TW200502151A - Apparatus for transferring substrate in horizontal and vertical directions - Google Patents

Apparatus for transferring substrate in horizontal and vertical directions

Info

Publication number
TW200502151A
TW200502151A TW093115263A TW93115263A TW200502151A TW 200502151 A TW200502151 A TW 200502151A TW 093115263 A TW093115263 A TW 093115263A TW 93115263 A TW93115263 A TW 93115263A TW 200502151 A TW200502151 A TW 200502151A
Authority
TW
Taiwan
Prior art keywords
substrate
transferring
horizontal
vertical directions
vertical
Prior art date
Application number
TW093115263A
Other languages
Chinese (zh)
Other versions
TWI275551B (en
Inventor
Yong-Seok Park
Kyung-Chul Kim
Tae-Bong Son
Original Assignee
Dms Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34192057&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TW200502151(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Dms Co Ltd filed Critical Dms Co Ltd
Publication of TW200502151A publication Critical patent/TW200502151A/en
Application granted granted Critical
Publication of TWI275551B publication Critical patent/TWI275551B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

A substrate transferring apparatus includes a frame, a horizontal transferring part for transferring a substrate in a horizontal direction by locating the substrate at an accurate location, preventing the substrate from sagging, and rotating the substrate, the horizontal transferring part being mounted on at the frame; a vertical transferring part for receiving/transferring the substrate from/to the horizontal transferring part and for transferring/receiving the substrate to/from a substrate treating line; and a transferring unit disposed between the vertical transferring part and the substrate treating line to receive/transfer the substrate from/to the vertical transferring part.
TW093115263A 2003-06-25 2004-05-28 Apparatus for transferring substrate in horizontal and vertical directions TWI275551B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2003-0041656A KR100500170B1 (en) 2003-06-25 2003-06-25 Apparatus for horizontal and up-down transporting of works

Publications (2)

Publication Number Publication Date
TW200502151A true TW200502151A (en) 2005-01-16
TWI275551B TWI275551B (en) 2007-03-11

Family

ID=34192057

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093115263A TWI275551B (en) 2003-06-25 2004-05-28 Apparatus for transferring substrate in horizontal and vertical directions

Country Status (4)

Country Link
JP (1) JP4053517B2 (en)
KR (1) KR100500170B1 (en)
CN (1) CN1284710C (en)
TW (1) TWI275551B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI413204B (en) * 2009-07-23 2013-10-21 Dms Co Ltd Apparatus for processing substrate
US9834378B2 (en) 2006-12-22 2017-12-05 Brooks Automation, Inc. Loader and buffer for reduced lot size

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100618918B1 (en) * 2005-04-12 2006-09-01 주식회사 디엠에스 Apparatus for transfering works
KR100654849B1 (en) * 2005-04-14 2006-12-06 주식회사 대성미크론 An angle adjusting and arraying apparatus of number of PCBs for a PCB surface mounting screen printer
KR100729958B1 (en) * 2005-08-30 2007-06-19 에버테크노 주식회사 Panel Transferring Lifter
KR100674882B1 (en) * 2005-10-24 2007-01-29 주식회사 디엠에스 Transfer for use in transmitting works
KR100660780B1 (en) * 2005-12-26 2006-12-26 주식회사 디엠에스 Device for transfer of flat display panel
KR100793137B1 (en) * 2006-09-06 2008-01-10 (주)젬텍 Buffer station of lcd mother glass transport line
KR100830873B1 (en) * 2006-10-17 2008-05-21 주식회사 에스에프에이 Printer
KR100783762B1 (en) * 2007-01-04 2007-12-07 주식회사 디엠에스 Transfering apparatus for substrate
KR100963316B1 (en) * 2008-06-13 2010-06-11 주식회사 디엠에스 apparatus for cleaning substrate
KR100967222B1 (en) 2008-06-16 2010-07-05 정진황 Transfer chamber and transfer method using the same
KR100962362B1 (en) 2008-06-27 2010-06-10 주식회사 디엠에스 apparatus for cleaning substrate
CN101633559B (en) * 2008-07-24 2011-07-27 洛阳兰迪玻璃机器有限公司 Glass conveyor lifting device
KR101052753B1 (en) * 2008-11-18 2011-08-01 세메스 주식회사 Substrate transfer module and substrate processing apparatus including same
KR101052750B1 (en) * 2008-11-18 2011-08-01 세메스 주식회사 Substrate transfer module and substrate processing apparatus including same
CN102107781B (en) * 2009-12-23 2013-06-19 株式会社太星技研 Plate glass transferring device
KR101302485B1 (en) * 2010-11-05 2013-09-02 주식회사 로보스타 Transfer apparatus
KR101917824B1 (en) * 2012-06-11 2018-11-13 세메스 주식회사 Apparatus and Method of rotating substrate
KR101977244B1 (en) * 2012-08-01 2019-05-10 엘지디스플레이 주식회사 apparatus for drying a substrate
KR200470942Y1 (en) 2013-01-24 2014-01-21 (주)아모레퍼시픽 Cosmetic container holder feeder
CN103569611A (en) * 2013-10-23 2014-02-12 南京熊猫电子股份有限公司 Environment-cleaning glass moving and lifting device
KR102064803B1 (en) * 2014-05-09 2020-01-13 주식회사 제우스 Substrate reversal unit
CN106369955B (en) * 2016-08-31 2019-08-16 武汉华星光电技术有限公司 Film dries machine support and film dryer
CN107958865A (en) * 2017-12-11 2018-04-24 苏州广林达电子科技有限公司 Transmitting device and display device above and below OLED pallets
CN108946019B (en) * 2018-08-09 2020-10-23 李舒欣 Translation mechanical device for machining production
KR102049043B1 (en) * 2019-08-16 2019-11-26 (주)선우하이테크 Substrate surface treating apparatus
CN115312446B (en) * 2022-10-11 2023-03-21 南通大鹏光电有限公司 Solar photovoltaic cell module's conveyer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9834378B2 (en) 2006-12-22 2017-12-05 Brooks Automation, Inc. Loader and buffer for reduced lot size
TWI413204B (en) * 2009-07-23 2013-10-21 Dms Co Ltd Apparatus for processing substrate

Also Published As

Publication number Publication date
CN1576199A (en) 2005-02-09
JP2005019986A (en) 2005-01-20
KR20050001482A (en) 2005-01-07
KR100500170B1 (en) 2005-07-07
JP4053517B2 (en) 2008-02-27
CN1284710C (en) 2006-11-15
TWI275551B (en) 2007-03-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees