GB0424371D0 - Shielding design for backside metal deposition - Google Patents

Shielding design for backside metal deposition

Info

Publication number
GB0424371D0
GB0424371D0 GB0424371A GB0424371A GB0424371D0 GB 0424371 D0 GB0424371 D0 GB 0424371D0 GB 0424371 A GB0424371 A GB 0424371A GB 0424371 A GB0424371 A GB 0424371A GB 0424371 D0 GB0424371 D0 GB 0424371D0
Authority
GB
United Kingdom
Prior art keywords
metal deposition
backside metal
shielding design
shielding
design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0424371A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trikon Technologies Ltd
Original Assignee
Trikon Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trikon Technologies Ltd filed Critical Trikon Technologies Ltd
Priority to GB0424371A priority Critical patent/GB0424371D0/en
Publication of GB0424371D0 publication Critical patent/GB0424371D0/en
Priority to GB0521968A priority patent/GB2419895B/en
Priority to DE200510052027 priority patent/DE102005052027A1/en
Ceased legal-status Critical Current

Links

GB0424371A 2004-11-04 2004-11-04 Shielding design for backside metal deposition Ceased GB0424371D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0424371A GB0424371D0 (en) 2004-11-04 2004-11-04 Shielding design for backside metal deposition
GB0521968A GB2419895B (en) 2004-11-04 2005-10-28 Shielding design for backside metal deposition
DE200510052027 DE102005052027A1 (en) 2004-11-04 2005-10-31 Shielding device for back metal deposit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0424371A GB0424371D0 (en) 2004-11-04 2004-11-04 Shielding design for backside metal deposition

Publications (1)

Publication Number Publication Date
GB0424371D0 true GB0424371D0 (en) 2004-12-08

Family

ID=33523157

Family Applications (2)

Application Number Title Priority Date Filing Date
GB0424371A Ceased GB0424371D0 (en) 2004-11-04 2004-11-04 Shielding design for backside metal deposition
GB0521968A Active GB2419895B (en) 2004-11-04 2005-10-28 Shielding design for backside metal deposition

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB0521968A Active GB2419895B (en) 2004-11-04 2005-10-28 Shielding design for backside metal deposition

Country Status (2)

Country Link
DE (1) DE102005052027A1 (en)
GB (2) GB0424371D0 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5603219B2 (en) * 2009-12-28 2014-10-08 キヤノンアネルバ株式会社 Thin film forming equipment

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5304248A (en) * 1990-12-05 1994-04-19 Applied Materials, Inc. Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions
US5411624A (en) * 1991-07-23 1995-05-02 Tokyo Electron Limited Magnetron plasma processing apparatus
US5275683A (en) * 1991-10-24 1994-01-04 Tokyo Electron Limited Mount for supporting substrates and plasma processing apparatus using the same
KR100264445B1 (en) * 1993-10-04 2000-11-01 히가시 데쓰로 Plasma treatment equipment
AU4741497A (en) * 1996-09-30 1998-04-24 Lam Research Corporation Apparatus for reducing polymer deposition on substrate support
US6284093B1 (en) * 1996-11-29 2001-09-04 Applied Materials, Inc. Shield or ring surrounding semiconductor workpiece in plasma chamber
US5942042A (en) * 1997-05-23 1999-08-24 Applied Materials, Inc. Apparatus for improved power coupling through a workpiece in a semiconductor wafer processing system
US6051122A (en) * 1997-08-21 2000-04-18 Applied Materials, Inc. Deposition shield assembly for a semiconductor wafer processing system
US6159299A (en) * 1999-02-09 2000-12-12 Applied Materials, Inc. Wafer pedestal with a purge ring
GB2350374B (en) * 1999-05-11 2003-09-24 Trikon Holdings Ltd Deposition apparatus
US6344105B1 (en) * 1999-06-30 2002-02-05 Lam Research Corporation Techniques for improving etch rate uniformity
US6475336B1 (en) * 2000-10-06 2002-11-05 Lam Research Corporation Electrostatically clamped edge ring for plasma processing
US7252738B2 (en) * 2002-09-20 2007-08-07 Lam Research Corporation Apparatus for reducing polymer deposition on a substrate and substrate support

Also Published As

Publication number Publication date
GB0521968D0 (en) 2005-12-07
GB2419895A (en) 2006-05-10
GB2419895B (en) 2010-09-22
DE102005052027A1 (en) 2006-05-24

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)