KR100659478B1 - 레이저 가공방법 및 가공장치 - Google Patents

레이저 가공방법 및 가공장치 Download PDF

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Publication number
KR100659478B1
KR100659478B1 KR1020057003237A KR20057003237A KR100659478B1 KR 100659478 B1 KR100659478 B1 KR 100659478B1 KR 1020057003237 A KR1020057003237 A KR 1020057003237A KR 20057003237 A KR20057003237 A KR 20057003237A KR 100659478 B1 KR100659478 B1 KR 100659478B1
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KR
South Korea
Prior art keywords
laser beam
lens
laser
workpiece
incident
Prior art date
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KR1020057003237A
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English (en)
Korean (ko)
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KR20050059103A (ko
Inventor
시로 하마다
지로 야마모토
도모유키 야마구치
Original Assignee
스미도모쥬기가이고교 가부시키가이샤
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Publication of KR20050059103A publication Critical patent/KR20050059103A/ko
Application granted granted Critical
Publication of KR100659478B1 publication Critical patent/KR100659478B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Laser Beam Processing (AREA)
KR1020057003237A 2002-08-30 2003-08-29 레이저 가공방법 및 가공장치 KR100659478B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2002-00254015 2002-08-30
JP2002254015 2002-08-30

Publications (2)

Publication Number Publication Date
KR20050059103A KR20050059103A (ko) 2005-06-17
KR100659478B1 true KR100659478B1 (ko) 2006-12-20

Family

ID=31972820

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057003237A KR100659478B1 (ko) 2002-08-30 2003-08-29 레이저 가공방법 및 가공장치

Country Status (5)

Country Link
JP (2) JPWO2004020140A1 (zh)
KR (1) KR100659478B1 (zh)
CN (6) CN101041206A (zh)
TW (1) TWI221102B (zh)
WO (1) WO2004020140A1 (zh)

Cited By (1)

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KR100817824B1 (ko) * 2007-05-28 2008-03-31 주식회사 이오테크닉스 광위치결정유닛의 제어방법

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KR100700654B1 (ko) 2005-02-22 2007-03-27 삼성에스디아이 주식회사 레이저 조사 장치 및 레이저 열 전사법
KR100723935B1 (ko) * 2005-10-18 2007-05-31 주식회사 한광옵토 레이저 패턴 가공 장치
ITBO20060586A1 (it) * 2006-08-03 2006-11-02 El En Spa Dispositivo per il taglio laser di un nastro continuo.
JP4884897B2 (ja) * 2006-09-15 2012-02-29 株式会社キーエンス レーザ加工装置、その制御方法及びその制御プログラム
JP5268749B2 (ja) * 2009-04-01 2013-08-21 株式会社日立ハイテクノロジーズ 基板状態検査方法及びレーザ加工装置並びにソーラパネル製造方法
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JP5580826B2 (ja) 2009-08-11 2014-08-27 浜松ホトニクス株式会社 レーザ加工装置及びレーザ加工方法
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KR101973660B1 (ko) * 2010-10-22 2019-04-30 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 빔 디더링 및 스카이빙을 위한 레이저 처리 시스템 및 방법
TWI400137B (zh) * 2010-12-17 2013-07-01 Ind Tech Res Inst 移除玻璃板材邊緣缺陷之裝置及其方法
CN102248289A (zh) * 2011-01-13 2011-11-23 苏州德龙激光有限公司 晶硅太阳能电池的激光划线绝缘设备
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JP5920662B2 (ja) * 2012-06-05 2016-05-18 三菱マテリアル株式会社 レーザ加工装置およびレーザ加工方法
JP5920661B2 (ja) * 2012-06-05 2016-05-18 三菱マテリアル株式会社 レーザ加工装置およびレーザ加工方法
JP6021493B2 (ja) * 2012-07-30 2016-11-09 株式会社アマダミヤチ レーザ加工システム及びレーザ加工方法
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JP6642702B2 (ja) * 2016-04-18 2020-02-12 株式会社島津製作所 質量分析装置
CN105834597B (zh) * 2016-06-12 2018-05-18 西安石油大学 一种导光板加工机构
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Also Published As

Publication number Publication date
CN101041209A (zh) 2007-09-26
CN100391679C (zh) 2008-06-04
WO2004020140A1 (ja) 2004-03-11
CN101041207A (zh) 2007-09-26
CN101041206A (zh) 2007-09-26
CN101041205B (zh) 2011-11-30
CN101041208A (zh) 2007-09-26
CN1678426A (zh) 2005-10-05
JPWO2004020140A1 (ja) 2005-12-15
CN101041205A (zh) 2007-09-26
JP2008229724A (ja) 2008-10-02
TWI221102B (en) 2004-09-21
KR20050059103A (ko) 2005-06-17
CN100553854C (zh) 2009-10-28
TW200408486A (en) 2004-06-01
JP4721293B2 (ja) 2011-07-13

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