KR100660780B1 - Device for transfer of flat display panel - Google Patents

Abstract

A device for transfer of a flat display panel is provided to reduce a cost by decreasing an installment area of a developing device having a sloping transfer part. In a device for transfer of a flat display panel, a substrate is processed in a chamber(11). A supporting part(15) is arranged inside the chamber, and forms a predetermined frame. A plurality of sloping transfer parts(17,19) is hinge-connected to the supporting part and transfers the substrate by transfer rollers rotating by a driving part(23). A guide(21) guides a movement of the supporting part. Another driving part ascends and descends the supporting part. A sloping guide member allows the plurality of sloping transfer parts to be inclined at a certain angle.

Description

Substrate transfer device for flat panel display {Device for transfer of flat display panel}

1 is a block diagram showing a substrate transfer apparatus that can be applied to the present invention.

2 is an overall configuration diagram for explaining an embodiment according to the present invention.

3 is a view for explaining the main part and the operation process of FIG.

4 is a view for explaining the operation of the present invention.

<Explanation of symbols of main parts in drawings>

DESCRIPTION OF SYMBOLS 1 Developing apparatus 3 Substrate supply part 5 Substrate discharge part

11 chamber 15 support portion 17 first inclined feed portion

19: 2nd inclined feed part 21: Guide 23: Drive part

25: slope induction means

The present invention relates to a substrate transfer apparatus for a flat panel display, and more particularly, can be applied to a developing apparatus in the process of manufacturing a flat panel display substrate, and can maximize space efficiency by minimizing an installation space of a device required for developing a substrate. A substrate transfer apparatus for flat panel displays.

In general, a process of forming a circuit pattern or the like on a glass substrate in the manufacturing process of a flat panel display device includes cleaning the substrate, applying a photosensitive resin to the surface of the cleaned substrate, and forming a photosensitive film, and exposing the photosensitive film through a predetermined pattern. And developing it.

In the manufacturing process of such a display apparatus, a developing process is apply | coating a developing solution to a board | substrate through a normal developing solution supply apparatus. In the developing process, the developing process may be performed by passing a substrate through a chamber containing a developing solution or by spraying the developing solution onto the substrate using a spraying device. The developing apparatus which performs such a developing process is provided with means for supplying a developing solution to a chamber, and also with a conveying means by which a substrate can be conveyed. Therefore, when the substrate is introduced into the chamber, the developer is supplied to the substrate by the means for supplying the developer, and after a predetermined time passes, the substrate is transferred to the cleaning device by the transfer means. Typically, the substrate transfer means, which is disposed on one side of the developing apparatus and supplies the substrate discharged from the developing apparatus, to the cleaning apparatus, transfers the substrate in an inclined state to clean and dry the substrate in order to increase processing efficiency of the substrate.

Such a conventional developing apparatus has a structure in which the developer is supplied to the substrate and then moved to the cleaning apparatus by the substrate transfer means after a predetermined time has elapsed for development so that the processing time is increased, and the productivity is lowered. Since the inclined transfer device for inclined transfer of the substrate must be additionally installed at the outlet side of the developing apparatus, there is a problem that the manufacturing cost can be increased with the increase of the installation space.

Therefore, the present invention has been proposed to solve the above problems, an object of the present invention can reduce the increase in processing time during the development process of the substrate, and to minimize the installation space of the development (developing) device manufacturing of the substrate It is to provide a substrate transfer device for a flat panel display that can reduce the cost.

In order to achieve the above object, the present invention, the chamber is provided with a space for processing the substrate, the support portion disposed in the chamber and forming a predetermined frame, the conveying rollers hinged to the support portion is rotated by the driving unit is provided A plurality of inclined feed units for transferring the guide, a guide for guiding movement of the support unit, another driving unit for driving the support unit to move along the guide, and inducing the plurality of inclined feed units to be inclined at a predetermined angle about the hinge coupler. Provided is a substrate transfer apparatus for a flat panel display including tilt inducing means.

The plurality of inclined transfer units may include a first inclined transfer unit hinged to the support and a second inclined transfer unit hinged to the support of the lower portion of the first inclined transfer unit.

The inclination inducing means may include a rod which is moved by the actuator to be in contact with or opposite to the hinge coupling portion of the inclined transfer portions.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a configuration diagram for explaining an embodiment to which the present invention is applied, and illustrates a developing apparatus. The developing apparatus of the present invention receives a substrate supply unit 3 for supplying a substrate G1 or G2 such as a glass substrate, and a substrate G1 or G2 that is a processing target from the substrate supply unit 3. The developer Gl or G2 is supplied to the developer sprayer 71 for applying the developer to G1 or G2, and the substrate G1 or G2 is supplied for a time required for developing by receiving the substrate G1 or G2 from the developer sprayer 71. The developing unit 1 to wait for development, the substrate G1 or G2 transferred from the developing unit 1 may be delivered in an inclined state, and the cleaning unit cleaning the substrate G1 or G2. (81), a drying unit 91 for receiving and drying the substrate G1 or G2 transferred from the cleaning unit 81, and a substrate for discharging the substrate (G1 or G2) of the drying unit 91 It may include a discharge portion (5).

In the developing apparatus, the developer injection part 71 includes a developer supplying device 71a and devices 71b for transferring the substrate. The developer supply device 71a is disposed inside the chamber to apply the developer to the substrates G1 and G2, and may include a developer spray nozzle. In the present invention, the developer supplying device 71a supplies developer to the substrates G1 and G2 only for developing the substrates G1 and G2, thereby developing the substrates G1 and G2. As long as it is possible, anything is possible and a conventional structure can be used and its detailed structure and description are abbreviate | omitted.

In addition, since the cleaning unit 81 and the drying unit 91 in the cleaning apparatus are used to clean and dry the substrate G1 or G2 in a developed state, a detailed description thereof will be omitted.

FIG. 2 is a block diagram illustrating a main part for explaining an embodiment according to the present invention, and FIG. 3 is a view illustrating in detail the main part of FIG. 1, wherein the substrates G1 and G2 used in the flat panel display panel are developed. The developing part 1 which can be discharged in the inclined state while temporarily storing the board | substrate G1 or G2 so that it may have a fixed developing time in the developing process is shown.

In the present invention, a substrate supply unit 3 is disposed on one side of the developing unit 1 to illustrate an example of supplying the substrates G1 and G2 to the developing unit 1. In addition, an example in which the substrate discharge part 5 capable of being transferred in the inclined state of the substrates G1 and G2 is disposed and described on the discharge side of the substrates G1 and G2 of the developing part 1. In the present invention, instead of the substrate supply unit 3 for supplying the substrates G1 and G2 to the developing apparatus 1, the developer solution injection unit 71 (shown in FIG. 1), and the substrate discharge unit 5 are replaced with three. The government part 81 may be disposed, and for convenience, the example is disposed in the developing part 1 between the substrate supply part 3 and the substrate discharge part 5.

That is, in the present invention, the substrate supply unit 3 is for explaining an example in which the substrates G1 and G2 are horizontally supplied to the developing unit 1, and the substrate discharge unit 5 is the substrates G1 and G2. This is to explain that they are applied to the structure that is discharged in an inclined state.

As shown in FIG. 2, the substrate supply unit 3 includes rollers R that are rotated by a motor 3a which is a normal driving source, and transfers the substrates G1 and G2 in a horizontal direction. Can have In addition, the substrate discharge part 5 receives the substrates G1 and G2 that are transferred in an inclined state and rotates the rollers R which are rotated by another motor 5a which is a normal driving source so as to be delivered to the cleaning apparatus. In addition, the rollers R are arranged in an inclined direction and have a structure in which the substrates G1 and G2 may be transferred in an inclined state.

The developing part 1 includes a chamber 11 having a space for processing the substrates G1 and G2, a support part 15 disposed inside the chamber 11, an image of the support part 15, The first inclined conveying unit 17 and the second inclined conveying unit 19 hinged to the lower position, the guide 21 for guiding the support unit 15 so that the support unit 15 moves in the up and down directions, the support unit The driving unit 23 for moving 15 and the first inclined conveying unit 17 and the second inclined conveying unit 19 rotate about the hinge coupling units 18 and 20 to induce a state inclined at a predetermined angle. And inclination inducing means 25.

The chamber 11 provides a space in which the substrates G1 and G2 applied to the flat panel display panel can stay for a predetermined time in order to perform a developing process. The chamber 11 is provided with an inlet 12 through which the substrates G1 and G2 can enter, and an outlet 14 through which the developed substrates G1 and G2 can be discharged.

The support part 15 is movable in an upward direction or a downward direction, and has a form of a frame formed in a frame shape. The first inclined conveyance unit 17 and the second inclined conveyance unit 19 are fixed to the support unit 15 by hinge coupling. The support 15 is not limited to a frame, and may be any structure that can move up and down. In addition, the support part 15 may transfer the substrates G1 and G2 in an inclined state by hinge coupling of the first inclined feed part 17 and the second inclined feed part 19. The inclined conveying unit 17 and the second inclined conveying unit 19 are formed in a structure that can be arranged in a row on the upper side, the lower side.

That is, the support part 15 is the first inclined conveying unit 17 and the second inclined conveying unit 19 is disposed in the upper, lower positions, the first inclined conveying unit 17 and the second inclined conveying unit 19 is hinged Is coupled to have a hinge coupling portion (18, 20) has a structure that can be maintained horizontal or inclined at a predetermined angle. In other words, one side of the first inclined transfer unit 17 is hinged to the support 15, and one side of the second inclined transfer unit 19 is hinged to the lower portion of the first inclined transfer unit 19. The first inclined conveying unit 17 and the second inclined conveying unit 19 may be fixed in a horizontal state by the support unit 15, and the hinge coupling unit ( 18, 20) has a structure that can be rotated around. In the structure in which the first inclined conveying unit 17 and the second inclined conveying unit 19 are horizontally arranged, the support unit 15 is formed in a frame shape, and the first inclined conveying unit 17 and the second inclined conveying unit ( 19 may have a structure in which the frame opposite to the hinge coupling part is maintained so that the first inclined conveyance unit 17 and the second inclined conveyance unit 19 may be placed on the support unit 15. In the exemplary embodiment of the present invention, the support 15 is illustrated in the drawings in the form of an example, but the present invention is not limited thereto, and the first inclined feeder 17 and the second inclined feeder 19 have a constant angle. In addition to having a structure coupled to the hinge so as to be inclined in a horizontal state, any one can be arranged side by side up and down.

The first inclined transfer unit 17 and the second inclined transfer unit 19 have a structure capable of transferring the substrates G1 and G2 by the same driving source or each driving source, respectively. In the first inclined conveying unit 17 and the second inclined conveying unit 17, a plurality of rollers R for conveying the substrates G1 and G2 are continuously arranged. The rollers R are coupled by a plurality of frames 31, 33, 35, 37. The frames 31 and 35 are coupled to the motors 17a and 19a as driving sources, and the driving force of the motors 17a and 19a is through the power transmission members such as belts, chains and sprockets. You can rotate them. Naturally, a structure for rotating the rollers R may be used. In addition, the frames 31 and 35 may be hinged to the above-described support part 15 so that the substrates G1 and G2 may be transported in a horizontal or inclined state.

The guide 21 serves to guide the support 15 to be moved in the up and down directions. Such a guide 21 may be installed to guide the support portion 15 by installing a frame serving as a separate guide as shown in the figure, and also coupled to the interior of the chamber 11 or the inner wall of the chamber 11, etc. It is possible to guide the support 15 to move up and down by using. That is, the guide 21 of the present invention is not limited to the drawings shown in the drawings or the embodiments described above, but may be any structure that can guide the lifting and lowering of the support 15. Do.

The driving unit 23 may be coupled to the support unit 15 so that the support unit 15 may move up and down along the guide 21 described above. The driving unit 23 may be a hydraulic, pneumatic cylinder or a screw that rotates by a motor and a motor. For example, the driving unit 23 may include a power transmission member for lifting and lowering the support unit 15 by transmitting power of the motor 23a and the motor 23a. For example, the power transmission member is rotatably coupled to the support 15 to the rotating screw 23c, and the driving force of the driving source such as the motor 23a rotates the rotating screw 23c by the belt 23b or the chain. Accordingly, the support 15 may have a structure capable of lifting and lowering. In the present invention, the driving unit 23 is just an example, and may be any structure that can lift and lower the support unit 15 to which the first inclined transfer unit 17 and the second inclined transfer unit 19 are coupled. Do.

The inclination guide means 25 for maintaining the first inclined feed portion 17 and the second inclined feed portion 19 in an inclined state in a horizontally arranged state is provided on one side of the chamber 11 or the support portion 15. It may be made of an actuator including a locking portion 25a moving in the horizontal direction. That is, the locking portion 25a is provided at the lower portion of the first inclined transfer portion 17 or the second inclined transfer portion 19 by an actuator operated by pneumatic or the like having a locking portion 25a capable of repeatedly moving a predetermined length horizontally. When the support part 15 is lowered when moving to the side, the opposite side of the hinge engaging portion of the first inclined conveyance part 17 or the second inclined conveyance part 19 comes into contact with the catching part 25a and the first inclined conveyance part 17. ) Or the second inclined transfer unit 19 is inclined, and the substrates G1 and G2 are transferred in an inclined state. In the present invention, the structure of the inclination inducing means 25 is not limited to the example shown in the drawings for explaining the present invention, and is disposed on the support part 15 or the like to provide the first inclined conveyance part 17 and the second inclination. As long as it is possible to have a constant inclination angle in the horizontal state of the transfer unit 19, any one can be variously applied.

If described in detail the operation of the embodiment according to the present invention made as follows.

First, the substrate supply part 3 is arranged to supply the substrate G1 in a horizontal state, and is positioned at a position where the substrate G1 can be horizontally transferred to the first inclined feed part 17 of the developing part 1. In addition, the substrate discharge unit 5 will be described by setting an example made of a position capable of receiving the substrates G1 and G2 discharged from the developing apparatus 1 in an inclined state (state shown in FIG. 4).

When the substrate G1 is supplied to the developing part 1 in a horizontal state from the substrate supply part 3, the substrate G1 is horizontally transmitted from the first inclined transfer part 17. At this time, the first inclined feed unit 17 receives the driving force transmitted through the motor 17a to the rollers R through the chain and the sprocket, and receives the substrate G1 by the rotation of the rollers R. As shown in FIG. Controlled by a controller (not shown) to stop the motor 17a when the substrate G1 is positioned on the first inclined transfer unit 17 so that the substrate G1 is placed on the first inclined transfer unit 17. do. The substrate G1 may include a state in which a developer is already applied. The substrate G1 may require a reaction time for developing. At this time, the driving force is transmitted through the belt 23b and the rotating screw 23c by driving the motor 23a of the driving unit 23, and the driving force raises and lowers the supporting unit 15. Accordingly, the support part 15 is raised along the guide 21 so that the second inclined feed part 19 is disposed at the same height as the substrate supply part 3. In this case, the substrate supply unit 3 horizontally transfers another substrate G2 to the second inclined transfer unit 19. The second inclined transfer unit 19 receives another substrate G2 in the same manner as the substrate transfer method of the first inclined transfer unit 17. During this process, the first substrate G1 is developed (developed) (figure 2).

At this time, the controller drives the motor 23a of the driving unit 23 to control the support unit 15 to descend a predetermined section. In addition, when the inclination inducing means 25 is driven, the locking portion 25a is moved to the lower side opposite to the hinge coupling portion 18 of the first inclined feed portion 17. In this state, the motor 23a of the driving unit 23 is controlled to lower the support 15 so that the first inclined transfer unit 17 is at the same position as the substrate discharge unit 5. Accordingly, the first inclined feed unit 17 is rotated about the hinge coupler 18 so that a predetermined angle is inclined. Subsequently, when the rollers R are rotated by driving the motor 17a, the first substrate G1 is moved toward the substrate discharge part 5 in an inclined state.

When the substrate G1 is completely discharged to the substrate discharge part 5 side, the motor 23a is driven to raise the support part 15 while at the same time leveling the locking part 25a of the inclination guide means 25. Control to move to.

Then, the first inclined conveyance unit 17 is maintained in a horizontally arranged state, and the first inclined conveyance unit 17 is lowered again under the control of the motor 23a to adjust the same height as that of the substrate supply unit 3. Control to move to a position where a new substrate (not shown) can be supplied. As described above, another substrate (not shown) is received from the substrate supply unit 3.

Subsequently, a method of transferring the second substrate G2 in the second inclined transfer unit 19 to the substrate discharge unit 5 will be described.

The locking portion 25a of the inclination inducing means 25 is moved in a direction opposite to the position of the second inclined transfer portion 19. Then, the motor 23a is controlled to lift the support 15. Of course, even at this time, the support part 15 is guided and moved to the guide 21. As the support part 15 moves up and down, the second inclined feed part 19 also moves up and down together. At this time, the second inclined transfer unit 19 controls the motor 23a to stop at a position slightly higher than the height when the height of the substrate discharge unit 5 is referred to. And the front end of the locking portion (25a) of the inclined guide means 15 is controlled to be disposed on the lower side opposite to the hinge coupling portion 20 of the second inclined transfer portion (19). And the control unit (not shown) to operate the motor 23a of the drive unit 23 to lower the support unit 15. Then, the second inclined transfer unit 19 is also lowered while the second inclined transfer unit 19 is rotated about the hinge coupler 20 to make an inclination. Then, by operating the motor 19a for driving the roller R of the second inclined transfer unit 19, the second substrate G2 is transferred to the substrate discharge unit 5 in an inclined state and discharged (FIG. 3). Shown).

Therefore, the present invention can reduce the overall processing time while ensuring a reaction time to sufficiently develop the development process in the substrate (G) to improve the productivity as well as to discharge the substrate in an inclined state chamber or device This can significantly reduce the installation space.

As described above, the present invention can reduce the tack time when the inclined transfer unit for transporting the substrate is formed of a plurality of stacked structures, and the substrate can be discharged in an inclined state, thereby reducing the installation area of the developing apparatus. This can reduce the manufacturing cost of the substrate.

Claims (3)

A chamber provided with space for substrate processing; A support part disposed in the chamber and forming a predetermined frame; A plurality of inclined conveying parts hinged to the support part and provided with conveying rollers rotating by a driving part to convey a substrate; A guide for guiding the movement of the support; Another driving unit for elevating and lowering the support unit; Inclination inducing means for inducing the plurality of inclined conveying parts to be inclined at a predetermined angle with respect to a hinge coupling part; Substrate transfer device for a flat panel display comprising a. The method of claim 1, wherein the plurality of inclined transfer portion And a second inclined transfer unit hinged to the support, and a second inclined transfer unit hinged to the support of the lower portion of the first inclined transfer unit. The method of claim 1, wherein the inclination inducing means And a rod moving by the actuator to be in contact with or opposite to the hinge coupling portion of the inclined transfer portions.

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