CN100470754C - Substrate conveying device and method - Google Patents
Substrate conveying device and method Download PDFInfo
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- CN100470754C CN100470754C CNB2005100748988A CN200510074898A CN100470754C CN 100470754 C CN100470754 C CN 100470754C CN B2005100748988 A CNB2005100748988 A CN B2005100748988A CN 200510074898 A CN200510074898 A CN 200510074898A CN 100470754 C CN100470754 C CN 100470754C
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- conveyer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Attitude Control For Articles On Conveyors (AREA)
- Liquid Crystal (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Intermediate Stations On Conveyors (AREA)
Abstract
The present invention provided a substrate conveyance device capable of efficiently transferring a substrate to a processing chamber when processing the substrate in the processing chamber by inclining the substrate. This substrate conveyance device is provided with a carrying-in transfer part 3 for inclining the substrate fed in a horizontal condition at a predetermined inclination angle to transfer it to the processing chamber 6, an inclination conveyance part 4 for receiving the substrate inclined at the predetermined angle in the carrying-in transfer part to convey it in a processing part at the inclination angle, and a carrying-out transfer part 5 for receiving the substrate conveyed in the processing part chamber at the predetermined inclination angle and processed from the inclination conveyance part and returning it into a horizontal condition. At least either of the carrying-in transfer part and the carrying-out transfer part is constituted by first and second carrying-in or carrying-out conveyors 31 to 34 which are sequentially arranged along the direction of conveyance of the substrate and can set inclination angle of the substrate separately and whose length is set to be shorter than length along the direction of conveyance of the substrate.
Description
Technical field
The present invention relates to be used to carry at the conveying device and the carrying method of handling part by the substrate of treatment fluid processing.
Background technology
On the substrate of the glass that is used for liquid crystal indicator, form circuitous pattern.Adopt photoetching technique in order on substrate, to form circuitous pattern.Photoetching technique is the well-known resist that is coated with on aforesaid substrate like that, by the mask irradiates light on this resist that has formed circuitous pattern.
Next, remove in the resist not by light-struck part or by light-struck part, the part of having removed resist of etching substrates by repeatedly removing the series of processes of resist etc. repeatedly, forms circuitous pattern on aforesaid substrate after etching.
In such photoetching technique, have on the aforesaid substrate by with imaging liquid, etching solution or the stripper of removing resist after the etching etc. as the operation of the soup treatment substrate of treatment fluid and after handling, utilize operation that the cleaning fluid as treatment fluid cleans etc. by soup, after cleaning, also need to remain in the drying process that the cleaning fluid on the substrate is removed with adhering to.
Substrate is being carried out under the situation of above-mentioned a series of processing, aforesaid substrate is that the conveying roller of horizontal arrangement is transported to handling part with horizontal state by axis, handles with treatment fluid there.
But, have at the glass substrate that is used for liquid crystal indicator recently and to maximize and the trend of slimming.So, if the horizontal feed substrate, because the bending of the substrate between the conveying roller would become big, so produce the problem that the processing in each treatment chamber can not be carried out equably to the plate face integral body of substrate.And under the state of residual a large amount of treatment fluids, because substrate is taken out of from handling part, under the situation that recycle process fluids is utilized again, the consumption quantitative change of treatment fluid is many, causes the raising of producing cost on substrate.
So, recently by substrate is carried, is made the treatment fluid that supplies on the substrate surface to flow swimmingly with the angle tilt of setting.Thus, the quantitative change of the treatment fluid that brings out from handling part along with substrate is few, equably the integral slab face of treatment substrate.
Make the substrate inclination and, make the substrate of coming tilt to the angle of setting and supply to handling part at handling part with the level conveying while carrying under the situation about handling.Like this, substrate after handling part is processed, will return to level from heeling condition after, hand over to next process.
Up to now, tilt in order to make substrate, the substrate that has perhaps made returns to level, moves into side and take out of side at above-mentioned handling part that respectively to dispose 1 length size bigger and can regulate the conveyer at angle of inclination than substrate.Like this, moving into side, substrate be supplied to level move into conveyer after, make this move into conveyer and tilt to and transfer substrate to handling part after angle of inclination with regulation is arranged on the identical angle in the angle of inclination of carrying conveyer of handling part.
In addition, taking out of side, making and take out of the angle of inclination standby of conveyer to set, after this took out of the substrate that conveyer accepted to take out of from handling part, the level of lodging into was carried out the transfer to next process.
But, move into side and taking out of side, by 1 conveyer separately substrate is handed over to handling part after with the angle tilt of setting, or the words of the level that behind the substrate that handling part has been handled, returns to have been accepted, moving into side at least till the conveyer that is shifted into handling part more than 1/2nd of the length dimension of substrate, can not make the conveyer lodging of moving into of moving into side get back to level and accept next substrate.So, can produce and move into conveyer and can accept required production blanking time till the next substrate, promptly transfer required production elongated problem blanking time.
In addition, taking out of side, owing to take out of conveyer after having accepted substrate and the level of lodging into from the conveyance conveyer of handling part, to from taking out of till conveyer sends whole base plate, can not make this take out of conveyer tilts to the angle of inclination of regulation and accepts next substrate, so with move into side similarly, also produce substrate and transfer required production elongated problem blanking time.
Summary of the invention
The present invention will be provided at that handling part tilts substrate with set angle and under the situation of carrying, and can shorten substrate and transfer required production base board delivery device and the carrying method of blanking time.
The present invention is the conveying device of substrate, and it is the conveying device of carrying the substrate of handling at handling part, it is characterized in that having:
After will tilting to the angle of inclination of setting with the substrate that level is sent here, hand over to the transfer portion that moves into of above-mentioned handling part;
Be received in this and move into the aforesaid substrate that transfer portion tilts to set angle, the inclination conveyance part of in above-mentioned handling part, carrying with this angle of inclination; With
From above-mentioned inclination conveyance part accept with the angle of inclination of setting in above-mentioned handling part, carry and the substrate handled after, return to the transfer portion that takes out of of level,
Above-mentionedly move into transfer portion and take out of at least one side of transfer portion, have by the throughput direction along substrate be set up in parallel successively, and the angular transformation unit that constitutes of a plurality of conveyers at the angle of inclination of setting substrate respectively.
The present invention is the carrying method of substrate, and it is a carrying method of carrying the substrate of handling at handling part, it is characterized in that having:
To move into the operation of moving into of above-mentioned handling part with the substrate that level is sent here;
The conveying operation that the substrate of moving into above-mentioned handling part is tilted to the angle of setting and carry; With
Be received in the operation of taking out of of substrate that above-mentioned handling part handled,
Above-mentioned at least one operation of moving into operation and taking out of operation has the angular transformation operation at conversion substrate angle of inclination.
According to this invention, because the above-mentioned at least one side who moves into transfer portion and take out of transfer portion, the angular transformation unit that setting is made of a plurality of conveyers, so substrate is tilted when handing over to handling part, can accept new substrate with level, taking out of when the substrate that will take out of from handling part in the transfer portion takes out of with level, can be received in the substrate that handling part was handled with heeling condition.Move into or from required production blanking time of transfer that handling part is taken out of etc. so can shorten to the handling part of substrate.
Description of drawings
Fig. 1 is the brief description figure of processing unit of an execution mode of this invention of expression.
Fig. 2 is the skiagraph of treatment chamber.
Fig. 3 is provided in a side of the plane graph of moving into side and taking out of the conveyer of side.
Fig. 4 is the side view of seeing from a side of the Width of conveyer shown in Figure 3.
Fig. 5 A-Fig. 5 C is the key diagram of handing-over of moving into the substrate of transfer portion.
Fig. 6 A-Fig. 6 C is the key diagram of handing-over of taking out of the substrate of transfer portion.
Symbol description: 3 move into transfer portion; 4 inclination conveyance parts; 5 take out of transfer portion; 6 treatment chamber; 31 first move into conveyer; 32 second move into conveyer; 33 first take out of conveyer; 34 second take out of conveyer; 56 driving cylinders.
Embodiment
Following with reference to drawing explanation embodiments of the present invention.
Fig. 1 represents the concise and to the point formation of the processing unit 1 of substrate W, and conveying device 2 of the present invention is used on this processing unit 1.Conveying device 2 is by moving into transfer portion 3, inclination conveyance part 4, take out of transfer portion 5 and constitute, above-mentioned inclination conveyance part 4 be arranged on be used for to substrate W with the treatment fluid of for example etching solution etc. handle as in the treatment chamber 6 of handling part.
Fig. 2 is the skiagraph of above-mentioned treatment chamber 6.This treatment chamber 6 along an end face of the throughput direction of substrate W form dot move into mouthfuls 7, on another end face, form and take out of mouthful (not being illustrated).The both ends of the Width that intersects at the throughput direction with substrate W in treatment chamber 6 are provided with support component 8 respectively.On these support components 8,, above-mentioned inclination conveyance part 4 for example is set the angle tilt of 5-15 degree with respect to the angle of above-mentioned Width to set.
Above-mentioned inclination conveyance part 4 has the supported framework 11 in both ends of Width on above-mentioned support component 8.An end of the Width of this framework 11 is directly supported by above-mentioned support component 8, and another end of Width is supported by angle adjustment parts 10.Thus, the angle of said frame 11 become to set, for example angle in the scopes of 5-15 degree and tilting with above-mentioned Width.In addition, the angle of inclination of framework 11 is not limited in the scopes of 5-15 degree, both can be less than also can be greater than that scope.
On said frame 11, with the throughput direction of axis along a plurality of conveying axis 12 (only illustrating) of the Width of framework 11 along the substrate W that intersects with Width with the interval set according to being provided with rotationally.Be provided with a plurality of conveying rollers 13 below the supporting substrate W at conveying axis 12 with predetermined distance.So, be supported on substrate W on the conveying roller 13 below with the angle tilt identical and be transferred with framework 11.
In the outside of Width one side of the upper end side of the incline direction that is positioned at said frame 11, power transmission shaft 14 sets up rotationally according to the throughput direction that makes axis along substrate W.At the middle part of this power transmission shaft 14 driven gear 15 is set.Driven wheel 16 is meshed with this driven gear 15.This driven wheel 16 is halved together with the force-output shaft 18 that is set at the drive source 17 of treatment chamber 6 outsides.
Though do not illustrate detailed part, on the end of above-mentioned conveying axis 14 1 sides of being positioned at of above-mentioned conveying axis 12, first bevel gear be set.First bevel gear is meshed with second bevel gear on being arranged on above-mentioned conveying axis 12.So above-mentioned drive source 17 moves and by above-mentioned driven wheel 16 and driven gear 15 above-mentioned power transmission shaft 14 is rotated, by the above-mentioned conveying axis 12 of above-mentioned first, second bevel gear rotating drive.Thus, carry the substrate W that is supported on the conveying axis 13.
In addition, in framework 11, with the radially roller 19 of a side of the Width that the incline direction lower surface of supporting substrate W is set on the corresponding position, incline direction bottom of conveying axis 12, promptly intersects with throughput direction.
Above substrate conveying W treatment chamber 6 in, be provided with at the interval according to the rules along a plurality of showers 21 (only illustrating) of the Width of substrate W throughput direction with respect to substrate.On each shower 21, a plurality of nozzles 22 are set according to the interval of setting.Above-mentioned shower 21 was connected with female pipe 23 by communicating pipe 24.This mother manages 23 sources of supply (not shown) that are communicated with the treatment fluid of etching solutions etc.Thus, go up inject process liquid from the substrate W of said nozzle 22 in being transported to treatment chamber 6.
The side of moving in above-mentioned treatment chamber 6 is provided with the above-mentioned transfer portion 3 that moves into, and the above-mentioned transfer portion 5 that takes out of is set taking out of side.As shown in Figure 1, move into transfer portion 3 and first move into conveyer 31 and second and move into conveyer 32 and constitute, take out of transfer portion 5 and first take out of conveyer 33 and second and take out of conveyer 34 and constitute by what the throughput direction along substrate W was set up in parallel successively by what the throughput direction along substrate W was set up in parallel successively.
Move into horizontal conveyer 3a in the above-mentioned upstream side setting of moving into transfer portion 3, be provided with in above-mentioned downstream of taking out of transfer portion 5 and take out of horizontal conveyer 5a.
In addition, first move into conveyer 31 and second and move into conveyer 32 and first and take out of conveyer 33 and second and take out of the angular transformation unit that conveyer 34 constitutes conversion substrate W angle respectively.
Above-mentioned each conveyer 31-34 only is the allocation position difference, and formation is the same, below, describe with reference to Fig. 3 and Fig. 4.That is, above-mentioned conveyer 31-34 has the framework 36 of rectangle shaped as frame.This framework 36 is according to setting with the framework 11 that is located at the inclination conveyance part 4 in the above-mentioned treatment chamber 6 measure-alikely, sets up supporting bracket 37 in the direction that the upper edge, Width both ends of that framework and Width are perpendicular.In addition, in this embodiment, the length dimension along the throughput direction of substrate W of the framework 36 of each conveyer 31-34 is littler than the size of this substrate W, and sets than the only about half of length of the length dimension of substrate W.
Set up a plurality of conveying axis 39 that both ends are supported rotationally by bearing 38 in a pair of supporting bracket 37 with the interval of setting.On each conveying axis 39, axially a plurality of conveying rollers 41 are set with the interval of setting.End at each conveying axis 39 of giving prominence to from a side supporting bracket 37 is provided with first bevel gear 42.
In an end side of the above-mentioned conveying axis 39 of said frame 36, along the configuration direction of conveying axis 39 supporting shaft 43 rotationally.On this power transmission shaft 43, second bevel gear 44 that is meshed with above-mentioned first bevel gear 42 is set.
Direction of principal axis middle part at above-mentioned power transmission shaft 43 is provided with driven pulley 45.On the lateral surface of said frame 36, with above-mentioned driven pulley 45 corresponding positions on drive source 46 is set.On the force-output shaft 47 of this drive source 46, driving wheel 48 is set, the chain 49 shown in the dotted line of Fig. 3 is set on this driving wheel 48 and above-mentioned driven pulley 45.
So, if above-mentioned drive source 46 actions, owing to be arranged on the above-mentioned power transmission shaft 43 of chain 49 rotating drive on driving wheel 48 and the driven pulley 45 by stretching, thus by with at first bevel gear 42 that is set up second bevel gear 44 on this power transmission shaft 43 and is meshed with second bevel gear 44 along direction initialization rotating drive conveying axis 39.Thus, the conveying roller 41 substrate supported W that are arranged on each conveying axis 39 carry along direction initialization.
As shown in Figure 4, side below said frame 36 is separated concurrently and is connected with the interval of setting by link 52 with these framework 36 sizes lower frame 51 much at one.
As an end of the Width of, lower frame 51 corresponding, in two ends of the direction that intersects with this Width back shaft 53 (only illustrating) is set respectively the axis and the axis normal of conveying axis 39 are intersected with an axial end that is arranged on the conveying axis 39 on the said frame 36.
Constitute above-mentioned move into transfer portion 3 and take out of on the end of top Width of pallet 54 of transfer portion 5 support component 55 is set.That support rotationally of above-mentioned back shaft 53 is on this support component 55.Thus, said frame 36 can be shaken with the Width of lower frame 51 edges as the axial substrate W of conveying axis 39 on pallet 54.
On above-mentioned pallet 54, on the corresponding position, another end of the Width of above-mentioned lower frame 51, along axis normal the driving cylinder 56 that constitutes head motion is set.The leading section of the driving shaft 57 of this driving cylinder 56 is provided with long mounting panel 58 along the direction that the Width with framework 36 intersects.Roller 59 (only illustrating one) is set respectively on the both ends of this mounting panel 58.A pair of roller 59 contacts with the contact plate 61 that is arranged on on the direction that this Width intersects on another end of the Width of lower frame 51.
So, this driving shaft 57 drives to projected direction if above-mentioned driving cylinder 56 moves, roller 59 presses by contact plate 61 another end with the Width of lower frame 51, rises with this lower frame 51 so be provided with the other end of Width of the framework 36 of conveying roller 41.
That is, to utilize driving cylinder 56 be that fulcrum makes another end of Width tilt to the direction higher than this end with an end of Width to framework 36.The angle of inclination of framework 36 according to become be located at above-mentioned treatment chamber 6 in the identical angle of inclination of the framework 11 of inclination conveyance part 4 set.And Fig. 4 has represented the state that framework 36 tilts.
Next, with reference to Fig. 5 A-Fig. 5 C and Fig. 6 A-Fig. 6 C, carry out the situation that substrate W handles for the processing unit 1 of the conveying device 2 by having used above-mentioned formation and describe.
The substrate W that has carried out in the not processed or operation in front handling flows to level and moves into first of transfer portion 3 and move on the conveyer 31 by moving into horizontal conveyer 3a shown in Fig. 5 A.At this moment, moving into first of transfer portion 3 moves into conveyer 31 and second and moves into conveyer 32 and accept substrate W with level.
Substrate W is moved into conveyer 31 by first and carries to second direction of moving into conveyer 32.Shown in Fig. 5 B like that along the leading section of the length direction of the throughput direction of substrate W carry second move on the conveyer 32 after, first moves into conveyer 31 and second moves into conveyer 32 and is driven by driving cylinder 56 adippings according to the mode that becomes the angle of inclination identical with inclination conveyance part 4 in the treatment chamber 6.
At this moment, on one side first, second move into conveyer 31,32 on one side conveying substrate W tilt.In addition, though at this moment the rearward end of substrate W is moved on the conveyer 3a in level, owing to moving on the conveyer 31,32 at first, second more than 1/2 of substrate W length, substrate W moves into conveyer 31,32 by these and tilts.
Shown in Fig. 5 C like that, substrate W is transported to second and moves on the conveyer 32 under the state that tilts, stay first length dimension of moving into the substrate W on the conveyer 31 in below 1/2 of total length, first moves into conveyer 31 is driven and returns to level from heeling condition.
At this moment, because the length dimension of staying the substrate W on first conveyer 31 about below 1/2 in total length, so substrate W is supported reliably by second conveyer 32.So substrate W is transferred to reliably and second is moved into the inclination conveyance part 4 of conveyer 32 with the same tilt angle tilt.
That is, move into conveyer 31 lodging and be level even stay under first state of moving on the conveyer 31 first in the part of substrate W, substrate W also can not move into conveyer 32 from second and fall and will be transported to inclination conveyance part 4.
First moves into conveyer 31 lodging is level, and next substrate W is moved into conveyer 3a by level and supplies to first with level and move into conveyer 31, carries the second plate base W and move into conveyer 31 by first.Therewith almost simultaneously, initial substrate W is moved into the conveying roller 13 that conveyer 32 is transferred inclination conveyance part 4 to from second, and this second is moved into conveyer 32 and driven and return to level from heeling condition.
Second moves into conveyer 32 become level after, move into conveyer 31 with first and accept to be moved into conveyer 31 and carry the second plate base W come with level by first.Then, these are moved into and conveyer 31,32 is driven into heeling condition from level after the second plate base W are transported in the treatment chamber 6, move into the length dimension of the second plate base W on the conveyer 32 smaller or equal to 1/2 if stay first in addition, first moves into conveyer 31 lodging is level, the 3rd plate base W is transported on this conveyer 31, so repeats above action.
Like this, moving into transfer portion 3 moves into conveyer 32 and constitutes by can angle adjustment becoming first of level and heeling condition to move into conveyer 31 and second.So, substrate W is supplied to and is transported to lodging and moves on the conveyer 31,32 under the level first, second, staying of this substrate W first moved into length dimension on the conveyer 31 in the words below 1/2, when moving into the state conveying substrate W of conveyer 32 with inclination by second, can move into conveyer 31 lodging with first is level, accepts next plate base W with level.
Promptly, because moving into transfer portion 3 is, this first move into conveyer 31 with level when moving into horizontal conveyer 3a and accepting substrate W, rely on second to move into the inclination conveyance part 4 that conveyer 32 hands over to treatment chamber 6, so compare with the situation of the acceptance of carrying out substrate W dividually and transfer, can shorten and produce blanking time.
For the substrate W that is transferred to the inclination conveyance part 4 in the treatment chamber 6, from nozzle 22 inject process liquid above it.Because substrate W carries with the angle tilt ground of setting, hold level with both hands mobile quietly downwards from the upper end of Width so supply to the speed that the treatment fluid above the substrate W can set.So, treatment fluid be difficult to remain in substrate W above because treatment fluid flows along direction initialization, so when improving processing speed, can improve the uniformity of processing.
Being tilted delivery section 4 substrate conveying W after being handled in treatment chamber 6 like this is handed over to and is transported to next process after taking out of transfer portion 5.For substrate W is carried out by following to taking out of 5 transfers of transfer portion like that from inclination conveyance part 4.That is, take out of first of transfer portion 5 and take out of conveyer 33 and second and take out of conveyer 34, wait for the taking out of of substrate W of processing treatment chamber 6 in the angle tilt identical with inclination conveyance part 4.
The substrate W that handles in treatment chamber 6 being handed over to first with the state that tilts like that and take out of on the conveyer 33 as shown in Figure 6A first taken out of conveyer 33 and taken out of conveyer 34 to second and carry from this.Shown in Fig. 6 B like that, taken out of and be transported to first, second from inclination conveyance part 4 as substrate W and taken out of on the conveyer 33,34, these first, second take out of conveyer 33,34 and drive from heeling condition and be level.Then, substrate W takes out of on the conveyer 33,34 at first, second with level and carries.
Shown in Fig. 6 C, the rear end of substrate W is taken out of conveyer 33 from first and is left, and this first is taken out of conveyer 33 and driven from horizontal direction and be heeling condition.Then, accept to take out of next next substrate W with the angle of inclination of setting from treatment chamber 6 by above-mentioned inclination conveyance part 4.
Take out of when conveyer 33 accepts next substrate W first, substrate W is taken out of conveyer 34 from second and transfers level to and take out of conveyer 5a and taken out of.Take out of conveyer 5a if substrate W is handed over to level, second takes out of conveyer 34 is driven to first from level and takes out of the identical angle of inclination of conveyer 33.
Thus, taken out of next the plate base W that comes from inclination conveyance part 4, take out of conveyer 33 and second by first and take out of conveyer 34 and taken out of with the inclined at inclination angles of setting, the rear end is left from inclination conveyance part 4, and these are taken out of conveyer 33,34 and are level from the heeling condition lodging.
Like this, the rear end of substrate W is taken out of conveyer 33 from first and is left, and this first conveyer 33 is driven from level is heeling condition, accepts to be taken out of from treatment chamber 6 the substrate W that comes, and repeats such action.
Like this, take out of conveyer 34 and constitute the transfer portion 5 that takes out of by taking out of conveyer 33 and second by first, taking out of conveyer 34 lodging second is under the horizontal state, when transferring substrate W to level and taking out of conveyer 5a, can make first to take out of conveyer 33 and tilt and accept the substrate W that the inclination conveyance part 4 of processed chamber 6 is taken out of.
Promptly, take out of transfer portion 5 owing to can take out of the substrate W that conveyer 33 acceptance are taken out of from treatment chamber 6 by first on one side, take out of conveyer 34 by second on one side and take out of conveyer 5a transfer to level, so with carry out respectively accepting substrate W and take out of conveyer 34 to level and transfer the situation of substrate W and compare from inclination conveyance part 4, can shorten and produce blanking time
In addition, though the treatment chamber 6 in an above-mentioned execution mode move into side and taking out of on the side, be set up in parallel respectively level and can erect 2 conveyers into the angle of inclination of setting, but also can be only 2 conveyers be set moving into side and take out of on a certain side in the side.Even like this, in that substrate W is tilted in treatment chamber under the situation of treatment substrate, also can shorten and transfer substrate required production blanking time.
In addition, formation is moved into transfer portion and is not limited to 2 with the quantity of taking out of the conveyer of transfer portion, also can be more than 3 or 3.
In addition, though horizontal conveyer is set and carries out the transfer of substrate in the upstream side of moving into transfer portion and the downstream of taking out of transfer portion, the place of water horizontal conveyor also can use robot to carry out.
Claims (5)
1. the conveying device of a substrate is carried the substrate of handling at handling part, it is characterized in that having:
To tilt to the angle of inclination of setting with the substrate that level is sent here and hand over to the transfer portion that moves into of described handling part;
After accepting to be moved into the described substrate that transfer portion tilts to set angle at this, the inclination conveyance part of in described handling part, carrying with this angle of inclination; With
Accept in described handling part, to carry also processed substrate from described inclination conveyance part, and this substrate returned to the transfer portion that takes out of of level with the angle of inclination of setting,
Describedly move into transfer portion and take out of at least one side of transfer portion, have the angular transformation unit that is set up in parallel in proper order and constitutes by a plurality of conveyers at the angle of inclination of setting substrate respectively along the throughput direction of substrate, wherein,
The described angular transformation unit of moving into transfer portion first is moved into conveyer and second and is moved into conveyer and constitute by what the throughput direction along substrate was set up in parallel in turn, first moves into conveyer and second moves into the angle that conveyer is accepted substrate with level and tilted to setting, substrate is transported to described inclination conveyance part, and, when first moves into conveyer and leave, make this first move into conveyer and lodge the level that to carry out the transfer of next substrate in half of the length dimension of substrate.
2. the conveying device of a substrate is carried the substrate of handling at handling part, it is characterized in that having:
To tilt to the angle of inclination of setting with the substrate that level is sent here and hand over to the transfer portion that moves into of described handling part;
After accepting to be moved into the described substrate that transfer portion tilts to set angle at this, the inclination conveyance part of in described handling part, carrying with this angle of inclination; With
Accept in described handling part, to carry also processed substrate from described inclination conveyance part, and this substrate returned to the transfer portion that takes out of of level with the angle of inclination of setting,
Describedly move into transfer portion and take out of at least one side of transfer portion, have the angular transformation unit that is set up in parallel in proper order and constitutes by a plurality of conveyers at the angle of inclination of setting substrate respectively along the throughput direction of substrate, wherein,
Described angular transformation unit of taking out of transfer portion first is taken out of conveyer and second and is taken out of conveyer and constitute by what the throughput direction along substrate was set up in parallel in turn, first takes out of conveyer and second takes out of conveyer with conveying substrate after accepting substrate and the level of lodging at the state of the angle tilt of setting, and, take out of when conveyer leaves from first at substrate, make this first take out of conveyer and erect to carrying out the heeling condition of the transfer of next substrate.
3. the conveying device of a substrate is carried the substrate of handling at handling part, it is characterized in that having:
To tilt to the angle of inclination of setting with the substrate that level is sent here and hand over to the transfer portion that moves into of described handling part;
After accepting to be moved into the described substrate that transfer portion tilts to set angle at this, the inclination conveyance part of in described handling part, carrying with this angle of inclination; With
Accept in described handling part, to carry also processed substrate from described inclination conveyance part, and this substrate returned to the transfer portion that takes out of of level with the angle of inclination of setting,
Describedly move into transfer portion and take out of at least one side of transfer portion, have the angular transformation unit that is set up in parallel in proper order and constitutes by a plurality of conveyers at the angle of inclination of setting substrate respectively along the throughput direction of substrate, wherein,
The described angular transformation unit of moving into transfer section first is moved into conveyer and second and is moved into conveyer and consist of by what the throughput direction along substrate was set up in parallel in turn; First moves into conveyer and second moves into the angle that conveyer is accepted substrate with level and tilted to setting; Substrate is transported to described inclination conveyance part; And; When half of the length dimension of substrate moved into conveyer and left from first; Make this first move into conveyer and lodge into the level that can carry out the transfer of next substrate
Described angular transformation unit of taking out of transfer portion first is taken out of conveyer and second and is taken out of conveyer and constitute by what the throughput direction along substrate was set up in parallel in turn, first takes out of conveyer and second takes out of conveyer with conveying substrate after accepting substrate and the level of lodging at the state of the angle tilt of setting, and, take out of when conveyer leaves from first at substrate, make this first take out of conveyer and erect to carrying out the heeling condition of the transfer of next substrate.
4. the carrying method of the substrate of the conveying device of a substrate as claimed in claim 1 is carried the substrate of handling at handling part, it is characterized in that having:
To move into the operation of moving into of described handling part with the substrate that level is sent here;
The substrate of moving into described handling part is tilted to the angle of inclination of setting and the conveying operation of carrying; With
Be received in the operation of taking out of of substrate that described handling part handled,
The described operation of moving into operation and taking out of at least one side of operation has the angular transformation operation at conversion substrate angle of inclination, wherein,
The described angular transformation operation of moving into operation has: first operation of accepting substrate with level; Make second operation of the substrate inclination of accepting with level; With in half of the length dimension of substrate when first moves into conveyer and leaves, make this first move into conveyer and lodge the level that to carry out the transfer of next substrate, the 3rd operation that the substrate after tilting is handed over to described handling part and carries out simultaneously with described first operation.
5. the carrying method of the substrate of the conveying device of a substrate as claimed in claim 1 is carried the substrate of handling at handling part, it is characterized in that having:
To move into the operation of moving into of described handling part with the substrate that level is sent here;
The substrate of moving into described handling part is tilted to the angle of inclination of setting and the conveying operation of carrying; With
Be received in the operation of taking out of of substrate that described handling part handled,
The described operation of moving into operation and taking out of at least one side of operation has the angular transformation operation at conversion substrate angle of inclination, wherein,
The described angular transformation operation of moving into operation has: first operation of accepting substrate with level; Make second operation of the substrate inclination of accepting with level; With in half of the length dimension of substrate when first moves into conveyer and leaves, make this first move into conveyer and lodge the level that to carry out the transfer of next substrate, the 3rd operation that the substrate after tilting is handed over to described handling part and carries out simultaneously with described first operation;
Described angular transformation operation of taking out of operation has: from described conveying operation so that the state that substrate tilts is accepted first operation of substrate; Make the substrate of being accepted with heeling condition be changed to second operation of level; With take out of when conveyer leaves from first at substrate, make this first take out of conveyer and erect, the 3rd operation of the substrate of the level of being changed to being taken out of and carrying out simultaneously with described first operation to carrying out the heeling condition of the transfer of next substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004165846 | 2004-06-03 | ||
| JP2004165846A JP4485853B2 (en) | 2004-06-03 | 2004-06-03 | Substrate transfer apparatus and transfer method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1705097A CN1705097A (en) | 2005-12-07 |
| CN100470754C true CN100470754C (en) | 2009-03-18 |
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ID=35496368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100748988A Active CN100470754C (en) | 2004-06-03 | 2005-06-03 | Substrate conveying device and method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4485853B2 (en) |
| KR (1) | KR101160534B1 (en) |
| CN (1) | CN100470754C (en) |
| TW (1) | TWI359472B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103065998A (en) * | 2011-10-21 | 2013-04-24 | 东京毅力科创株式会社 | Processing bench device and coating processing device using same |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4593536B2 (en) * | 2006-08-23 | 2010-12-08 | 大日本スクリーン製造株式会社 | Attitude change device and substrate transfer device |
| US8502952B2 (en) | 2007-04-14 | 2013-08-06 | Industrial Technology Research Institute | Color cholesteric liquid crystal display devices and fabrication methods thereof |
| JP4834604B2 (en) * | 2007-05-10 | 2011-12-14 | 芝浦メカトロニクス株式会社 | Substrate angle conversion device and substrate processing device |
| KR101303900B1 (en) * | 2012-04-17 | 2013-09-05 | 세메스 주식회사 | Apparatus for processing substrate and method thereof |
| TWI557056B (en) * | 2013-04-24 | 2016-11-11 | 財團法人工業技術研究院 | Delivery apparatus for roll to roll having protection of flexible substrate |
| CN104347352B (en) * | 2013-07-31 | 2018-05-29 | 细美事有限公司 | A kind of substrate board treatment and substrate processing method using same |
| CN108033270A (en) * | 2017-11-23 | 2018-05-15 | 东旭科技集团有限公司 | Glass substrate conveying device and its operating method and glass substrate transmission system |
| JP2019102540A (en) * | 2017-11-29 | 2019-06-24 | 三星ダイヤモンド工業株式会社 | Substrate unloading device |
| KR101867016B1 (en) | 2018-03-22 | 2018-06-12 | 김민석 | Wiping mop |
| CN118081510A (en) * | 2018-12-19 | 2024-05-28 | 东京毅力科创株式会社 | Substrate processing apparatus and substrate processing method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5854427Y2 (en) * | 1979-10-31 | 1983-12-12 | シ−ケ−ディ株式会社 | Multi-row bending conveyor |
| JPH11307493A (en) * | 1998-04-17 | 1999-11-05 | Dainippon Screen Mfg Co Ltd | Substrate processing device |
| JP4339722B2 (en) * | 2004-03-03 | 2009-10-07 | 大日本印刷株式会社 | Substrate transfer system |
-
2004
- 2004-06-03 JP JP2004165846A patent/JP4485853B2/en not_active Expired - Lifetime
-
2005
- 2005-05-23 TW TW094116722A patent/TWI359472B/en not_active IP Right Cessation
- 2005-06-02 KR KR1020050047229A patent/KR101160534B1/en active IP Right Grant
- 2005-06-03 CN CNB2005100748988A patent/CN100470754C/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103065998A (en) * | 2011-10-21 | 2013-04-24 | 东京毅力科创株式会社 | Processing bench device and coating processing device using same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4485853B2 (en) | 2010-06-23 |
| TWI359472B (en) | 2012-03-01 |
| KR20060049511A (en) | 2006-05-19 |
| TW200603328A (en) | 2006-01-16 |
| KR101160534B1 (en) | 2012-06-28 |
| CN1705097A (en) | 2005-12-07 |
| JP2005343639A (en) | 2005-12-15 |
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