
    • H10P72/0421—Apparatus for fluid treatment for etching for drying etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H01J37/32642—Focus rings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7606—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7611—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10S156/915—Differential etching apparatus including focus ring surrounding a wafer for plasma apparatus

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
KR1020017016518A 1999-06-30 2000-06-29 에칭율의 균일성을 개선하기 위한 기술 Expired - Lifetime KR100743872B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/345,639 1999-06-30
US09/345,639 US6344105B1 (en) 1999-06-30 1999-06-30 Techniques for improving etch rate uniformity

Publications (2)

Publication Number Publication Date
KR20020041340A KR20020041340A (ko) 2002-06-01
KR100743872B1 true KR100743872B1 (ko) 2007-07-30

Family

ID=23355856

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020017016518A Expired - Lifetime KR100743872B1 (ko) 1999-06-30 2000-06-29 에칭율의 균일성을 개선하기 위한 기술

Country Status (9)

Country Link
US (1) US6344105B1 (https=)
EP (2) EP1198821B1 (https=)
JP (2) JP4792185B2 (https=)
KR (1) KR100743872B1 (https=)
CN (2) CN101241846B (https=)
AU (1) AU5908600A (https=)
DE (2) DE60038175T2 (https=)
TW (1) TW463235B (https=)
WO (1) WO2001001445A1 (https=)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140103872A (ko) * 2013-02-18 2014-08-27 램 리써치 코포레이션 플라즈마 웨이퍼 처리를 위한 하이브리드 에지 링
KR20200098759A (ko) * 2019-02-11 2020-08-21 삼성전자주식회사 플라즈마 처리 장치
KR20220060667A (ko) * 2020-11-05 2022-05-12 주식회사 원익아이피에스 포커스 링 및 이를 포함하는 기판 처리 장치
US12592366B2 (en) 2022-01-28 2026-03-31 Samsung Electronics Co., Ltd. Substrate processing apparatus and substrate processing method using the same

Families Citing this family (121)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5662770A (en) * 1993-04-16 1997-09-02 Micron Technology, Inc. Method and apparatus for improving etch uniformity in remote source plasma reactors with powered wafer chucks
US6334960B1 (en) * 1999-03-11 2002-01-01 Board Of Regents, The University Of Texas System Step and flash imprint lithography
KR100315088B1 (ko) * 1999-09-29 2001-11-24 윤종용 포커스 링을 갖는 반도체 웨이퍼 제조 장치
US6489249B1 (en) * 2000-06-20 2002-12-03 Infineon Technologies Ag Elimination/reduction of black silicon in DT etch
TW506234B (en) * 2000-09-18 2002-10-11 Tokyo Electron Ltd Tunable focus ring for plasma processing
US6475336B1 (en) * 2000-10-06 2002-11-05 Lam Research Corporation Electrostatically clamped edge ring for plasma processing
US6554954B2 (en) * 2001-04-03 2003-04-29 Applied Materials Inc. Conductive collar surrounding semiconductor workpiece in plasma chamber
TWI234417B (en) * 2001-07-10 2005-06-11 Tokyo Electron Ltd Plasma procesor and plasma processing method
DE10143718A1 (de) * 2001-08-31 2003-03-27 Infineon Technologies Ag Lagerungsvorrichtung für einen Wafer in einer Plasmaätzanlage
US7041201B2 (en) * 2001-11-14 2006-05-09 Applied Materials, Inc. Sidewall magnet improving uniformity of inductively coupled plasma and shields used therewith
TWI272877B (en) * 2001-12-13 2007-02-01 Tokyo Electron Ltd Ring mechanism, and plasma processing device using the ring mechanism
US20030159778A1 (en) * 2002-02-27 2003-08-28 Kunihiko Koroyasu Plasma processing apparatus, protecting layer therefor and installation of protecting layer
US20040000375A1 (en) * 2002-06-27 2004-01-01 Taiwan Semiconductor Manufacturing Co., Ltd. Plasma etch chamber equipped with multi-layer insert ring
US20040040663A1 (en) * 2002-08-29 2004-03-04 Ryujiro Udo Plasma processing apparatus
US20040112862A1 (en) * 2002-12-12 2004-06-17 Molecular Imprints, Inc. Planarization composition and method of patterning a substrate using the same
DE10260645B3 (de) * 2002-12-23 2004-09-16 Infineon Technologies Ag Kompensationsrahmen zur Aufnahme eines Substrats
US20040168613A1 (en) * 2003-02-27 2004-09-02 Molecular Imprints, Inc. Composition and method to form a release layer
US7540935B2 (en) * 2003-03-14 2009-06-02 Lam Research Corporation Plasma oxidation and removal of oxidized material
WO2004095529A2 (en) * 2003-03-21 2004-11-04 Tokyo Electron Limited Method and apparatus for reducing substrate backside deposition during processing
US7049052B2 (en) * 2003-05-09 2006-05-23 Lam Research Corporation Method providing an improved bi-layer photoresist pattern
US20040226516A1 (en) * 2003-05-13 2004-11-18 Daniel Timothy J. Wafer pedestal cover
CN100463112C (zh) * 2003-05-30 2009-02-18 周星工程股份有限公司 一种用于半导体装置的设备
US7307118B2 (en) * 2004-11-24 2007-12-11 Molecular Imprints, Inc. Composition to reduce adhesion between a conformable region and a mold
US20060108710A1 (en) * 2004-11-24 2006-05-25 Molecular Imprints, Inc. Method to reduce adhesion between a conformable region and a mold
US7157036B2 (en) * 2003-06-17 2007-01-02 Molecular Imprints, Inc Method to reduce adhesion between a conformable region and a pattern of a mold
US20050160934A1 (en) * 2004-01-23 2005-07-28 Molecular Imprints, Inc. Materials and methods for imprint lithography
US7658816B2 (en) 2003-09-05 2010-02-09 Tokyo Electron Limited Focus ring and plasma processing apparatus
US7024105B2 (en) * 2003-10-10 2006-04-04 Applied Materials Inc. Substrate heater assembly
US7122482B2 (en) 2003-10-27 2006-10-17 Molecular Imprints, Inc. Methods for fabricating patterned features utilizing imprint lithography
US7244336B2 (en) * 2003-12-17 2007-07-17 Lam Research Corporation Temperature controlled hot edge ring assembly for reducing plasma reactor etch rate drift
US7338578B2 (en) * 2004-01-20 2008-03-04 Taiwan Semiconductor Manufacturing Co., Ltd. Step edge insert ring for etch chamber
US8076386B2 (en) * 2004-02-23 2011-12-13 Molecular Imprints, Inc. Materials for imprint lithography
US20050189068A1 (en) * 2004-02-27 2005-09-01 Kawasaki Microelectronics, Inc. Plasma processing apparatus and method of plasma processing
JP3981091B2 (ja) * 2004-03-01 2007-09-26 株式会社東芝 成膜用リングおよび半導体装置の製造装置
US20050193951A1 (en) * 2004-03-08 2005-09-08 Muneo Furuse Plasma processing apparatus
JP2005303099A (ja) 2004-04-14 2005-10-27 Hitachi High-Technologies Corp プラズマ処理装置およびプラズマ処理方法
US7282550B2 (en) * 2004-08-16 2007-10-16 Molecular Imprints, Inc. Composition to provide a layer with uniform etch characteristics
US7939131B2 (en) 2004-08-16 2011-05-10 Molecular Imprints, Inc. Method to provide a layer with uniform etch characteristics
US20060062922A1 (en) * 2004-09-23 2006-03-23 Molecular Imprints, Inc. Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor
US7578945B2 (en) * 2004-09-27 2009-08-25 Lam Research Corporation Method and apparatus for tuning a set of plasma processing steps
US7138067B2 (en) * 2004-09-27 2006-11-21 Lam Research Corporation Methods and apparatus for tuning a set of plasma processing steps
US7244311B2 (en) * 2004-10-13 2007-07-17 Lam Research Corporation Heat transfer system for improved semiconductor processing uniformity
US20060081557A1 (en) * 2004-10-18 2006-04-20 Molecular Imprints, Inc. Low-k dielectric functional imprinting materials
GB0424371D0 (en) * 2004-11-04 2004-12-08 Trikon Technologies Ltd Shielding design for backside metal deposition
JP4336320B2 (ja) * 2005-02-25 2009-09-30 キヤノンアネルバ株式会社 ウエハホルダ
US9659758B2 (en) * 2005-03-22 2017-05-23 Honeywell International Inc. Coils utilized in vapor deposition applications and methods of production
US20060219172A1 (en) * 2005-04-05 2006-10-05 Taiwan Semiconductor Manufacturing Co., Ltd. PVD equipment and electrode and deposition ring thereof
KR100714896B1 (ko) * 2005-06-08 2007-05-04 삼성전자주식회사 건식 식각 장치의 포커스 링
US20060278520A1 (en) * 2005-06-13 2006-12-14 Lee Eal H Use of DC magnetron sputtering systems
KR100688747B1 (ko) 2005-06-27 2007-03-02 동부일렉트로닉스 주식회사 웨이퍼 에지 식각 장치 및 방법
US7759407B2 (en) * 2005-07-22 2010-07-20 Molecular Imprints, Inc. Composition for adhering materials together
US8808808B2 (en) 2005-07-22 2014-08-19 Molecular Imprints, Inc. Method for imprint lithography utilizing an adhesion primer layer
US8557351B2 (en) * 2005-07-22 2013-10-15 Molecular Imprints, Inc. Method for adhering materials together
WO2007034747A1 (ja) * 2005-09-22 2007-03-29 Sekisui Chemical Co., Ltd. プラズマ処理装置
US7736528B2 (en) * 2005-10-12 2010-06-15 Panasonic Corporation Plasma processing apparatus and plasma processing method
US7651571B2 (en) * 2005-12-22 2010-01-26 Kyocera Corporation Susceptor
JP2007250967A (ja) * 2006-03-17 2007-09-27 Tokyo Electron Ltd プラズマ処理装置および方法とフォーカスリング
US8635971B2 (en) * 2006-03-31 2014-01-28 Lam Research Corporation Tunable uniformity in a plasma processing system
US20080194113A1 (en) * 2006-09-20 2008-08-14 Samsung Electronics Co., Ltd. Methods and apparatus for semiconductor etching including an electro static chuck
KR100809957B1 (ko) * 2006-09-20 2008-03-07 삼성전자주식회사 반도체 식각장치
US20080110557A1 (en) * 2006-11-15 2008-05-15 Molecular Imprints, Inc. Methods and Compositions for Providing Preferential Adhesion and Release of Adjacent Surfaces
US20080296261A1 (en) * 2007-06-01 2008-12-04 Nordson Corporation Apparatus and methods for improving treatment uniformity in a plasma process
US7837827B2 (en) * 2007-06-28 2010-11-23 Lam Research Corporation Edge ring arrangements for substrate processing
US8999106B2 (en) * 2007-12-19 2015-04-07 Applied Materials, Inc. Apparatus and method for controlling edge performance in an inductively coupled plasma chamber
US20090194414A1 (en) * 2008-01-31 2009-08-06 Nolander Ira G Modified sputtering target and deposition components, methods of production and uses thereof
US8409355B2 (en) * 2008-04-24 2013-04-02 Applied Materials, Inc. Low profile process kit
US20100101729A1 (en) * 2008-10-28 2010-04-29 Applied Materials, Inc. Process kit having reduced erosion sensitivity
KR101063588B1 (ko) * 2008-11-05 2011-09-07 주식회사 디엠에스 커버 링의 수명을 연장하고 플라즈마 반응기의 식각 성능을향상시키기 위한 구조를 가지는 정전 척 어셈블리
KR101540609B1 (ko) * 2009-02-24 2015-07-31 삼성전자 주식회사 웨이퍼 에지 식각 장치
KR101343502B1 (ko) * 2009-07-24 2013-12-19 엘지디스플레이 주식회사 코팅장비의 코터 척
WO2011058851A1 (ja) * 2009-11-16 2011-05-19 シャープ株式会社 ドライエッチング装置およびドライエッチング方法
JP6285620B2 (ja) * 2011-08-26 2018-02-28 新光電気工業株式会社 静電チャック及び半導体・液晶製造装置
US9376752B2 (en) * 2012-04-06 2016-06-28 Applied Materials, Inc. Edge ring for a deposition chamber
KR20140101996A (ko) * 2013-02-13 2014-08-21 삼성전자주식회사 기판 지지유닛 및 이를 구비한 플라즈마 식각장치
WO2015116245A1 (en) * 2014-01-30 2015-08-06 Applied Materials, Inc. Gas confiner assembly for eliminating shadow frame
US10242848B2 (en) * 2014-12-12 2019-03-26 Lam Research Corporation Carrier ring structure and chamber systems including the same
JP2016184610A (ja) * 2015-03-25 2016-10-20 株式会社東芝 上部電極、エッジリングおよびプラズマ処理装置
US10903055B2 (en) * 2015-04-17 2021-01-26 Applied Materials, Inc. Edge ring for bevel polymer reduction
JP6570971B2 (ja) * 2015-05-27 2019-09-04 東京エレクトロン株式会社 プラズマ処理装置およびフォーカスリング
US10755902B2 (en) * 2015-05-27 2020-08-25 Tokyo Electron Limited Plasma processing apparatus and focus ring
US10854492B2 (en) * 2015-08-18 2020-12-01 Lam Research Corporation Edge ring assembly for improving feature profile tilting at extreme edge of wafer
US10186448B2 (en) * 2015-12-11 2019-01-22 Lam Research Corporation Wafer support pedestal with wafer anti-slip and anti-rotation features
KR101722382B1 (ko) * 2016-01-08 2017-04-03 주식회사 윈텔 플라즈마 처리 장치
JP6888007B2 (ja) * 2016-01-26 2021-06-16 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ ウェハエッジリングの持ち上げに関する解決
CN107316795B (zh) * 2016-04-26 2020-01-03 北京北方华创微电子装备有限公司 一种聚焦环和等离子体处理装置
US10163642B2 (en) * 2016-06-30 2018-12-25 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device, method and tool of manufacture
JP2018006299A (ja) 2016-07-08 2018-01-11 東芝メモリ株式会社 プラズマ処理装置用処理対象支持台、プラズマ処理装置及びプラズマ処理方法
US20180122670A1 (en) * 2016-11-01 2018-05-03 Varian Semiconductor Equipment Associates, Inc. Removable substrate plane structure ring
US10032661B2 (en) 2016-11-18 2018-07-24 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device, method, and tool of manufacture
WO2018183245A1 (en) * 2017-03-31 2018-10-04 Mattson Technology, Inc. Material deposition prevention on a workpiece in a process chamber
KR101966793B1 (ko) * 2017-05-17 2019-04-09 세메스 주식회사 기판 지지 유닛 및 그를 포함하는 기판 처리 장치
JP6966286B2 (ja) * 2017-10-11 2021-11-10 東京エレクトロン株式会社 プラズマ処理装置、フォーカスリングの昇降制御方法およびフォーカスリングの昇降制御プログラム
US11183373B2 (en) 2017-10-11 2021-11-23 Honeywell International Inc. Multi-patterned sputter traps and methods of making
KR102089949B1 (ko) * 2017-10-20 2020-03-19 세메스 주식회사 기판 처리 장치 및 기판 처리 장치의 부품
TWI848010B (zh) 2018-10-18 2024-07-11 美商蘭姆研究公司 用於斜面蝕刻器的下電漿排除區域環
JP7117734B2 (ja) * 2018-12-06 2022-08-15 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ処理方法
US11551965B2 (en) * 2018-12-07 2023-01-10 Applied Materials, Inc. Apparatus to reduce polymers deposition
JP7612618B2 (ja) * 2019-06-18 2025-01-14 ラム リサーチ コーポレーション 基板処理システム用の縮径キャリアリングハードウェア
US11302563B2 (en) * 2019-06-20 2022-04-12 Corning Incorporated Carrier for back end of line processing
KR102214333B1 (ko) 2019-06-27 2021-02-10 세메스 주식회사 기판 처리 장치 및 기판 처리 방법
KR102406942B1 (ko) * 2019-09-16 2022-06-10 에이피시스템 주식회사 엣지 링 및 이를 포함하는 열처리 장치
JP7361002B2 (ja) * 2019-10-02 2023-10-13 東京エレクトロン株式会社 プラズマ処理装置
CN112885690B (zh) * 2019-11-29 2023-10-20 中微半导体设备(上海)股份有限公司 一种等离子体处理装置
CN112992631B (zh) * 2019-12-16 2023-09-29 中微半导体设备(上海)股份有限公司 一种下电极组件，其安装方法及等离子体处理装置
CN111312630A (zh) * 2020-03-05 2020-06-19 锐捷光电科技（江苏）有限公司 一种单一密封皮圈对于蚀刻均匀性的改善方法
JP7398988B2 (ja) * 2020-03-13 2023-12-15 東京エレクトロン株式会社 スパッタ装置
CN115668438A (zh) 2020-03-27 2023-01-31 朗姆研究公司 用于处理具有缺口的晶片的等离子体排除区域环
KR102177146B1 (ko) * 2020-04-10 2020-11-10 비씨엔씨 주식회사 플라즈마 공정 챔버용 엣지링
CN113808968A (zh) * 2020-06-12 2021-12-17 东京毅力科创株式会社 边缘环和等离子体处理装置
USD1034491S1 (en) 2020-07-27 2024-07-09 Applied Materials, Inc. Edge ring
US11380575B2 (en) 2020-07-27 2022-07-05 Applied Materials, Inc. Film thickness uniformity improvement using edge ring and bias electrode geometry
US12106943B2 (en) 2021-05-25 2024-10-01 Applied Materials, Inc. Substrate halo arrangement for improved process uniformity
US20230066418A1 (en) * 2021-08-30 2023-03-02 Taiwan Semiconductor Manufacturing Company, Ltd. Focus ring for a plasma-based semiconductor processing tool
CN113921365B (zh) * 2021-09-29 2024-03-26 北京北方华创微电子装备有限公司 半导体工艺设备及其边缘保护机构
KR20230094576A (ko) 2021-12-21 2023-06-28 삼성전자주식회사 링 어셈블리, 기판 지지 장치 및 이를 포함하는 플라즈마 처리 장치
KR102744848B1 (ko) 2022-07-21 2024-12-19 솔믹스 주식회사 포커스 링 및 이를 포함하는 플라즈마 식각장치
CN118737789B (zh) * 2023-03-29 2025-10-14 中微半导体设备(上海)股份有限公司 一种聚焦环、等离子体处理装置及其操作方法
CN116525530A (zh) * 2023-06-12 2023-08-01 广东中图半导体科技股份有限公司 晶片承载装置及修复方法
US20250226188A1 (en) * 2024-01-08 2025-07-10 Taiwan Semiconductor Manufacturing Company, Ltd. Plasma etcher with edge ring and method of processing semiconductor device using the same
WO2025203162A1 (ja) * 2024-03-25 2025-10-02 株式会社タイカ 高誘電性熱伝導性組成物及び高誘電性熱伝導性部材
CN120141385A (zh) * 2025-03-13 2025-06-13 江苏富乐华半导体科技股份有限公司 一种蚀刻均匀性的简化测试方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5411624A (en) * 1991-07-23 1995-05-02 Tokyo Electron Limited Magnetron plasma processing apparatus
US5556500A (en) * 1994-03-03 1996-09-17 Tokyo Electron Limited Plasma etching apparatus

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2501948B2 (ja) * 1990-10-26 1996-05-29 三菱電機株式会社 プラズマ処理方法及びプラズマ処理装置
JPH0529270A (ja) * 1991-07-23 1993-02-05 Tokyo Electron Ltd マグネトロンプラズマ処理装置
KR100297358B1 (ko) * 1991-07-23 2001-11-30 히가시 데쓰로 플라즈마에칭장치
US5662770A (en) 1993-04-16 1997-09-02 Micron Technology, Inc. Method and apparatus for improving etch uniformity in remote source plasma reactors with powered wafer chucks
JP2638443B2 (ja) 1993-08-31 1997-08-06 日本電気株式会社 ドライエッチング方法およびドライエッチング装置
US5529657A (en) * 1993-10-04 1996-06-25 Tokyo Electron Limited Plasma processing apparatus
US5463525A (en) 1993-12-20 1995-10-31 International Business Machines Corporation Guard ring electrostatic chuck
JP2659919B2 (ja) 1994-01-13 1997-09-30 インターナショナル・ビジネス・マシーンズ・コーポレイション プラズマの不均一性を補正するプラズマ装置
US5891348A (en) 1996-01-26 1999-04-06 Applied Materials, Inc. Process gas focusing apparatus and method
JPH09213683A (ja) * 1996-02-07 1997-08-15 Sony Corp プラズマエッチング装置
US6113731A (en) * 1997-01-02 2000-09-05 Applied Materials, Inc. Magnetically-enhanced plasma chamber with non-uniform magnetic field
US6074488A (en) 1997-09-16 2000-06-13 Applied Materials, Inc Plasma chamber support having an electrically coupled collar ring
JP4602545B2 (ja) * 1997-09-16 2010-12-22 アプライド マテリアルズ インコーポレイテッド プラズマチャンバの半導体ワークピース用シュラウド
US6039836A (en) 1997-12-19 2000-03-21 Lam Research Corporation Focus rings
KR100258984B1 (ko) * 1997-12-24 2000-08-01 윤종용 건식 식각 장치
US6117349A (en) * 1998-08-28 2000-09-12 Taiwan Semiconductor Manufacturing Company, Ltd. Composite shadow ring equipped with a sacrificial inner ring

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5411624A (en) * 1991-07-23 1995-05-02 Tokyo Electron Limited Magnetron plasma processing apparatus
US5556500A (en) * 1994-03-03 1996-09-17 Tokyo Electron Limited Plasma etching apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140103872A (ko) * 2013-02-18 2014-08-27 램 리써치 코포레이션 플라즈마 웨이퍼 처리를 위한 하이브리드 에지 링
KR102208209B1 (ko) * 2013-02-18 2021-01-27 램 리써치 코포레이션 플라즈마 웨이퍼 처리를 위한 하이브리드 에지 링
KR20200098759A (ko) * 2019-02-11 2020-08-21 삼성전자주식회사 플라즈마 처리 장치
KR102647177B1 (ko) * 2019-02-11 2024-03-15 삼성전자주식회사 플라즈마 처리 장치
US12125685B2 (en) 2019-02-11 2024-10-22 Samsung Electronics Co., Ltd. Plasma processing apparatus
KR20220060667A (ko) * 2020-11-05 2022-05-12 주식회사 원익아이피에스 포커스 링 및 이를 포함하는 기판 처리 장치
KR102811688B1 (ko) 2020-11-05 2025-05-26 주식회사 원익아이피에스 포커스 링 및 이를 포함하는 기판 처리 장치
US12592366B2 (en) 2022-01-28 2026-03-31 Samsung Electronics Co., Ltd. Substrate processing apparatus and substrate processing method using the same

Also Published As

Publication number Publication date
DE60044958D1 (de) 2010-10-21
WO2001001445A1 (en) 2001-01-04
EP1198821B1 (en) 2008-02-27
EP1198821A1 (en) 2002-04-24
EP1898444A1 (en) 2008-03-12
EP1898444B1 (en) 2010-09-08
KR20020041340A (ko) 2002-06-01
DE60038175T2 (de) 2009-03-12
CN101241846A (zh) 2008-08-13
JP4792185B2 (ja) 2011-10-12
CN1373899A (zh) 2002-10-09
CN100392791C (zh) 2008-06-04
TW463235B (en) 2001-11-11
DE60038175D1 (de) 2008-04-10
JP2003503841A (ja) 2003-01-28
AU5908600A (en) 2001-01-31
JP2011014943A (ja) 2011-01-20
US6344105B1 (en) 2002-02-05
CN101241846B (zh) 2010-08-11

Similar Documents

Publication Publication Date Title
KR100743872B1 (ko) 에칭율의 균일성을 개선하기 위한 기술
KR100600898B1 (ko) 플라즈마 공정 챔버 내의 초점 링 조립체
JP4928055B2 (ja) プラズマを閉じ込める処理室構成
KR101342319B1 (ko) 플라즈마 에칭 챔버를 위한 통합된 용량성 전원과 유도성 전원
US5605637A (en) Adjustable dc bias control in a plasma reactor
US5404079A (en) Plasma generating apparatus
KR100437956B1 (ko) 이온화된 물리적 증착 방법 및 장치
US8222157B2 (en) Hybrid RF capacitively and inductively coupled plasma source using multifrequency RF powers and methods of use thereof
KR100635693B1 (ko) 플라즈마 처리 챔버 포커스 링
KR100743875B1 (ko) 전극 조립체
KR100857747B1 (ko) 바람직한 ｒｆ 복귀 경로를 사용한 플라즈마 컨파인먼트
KR101480738B1 (ko) 환형 배플
US20060043067A1 (en) Yttria insulator ring for use inside a plasma chamber
WO2001045134A2 (en) Method and apparatus for producing uniform process rates
KR20080106427A (ko) 플라즈마 프로세싱 챔버의 선택적 프리-코트를 위한 방법 및 장치
US8342121B2 (en) Plasma processing apparatus
KR20020093841A (ko) 유도결합 플라즈마 에칭장치
JP3458912B2 (ja) プラズマ処理装置
JP3784912B2 (ja) マイクロ波励起プラズマ装置
KR101283645B1 (ko) 내장 무선 주파수 안테나를 구비한 유도 결합 플라즈마반응기
JPH11241189A (ja) 誘導結合放電エッチング装置

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

FPAY Annual fee payment

Payment date: 20130708

Year of fee payment: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

FPAY Annual fee payment

Payment date: 20140709

Year of fee payment: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

FPAY Annual fee payment

Payment date: 20150707

Year of fee payment: 9

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 9

FPAY Annual fee payment

Payment date: 20160712

Year of fee payment: 10

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 10

FPAY Annual fee payment

Payment date: 20170712

Year of fee payment: 11

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 11

FPAY Annual fee payment

Payment date: 20180712

Year of fee payment: 12

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 12

FPAY Annual fee payment

Payment date: 20190711

Year of fee payment: 13

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 13

PC1801 Expiration of term

St.27 status event code: N-4-6-H10-H14-oth-PC1801

Not in force date: 20200630

Ip right cessation event data comment text: Termination Category : EXPIRATION_OF_DURATION

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000