KR100742765B1 - 리소그래피 장치 및 디바이스 제조방법 - Google Patents

리소그래피 장치 및 디바이스 제조방법 Download PDF

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KR100742765B1
KR100742765B1 KR1020050133107A KR20050133107A KR100742765B1 KR 100742765 B1 KR100742765 B1 KR 100742765B1 KR 1020050133107 A KR1020050133107 A KR 1020050133107A KR 20050133107 A KR20050133107 A KR 20050133107A KR 100742765 B1 KR100742765 B1 KR 100742765B1
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South Korea
Prior art keywords
substrate
optical element
projection system
liquid
height
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Expired - Fee Related
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English (en)
Korean (ko)
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KR20060079112A (ko
Inventor
요한네스 야코부스 마테우스 바젤만스
쇼에르트 니콜라스 람베르투스 돈더스
크리스티안 알렉산더 후겐담
예뢴 요한네스 소피아 마리아 메르텐스
요한네스 카타리누스 후베르투스 물켄스
봅 스트리프케르크
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에이에스엠엘 네델란즈 비.브이.
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020050133107A 2004-12-30 2005-12-29 리소그래피 장치 및 디바이스 제조방법 Expired - Fee Related KR100742765B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/025,603 2004-12-30
US11/025,603 US20060147821A1 (en) 2004-12-30 2004-12-30 Lithographic apparatus and device manufacturing method

Publications (2)

Publication Number Publication Date
KR20060079112A KR20060079112A (ko) 2006-07-05
KR100742765B1 true KR100742765B1 (ko) 2007-07-25

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KR1020050133107A Expired - Fee Related KR100742765B1 (ko) 2004-12-30 2005-12-29 리소그래피 장치 및 디바이스 제조방법

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US (4) US20060147821A1 (enExample)
EP (2) EP1677156B1 (enExample)
JP (3) JP2006191079A (enExample)
KR (1) KR100742765B1 (enExample)
CN (1) CN1808279A (enExample)
SG (1) SG123752A1 (enExample)
TW (1) TWI342468B (enExample)

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US8936367B2 (en) 2008-06-17 2015-01-20 The Invention Science Fund I, Llc Systems and methods associated with projecting in response to conformation
US8733952B2 (en) 2008-06-17 2014-05-27 The Invention Science Fund I, Llc Methods and systems for coordinated use of two or more user responsive projectors
US20090309826A1 (en) 2008-06-17 2009-12-17 Searete Llc, A Limited Liability Corporation Of The State Of Delaware Systems and devices
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US8608321B2 (en) 2008-06-17 2013-12-17 The Invention Science Fund I, Llc Systems and methods for projecting in response to conformation
US8641203B2 (en) 2008-06-17 2014-02-04 The Invention Science Fund I, Llc Methods and systems for receiving and transmitting signals between server and projector apparatuses
US8723787B2 (en) 2008-06-17 2014-05-13 The Invention Science Fund I, Llc Methods and systems related to an image capture projection surface
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US8351024B2 (en) 2009-03-13 2013-01-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method involving a level sensor having a detection grating including three or more segments
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CN103545174B (zh) * 2012-07-16 2016-08-24 无锡华润上华科技有限公司 光刻对焦参数测试方法及系统
WO2015082158A1 (en) * 2013-12-05 2015-06-11 Asml Netherlands B.V. Method and apparatus for measuring a structure on a substrate, models for error correction, computer program products for implementing such methods & apparatus
KR102330321B1 (ko) * 2014-12-12 2021-11-23 에이에스엠엘 네델란즈 비.브이. 기판 모델 파라미터를 계산하고 리소그래피 처리를 제어하기 위한 방법 및 장치
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