KR20130098750A - Stocker - Google Patents

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Publication number
KR20130098750A
KR20130098750A KR1020120020528A KR20120020528A KR20130098750A KR 20130098750 A KR20130098750 A KR 20130098750A KR 1020120020528 A KR1020120020528 A KR 1020120020528A KR 20120020528 A KR20120020528 A KR 20120020528A KR 20130098750 A KR20130098750 A KR 20130098750A
Authority
KR
South Korea
Prior art keywords
casing unit
unit
frame
workpiece
vertical
Prior art date
Application number
KR1020120020528A
Other languages
Korean (ko)
Inventor
조광남
김정훈
정형주
박성용
김진철
조한형
남상빈
박성채
Original Assignee
주식회사 조광하이테크
조광남
김정훈
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 조광하이테크, 조광남, 김정훈 filed Critical 주식회사 조광하이테크
Priority to KR1020120020528A priority Critical patent/KR20130098750A/en
Publication of KR20130098750A publication Critical patent/KR20130098750A/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • B65G1/0407Storage devices mechanical using stacker cranes
    • B65G1/0414Storage devices mechanical using stacker cranes provided with satellite cars adapted to travel in storage racks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/062Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769Storage means
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Abstract

The present invention relates to a stocker that can increase the production efficiency of the workpiece by effectively loading and waiting the workpiece on the workpiece flow line of the production line for producing the workpiece, such as semiconductor wafer, LCD, flat panel.
Stocker according to the present invention, the frame installed along the workpiece flow line of the production line; A casing unit installed in the frame to be movable in a vertical direction; A plurality of conveyor units installed in the casing unit and configured to load or transfer a plurality of workpieces; And a driving unit for selectively driving any one of the plurality of conveyor units in response to vertical movement of the casing unit.

Description

Stocker {STOCKER}

The present invention relates to a stocker, and more particularly, to a stocker that can increase the production efficiency of the workpiece by effectively loading and waiting the workpiece on the workpiece flow line of the production line, such as a semiconductor.

A production line for manufacturing a workpiece such as a semiconductor wafer, an LCD, a flat panel, etc. is provided with a plurality of work stations and a plurality of accessory equipments. In this production line, the workpieces are moved between a plurality of workstations, and several work processes proceed sequentially.

In addition, during the process in the production line, the workpiece is configured to smooth the workflow of the workpiece while temporarily waiting after being loaded on the stocker for various reasons.

Meanwhile, the conventional stocker is installed at a position spaced apart from the production line of the workpiece, and is configured to load or unload the workpiece into the stacking position of the stocker by various transport robots, thus taking up a lot of space on the production line. Since a transport robot is required, the flow of the workpiece cannot be smoothly progressed, which causes a decrease in the overall production efficiency.

The present invention has been made in view of the above, the production of the workpiece by effectively performing the loading and waiting of the workpiece on the workpiece flow line of the production line for producing the workpiece such as semiconductor wafer, LCD, flat panel The purpose is to provide a stocker that can increase the efficiency.

The stocker according to the present invention for achieving the above object,

A frame installed along the workpiece flow line of the production line;

A casing unit installed in the frame to be movable in a vertical direction;

A plurality of conveyor units installed in the casing unit and configured to load or transfer a plurality of workpieces; And

And a driving unit for selectively driving any one of the plurality of conveyor units in response to vertical movement of the casing unit.

Moving mechanisms for moving the casing unit in the vertical direction are respectively installed on both left and right sides of the frame,

The moving mechanism includes a screw shaft rotatably installed on both left and right sides of the frame and a nut member installed to be screwable relative to the screw shaft.

The nut member is fixed to the casing unit side.

The casing unit has a plurality of vertical members are disposed on both left and right sides, a plurality of horizontal members are disposed on both upper and lower sides, the front and rear of the casing unit is an open structure, one or more guides on the vertical member side The member is installed, one or more guide rods are installed in the left and right sides of the frame in the vertical direction, and the guide member is guided in the vertical direction along the outer circumferential surface of the guide rod.

At least one auxiliary guide member is installed in the vertical member of the casing unit, and the auxiliary guide member is installed to be guided along the screw shaft of the moving mechanism.

The plurality of conveyor units are installed spaced apart at regular intervals in the casing unit in the vertical direction,

Each conveyor unit includes a pair of rotary shafts rotatably installed between the vertical members of the casing unit, one or more rollers installed on the outer circumferential surface of each rotary shaft, one or more transfer belts installed between the rollers,

The workpiece is seated on the upper surface of the conveyance belt and temporarily loaded or conveyed,

A coupling socket is installed at an end of one of the pair of rotary shafts, a coupling groove is formed at an end of the coupling socket, and the coupling groove is formed in a rectangular structure.

The driving unit may include a drive motor rotatably installed in one side of the frame, a drive shaft rotatably protruding from one side of the drive motor, a moving block installed under the drive motor, and the moving block in a left and right direction. Including a moving cylinder,

An end portion of the drive shaft is configured to protrude toward the conveyor unit, and the coupling protrusion is formed in a rectangular structure corresponding to the coupling groove of the coupling socket.

According to the present invention, a frame is disposed along a workpiece flow line of a production line in which a plurality of workstations are arranged, and the workpieces conveyed along the workpiece flow line are sequentially processed by a casing unit and a plurality of conveyor units. As it is configured to transfer to the workstation side of the subsequent process after temporarily loading or waiting, it is possible not only to increase the space utilization in the production line, but also does not require a separate transport robot for transporting the workpiece.

In addition, the present invention can be quickly and accurately transferred to the workstation side of the conveying process after temporarily loading the workpiece by a plurality of conveyor units on the workpiece flow line of the production line, the advantage of increasing the production efficiency of the workpiece There is this.

1 is a side view showing a stocker according to an embodiment of the present invention.
FIG. 2 is a front view of the present invention as seen from the arrow A direction of FIG.
3A and 3B are enlarged views of arrow B of FIG. 2, illustrating an operation relationship between a casing unit and a driving unit.
4 is a plan view of the present invention as viewed from the arrow C direction of FIG.
5 is a view seen from the direction of the arrow DD of FIG.
FIG. 6 is an enlarged view of a portion E of FIG. 5.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 to 6 are diagrams showing a stocker according to an embodiment of the present invention.

As shown, the stocker according to the present invention loads or conveys a plurality of workpieces in the frame 10, the casing unit 20 installed in the frame 10 so as to be movable upward and downward, and the casing unit 20. It includes a plurality of conveyor unit 30 is installed so as to, and a drive unit 40 for selectively driving any one of the plurality of conveyor unit 30, the conveyor unit (30).

The frame 10 may be disposed along a flow line of a workpiece WP such as a semiconductor wafer, an LCD, or a flat panel. The frame 10 is installed so that its lower end is stably supported on the bottom surface, and a pair of moving mechanisms for moving the casing unit 20 in the up and down direction (see arrow V direction) on both left and right sides of the frame 10 ( 15) are installed symmetrically.

As shown in FIG. 2, each moving mechanism 15 includes a screw shaft 15a rotatably installed on both left and right sides of the frame 10 and a nut member rotatably installed relative to the screw shaft 15a. 15b), and the nut member 15b is fixed to the side of the casing unit 20.

The screw shaft 15a is configured to rotate individually by a drive mechanism 16 installed on the top of the frame 10. As shown in FIG. 4, the driving mechanism 16 includes a plurality of transmission shafts 17c symmetrically connected to the driving motor 16a and the plurality of gearboxes 16b on the driving motor 16a side. The plurality of transmission shafts 16c are connected to the screw shaft 15a side of each moving mechanism 15 via a plurality of gearboxes 16b from the output side of the driving motor 16a, thereby driving the motor ( The driving force of 15a) is transmitted to the respective screw shafts 15a through the plurality of gearboxes 16b and the plurality of transmission shafts 16c, and as the screw shafts 15a rotate, the nut member 15b and the casing unit are rotated. 20 moves up and down symmetrically in the frame 10.

As shown in FIGS. 1 and 2, the casing unit 20 includes a plurality of vertical members 21 disposed on both left and right sides, a plurality of horizontal members 22 disposed on both upper and lower sides, and a vertical member 21. ) And the horizontal member 22 is configured by being coupled to each other at its adjacent ends. And, the casing unit 20 is made of a structure in which the front and the rear is opened as shown in Figure 2 is easy to enter or discharge the workpiece (WP).

As shown in FIG. 1, a pair of guide rods 13a are arranged symmetrically with respect to the screw shaft 15a of the frame 10, and one on the side of the vertical member 21 of the casing unit 20. The above guide member 13b is provided. The guide rod 13a is installed in the vertical direction, and the guide member 13b of the casing unit 20 is the outer circumferential surface of the guide rod 13a when the casing unit 20 is moved up and down by the moving mechanism 15. It may be guided in the vertical direction along the.

In addition, at least one auxiliary guide member 14 is installed in the vertical member 21 of the casing unit 20, and the auxiliary guide member 14 is guided along the screw shaft 15a of the moving mechanism 15. Is installed.

Through this guide structure, the vertical movement of the casing unit 20 can be made very precisely.

The plurality of conveyor units 30 may be spaced apart at regular intervals in the casing unit 20 in the vertical direction, and may temporarily load and wait the workpieces WP transported along the workpiece flow lines of the production line. And, there is an advantage that a separate transport robot for transporting the workpiece (WP) is not required.

Each conveyor unit 30 is a pair of rotary shafts 32 rotatably installed between the vertical members 21 of the casing unit 20, as shown in Figure 5 is installed on the outer peripheral surface of each rotary shaft 32 One or more rollers 31 and one or more transfer belts 35 installed between the rollers 31. The workpiece WP may be seated on the upper surface of the conveyance belt 35 to be temporarily loaded or conveyed.

As the conveyor unit 30 rotates any one of the rotating shafts 32, the conveying belt 35 is driven as the rotating shaft 32 and the roller 31 rotate, and are seated on the upper surface of the conveying belt 35. The workpiece WP can be transferred.

2, 3A, 3B, 5 and 6, the coupling socket 36 is installed at the end of any one of the pair of rotary shafts 32, the coupling socket ( The coupling groove 36a is formed at the end of the coupling member 36, and the coupling groove 36a is formed in a rectangular structure.

The drive unit 40 is installed on one side of the frame 10, so as to selectively drive any one of the plurality of conveyor units 30 in response to the vertical movement of the casing unit 20. It is composed.

As shown in FIGS. 2, 3A, 3B, 5 and 6, the driving unit 40 includes a driving shaft 42 rotatably protruding from one side of the driving motor 41 and the driving motor 41. It includes a moving block 43 installed on the lower portion of the drive motor 41, a moving cylinder 45 for moving the moving block 43 in the left and right directions.

The drive motor 41 is installed on one side of the frame 10 so as to be movable in the horizontal direction (arrow H direction).

The drive shaft 42 is rotatably protruded from one side of the drive motor 41, the coupling protrusion 42a is configured to protrude toward the conveyor unit 30 at the end of the drive shaft 42. The coupling protrusion 42a is formed in a square structure corresponding to the coupling groove 36a of the coupling socket 36, so that the coupling protrusion 42a of the driving shaft 42 is coupled to the coupling groove 36a of the coupling socket 36. When coupled, the driving force of the drive motor 41 is transmitted to the rotating shaft 32 side of the conveyor unit 30 through the drive shaft 42 and the coupling socket 36.

On the other hand, the drive shaft 42 is rotatably supported by a support bracket 46 extending in the shape of the letter "a" on one side of the drive motor (41). One side of the support bracket 46 is fixed to one side of the drive motor 41, and the other end thereof is configured to rotate and support the outer circumferential surface of the drive shaft 42.

The moving block 43 is fixed to the lower portion of the drive motor 41, and the moving cylinder 45 is configured to move the moving block 43 in the left and right directions (arrow H direction). The moving cylinder 45 is installed at one side of the frame 10 via the fixing bracket 44.

With this configuration, as shown in FIG. 3B, after the driving shaft 42 of the driving motor 41 moves to one of the conveyor units 30, the engaging protrusion 42a of the driving shaft 42 is coupled to the conveyor unit 30. Coupling to the coupling groove (36a) side of the socket 36, the rotating shaft 31 of the conveyor unit 30 is driven to rotate as the drive shaft 42 is rotated by the drive motor 41, thereby the conveyor unit 30 The conveyance belt 35 of) can be driven to convey the workpiece (WP) loaded on the upper surface.

According to the present invention as described above, when moving up and down by the shanghai (arrow V direction) of the casing unit 20, the engaging socket 36 of any one of the plurality of conveyor unit 30 (30) Located adjacent to the drive shaft 42 of the drive unit 40, in this state as the drive motor 41 of the drive unit 40 moves in the left and right direction (arrow H direction) by the moving cylinder 45 As shown in 3b, the coupling protrusion 42a of the driving shaft 42 is coupled to the coupling groove 36a side of the coupling socket 36. As the drive shaft 42 of the drive motor 41 rotates, the conveyor unit 30 is driven to transfer the workpiece WP on the transfer belt 35 to be discharged to the workstation side of a subsequent process.

Meanwhile, as the driving unit 40 drives the conveyor unit 30 in accordance with the vertical movement of the casing unit 20, the workpiece WP first introduced into the plurality of conveyor units 30 may be discharged first. It may be possible (first in, first out).

As described above, according to the present invention, the frame 10 is disposed along the workpiece flow line of the production line in which the plurality of workstations are arranged, and the workpiece WP transferred along the workpiece flow line is stored in the casing unit 20. ) And a plurality of conveyor units 30 to be temporarily loaded or waited in a sequential order and then transported to the workstation side of a subsequent process, thereby increasing the space utilization in the production line as well as a separate for transporting the workpiece. There is an advantage that the carrying robot is not required.

In addition, the present invention can be quickly and accurately transferred to the workstation side of the conveying process after temporarily loading the workpiece (WP) by a plurality of conveyor units 30 on the workpiece flow line of the production line, the workpiece (WP ) Has the advantage of increasing the production efficiency.

10: frame 15: moving mechanism
20: casing unit 21: vertical member
22: horizontal member 30: conveyor unit
36: coupling socket 36a: coupling groove
40: drive unit 42: drive shaft
42: engaging protrusion

Claims (5)

A frame installed along the workpiece flow line of the production line;
A casing unit installed in the frame to be movable in a vertical direction;
A plurality of conveyor units installed in the casing unit for loading or transferring a plurality of workpieces; And
And a driving unit for selectively driving any one of the plurality of conveyor units in response to vertical movement of the casing unit.
Moving mechanisms for moving the casing unit in the vertical direction are respectively installed on both left and right sides of the frame,
The moving mechanism includes a screw shaft rotatably installed on both left and right sides of the frame and a nut member installed to be screwable relative to the screw shaft.
The nut member is a stocker, characterized in that fixed to the casing unit side.
The method according to claim 1,
The casing unit has a plurality of vertical members are disposed on both the left and right sides, a plurality of horizontal members are disposed on both the upper and lower sides, the front and rear of the casing unit is an open structure, one or more guides on the vertical member side The member is installed, the left and right sides of the frame at least one guide rod is installed in the vertical direction, the guide member is characterized in that the guide member is guided in the vertical direction along the outer circumferential surface of the guide rod.
The method according to claim 2,
At least one auxiliary guide member is installed on the vertical member of the casing unit, and the auxiliary guide member is installed to be guided along the screw shaft of the moving mechanism.
The method according to claim 1,
The plurality of conveyor units are installed spaced apart at regular intervals in the casing unit in the vertical direction,
Each conveyor unit includes a pair of rotary shafts rotatably installed between the vertical members of the casing unit, one or more rollers installed on the outer circumferential surface of each rotary shaft, one or more transfer belts installed between the rollers,
The workpiece is seated on the upper surface of the conveyance belt and temporarily loaded or conveyed,
A coupling socket is installed at an end of any one of the pair of rotary shafts, a coupling groove is formed at an end of the coupling socket, and the coupling groove is formed in a rectangular structure.
The method of claim 4,
The driving unit may include a drive motor rotatably installed in one side of the frame, a drive shaft rotatably protruding from one side of the drive motor, a moving block installed under the drive motor, and the moving block in a left and right direction. Including a moving cylinder,
The end of the drive shaft is configured such that the engaging projection is projected toward the conveyor unit, the engaging projection is characterized in that the stocker is formed in a rectangular structure corresponding to the coupling groove of the coupling socket.
KR1020120020528A 2012-02-28 2012-02-28 Stocker KR20130098750A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020120020528A KR20130098750A (en) 2012-02-28 2012-02-28 Stocker

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120020528A KR20130098750A (en) 2012-02-28 2012-02-28 Stocker

Publications (1)

Publication Number Publication Date
KR20130098750A true KR20130098750A (en) 2013-09-05

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Family Applications (1)

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KR1020120020528A KR20130098750A (en) 2012-02-28 2012-02-28 Stocker

Country Status (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106629053A (en) * 2016-09-20 2017-05-10 信义玻璃(天津)有限公司 Multi-layer frame and method for adjusting glass transferring sequence
CN108529113A (en) * 2018-04-23 2018-09-14 合肥哈工众志自动化科技有限公司 A kind of carrier-and-stacker

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106629053A (en) * 2016-09-20 2017-05-10 信义玻璃(天津)有限公司 Multi-layer frame and method for adjusting glass transferring sequence
CN106629053B (en) * 2016-09-20 2019-09-27 信义玻璃(天津)有限公司 A kind of method of thousand layer frames and adjustment glass transmission order
CN108529113A (en) * 2018-04-23 2018-09-14 合肥哈工众志自动化科技有限公司 A kind of carrier-and-stacker

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