JP2005019986A - Substrate horizontal/vertical transport equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide substrate horizontal/vertical transport equipment which can avoid a phenomenon in which a substrate sags due to its own weight by upwardly pressurize the bottom face of the substrate and can eliminate the necessity to position any additional inverting portion by integrating a substrate processing line into a laminated structure to enable one inverting portion to invert a substrate and supply it to the processing line. <P>SOLUTION: This substrate horizontal/vertical transport equipment includes a frame, at least one horizontal transport means which is installed in the frame and carries a substrate in a fixed position while avoiding sagging of the substrate and can invert the substrate, a vertical transport means which is positioned in the frame so that the vertical transport means can be lifted or lowered and receives the substrate from the horizontal transport means and supplies it to a substrate processing line, and a transport unit which is positioned between the vertical transport means and the substrate processing line and receives the substrate from the vertical transport means and transports it. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a horizontal and vertical transfer device for a substrate, and more particularly, can improve the transfer efficiency of a substrate by enabling alignment of the substrate, prevention of a substrate dripping phenomenon, and inversion of the substrate. The present invention relates to a horizontal and vertical transfer device for a substrate.

In general, a substrate used for a flat panel display (FPD), a semiconductor wafer, an LCD, a glass for a photomask, etc. is cleaned after passing through a series of processing lines and undergoing processes such as etching, stripping and rinsing.
In such a substrate processing line, a transfer device for transferring a substrate between the lines is indispensable and various techniques relating to the substrate transfer device have been developed.

FIG. 1 discloses, as an example of such a technique, Patent Document 1 filed under the name of “glass wet cleaning apparatus”.
Korean Patent Publication No. 2002-58790

  As shown in the figure, the apparatus includes a reversing unit 102 for reversing the glass 100, a loader 104 for receiving the glass 100 from the reversing unit 102 and supplying it to the cleaning unit, and a surface on the surface of the glass 100. First to fourth cleaning units 106, 108, 112, 116 for sequentially cleaning foreign matter, upstream and downstream conveyors 110, 114 for rotating the glass 100 to a predetermined angle and supplying the cleaning unit, and cleaning The drying unit 118 for drying the formed glass 100 and the unloader 120 for unloading the glass 100 are configured. Therefore, the glass cleaning apparatus having such a structure cleans through a series of steps by transferring the glass along the arrow direction.

  However, such a glass cleaning apparatus needs to be properly inverted in order to align the substrate in the width direction.

  Furthermore, recently, substrates used for LCDs or the like have been gradually increased in size, and there is a demand for substrates that are increased in size from the conventional 650 × 550 mm to, for example, 830 × 650 mm or more. Therefore, when such a large substrate is supplied to the line, interference or the like may occur due to the length of the substrate. Therefore, it is necessary to invert the substrate and transport it in the length direction.

  However, in the invention as described above, there is a problem that the reversing portions must be arranged at various positions in order to align the substrate transfer direction. In addition, when the substrate is increased in size, when the substrate is transferred, a phenomenon occurs in which the intermediate portion hangs due to the weight of the substrate, etc., which affects the quality of the substrate and increases the defect rate. .

  When the substrate is transferred by supporting the substrate on the substrate transfer device, the substrate is biased to one side due to an external impact or the like. When supplying such a substrate to the line, the substrate is aligned again at an accurate position. There is the hassle of having to let it.

  Accordingly, the present invention has been made to solve the above-described problems, and an object of the present invention is to prevent the phenomenon that the substrate hangs down due to its own weight by pressing the bottom surface of the substrate upward. An object of the present invention is to provide a horizontal and vertical transfer device for a substrate.

  Another object of the present invention is to integrate the substrate processing line into a stacked form, so that the substrate is inverted by one reversing unit and supplied to the processing line, so there is no need to additionally arrange the reversing unit. It is to provide a horizontal and vertical transfer device for a substrate.

  Another object of the present invention is to provide a horizontal and vertical transfer apparatus for a substrate, in which a substrate alignment unit is provided in the substrate transfer means and aligned at a fixed position during substrate transfer so that a separate alignment unit is not required. .

  Another object of the present invention is to provide a horizontal and vertical transfer device for a substrate that can easily transfer a substrate to the upper and lower parts when the substrate transfer means and the substrate processing line are configured in a vertically stacked form. is there.

  In order to achieve the above object, the present invention provides a frame; and is mounted inside the frame, and the substrate is aligned at a predetermined position to prevent the substrate from dripping and to reverse the substrate. The above-mentioned horizontal transfer means; and a vertical transfer means which is disposed so as to be movable up and down on the frame, accepts (takes over) a substrate from the horizontal transfer means and supplies (takes) the substrate to a substrate processing line; There is provided a horizontal and vertical transfer apparatus for a substrate, including a transfer unit disposed between a transfer means and a substrate processing line and receiving and transferring a substrate from the vertical transfer means.

The substrate horizontal and vertical transfer apparatus of the present invention has the following advantages.
First, by providing the horizontal transfer means with a floating part, it is possible to prevent the substrate from dripping and to reduce the product defect rate.
Second, by providing a rotating member, the substrate is inverted in advance during transfer and supplied to the line, so there is no need to place a separate inversion part in the line, so the operation is simple and the investment is reduced. be able to.
Third, since the horizontal transfer means is provided with an alignment portion and aligned at an accurate position when the substrate is transferred, an additional alignment portion is not required, so that the operation is simple and the installation cost can be reduced.
Fourthly, the substrate can be easily transferred up and down by providing the vertical transfer means composed of the upper and lower hands.

Hereinafter, a horizontal and vertical transfer apparatus for a substrate according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 2 is a perspective view illustrating a substrate processing line to which a horizontal and vertical transfer apparatus for substrates according to a preferred embodiment of the present invention is applied. FIG. 3 is a side view of the substrate processing line shown in FIG.

  As shown in the drawing, the substrate horizontal and vertical transfer apparatus proposed by the present invention is applied to a normal substrate processing line, but preferably on the entrance side and the exit side of the stacked substrate processing line as shown in FIG. Applied.

  That is, the laminated substrate processing line is a line in which the substrate processing unit 13 for processing the substrate (I) is miniaturized inside the frame 1 having a multilayer structure, and is provided on the entry side and the exit side thereof. By arranging the horizontal transfer means 3 and the vertical transfer means 5 and 7 for the substrate, the substrate (I) is supplied and discharged.

  The horizontal transfer means 3 and the vertical transfer means 5 and 7 of the substrate are mounted in the frame 1 and the inside of the frame 1 to cause the substrate (I) to hang down by aligning the substrate (I) at a fixed position. At least one or more horizontal transfer means 3 capable of preventing and reversing the substrate (I) and the frame 1 are arranged so as to be movable up and down, and accept the substrate (I) from the horizontal transfer means 3 (Takeover) vertical transfer means 5, 7 and between the vertical transfer means 5, 7 and the substrate processing unit 13, and accepts the substrate (I) from the vertical transfer means 5, 7 ( And transfer units 9 and 11 to be transferred.

  In the horizontal and vertical transfer device for the substrate, the horizontal transfer means 3 is mounted on a pair of rails 17 mounted on the frame 1 and slidable, and mounted on the upper portion of the lower base 20. The upper base 21 on which the substrate (I) is placed, the alignment unit 23 that aligns the substrate (I) at a fixed position, and a plurality of layers that prevent the drooping phenomenon by floating the substrate (I) to a certain height. The floating part 25 is comprised.

More specifically, as shown in FIGS. 4 and 5, sliding plates 18 and 19 are provided at both ends of the lower base 20, and the sliding plates 18 and 19 are disposed on the frame 1. The pair of rails 17 are slidably provided.
Accordingly, when the motor assembly (not shown) is driven, the sliding plates 18 and 19 are moved along the rails 17 so that the horizontal transfer means 3 is moved in the front-rear direction.

  The upper base 21 is provided with two alignment portions 23 and a plurality of support pins 29 arranged diagonally to each other. The substrate (I) is stably provided on the alignment portion 23 and the plurality of support pins 29.

  FIG. 6 shows the alignment unit 23 in detail. That is, the alignment portion 23 has a case 30 shape, and the motor assembly 32 is mounted therein. The motor assembly 32 is provided with a connecting bar 34 that reciprocates in the central direction of the horizontal transfer means 3 when the motor assembly 32 is driven.

  In addition, a pair of alignment pins 36 protrudes from both ends of the connecting bar 34, and the pair of alignment pins 36 protrudes upward through a long hole 40 formed in the upper surface of the case 30. The corner portion 38 of the substrate (I) is located between the pair of alignment pins 36.

  Accordingly, the pair of alignment pins 36 are moved to a preset position by driving the motor assembly 32, and at this time, each corner portion 38 of the substrate (I) is pressed within an appropriate range, whereby the substrate (I ) Are aligned to the correct position. Such an alignment portion 23 has been described as two in the present invention, but is not limited thereto, and may be more than that.

  Referring to FIG. 4 again, a plurality of the floating portions 25 are provided on the upper base 21, and air is blown to the bottom surface of the substrate (I) to pressurize the substrate (I) upward. This prevents the substrate (I) placed on the plurality of support pins 29 from dripping.

  As shown in FIGS. 4 and 7, the floating portion 25 includes a plate 42 provided on the upper portion of the upper base 21, an auxiliary plate 44 provided on the upper surface of the plate 42, and the auxiliary plate 44. And a perforated plate 46 that is mounted on the substrate, supports the substrate (I), and blows out air of a constant pressure to float the substrate (I) to a constant height. The porous plate 46 is a generally known porous material, that is, a plate in which many fine holes are formed. And such a perforated plate 46 is connected with an air supply part (not shown). Therefore, the air supplied by the air supply unit (not shown) is ejected to the upper surface through the fine holes of the perforated plate 46 to form a constant air layer. Of course, any substance can be used as long as it can form a suitable pressure layer in addition to air.

  At this time, the substrate (I) is in a state of being supported by a plurality of support pins 29, and the middle of the substrate (I) tends to hang downward due to its own weight. Accordingly, the air ejected from the plurality of floating portions 25 pushes up the bottom surface of the substrate (I) to prevent the substrate (I) from dripping. Eventually, the substrate (I) can maintain an excellent flatness by the floating portion 25, so that the defective rate of the product can be reduced.

  In the above, the floating portion by the air injection method has been described. However, the present invention is not limited to this, and a method of pressing the substrate upward, that is, a rubber, a sponge, a fluid method, and the like can also be applied.

  As shown in FIG. 5, a rotating member 27 is mounted between the upper base 21 and the lower base 20. The rotating member 27 includes a motor assembly 28, and is preferably a direct connection motor (DD Motor; Direct Motor). The rotating member 27 has a lower portion provided on the upper surface of the support portion 26 mounted on the lower base 20, and an upper portion connected to the bottom surface of the upper base 21. Accordingly, when the rotating member 27 is driven, the upper base 21 rotates at a constant angle.

  As a result, since the user can rotate the upper base 21 by the rotation of the rotating member 27, the direction of the supported substrate (I) can be reversed and transferred in the width direction or the length direction. it can. Of course, when it is not necessary to reverse the substrate (I), the substrate (I) is transferred without driving the rotating member 27.

  In the above, one horizontal transfer means has been described, but the present invention is not limited to this, and there may be two or more horizontal transfer means.

  On the other hand, the substrate (I) transferred by the horizontal transfer means 3 (FIG. 2) is supplied to the vertical transfer means 5 and 7 (FIG. 2) and transferred up and down.

  That is, as shown in FIGS. 3 and 8, the vertical transfer means 5, 7 includes a first up / down buffer unit 5 and a second up / down buffer unit 7, and the first up / down buffer unit 5. Is mounted on one side of the frame 1 so as to be movable up and down and accepts the substrate (I) from the horizontal transfer means 3, and the second up / down buffer unit 7 is connected to the first up / down buffer unit 5. Mounted on the opposite side, the processed substrate (I) is taken over by the horizontal transfer means 3.

  Since the first and second up / down buffer units 5 and 7 have the same structure, only one up / down buffer unit 5 will be described below.

  The first up / down buffer unit 5 receives a substrate (I) from the horizontal transfer means 3 and moves up and down, and receives a substrate (I) from the pair of upper hands 15 and a loader 9. It consists of a lower hand 6 that takes over (FIG. 2). The pair of upper hands 15 includes first and second hands 51 and 53 formed in equilibrium with each other, and the first and second hands 51 and 53 include horizontal portions 55 and 57 and a vertical portion 62, respectively. 64 and has a “F” shape. A plurality of upper support pins 58 are formed on the upper surfaces of the horizontal portions 55 and 57 so as to protrude upward. Accordingly, the substrate (I) is stacked and supported on the plurality of upper support pins 58 of the horizontal portions 55 and 57. The vertical portions 62 and 64 of the first and second hands 51 and 53 are moved up and down and left and right with lower end portions 65 and 70 slidably mounted on the connecting bar 66.

  More specifically, guides 72 are formed to protrude at both ends of the panel 2, and transfer slots 74 formed at both ends of the connecting bar 66 are slidably coupled to the guides 72. Further, a guide bracket 76 protrudes in the middle of the connecting bar 66, and a vertical connecting shaft 80 passes through the guide bracket 76. The vertical connecting shaft 80 is rotatably fixed by a support bracket 78, and is preferably a ball screw. A first motor assembly 88 is connected to the lower end of the vertical connection shaft 80.

  Accordingly, when the first motor assembly 88 is driven, the vertical connecting shaft 80 rotates in a fixed direction or in the reverse direction, and at this time, the guide bracket 76 of the connecting bar 66 and the vertical connecting shaft 80 are screwed together. Therefore, the connecting bar 66 reciprocates up and down.

  Further, horizontal rails 68 and 69 are attached to both end portions of one side of the connecting bar 66, and the lower ends 70 and 65 of the first and second hands 51 and 53 are attached to the pair of horizontal rails 68 and 69, respectively. Each is slidably coupled.

  A second motor assembly 90 is provided between the pair of horizontal rails 68 and 69, and horizontal connecting shafts 92 extend on both sides of the second motor assembly 90. Such a horizontal connecting shaft 92 is screwed to the lower end portions 65 and 70 of the vertical portions 62 and 64, respectively.

  Accordingly, when the second motor assembly 90 is driven, the horizontal connecting shaft 92 rotates in a fixed direction or a reverse direction, and the first and second hands 51 and 53 move inward or outward along the left-right direction. . As a result, the pair of upper hands 15 move up and down or left and right as the first and second motor assemblies 88 and 90 are driven, so that the pair of upper hands 15 become far from and close to each other as necessary.

  On the other hand, the lower hand 6 includes a horizontal frame 73 on which the substrate (I) is placed, and a support plate 84 that supports the horizontal frame 73 and reciprocates the horizontal frame 73 up and down.

  More specifically, the horizontal frame 73 has a “F” shape, and a plurality of lower support pins 75 project from the upper surface. The plurality of lower support pins 75 are arranged between the conveyance rollers 10 of a loader 9 (FIG. 2) described later. Therefore, when the lower hand 6 is raised, the plurality of lower support pins 75 pass between the transport rollers 10 and rise to the upper part of the substrate pass line (P / S) and are transferred from the upper hand 15. Undertake the substrate (I).

  The support plate 84 has an upper end connected to the bottom surface of the horizontal frame 73 and a lower end connected to a rotating shaft 86 connected to the third motor assembly 82. At this time, the rotating shaft 86 preferably includes a ball screw that is screwed to the support plate 84. The support plate 84 is supported by a pair of guide bars 89 protruding on the panel 2. Therefore, when the third motor assembly 82 is driven, the rotation shaft 86 rotates in a fixed direction or in the reverse direction, thereby causing the support plate 84 to reciprocate up and down.

  The upper and lower hands 15 and 6 having such a structure are waiting at a certain height when the substrate (I) is lowered onto the first and second hands 51 and 53 of the upper hand 15. It intersects with the horizontal frame 73 of the lower hand 6, and at this time, the distance between the first and second hands 51, 53 is formed wider than the width of the lower hand 6. 51, 53. Accordingly, when the first and second hands 51 and 53 pass through the lower hand 6 and are lowered to a position lower than the lower hand 6, the substrate (I) is placed on the horizontal frame 73 of the lower hand 6. . Then, the first and second hands 51 and 53 move left and right to prevent interference with the lower hand 6, so that the lower hand 6 is smoothly lowered.

  When the lower hand 6 descends and falls below the substrate pass line (P / S), the substrate (I) is placed on the transfer units 9 and 11 (FIG. 2) and transferred to the substrate processing unit 13.

  As shown in FIG. 2, the transfer units 9 and 11 include a loader 9 disposed on the entrance side of the substrate processing unit 13 and an unloader 11 disposed on the exit side. The loaders and unloaders 9 and 11 have the same structure, that is, a plurality of transport rollers 10 that can be rotated by a drive motor (not shown). Further, idle rollers 10a for preventing the substrate (I) from dripping are mounted on the transport rollers 10, respectively. Accordingly, when the driving motor (not shown) is operated, the plurality of transport rollers 10 rotate to transfer the substrate (I) supplied from the first up / down buffer unit 5 to the substrate processing unit 13, The substrate (I) transferred from the substrate processing unit 13 is supplied to the second up / down buffer unit 7.

  Hereinafter, the operation of the horizontal and vertical transfer apparatus according to the preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

  First, an operation process of the horizontal transfer means for the substrate will be described with reference to FIGS. 2 to 7. The horizontal transfer means 3 reaches a certain position, preferably a substrate undertaking position, and takes over the substrate. When the substrate (I) is placed on the horizontal transfer means 3, the bottom surface of the substrate (I) comes into contact with a plurality of support pins 29 protruding from the upper base 21. Then, the motor assembly 32 provided in the alignment unit 23 is driven, and the alignment pin 36 moves along a diagonal direction to a preset position.

  When the alignment pin 36 moves to a preset position, the two alignment pins 36 press the corners 38 of the substrate (I), thereby aligning the substrate (I) at an accurate position. At this time, air with a constant pressure is supplied to the floating part 25 from an air supply part (not shown), and air is being jetted to the upper part of the porous plate 46. Therefore, the ejected air forms an air layer having a constant pressure, and the air layer pushes up the bottom surface of the substrate (I) to prevent the substrate (I) from dripping due to its own weight. be able to.

  When the substrate (I) is to be reversed, the direction of the supporting substrate (I) is reversed by driving the rotating member 27 mounted between the upper and lower bases 21 and 20. Can be made. That is, in the case of a large substrate having a size of 830 × 650 mm or more, interference or the like may occur when the substrate is transferred in the length direction and put into the processing process. In such a case, by driving the rotating member 27, the substrate (I) can be reversed in the width direction and smoothly put into the processing step. Of course, when it is not necessary to reverse the substrate (I), the substrate (I) is transferred without driving the rotating member 27.

  On the other hand, the horizontal transfer means 3 as described above, after placing the substrate (I), moves a certain distance along the frame 1 to reach the position adjacent to the vertical transfer means 5 and 7 and takes over the substrate. . That is, the first motor assembly 88 of the first up / down buffer unit 5 is driven to raise the connection bar 66, and the first and second hands 51 and 53 coupled to the connection bar 66 are raised. And it raises to a fixed height and waits until the horizontal transfer means 3 approaches.

  When the horizontal transfer means 3 approaches, the first and second hands 51 and 53 rise slightly to support both frame portions of the substrate (I) and push it upward to move the substrate (I) horizontally. Take it up from 3.

  When the upper hand 15 receives the substrate, the first motor assembly 88 is driven in the reverse direction, and the upper hand 15 is lowered to a certain position. At this time, the plurality of lower support pins 75 projecting from the lower hand 6 are in a state of passing through between the transport rollers 10 of the loader 9 and waiting at a height equal to or higher than the substrate pass line (P / S). .

  When the first and second hands 51, 53 of the upper hand 15 pass through the lower hand 6 and descend, the lower hand 6 passes between the first and second hands 51, 53. Therefore, the substrate (I) supported by the first and second hands 51 and 53 is taken over by being placed on the horizontal frame 73 of the lower hand 6.

  Then, the second motor assembly 90 is driven, and the first and second hands 51 and 53 move outward along the left-right direction. Therefore, the occurrence of interference can be prevented when the lower hand 6 is lowered.

  When the substrate (I) is received by the lower hand 6, the third motor assembly 82 is driven and the support plate 84 of the lower hand 6 is lowered. At this time, the plurality of lower support pins 75 protruding upward from the horizontal frame 73 pass between the transport rollers 10 of the loader 9 and descend. Accordingly, when the lower hand 6 is lowered and the plurality of lower support pins 75 are lowered below the substrate pass line (P / S), the substrate (I) is separated from the lower hand 6 and stacked on the upper portion of the transport roller 10 of the loader 9. Placed.

  When the substrate (I) is placed on the transport roller 10, a drive motor (not shown) is operated to rotate the transport roller 10, and the substrate (I) is supplied to the substrate processing unit 13. At this time, since the length of the substrate (I) is long, a phenomenon that the substrate hangs down during the transfer may occur. This is prevented by supporting the substrate (I) by the idle roller 10a of the transport roller 10. To do. In particular, in the case of a large-sized substrate having a size of 830 × 650 mm or more, the dripping phenomenon is remarkable, and thus application of such an idle roller 10a is required.

  Through this process, the substrate (I) is transferred from the vertical transfer means 5 and 7 to the substrate processing unit 13 through the loader 9.

  Meanwhile, the operation of the second up / down buffer unit 7 is in reverse order to the first up / down buffer unit 5 (the first and second up / down buffer units have the same structure. (It will be described using the same reference numerals as the buffer unit). That is, when the substrate (I) is transferred by the unloader 11 and reaches a certain position, the third motor assembly 82 is driven to raise the lower hand 6. At this time, the plurality of lower support pins 75 of the lower hand 6 pass between the transport rollers 10 and rise to the upper part of the substrate pass line (P / S). At this time, the first and second hands 51 and 53 of the upper hand 15 are in a standby state at a certain height.

  When the lower hand 6 is raised and the substrate (I) reaches a certain position, the second motor assembly 90 is driven, and the first and second hands 51 and 53 of the upper hand 15 are moved along the left-right direction. Move inward each. When the first and second hands 51 and 53 come into contact with the bottom surfaces of both frame portions of the substrate (I) supported by the lower hand 6, the first motor assembly 88 is driven to drive the first and second hands 51. , 53 are raised. Accordingly, the substrate (I) supported by the lower hand 6 is taken over by the upper hand 15.

  After the upper hand 15 takes over the substrate (I), the first and second hands 51 and 53 rise to reach a certain height, and take over the substrate (I) to the horizontal transfer means 3.

  As described above, the substrate is transferred to the substrate processing step by being transferred by the horizontal transfer means 3 and the vertical transfer means 5 and 7.

  The preferred embodiments of the present invention have been described above. However, the present invention is not limited thereto, and various modifications can be made within the scope of the claims, the detailed description of the invention, and the attached drawings. Of course, this also belongs to the scope of the present invention.

It is the schematic which shows the substrate processing line to which the conventional substrate transfer apparatus was applied. 1 is a perspective view showing a substrate processing line to which a substrate horizontal and vertical transfer apparatus according to a preferred embodiment of the present invention is applied. FIG. 3 is a side view of the substrate processing line shown in FIG. 2. It is a perspective view which expands and shows the horizontal transfer means of the board | substrate shown by FIG. FIG. 6 is a rear view showing horizontal transfer means for the substrate shown in FIG. 5. FIG. 5 is an enlarged perspective view illustrating an alignment portion of the substrate illustrated in FIG. 4 in an enlarged manner. It is an expansion perspective view which expands and shows the floating part of the board | substrate shown by FIG. It is a perspective view which shows the structure of the vertical transfer means of the board | substrate shown by FIG.

Explanation of symbols

3 Horizontal transfer means 5, 7 Vertical transfer means 6 Lower hand 9, 11 Transfer unit 10 Transport roller 10 a Idle roller 13 Substrate processing unit 15 Upper hand 17 Rail 18, 19 Sliding plate 20 Lower base 21 Upper base 23 Alignment part 25 Floating upper part DESCRIPTION OF SYMBOLS 26 Support part 27 Rotating member 28 Motor assembly 29,58 Support pin 30 Case 34,66 Connecting bar 36 Alignment pin 38 Corner part 42 Plate 44 Auxiliary plate 46 Perforated plate 51 First hand 53 Second hand 55, 57 Horizontal part 62 , 64 Vertical portion 65, 70 Lower end portions 68, 69 of the first and second hands Horizontal rail 72 Guide 73 Horizontal frame 75 Lower support pin 76 Guide bracket 78 Support bracket 80 Vertical connecting shaft 82 Third motor assembly 84 Support plate 86 Rotation shaft 88 First motor set Body 89 guide bar 90 second motor assemblies 92 horizontal connecting shaft

Claims (11)

Frame;
At least one horizontal transfer means mounted inside the frame and capable of aligning the substrate at a fixed position to prevent the substrate from dropping and reversing the substrate;
A vertical transfer means disposed on the frame so as to be movable up and down, receiving a substrate from the horizontal transfer means and supplying the substrate to a substrate processing line, or taking over the substrate to the horizontal transfer means and receiving from the substrate processing line;
And a transfer unit disposed between the vertical transfer unit and the substrate processing line, for receiving the substrate from the vertical transfer unit or taking over the substrate to the vertical transfer unit and transferring the substrate. Horizontal and vertical transfer device.   The horizontal transfer means includes a slidable lower base provided on a rail mounted on the frame, an upper base mounted on an upper portion of the lower base, and a substrate placed thereon, and protrudes on the upper base. The apparatus of claim 1, further comprising a plurality of support pins formed to support the substrate, and an alignment unit that aligns the substrate at a predetermined position.   The horizontal transfer means may further include a floating portion that pressurizes the bottom surface of the substrate by air pressure, and a rotating member that is disposed between the upper and lower bases and reverses the upper base. The horizontal and vertical transfer apparatus of the board | substrate of Claim 2.   The floating part includes at least one plate provided on the upper base, and a perforated plate which is provided on an upper surface of each of the plates and causes the mounted substrate to float upward by blowing air. The apparatus for horizontally and vertically transferring a substrate according to claim 3, further comprising: an air supply unit that supplies air to the perforated plate.   The alignment unit includes a case having a pair of elongated holes formed on an upper surface thereof, a motor assembly attached to the case, and a motor assembly that is connected to the motor assembly. A pair of reciprocating connecting bars, and a pair of protrusions protruding upward at both ends of the connecting bar, protruding through the elongated holes and projecting to the top of the case, and pressurizing corners of the substrate to align them in place. The horizontal and vertical transfer device for a substrate according to claim 2, further comprising:   4. The horizontal and vertical transfer apparatus according to claim 3, wherein the rotating member includes a direct motor having a lower part connected to the lower base and an upper part connected to the upper base. The vertical transfer means includes
An upper hand that can move vertically or horizontally, accepts a substrate from the horizontal transfer means or takes over a substrate to the horizontal transfer means, and accepts a substrate from the upper hand to supply a substrate to the transfer unit or the transfer unit The horizontal and vertical transfer apparatus for a substrate according to claim 1, further comprising an up / down unit including a lower hand that takes over the substrate supplied from the upper hand.   The upper hand includes first and second hands arranged in parallel to each other, and the first and second hands have a plurality of upper support pins protruding from the upper surface thereof, and a horizontal portion on which a substrate is placed. The horizontal and vertical transfer device for a substrate according to claim 7, further comprising a vertical portion mounted on the frame and capable of moving vertically and horizontally.   The vertical part of the first and second hands can move up and down when the first motor assembly is driven by connecting a connecting bar connecting the lower ends to the first motor assembly. A lower end portion of the vertical portion is slidably coupled to a horizontal rail mounted on a side surface of the coupling bar, and is coupled to the second motor assembly by a horizontal coupling shaft, thereby driving the second motor assembly. 9. The apparatus for horizontally and vertically transferring a substrate according to claim 8, wherein the apparatus can move to the left and right sometimes.   The lower hand includes a horizontal frame, a plurality of lower support pins formed on the upper surface of the horizontal frame, on which a substrate is placed, and is attached to the frame and connected to a third motor assembly, thereby The apparatus for horizontally and vertically transferring a substrate according to claim 7, further comprising a support plate that reciprocates up and down when the motor assembly is driven. The apparatus of claim 7, wherein the up / down unit includes first and second up / down buffer units disposed at front and rear sides of the frame, respectively.

Images