KR100963316B1 - apparatus for cleaning substrate - Google Patents

Abstract

Disclosed is a substrate cleaning apparatus capable of easily carrying out a cleaning operation while feeding and feeding a flat panel display substrate to a cleaning region along a predetermined transfer section.

Such a substrate cleaning device includes a frame, a loading plate for loading a substrate, a first horizontal transfer portion for transferring a substrate from one side of the frame to the other side, and a driving fluid or driving electricity installed on the loading plate side. A position control unit operable to receive and control a loading state of the substrate, and a connecting means for detachably connecting a port section for supplying driving fluid or driving electricity to the position control unit by a connection / disconnection operation. do.

Cleaning operation of substrate, transfer means, position control part, connecting means, driving fluid and driving electricity supply by connecting / disconnecting operation, indirect connection method by connecting connector

Description

Apparatus for cleaning substrate

The present invention relates to a substrate cleaning apparatus which can easily perform a cleaning operation while feeding and supplying a substrate for a flat panel display element to a cleaning region, and in particular, can secure an improved operating safety during transfer of the substrate.

In general, cleaning of substrates for flat panel display devices is performed by continuously cleaning a plurality of substrates using a roll brushing method to remove various foreign substances on the surface of the substrate using a substrate cleaning device having a roll brush. Methods are known.

The substrate cleaning apparatus has a structure of sequentially supplying / discharging the substrate toward the cleaning area while transferring (takeover / takeover) the substrate in a horizontal and vertical direction along a predetermined transfer section.

Briefly, the general structure of the substrate processing apparatus includes a frame, upper and lower conveying means disposed above and below the frame, vertical conveying means disposed to correspond to both ends of the upper and lower conveying means, and And a cleaning part disposed in the transport section of the lower transport means to clean the substrate.

Among the above conveying means, in particular, the upper conveying means is capable of conveying the loading position of the substrate in a state aligned within the allowable range when transferring the substrate supplied from the outside. If the position of the substrate is out of the allowable range during the initial transfer of the substrate, the substrate may be abnormally supplied to the cleaning unit, and the substrate may be damaged during the cleaning operation or the cleaning efficiency may be reduced.

That is, the upper transfer means, the loading plate for loading the substrate (also referred to as a "moving unit") is configured to be movable along the rail (for example, LM guide), to align the position of the substrate corresponding to the loading plate And a aligner and a detector for detecting are installed.

In particular, since the main driving units (eg, cylinders, sensors) of the aligner and the detector are set to be driven by being supplied with hydraulic pressure (eg pneumatic) or electricity, in order to smoothly align and sense the position of the substrate, It is very important to stably supply driving fluid or electricity in connection with the operation of the loading plate moving along the rail within the transfer section.

However, the above-described conventional substrate cleaning apparatus is installed in a cable conveyor connected in a chain type to supply a driving fluid or electricity in a state in which a cable or a tube is directly connected to the aligner or a detector (direct connection method). As such, this structure can cause various problems during operation.

For example, due to the frequent movement of the loading plate, the sheath of the cable or the tube can be easily deformed and broken (breaking), so that the durability is not good and the maintenance is frequently required.

In particular, when the electric cable is disconnected, it may cause a serious problem of generating various electric safety accidents due to short circuit and short during the cleaning operation of the substrate.

In addition, since the cable conveyor occupies an excessive amount of space in the apparatus, it is difficult to form the overall size of the apparatus compactly.

Moreover, the cable conveyor may be a factor that degrades the working environment because it causes a unique operating noise or oscillation while moving along the loading plate.

Therefore, the direct connection method using the cable conveyor as described above is difficult to ensure satisfactory operation stability and workability during substrate cleaning.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems occurring in the prior art,

An object of the present invention is to further stably supply a driving fluid or driving electricity to a series of devices (for example, a aligner and a detector) for aligning and detecting a position of a substrate within a transfer section of a substrate for a flat panel display device. An object of the present invention is to provide a substrate cleaning device capable of securing improved operating stability.

In order to realize the object of the present invention as described above,

frame;

A first horizontal transfer unit having a loading plate for loading a substrate and transferring the substrate from one side of the frame to the other side;

A position control unit installed at the loading plate and operable to control a loading state of the substrate by receiving a driving fluid or driving electricity;

Connecting means for detachably connecting a port section for supplying a driving fluid or driving electricity to the position control unit by a connection / separation operation;

It provides a substrate cleaning apparatus comprising a.

In the present invention as described above, the cleaning operation can be easily performed in the cleaning area provided on one side of the transfer section while transferring the substrate along the predetermined transfer section on the frame.

In the transfer section of the substrate, a connecting means for connecting a driving fluid (for example, pneumatic) or driving electricity is located on the side of the position controller for aligning and detecting the position of the substrate. Indirect connection by connecting / disconnecting the connector has a structure capable of supplying driving fluid or driving electricity.

In particular, such an indirect connection method is a deformation of the cable or tube as compared to the direct connection method for supplying the driving electric drive for driving the drive in the state in which the cable or tube is directly connected, for example by a conventional cable conveyor. It is possible to fundamentally prevent breakage and disconnection, thereby further improving operational stability.

In addition, it is possible to realize the miniaturization of the device by significantly reducing the occupied space, and can significantly reduce the production cost because it does not need to use expensive cable conveyors.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

Embodiments of the present invention are described to the extent that those of ordinary skill in the art can practice the present invention.

Therefore, since the embodiments of the present invention may be modified in various other forms, the claims of the present invention are not limited to the embodiments described below.

1 is a view showing the overall structure of a substrate cleaning apparatus according to an embodiment of the present invention, 2 denotes a frame.

The frame 2 serves as a kind of work table for cleaning the substrate G. The frame 2 may be formed as a rectangular frame body extending left / right when referring to FIG. 1.

The frame 2 may be formed by connecting and fixing a metal bar or a pipe by a conventional method (bolt or welding).

For example, the frame 2 may be formed to have an internal structure sealed by a panel or the like except for the loading / unloading point of the substrate G, although not shown in the drawing.

According to such a structure, various foreign matters (eg, dust) from the outside can be prevented from entering the inside of the frame 2.

The conveying means 4 for conveying the substrate G is installed on the frame 2, and the conveying means 4 includes the first and second horizontal conveying parts T1 and T3 and the first as shown in FIG. 1. And second vertical transfer parts T2 and T4.

The transfer means 4 is made possible to transfer the substrate (G) in the counterclockwise direction along the inner circumference of the frame (2) based on FIG.

That is, the first horizontal transfer part T1 is composed of a loading plate 6 and a rail 8, and is set to provide a horizontal transfer section of the substrate G on the upper side of the frame 2.

The loading plate 6 has an area corresponding to the substrate G, and is fixedly installed in a state where a plurality of support pins 6a are erected on the upper surface thereof so that the bottom surface of the substrate G is supported at the ends of the support pins 6a. Loaded as state.

The rail 8 may use a conventional "LM guide ", and is installed in a conventional manner so that the loading plate 6 can be transported along a transport section of the " LM guide ".

That is, the loading plate 6 may be horizontally moved in the left / right direction along the transfer section of the rail 8 at the upper side of the frame 2 when referring to FIG. 1.

In addition, the loading plate 6 may have a structure capable of preventing sagging of the substrate G. For example, although not shown in the drawings, air holes may be formed in the upper surface of the loading plate 6 to spray the air at a predetermined pressure through the air holes, thereby supporting the bottom of the substrate G flat.

The substrate G can be loaded / unloaded on the loading plate 6 side, for example, by being transferred in a conventional manner by a separate robot arm provided outside the frame 2.

The second horizontal conveying part T3 is spaced apart from the frame 2 in parallel with the first horizontal conveying part T1 and is a conventional roller conveyor composed of a plurality of conveying rollers R. It may be of a type structure.

That is, the plurality of transport rollers R are arranged left / right at a predetermined interval below the frame 2 as shown in FIG. 1, and although not shown in the drawing, a conventional method (eg a chain / Sprocket, belt / pulley) to receive power and set to rotate about the axis.

The first vertical feeder T2 and the second vertical feeder T4 are disposed at both end points of the first horizontal feeder T1 and the second horizontal feeder T3 to form a substrate G. Takeover / takeover is possible while transporting in the downward direction.

As shown in FIG. 1, the first vertical transfer part T2 is disposed at a left point inside the frame 2, and the substrate G is taken over from the first horizontal transfer part T1 to receive the second horizontal transfer part ( It has a normal up-down buffer unit structure that can be turned over to the T3) side.

That is, the first vertical transfer part T2 includes an upper hand 10a and an upper hand 10b and a lower hand 10b that takes the substrate G from the upper hand 10a.

The upper hand 10a has a horizontal portion and a vertical portion as shown in FIG. 2 and is composed of two pairs, and a screw driving method M1 of which a screw is rotated forward / backward by a motor shaft as shown in the drawing. Up and down movement as well as receiving power from M2) is operated so that the gap between the two upper hands 10a can be narrowed or widened.

In addition, the lower hand 10b is disposed between the feeding rollers R of the second horizontal feeder T3 as shown in FIG. 2, and the screw is forward / reversed by the motor shaft as shown in the drawing. Up / down movement is performed by receiving power from a rotating screw drive type drive device M3.

The drive devices M1, M2, and M3 may be made of, for example, a cylinder drive method or a rail drive method composed of a cylinder or a pneumatic transfer unit, in addition to the screw drive method.

Since such a driving structure can be easily implemented by those skilled in the art, more detailed description thereof will be omitted.

The first vertical transfer part T2 may supply the substrate G from the first horizontal transfer part T1 to the second horizontal transfer part T3 while taking over or taking over the substrate G by the following operation. Can be.

That is, when the substrate G is loaded on the loading plate 6 and positioned at one end (left side) of the first horizontal transfer part T1, the substrate is moved horizontally by the up operation of the upper hand 10a. G) The bottom surface is lifted up to take the substrate G from the loading plate 6.

When the loading plate 6 is returned to its original position (loading and unloading point), the upper hand 10a has a substrate G on one end (left side) of the second horizontal transfer part T3 as shown in FIG. 3. It is operated down so that it is positioned.

Then, as the lower hand 10b is slightly operated upward as shown in FIG. 4, the substrate G is taken over from the upper hand 10a, and the upper hand 10a is not left in contact with the substrate G. Returned upwards with a gap between / right.

In addition, the lower hand 10b moves down as shown in FIG. 5 while the substrate G is taken over and places the substrate G on the transport roller R side of one end of the second horizontal transfer part T3. Take over in a released condition.

Therefore, the substrate G is taken over from the first horizontal transfer part T1 by the up / down operation of the upper hand 10a and the lower hand 10b as described above, and is turned over to the second horizontal transfer part T3. The substrate G can be supplied in such a way as to.

The second vertical transfer part T4 has the same up-down buffer unit structure as the first vertical transfer part T2, and is operated by the driving devices M1, M2, and M3.

That is, the second vertical transfer part T4 has an upper hand 10c and a lower hand 10d as shown in FIG. 1, and has a first first and second horizontal transfer parts T1 and T3 interposed therebetween. It is disposed on the other side of the frame 2 in a state corresponding to the vertical transfer portion (T2).

The second vertical feeder T4 is operated in the reverse order of the operation of the first vertical feeder T2, and the second horizontal feeder T4 is operated by the takeover / takeover operation of the upper hand 10c and the lower hand 10d. T3) The substrate G, which is located at one point (right), may be supplied while being moved to one point (right) of the first horizontal transfer part T1.

According to such a structure of the conveying means 4, the substrate (G) loaded on the upper side of the frame (2) is first moved while moving counterclockwise along the inner circumference of the frame (2) based on FIG. It can be transported to be unloaded at the loading point.

The substrate cleaning apparatus according to the embodiment of the present invention includes a position controller 12.

The position control unit 12 is for aligning the loading position of the substrate G within the allowable range within the transfer section of the transfer means 4, the position aligner S1 for aligning the position of the substrate G with a contact force. ) And may be installed to align the position of the substrate (G) on the loading plate (6).

That is, as shown in FIG. 6, the positioner S1 may include a first guide pin 14a corresponding to one corner point positioned diagonally among four corners of the substrate G and the substrate G. A second guide pin 14b corresponding to the other corner point and an actuator 14c for moving any one of the first and second guide pins 14a and 14b back and forth.

The first guide pin 14a is installed in a state in which two are erected on one side of the loading plate 6 so as to be in contact with two sides meeting each other at one corner of the substrate G.

The first guide pin 14a serves to hold a reference point of the loading position when the substrate G is loaded on the loading plate 6 side.

Two second guide pins 14b are disposed in a state in which two second guide pins 14b are erected on the other side of the loading plate 6 so as to be in contact with two sides that meet each other at the other edge portion of the substrate G.

The second guide pin 14b is fixedly installed on the moving plate 14d as shown in FIG. 6 and is set to be movable on the loading plate 6.

In addition, the actuator 14c may use a conventional pneumatic cylinder, and is set to move the moving plate 14d forward and backward toward the first guide pin 14a.

That is, the actuator 14c may move forward / backward by pushing or pulling the moving plate 14d with a piston rod by receiving pneumatic pressure.

According to such a structure, when the substrate G is loaded on the loading plate 6 side, the contact force of the second guide pin 14b while moving the transfer plate 14d back and forth to the actuator 14c. By this, the position of the substrate G can be easily aligned in the allowable range.

The position controller 12 may further include a position sensor S2.

The position sensor S2 includes a sensing sensor 16 installed to detect whether the substrate G is loaded or unloaded from one side of the loading plate 6.

The sensing sensor 16 may use a conventional optical sensor or a limit switch, and is set to detect a loading or unloading state of the substrate G in a conventional manner by receiving electricity.

That is, the position control unit 12 can easily detect the loading and unloading state of the substrate G within the transfer section of the first horizontal transfer unit T1, and in particular, of the loaded substrate G Since the position can be corrected within the allowable range, it is possible to prevent the phenomenon in which the substrate G is abnormally supplied to the side of the cleaning unit 18 described later.

In the above description, the position controller 12 is provided in the transport section of the first horizontal feeder T1 as an example in the description and the drawings, but the present invention is not limited to the above structure.

For example, although not shown in the drawings, it can be appropriately installed in the entire transport section of the transport means 4 to meet the required working conditions and environment.

The substrate cleaning apparatus according to the embodiment of the present invention may include a cleaning unit 18 as shown in FIG. 1.

The cleaning unit 18 is disposed in the transfer section of the transfer means 4 and is set to proceed with the cleaning operation during the transfer of the substrate G. The organic cleaning module C1 and the cleaning module C2 are installed. And, it may be composed of a drying module (C3).

That is, the organic cleaning module (C1), the cleaning module (C2) and the drying module (C3) is manufactured in the form of a chamber case having a predetermined size space therein, as shown in FIG. It may be installed on one side of the transport section.

In particular, although the cleaning module C2 is not shown in the drawings, for example, a roll brush, a cleaning unit such as an air curtain, an air suction, a die jet, an air knife, and the like are provided to clean the substrate G using a conventional roll brushing method. It can be operated to be cleaned.

And, the organic cleaning module (C1) is not necessarily provided, it can be installed or omitted to meet the required working conditions.

Therefore, in the substrate cleaning apparatus according to the embodiment of the present invention, the substrate G loaded on the frame 2 is cleaned by a roll brushing method in the cleaning part 18 region, and then, at the initial loading point. Several substrates G can be continuously cleaned while being transferred (taken over) to the transfer means 4 so that they can be unloaded.

On the other hand, the substrate cleaning apparatus according to an embodiment of the present invention includes a connection means (20).

As shown in FIGS. 7 and 8, the connecting means 20 connects a driving fluid W1 for operating the positioner S1 of the position controller 12 in the transfer section of the transfer means 4. (connector) It is to supply by connection method (indirect connection method).

Referring to FIG. 9, the connecting means 20 includes a first connector N1 having a connecting pin P1 and a second connector having a connecting tube P2 corresponding to the connecting pin P1. (N2), a connection driving unit (N3) for detachably connecting the first and second connectors (N1, N2), and the first and second connectors (N1, N2) in a connected state by fluid pressure. It includes a locking portion (N4) for fixing, and is installed to correspond to the loading plate 6 in the transport section of the first horizontal feed (T1).

The first connector N1 has a first fluid port F1 having an outlet port function, and is fixedly installed at one side of the lower side of the loading plate 6.

The connection pin P1 has a fin structure formed with a passage therein as shown in FIG. 9, and protrudes on one surface of the first connector N1 with an inner passage communicating with the first fluid ports F1. Is formed.

The first connector N1 is set so that the connecting pin P1 faces downward when the first connector N1 is fixed to the loading plate 6 side, and the first fluid ports F1 are connected to the positioner S1. The actuator 14c is connected to the actuator 14c in a conventional manner (eg, a flexible tube or tube) so that the driving fluid W1 can be supplied.

The second connector N2 includes a second fluid port F2 having an inlet port function corresponding to the first fluid port F1, and in a form corresponding to the first connector N1. Is done.

The connection tube P2 has a passage that can cover the outer surface of the connection pin P1 and is installed inside the second connector N2 in communication with the second fluid port F2. (See FIG. 9)

The connection tube P2 uses a soft tube (eg, a silicon tube or a rubber tube), and has a type in which flange portions are formed at both ends as shown in FIG. 9.

The cover plates N2a and N2b may be further provided on one surface (upper surface) and the other surface (lower surface) of the second connector N2 while covering the flange portion of the connection tube P2. The cover plates N2a and N2b may be fixed to the inside of the second connector N2 in a stable state in which a seal is held by pressing the flanges of the connection tube P2, respectively.

The second connector N2 is formed in the transfer section of the first horizontal transfer part T1, for example, as shown in FIG. 7, and the point at which the substrate G is loaded on the loading plate 6 side. 1 may be disposed at a left point corresponding to the vertical transfer part T2 and may be set in a state in which the first connector N1 can be connected / disconnected.

The connection driving unit N3 may use the cylinder N3a as a driving source, and a piston rod of the cylinder and one side of the second connector N2 are connected.

According to this structure, the piston rod of the cylinder (N3a) can be connected to or disconnected from the first connector (N1) while pushing or pulling the second connector (N2a) upwards. (See Figures 9 and 10)

Meanwhile, the locking part N4 connects the first connector N1 and the second connector N2 by pressing the outer surface of the connection tube P2 by the fluid pressure to tighten the connection pin P1. It is configured to be fixed in a state.

The locking portion N4 is connected to the pressurizing passage N4a formed inside the second connector N2 so as to correspond to the outer surface of the connecting tube P2 as shown in FIG. 9 and the pressurizing passage N4a. It may be made by including a pressure generator (N4b).

The pressurizing passage N4a may be formed as shown in FIG. 9 so that a fluid pressure may act on the outer surface of each of the connection tubes P2 inside the second connector N2.

One side of the pressure passage N4a is connected to the pressure generator N4b by a tube. As the pressure generator N4b, for example, a conventional air pump capable of supplying a pressurizing fluid A such as air to the inside of the pressurizing passage N4a at a predetermined pressure to form a pressurized atmosphere can be used. In addition, a fluid pump capable of supplying a liquid fluid at a constant pressure may be used.

The locking unit N4 includes the pressure generator in a state where the connecting pin P1 is fitted inside the connecting tube P2 by the connection of the first connector N1 and the second connector N2. When the pressurizing fluid A is supplied to N4b, the inside of the pressurizing passage N4a becomes a pressurized atmosphere, and the outer surface of the connecting tube P2 is pressurized by the pressure of the pressurizing fluid A so that the connecting pin ( P1) can be fixed in a fastened state (see Fig. 10).

Therefore, the first and second connectors N1 and N2 may be fixed to the connected state so that the first fluid port F1 and the second fluid port F2 are connected by this action.

In particular, the method of fixing the first and second connectors N1 and N2 in a connected state in a pressurized atmosphere by the pressurizing fluid A as described above is further improved by suppressing friction and wear as well as operating noise. It can provide a connection environment.

In addition, as described above, the first fluid port F1 and the second fluid port F2 are connected to each other by fitting the connection pin P1 and the connection tube P2 to each other in the first and second connectors N1. When supplying the driving fluid W1 with N2 connected, the sealing loss can be further improved to reduce the driving loss.

The pressure flow path N4a is, for example, in a state in which the pressure generator N4b is turned off. For example, the pressure (pressure atmosphere) of the pressurized fluid A is reduced while the vent is formed by a normal valve action. It may be configured to be released automatically.

According to such a structure, for example, in the off state of the locking portion N4, it can always be unlocked (unlocked) state, it is possible to ensure further improved work convenience during maintenance.

In the above description, the pressure generator N4b supplies a pressurizing fluid A at a predetermined pressure inside the pressurizing passage N4a to fix the pressurizing fluid A in a pressurized atmosphere. It is not limited to.

For example, as shown in FIG. 11, the pressure generator N4b forms a reduced pressure atmosphere while forcibly discharging the air A1 inside the pressurizing passage N4a to the outside, thereby reducing the connection tube. The connecting pin P1 may be fixed while tightening the outer surface of the P2.

In addition, the connecting means 20 is separated to supply the driving fluid W1 to the positioner S1 side of the position control unit 12 when the first and second connectors N1 and N2 are connected. It is not limited to the structure which connects (connects) possibly.

For example, as shown in Figure 9 and the first electrical port (F3, outlet port) connected to the electrical terminals (P3, P4) connected to the first and second connectors (N1, N2) in the male / male form In addition, a second electric port F4 (inlet port) may be formed to enable the supply of driving electric power W2 to the position sensor S2.

That is, the first electrical port F3 on the side of the first connector N1 is connected to the sensing sensor 16 of the position sensor S2 and the second electrical port F4 of the second connector N2. Although not shown in the drawing is connected to a conventional electricity supply device.

According to this structure, when the first and second connectors N1 and N2 are connected, the first and second electrical ports F3 and F4 are connected to the electrical terminals P3 and P4 as shown in FIG. 10. It is possible to simply supply electricity for driving W2 to the detection sensor 16 while being electrically connected and connected by these devices.

Therefore, the connecting means 20 is the first and second connectors (N1, when the loading plate 6 is in the stopped state within the transport section of the first horizontal feeder T1, as shown in FIG. While N2) is detachably connected, the driving fluid W1 or the driving electricity W2 can be easily supplied to the position control unit 12 side.

In particular, the indirect connection method is normally performed such that, for example, the driving fluid W1 or the driving electricity W2 can be supplied by the connection / disconnection operation of the first and second connectors N1 and N2. Compared to the direct connection of cables or tubes of cable conveyors (direct connection), malfunctions caused by breakage, deformation or disconnection of cables or tubes can be prevented, and the cost and time due to frequent maintenance can be greatly reduced. have.

In addition, as the cable conveyor does not generate any oscillation or noise during operation, and because the structure is simple, it is possible to reduce the manufacturing cost and to minimize the space occupied to realize the miniaturization of the device.

Incidentally, in the above-described embodiment, the connecting means 20 is installed in the conveying section of the first horizontal conveying part T1 as an example in the description and the drawings. However, the present invention is not limited to the above structure. .

For example, although not shown in the drawings, it can be appropriately set to enable the above operation within the entire transfer section of the transfer means 4 to match the working conditions or working environment.

Therefore, the substrate cleaning apparatus according to the embodiment of the present invention, the cleaning operation by the cleaning unit 18 while the substrate (G) is transferred to the transfer means 4 on the frame (2) easily. You can proceed.

In particular, in the transfer section of the transfer means 4, the driving fluid W1 or the driving electricity W2 is connected to the connector on the side of the position controller 12 that aligns the loading position and the loading position of the substrate G. The connecting means 20 for supplying indirectly connected by the / separating operation is installed to more stably supply the driving fluid W1 or the driving electricity W2 to the position control unit 12.

1 is a view showing the overall structure of a substrate cleaning apparatus according to an embodiment of the present invention.

2 is a view for explaining the detailed structure of the first vertical transfer unit (second vertical transfer unit) of the substrate cleaning apparatus according to an embodiment of the present invention.

3 to 5 are views for explaining the action of the first vertical transfer unit (second vertical transfer unit) of the substrate cleaning apparatus according to an embodiment of the present invention.

6 is a view for explaining the detailed structure of the position control unit of the substrate cleaning apparatus according to an embodiment of the present invention.

7 is an enlarged view illustrating a connection means of a substrate cleaning apparatus according to an embodiment of the present invention.

8 is a view for explaining the detailed structure of the connecting means of the substrate cleaning apparatus according to the embodiment of the present invention.

9 and 10 are views for explaining the connection / disconnection operation and the locking action of the connecting means of the substrate cleaning apparatus according to an embodiment of the present invention.

11 is a view for explaining another locking structure of the connecting means of the substrate cleaning apparatus according to the embodiment of the present invention.

[Description of Symbols for Main Parts of Drawing]

2: frame 4: conveying means 6: loading plate

12: position control unit 18: cleaning unit 20: connection means

N1: First connector N2: Second connector N3: Connection driver

N4: Locking part G: Substrate P1: Connection pin

P2: connection tube P3, P4: electric terminal

Claims (14)

frame; A first horizontal transfer unit having a loading plate for loading a substrate and transferring the substrate from one side of the frame to the other side; A position control unit installed at the loading plate and operable to control a loading state of the substrate by receiving a driving fluid or driving electricity; Connecting means for detachably connecting a port section for supplying a driving fluid or driving electricity to the position control unit by a connection / separation operation; Including; The connecting means, A first connector having a connecting pin and positioned on the loading plate side; A second connector having a connection tube corresponding to the connection pin and positioned on a transport section of the loading plate; A connection driver for detachably connecting the first connector and the second connector; A locking unit configured to fix a connection state of the first connector and the second connector to fluid pressure; Substrate cleaning device comprising a. The method according to claim 1, The first horizontal transfer unit, The substrate cleaning apparatus is set to transfer the substrate in the horizontal direction from the upper portion of the frame while the loading plate is moved along the guide rail. The method according to claim 1, The position control unit, A aligner for aligning the loading position of the substrate, The positioner is, A first guide pin disposed on the loading plate to correspond to one corner point positioned diagonally among the four corners of the substrate, a second guide pin disposed to correspond to the other corner point of the substrate; It consists of an actuator for moving the guide pin of any one of the first and second guide pins back and forth, And the actuator is configured to receive a driving fluid (or driving electricity) to align the position of the substrate by pin contact while moving the first guide pin or the second guide pin. The method according to claim 1, The position control unit, It includes a position sensor for detecting the loading position of the substrate, The position sensor, Substrate cleaning device that is set to detect the position of the substrate by using any one of the optical sensor or the limit switch as a sensing sensor and supplied with driving electricity (or driving fluid). delete The method according to claim 1, The connecting pin is A substrate cleaning device protruding from one surface of the first connector and connected to a first fluid port (outlet port) for supplying a driving fluid. The method according to claim 1, The connecting tube, The substrate cleaning device inserted into the second connector and connected in communication with a second fluid port (inlet port) for supplying a driving fluid. The method according to claim 1, The connecting tube, Substrate cleaning device using rubber tube or silicon tube. The method according to claim 1, The first connector and the second connector, Substrate cleaning device, characterized in that the connecting pin is connected in a state detachably fitted in the connection tube. The method according to claim 1, The locking unit, Comprising a pressure passage formed inside the second connector to correspond to the outer surface of the connection tube, and a pressure generator connected to one side of the pressure passage, And the pressure generator forms the inside of the pressure passage in a pressurized or reduced pressure atmosphere to fix the connecting pins in a fastened state while tightening the outer surface of the connecting tube by a pressing force or a depressurizing force. The method according to claim 1, The first connector and the second connector, It is further provided with an electrical connection for supplying driving electricity, The electrical connection portion, A first electrical port (outlet port) and a second electrical port (inlet port) that are connected / disconnected in the form of a male / female electrical terminal, so that the electric supply can be connected when the first connector and the second connector are connected. Substrate cleaning device to be set. The method according to claim 1, The substrate cleaning device, Further comprising a second horizontal transfer unit, The second horizontal transfer unit, And a plurality of transfer rollers, the substrate cleaning apparatus being set to transfer the substrate in the horizontal direction from the bottom of the frame by rotation of the transfer rollers. The method according to claim 12, The cleaning unit is installed in the transport section of the second horizontal transfer unit, The cleaning unit, A substrate cleaning device comprising an organic cleaning module, a cleaning module and a drying module disposed on one side of the organic cleaning module. The method according to claim 1, The substrate cleaning device, Further comprising a first vertical transfer portion or a second vertical transfer portion, The first vertical transfer unit or the second vertical transfer unit, It consists of an upper hand and a lower hand that can move up and down, The upper hand and the lower hand, The substrate cleaning device is set to be transferred in the vertical direction while taking over / taking over the substrate by the up / down operation at one end or the other end of the first horizontal transfer unit.

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