KR100500170B1 - 기판의 수평 및 상하 이송장치 - Google Patents

기판의 수평 및 상하 이송장치 Download PDF

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Publication number
KR100500170B1
KR100500170B1 KR10-2003-0041656A KR20030041656A KR100500170B1 KR 100500170 B1 KR100500170 B1 KR 100500170B1 KR 20030041656 A KR20030041656 A KR 20030041656A KR 100500170 B1 KR100500170 B1 KR 100500170B1
Authority
KR
South Korea
Prior art keywords
substrate
horizontal
vertical
motor assembly
frame
Prior art date
Application number
KR10-2003-0041656A
Other languages
English (en)
Korean (ko)
Other versions
KR20050001482A (ko
Inventor
박용석
김경철
손태봉
Original Assignee
주식회사 디엠에스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34192057&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR100500170(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 주식회사 디엠에스 filed Critical 주식회사 디엠에스
Priority to KR10-2003-0041656A priority Critical patent/KR100500170B1/ko
Priority to TW093115263A priority patent/TWI275551B/zh
Priority to JP2004173036A priority patent/JP4053517B2/ja
Priority to CNB2004100481243A priority patent/CN1284710C/zh
Publication of KR20050001482A publication Critical patent/KR20050001482A/ko
Application granted granted Critical
Publication of KR100500170B1 publication Critical patent/KR100500170B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR10-2003-0041656A 2003-06-25 2003-06-25 기판의 수평 및 상하 이송장치 KR100500170B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR10-2003-0041656A KR100500170B1 (ko) 2003-06-25 2003-06-25 기판의 수평 및 상하 이송장치
TW093115263A TWI275551B (en) 2003-06-25 2004-05-28 Apparatus for transferring substrate in horizontal and vertical directions
JP2004173036A JP4053517B2 (ja) 2003-06-25 2004-06-10 基板の水平及び上下移送装置
CNB2004100481243A CN1284710C (zh) 2003-06-25 2004-06-16 在水平和垂直方向输送衬底的装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2003-0041656A KR100500170B1 (ko) 2003-06-25 2003-06-25 기판의 수평 및 상하 이송장치

Publications (2)

Publication Number Publication Date
KR20050001482A KR20050001482A (ko) 2005-01-07
KR100500170B1 true KR100500170B1 (ko) 2005-07-07

Family

ID=34192057

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2003-0041656A KR100500170B1 (ko) 2003-06-25 2003-06-25 기판의 수평 및 상하 이송장치

Country Status (4)

Country Link
JP (1) JP4053517B2 (ja)
KR (1) KR100500170B1 (ja)
CN (1) CN1284710C (ja)
TW (1) TWI275551B (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100962362B1 (ko) 2008-06-27 2010-06-10 주식회사 디엠에스 기판세정장치
KR100963316B1 (ko) * 2008-06-13 2010-06-11 주식회사 디엠에스 기판세정장치
KR100967222B1 (ko) 2008-06-16 2010-07-05 정진황 이송챔버 및 기판이송방법
KR101052750B1 (ko) * 2008-11-18 2011-08-01 세메스 주식회사 기판 이송 모듈 및 이를 포함하는 기판 처리 장치
KR101052753B1 (ko) * 2008-11-18 2011-08-01 세메스 주식회사 기판 이송 모듈 및 이를 포함하는 기판 처리 장치
KR101302485B1 (ko) * 2010-11-05 2013-09-02 주식회사 로보스타 이송장비
KR20140018496A (ko) * 2012-08-01 2014-02-13 엘지디스플레이 주식회사 건조 장치

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100618918B1 (ko) * 2005-04-12 2006-09-01 주식회사 디엠에스 적층형 기판 이송장치
KR100654849B1 (ko) * 2005-04-14 2006-12-06 주식회사 대성미크론 인쇄회로기판 표면 실장용 스크린 프린터의 다수개의인쇄회로기판 각도조정 및 정렬장치
KR100729958B1 (ko) * 2005-08-30 2007-06-19 에버테크노 주식회사 패널 이송리프터
KR100674882B1 (ko) * 2005-10-24 2007-01-29 주식회사 디엠에스 기판 이송용 트랜스퍼
KR100660780B1 (ko) * 2005-12-26 2006-12-26 주식회사 디엠에스 평판 디스플레이용 기판 전달 장치
KR100793137B1 (ko) * 2006-09-06 2008-01-10 (주)젬텍 엘시디 마더글라스 이송라인의 버퍼스테이션
KR100830873B1 (ko) * 2006-10-17 2008-05-21 주식회사 에스에프에이 인쇄장치
US9834378B2 (en) 2006-12-22 2017-12-05 Brooks Automation, Inc. Loader and buffer for reduced lot size
KR100783762B1 (ko) * 2007-01-04 2007-12-07 주식회사 디엠에스 기판 반송장치
CN101633559B (zh) * 2008-07-24 2011-07-27 洛阳兰迪玻璃机器有限公司 一种玻璃输送升降装置
KR101105416B1 (ko) * 2009-07-23 2012-01-17 주식회사 디엠에스 기판 처리 장치
CN102107781B (zh) * 2009-12-23 2013-06-19 株式会社太星技研 平板玻璃移送装置
KR101917824B1 (ko) * 2012-06-11 2018-11-13 세메스 주식회사 기판 반전 장치 및 방법
KR200470942Y1 (ko) 2013-01-24 2014-01-21 (주)아모레퍼시픽 화장품 용기 홀더 이송장치
CN103569611A (zh) * 2013-10-23 2014-02-12 南京熊猫电子股份有限公司 一种洁净环境玻璃走行提升装置
KR102064803B1 (ko) * 2014-05-09 2020-01-13 주식회사 제우스 기판반전유닛
CN106369955B (zh) * 2016-08-31 2019-08-16 武汉华星光电技术有限公司 薄膜烘干机支架及薄膜烘干机
CN107958865A (zh) * 2017-12-11 2018-04-24 苏州广林达电子科技有限公司 Oled托盘上下传输装置及显示装置
CN108946019B (zh) * 2018-08-09 2020-10-23 李舒欣 一种机械加工生产用平移机械装置
KR102049043B1 (ko) * 2019-08-16 2019-11-26 (주)선우하이테크 기판 위치 가변형 표면 처리장치
CN115312446B (zh) * 2022-10-11 2023-03-21 南通大鹏光电有限公司 一种太阳能光伏电池组件的运输装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100963316B1 (ko) * 2008-06-13 2010-06-11 주식회사 디엠에스 기판세정장치
KR100967222B1 (ko) 2008-06-16 2010-07-05 정진황 이송챔버 및 기판이송방법
KR100962362B1 (ko) 2008-06-27 2010-06-10 주식회사 디엠에스 기판세정장치
KR101052750B1 (ko) * 2008-11-18 2011-08-01 세메스 주식회사 기판 이송 모듈 및 이를 포함하는 기판 처리 장치
KR101052753B1 (ko) * 2008-11-18 2011-08-01 세메스 주식회사 기판 이송 모듈 및 이를 포함하는 기판 처리 장치
KR101302485B1 (ko) * 2010-11-05 2013-09-02 주식회사 로보스타 이송장비
KR20140018496A (ko) * 2012-08-01 2014-02-13 엘지디스플레이 주식회사 건조 장치
KR101977244B1 (ko) * 2012-08-01 2019-05-10 엘지디스플레이 주식회사 건조 장치

Also Published As

Publication number Publication date
CN1284710C (zh) 2006-11-15
KR20050001482A (ko) 2005-01-07
JP4053517B2 (ja) 2008-02-27
TW200502151A (en) 2005-01-16
CN1576199A (zh) 2005-02-09
JP2005019986A (ja) 2005-01-20
TWI275551B (en) 2007-03-11

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