KR101302485B1 - Transfer apparatus - Google Patents

Transfer apparatus Download PDF

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Publication number
KR101302485B1
KR101302485B1 KR1020100109474A KR20100109474A KR101302485B1 KR 101302485 B1 KR101302485 B1 KR 101302485B1 KR 1020100109474 A KR1020100109474 A KR 1020100109474A KR 20100109474 A KR20100109474 A KR 20100109474A KR 101302485 B1 KR101302485 B1 KR 101302485B1
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KR
South Korea
Prior art keywords
horizontal
vertical
fork
substrate
coupled
Prior art date
Application number
KR1020100109474A
Other languages
Korean (ko)
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KR20120048058A (en
Inventor
최오성
고임섭
Original Assignee
주식회사 로보스타
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Priority to KR1020100109474A priority Critical patent/KR101302485B1/en
Publication of KR20120048058A publication Critical patent/KR20120048058A/en
Application granted granted Critical
Publication of KR101302485B1 publication Critical patent/KR101302485B1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/023—Cartesian coordinate type
    • B25J9/026—Gantry-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/066—Transporting devices for sheet glass being suspended; Suspending devices, e.g. clamps, supporting tongs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

Abstract

The present invention relates to a transfer device, the present invention frame; Horizontal guide members provided in the main body frame; A horizontal moving frame coupled to the horizontal guide members to be movable and provided with vertical guide members; A horizontal driving unit moving the horizontal moving frame; An up and down moving member movably coupled along the up and down direction guide members; An up and down drive unit for moving the up and down moving member; An adsorption fork rotatably coupled to the up and down moving member and configured to adsorb or release adsorption of the substrate; And a rotation drive unit for rotating the suction fork. In the present invention, since the adsorption fork adsorbing the substrate moves simultaneously with the horizontal, vertical and rotational movements, the adsorption fork moves to the cassette in order to move the substrate contained in the cassette to the stage and adsorb the substrate contained in the cassette again. The time is shortened and the space in which the suction fork moves is small.

Description

Transport equipment {TRANSFER APPARATUS}

The present invention relates to a transport equipment.

In general, a liquid crystal display includes a first substrate including a color filter layer, a second substrate on which driving elements are arranged, a paste (also called a sealant) pattern to attach the first substrate and the second substrate, and the second substrate. It includes a liquid crystal layer positioned between the first and second substrates.

When the power is applied to the driving elements of the second substrate, the liquid crystal display drives the liquid crystal molecules of the liquid crystal layer to control the amount of light passing through the liquid crystal layer to display image information.

An example of the method of manufacturing the said liquid crystal display device is as follows.

First, a substrate having driving elements is manufactured in a plate-shaped glass having a predetermined size. The board | substrate with a color filter layer is produced in plate-shaped glass which has a predetermined size. The paste is applied to one of the two substrates in a set pattern. Liquid crystal is dripped in the inner region of the paste pattern. The two substrates are bonded together. The two bonded substrates are called mother substrates. The mother substrate is cut and divided into unit panels constituting the liquid crystal display.

Liquid crystal displays are manufactured through various processes in manufacturing lines in which manufacturing equipment is arranged. On the other hand, the transfer equipment for transferring the substrate (or glass panel) between the manufacturing line and the manufacturing line or manufacturing equipment and manufacturing equipment is installed. The transfer equipment transfers the finished substrate to another manufacturing line after the process of processing the substrate in the manufacturing line (or manufacturing equipment).

The transfer equipment should be transported within a short time during the transfer of the substrate in order to increase the productivity, and also should be small in size to reduce the installation space.

An object of the present invention is not only to shorten the time for transferring the glass panel or the substrate, but also to reduce the moving space for transferring the glass panel or the substrate.

In order to achieve the object of the present invention, the body frame; Horizontal guide members provided in the main body frame; A horizontal moving frame coupled to the horizontal guide members to be movable and provided with vertical guide members; A horizontal driving unit moving the horizontal moving frame; An up and down moving member movably coupled along the up and down direction guide members; An up and down drive unit for moving the up and down moving member; An adsorption fork rotatably coupled to the up and down moving member and configured to adsorb or release adsorption of the substrate; And a rotation driving unit for rotating the adsorption fork.

The main body frame preferably includes a rectangular frame to which four bars are connected, and four support shafts respectively coupled to a lower surface of the rectangular frame.

One side of the main body frame is provided with a cassette detachment unit for detaching the cassette containing the substrate, the other side of the main frame is preferably a stage is located.

The horizontal moving frame includes a horizontal member having both ends movably coupled to the horizontal guide members, respectively; It is preferable that the horizontal members are coupled to each other at a predetermined interval, and include vertical guide members positioned in the vertical direction.

Both ends of the vertical movement member are movably coupled to the vertical guide members, respectively, and a length adjusting unit is provided between one end of the vertical movement member and the vertical guide member coupled to the one end thereof. desirable.

The adsorption fork preferably adsorbs the substrate in a vertical state in the downward direction and drops the adsorbed substrate on the horizontal.

In the present invention, since the adsorption fork adsorbing the substrate (or glass panel) is simultaneously made of horizontal, vertical and rotational movements, the adsorption fork adsorbs the substrate contained in the cassette to the stage and moves the cassette back to adsorb the substrate contained in the cassette. Travel time is short, and the space where the suction fork moves is small. As a result, the present invention can move a large number of substrates in the cassette to the stage in a short time, and also can be reduced in size, taking up less space for installation.

1 is a perspective view showing one embodiment of a transfer equipment according to the present invention,
Figure 2 is a side view showing an embodiment of the transfer equipment,
3 is a front view showing an embodiment of the transfer equipment,
Figure 4 is a side view showing a length adjusting unit constituting an embodiment of the transfer equipment,
Figure 5 is a perspective view showing a suction fork and a rotation drive unit constituting an embodiment of the transfer equipment,
Figures 6, 7, and 8 are side views showing the operating states of one embodiment of the transfer equipment, respectively.

Hereinafter, with reference to the accompanying drawings an embodiment of the transfer equipment according to the present invention.

1 is a perspective view showing an embodiment of a transfer equipment according to the present invention. 2 is a side view of the transfer equipment. 3 is a front view of the transfer equipment. 4 is an enlarged cross-sectional view of a portion of the transport equipment.

As shown in Figure 1, 2, 3, 4, one embodiment of the transfer equipment according to the present invention is the main frame 100, the horizontal guide member 200, the horizontal moving frame 300, the horizontal direction And a driving unit 400, a vertical moving member 500, a vertical driving unit 600, a suction fork 700, and a rotation driving unit 800.

The body frame 100 preferably includes a quadrangular frame 110 connected by four bars and four support shafts 120 respectively coupled to a bottom surface of the rectangular frame 110. The four support shafts 120 are preferably coupled to corner portions of the rectangular frame 110, respectively. The support shafts 120 are respectively coupled to the rectangular frame 110 at an upper portion thereof. When the four support shafts 120 are referred to as the first, second, third, and fourth support shafts 121, 122, 123, and 124, respectively, in the counterclockwise direction when viewed from the top of the rectangular frame 110. The first support shaft 121 and the second support shaft 122 are connected by the reinforcing bar 130. The second support shaft 122 and the third support shaft 123 are connected by the reinforcement bar 130, and the third support shaft 123 and the fourth support shaft 124 are connected by the reinforcement bar 130. Connected. The side in which the first support shaft 121 and the fourth support shaft 124 are positioned in the body frame 100 is referred to as the front side of the body frame 100. The reinforcing bar 130 is not connected to the first and second support shafts 121 and 124. The opposite side of the front side of the main body frame 100, that is, the side where the second support shaft 122 and the third support shaft 123 are located is called the rear of the main body frame 100. When the rectangular frame 110 is viewed from above, a bar positioned between the first support shaft 121 and the fourth support shaft 124 is referred to as a first bar 111 and is counterclockwise from the first bar 111. It is referred to as second, third, and fourth bars 111, 112, 113, and 114.

The cassette detachment unit 140 is provided at the front of the main frame 100. The cassette detachment unit 140 is provided with a cassette C on which substrates are placed. A stage (not shown) is positioned behind the main body frame 100.

The horizontal guide member 200 is preferably two. The horizontal guide member 200 is preferably coupled to the second bar 112 and the fourth bar 114 of the body frame 100, respectively. The length of the horizontal guide member 200 is preferably equal to or slightly smaller than the length of the second bar 112 or the fourth bar 114. The horizontal guide members 200 are parallel to each other.

The horizontal moving frame 300 has a horizontal member 310, both ends of which are movably coupled to the horizontal guide members 200, and vertically coupled to the horizontal member 310 at a predetermined distance from each other. Direction guide members 320. When viewed from the top of the main body frame 100, the horizontal member 310 preferably crosses the horizontal guide members 200 at right angles, respectively. Preferably, the vertical guide members 320 are two pieces. Each longitudinal direction of the vertical guide members 320 is located in the vertical direction, it is preferable to be parallel to each other.

The horizontal driving unit 400 linearly reciprocates the horizontal moving frame 300. The horizontal moving frame 300 reciprocates linearly along the horizontal guide member 200 by the operation of the horizontal driving unit 400.

In a first embodiment of the horizontal drive unit 400, the horizontal drive unit 400 includes motors 410 and ball screw assemblies 420 connected to the motor 410. The motors 410 are mounted on one side of the horizontal guide members 200, respectively, and the ball screw assemblies 420 are coupled to the horizontal guide members 200, respectively. Both ends of the horizontal member of the horizontal moving frame 300 are connected to the ball screw assembly 420, respectively. When the two motors 410 rotate, the ball screw assemblies 420 operate, respectively, to move the horizontal moving frame 200.

In a second embodiment of the horizontal drive unit, the ball screw assembly 420 on the side excluding the one motor 410 and the other motor 410 and the motor 410 is excluded in the first embodiment. ) Is connected by a power transmission means (not shown). The power transmission means comprises a coupling. When the motor 410 is rotated, the ball screw assembly 420 connected to the motor 410 is operated by the rotational force of the motor 410, the other ball screw assembly 420 is a rotational force transmitted by the power transmission means While operating as the horizontal moving frame 200 moves.

In a third embodiment of the horizontal drive unit 400, the horizontal drive unit is a motor (not shown), a drive pulley (not shown) connected to the motor and the drive pulley at a predetermined interval position A driven pulley (not shown) and a belt (not shown) connecting the driving pulley and the driven pulley. The motor is mounted on one side of the horizontal guide member 200, and the driving pulley and the driven pulley are respectively installed at both ends of the horizontal guide member 200. One end of the horizontal member of the belt and the horizontal moving frame 300 is connected by a connecting member (not shown).

The vertical movement member 500 is movably coupled to the vertical guide members 320 of the horizontal movement frame 300. Both ends of the vertical movement member 500 are preferably coupled to the vertical guide members 320 so as to be movable. It is preferable that the longitudinal direction of the vertical movement member 500 is perpendicular to the longitudinal direction of the vertical movement member 500.

The vertical driving unit 600 reciprocates the vertical moving member 500 in a straight line.

In a first embodiment of the vertical drive unit 600, the first drive unit is installed on one vertical guide member 320, and the second drive unit is installed on the other vertical guide member 320 It is preferable to include. The vertical guide member 320 in which the first driving unit is installed is called the first vertical guide member 320, and the vertical guide member 320 in which the second driving unit is installed is the second vertical guide member 320. Is called.

The first and second driving units each include a motor 610 and a ball screw assembly 620 connected to the motor 610. The motor 610 is mounted to one side of the vertical guide member 320, the ball screw assembly 620 is coupled to the vertical guide member 320. One end of the vertical moving member 500 is connected to the ball screw assembly 620.

In another embodiment of the first and second driving units, it may be configured like another example of the horizontal driving unit 400.

In a second embodiment of the vertical drive unit 600, the motor (which may correspond to No. 610) mounted on the first vertical guide member 320 and the first vertical guide member 320; A first ball screw assembly (which may correspond to No. 620) installed and connected to the motor, and a second ball screw assembly (which may correspond to No. 620) installed in the second vertical guide member 320. And a power transmission means (not shown) for transmitting the rotational force of the motor to the second ball screw assembly. The power transmission means includes a first pulley coupled to a first ball screw assembly, a second pulley coupled to the second ball screw assembly, and a belt connecting the first pulley and the second pulley. It is preferable that the belt is a timing belt. Both ends of the vertical moving member 500 are connected to the first and second ball screw assemblies, respectively. When the motor is rotated, the first ball screw assembly connected to the motor is operated by the rotational force of the motor, and the second ball screw assembly is operated by the rotational force transmitted by the power transmission means to move the vertical movement member 500. Move.

It is preferable that the length adjusting unit (G) is provided between one end of the vertical movement member 500 and the vertical guide member 320 coupled to one end thereof. The length adjustment unit (G) is the vertical movement member 500 is the two vertical direction even when the two vertical guide members 320 are not installed in parallel with each other due to machining error and / and coupling error The vertical movement along the guide members 320 is smooth.

The length adjusting unit (G), as shown in Figure 4, is movably coupled to the vertical guide member 320, the vertical drive unit (first or second drive unit) of the 600 A sliding block 330 moving by operation; It is fixedly coupled to the sliding block 330, and includes a support pin 340 is slidably inserted into the end surface of the vertical movement member 500. One side of the vertical moving member 500 is supported by the support pin 340. The support pin 340 is preferably a plurality of.

The sliding block 330 includes a body portion 331 and a coupling portion 332 extending from one side of the body portion 331. A screw hole 333 that is engaged with the screw of the ball screw assembly 620 is provided in the coupling portion 332. The vertical guide member 320 is preferably a hollow rectangular tube shape having a predetermined length, and is provided with a guide slot having a predetermined width and length in the longitudinal direction on one surface of the vertical guide member 320, The coupling part 332 of the sliding block 330 passes through the guide slot and is positioned inside the vertical guide member 320. The ball screw assembly 620 is located in the up and down guide member 320, the screw constituting the ball screw assembly 620 in the screw hole 333 of the coupling portion 332 of the sliding block. Is fastened. According to the forward and reverse rotation of the screw, the sliding block 330 is linear reciprocating motion. The support pins 340 are fixedly coupled to the body portion 331 to protrude from one side of the body portion 331 of the sliding block 330.

The vertical moving member 500 has a hollow tube 510 having a predetermined length, a first connection portion 520 provided at one end of the hollow tube 510, and a second connection portion provided at the other end of the hollow tube. 530. Sliding holes 521 corresponding to the support pins 340 are provided on one surface of the first connector 520. The support pins 340 fixedly coupled to the sliding block 330 are slidably inserted into the sliding holes 521, respectively. When the sliding block 330 is coupled to the first vertical guide member 320, the second connecting portion of the vertical moving member 500 is movably coupled to the second vertical guide member 320. The second connection portion 530, like the coupling portion 332 of the sliding block 330, has a protruding coupling portion (not shown), and a screw hole is provided in the coupling portion. The coupling portion of the second connecting portion penetrates through the guide slot of the second vertical guide member 320 and is positioned inside the second vertical guide member 320. The ball screw assembly 620 constituting the second driving unit is located inside the second up and down guide member 320, and the screw constituting the ball screw assembly 620 is fastened to the screw hole of the coupling part. do.

By the operation of the vertical driving unit 600, that is, the first and second driving units, the vertical moving member 500 moves up and down along the first and second vertical guide members 320.

As shown in FIG. 5, the suction fork 700 and the rotation driving unit 800 are installed in the vertical moving member 500. The adsorption fork 700 adsorbs the substrate or releases the adsorption, and the rotation driving unit 800 rotates the adsorption fork 700. The rotation angle of the suction fork 700 is preferably 80 degrees to 100 degrees. The adsorption fork 700 is preferably adsorb the substrate in a vertical state in the downward direction and drop the adsorbed substrate on the horizontal.

The suction fork 700 has a body member 710 having a predetermined area, a plurality of feet 720 coupled to the body member 710, and a coupling member 730 coupled to the body member 710. ). The body member 710 is preferably a plate shape having a predetermined thickness and area. The feet 720 are coupled to one surface of the body member 710. The coupling member 730 is coupled to the other surface of the body member 710. Feet 720 of the adsorption fork 700 are provided with a plurality of adsorption nozzles 740, each of which vacuum selectively acts. When the feet 720 of the suction fork 700 are in contact with the substrate to generate a vacuum in the suction nozzles 740, the substrate is attracted to the feet 720 of the suction fork 700. When the vacuum is released to the suction nozzles 740, the substrate is separated from the feet 720 of the suction fork 700.

Preferably, the feet 720 of the suction fork 700 are four. When the number of feet 720 of the suction fork 700 is four, the lengths of the four feet 720 are preferably equal to each other. When the four feet 720 of the adsorption fork 700 have the same length, the adsorption fork 700 is suitable for adsorbing a large substrate.

Meanwhile, when the four feet 720 of the suction fork 700 are sequentially called first, second, third, and fourth feet, the lengths of the first and second feet are the same, and the lengths of the third and fourth feet are the same. Are the same as each other, the length of the first foot can be configured to be longer than the length of the third foot. In this case, a vacuum may be selectively applied to the adsorption nozzles 740 provided on the first and second feet and the adsorption nozzles 740 provided on the third and fourth feet, respectively. Vacuum may be applied to all four foot suction nozzles 740. As such, when the feet 720 of the adsorption fork 700 are different in length, the adsorption fork 700 is suitable for adsorbing a small area substrate.

The rotation drive unit 800 may include a mounting frame 810 mounted to the vertical moving member 500, a rotating shaft (not shown) rotatably coupled to the mounting frame 810, and rotating the rotating shaft. Motor 820. Preferably, the reducer is mounted between the rotating shaft and the motor shaft of the motor. The coupling member 730 of the suction fork 700 is fixedly coupled to the rotating shaft. As the rotary force of the motor 820 is transmitted to the rotary shaft, the suction fork 700 rotates together with the rotary shaft as the rotary shaft rotates. The mounting frame 810 is provided with a front surface and a bottom surface, the front surface of the mounting frame 810 is preferably a vertical plane and the bottom surface is preferably a horizontal plane. When the feet 720 of the suction fork 700 are vertically positioned downward, one surface of the main body member 710 of the suction fork 700 contacts the front surface of the mounting frame 810 and the suction fork 700 When the feet 720 are horizontally positioned, one surface of the main body member 710 of the suction fork 700 contacts the lower surface of the mounting frame 810. That is, when one surface of the main body member 710 of the suction fork 700 is in contact with the front surface of the mounting frame 810, the suction fork 700 is moved within a range of approximately 90 degrees. The rotation angle of the suction fork 700 may be 180 degrees. Rotation angle of the suction fork 700 is determined according to the position of the front and lower surfaces of the mounting frame 810, that is, the angle between the. When the feet 720 of the adsorption fork 700 are positioned vertically, the adsorption nozzles 740 provided on the feet 720 are located in front of the main frame 100. Thus, when the feet 720 of the suction fork 700 are rotated and positioned horizontally, the suction nozzles 740 face downward.

The horizontal driving unit 400, the vertical driving unit 600, and the rotation driving unit 800 may each or simultaneously or operate only two elements.

Hereinafter, the operation and effect of the transfer equipment according to the present invention.

First, the substrates processed in the previous line or equipment are put in a cassette, and the cassette C containing the substrates is mounted in the cassette detachment unit 140. The stage is positioned behind the main body frame 100. The substrates placed on the stage are fed to a line or equipment where the next process takes place.

In the state in which the feet 720 of the suction fork 700 are vertically positioned downward, the horizontal driving unit 400 so that the feet 720 of the suction fork 700 are located above the cassette C. ) Moves the horizontal moving frame (300). The horizontal moving frame 300 moves in a straight line along the horizontal guide members 200. The vertical movement member 500 is coupled to the vertical guide member 320 of the horizontal movement frame 300, and the rotary drive unit 800 and the suction fork 700 are connected to the vertical movement member 500. Since the horizontal movement frame 300 is connected to the suction fork 700 also moves together.

In the state where the feet 720 of the suction fork 700 are located above the cassette C, the feet 720 of the suction fork 700 are driven up and down to face the set substrate contained in the cassette C. The unit 600 moves the vertical movement member 500 downward. The vertical moving member 500 moves in a straight line along the vertical guide member 320 of the horizontal moving frame 300. Since the rotary drive unit 800 and the suction fork 700 are connected to the vertical moving member 500, the suction fork 700 also moves downward as the vertical moving member 500 moves downward.

When the feet 720 of the suction fork 700 face the set substrate, the substrate is sucked to the suction nozzles 740 provided on the feet 720 of the suction fork 700. Vacuum is generated at the adsorption nozzles 740.

In a state where the substrate is adsorbed to the adsorption nozzles 740 provided on the feet 720 of the adsorption fork 700, as shown in FIG. The direction drive unit 600 moves the vertical movement member 500 upward. At the same time as the substrate comes out of the cassette C, as shown in FIG. 7, the rotation driving unit 800 rotates the suction fork 700.

At the same time as the rotation driving unit 800 rotates the suction fork 700, as shown in FIG. 8, the substrate adsorbed to the suction nozzles 740 of the suction fork 700 is an upper surface of the stage. The horizontal driving unit 400 moves the horizontal moving frame 300 to the rear of the main frame 100 so that the vertical driving unit 600 moves the vertical moving member 500 downward. Move to The rotary drive unit 800 rotates the suction fork 700 such that the substrate adsorbed by the suction fork 700 is positioned below and is horizontal.

The vacuum generated in the adsorption nozzles 740 is released so that the substrate is separated from the adsorption fork 700 while the substrate adsorbed on the adsorption fork 700 is placed on the upper surface of the stage.

In a state where the substrate is separated from the suction fork 700, the suction fork 700 is moved above the cassette C so that the suction fork 700 sucks another substrate in the cassette C. In order to move the suction fork 700 to the upper side of the cassette (C), the horizontal driving unit 400 moves the horizontal moving frame 300 to the front of the main frame 100 and at the same time the vertical drive The unit 600 moves the up and down moving member 500 upward, and at the same time the rotation driving unit 800 is the suction fork 700 so that the feet 720 of the suction fork 700 vertically down. Rotate The rotation driving unit 800 rotates the suction fork 700 from a position where the suction fork 700 does not collide with the stage even when the suction fork 700 rotates.

With the feet 720 of the adsorption fork 700 vertically positioned above and above the cassette C, another set substrate in which the feet 720 of the adsorption fork 700 are contained in the cassette C The up and down driving unit 600 moves the up and down moving member 500 downward so as to face.

When the feet 720 of the suction fork 700 face the set substrate, the substrate is sucked to the suction nozzles 740 provided on the feet 720 of the suction fork 700. Vacuum is generated at the adsorption nozzles 740.

The substrate adsorbed on the adsorption fork 700 is placed on the upper surface of the stage in the same manner as the substrate is adsorbed on the adsorption fork 700. The substrate placed on the stage before the substrate is placed on the upper surface of the stage is transferred to another line or equipment by a transfer robot or the like.

As the above operation is repeated, the substrates in the case are transferred to the upper surface of the stage.

As described above, the transfer equipment according to the present invention is because the adsorption fork 700 for adsorbing the substrate is moved while the horizontal motion, vertical motion and rotational movement proceeds simultaneously, so that the adsorption fork 700 is contained in the cassette (C). In order to move the substrate to the stage and again to adsorb the substrate contained in the cassette C, the time for moving toward the cassette C becomes short, and the space in which the suction fork 700 moves is small.

Since the time for transferring the substrate contained in the cassette C to the stage is shortened, many substrates contained in the cassette C can be quickly transferred to the stage. Since the space where the suction fork 700 moves is reduced, the size of the equipment can be reduced, so that the equipment installation space is reduced.

Although the case of transferring the substrate has been described above, a glass panel or the like may be applied instead of the substrate. In addition, in the claims of the present invention, but limited to the object to be adsorbed to the adsorption fork substrate, it can be applied to various articles in addition to the substrate.

100; Body frame 200; Horizontal guide member
300; Horizontal moving frame 400; Horizontal drive unit
500; Vertical moving member 600; Vertical drive unit
700; Adsorption fork 800; Rotary drive unit
C; Cassette G; Length control unit

Claims (9)

Body frame;
Horizontal guide members provided in the main body frame;
A horizontal moving frame including two horizontal guide members each of which is movably coupled to the horizontal guide members, and two vertical guide members each of which is coupled to the horizontal member at intervals and have a length in the vertical direction;
A horizontal driving unit moving the horizontal moving frame;
A vertically movable member having both ends movably coupled to the two vertical guide members, the vertical movable members being vertically moved along the vertical guide members;
A length adjusting unit provided between one end of the vertical moving member and the vertical guide member coupled to the one end;
An up and down drive unit for moving the up and down moving member;
An adsorption fork rotatably coupled to the up and down moving member and configured to adsorb or release adsorption of the substrate; And
It includes a rotary drive unit for rotating the suction fork,
The length adjusting unit is slidably coupled to the vertical guide member, the sliding block is moved by the operation of the vertical drive unit; And a support pin fixedly coupled to the sliding block and slidably inserted into an end surface of the vertical movement member to support the vertical movement member. The transfer apparatus of claim 1, wherein the body frame includes a quadrangular frame having four bars connected thereto, and four support shafts respectively coupled to a bottom surface of the rectangular frame. The transfer apparatus according to claim 1, wherein one side of the main body frame is provided with a cassette detachment unit for detaching a cassette containing substrates, and a stage is located on the other side of the main body frame. delete delete delete The transport equipment of claim 1, wherein the support pins are provided in plural. delete The transport apparatus of claim 1, wherein the suction fork absorbs the substrate in a vertical state in a downward direction and drops the absorbed substrate in a horizontal state.
KR1020100109474A 2010-11-05 2010-11-05 Transfer apparatus KR101302485B1 (en)

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KR101423472B1 (en) * 2013-11-07 2014-07-28 주식회사 로덱 Horizontal Transportation Apparatus with Lock and Release Function
KR101662580B1 (en) * 2015-05-04 2016-10-05 진광기공주식회사 Apparatus for supplying wood pannels
FR3055825A1 (en) * 2016-09-15 2018-03-16 Robotiques 3 Dimensions DEVICE FOR MOVING SHEET MATERIAL AND CORRESPONDING METHOD.
CN108508638B (en) * 2018-03-15 2021-03-09 中电科风华信息装备股份有限公司 Liquid crystal display carrying manipulator butt joint device
CN108673482B (en) * 2018-07-12 2020-04-10 温州大学 Telescopic multi-axis mobile robot
KR102165856B1 (en) * 2019-05-16 2020-10-14 주식회사 아셀 Apparatus for reversing frame
KR102359790B1 (en) * 2021-09-06 2022-02-08 김종석 Food plates dispenser with enhanced sanitation
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JPH0356141U (en) * 1989-05-31 1991-05-30
KR100500170B1 (en) * 2003-06-25 2005-07-07 주식회사 디엠에스 Apparatus for horizontal and up-down transporting of works
KR100620352B1 (en) * 2004-07-27 2006-09-19 학교법인 동아대학교 Yard crane
KR100854410B1 (en) * 2007-01-23 2008-08-26 (주)인터노바 A Transportation System For Processing Semiconductor Material

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JPH0356141U (en) * 1989-05-31 1991-05-30
KR100500170B1 (en) * 2003-06-25 2005-07-07 주식회사 디엠에스 Apparatus for horizontal and up-down transporting of works
KR100620352B1 (en) * 2004-07-27 2006-09-19 학교법인 동아대학교 Yard crane
KR100854410B1 (en) * 2007-01-23 2008-08-26 (주)인터노바 A Transportation System For Processing Semiconductor Material

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