1322789 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種平面顯示器用基板輸送裝置尤兑涉 及一種在製造平面顯示㈣基板的過程中，能夠適用於顯 影裝置、且通過最小的基板顯影裝置安裝空間來獲得最大 的空間利用率的平面顯示器用基板輸送裝置。 【先前技術】BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer apparatus for a flat panel display, which is particularly applicable to a developing device and a minimum substrate developing device in the process of manufacturing a flat display (four) substrate. A substrate transfer device for a flat panel display that mounts space for maximum space utilization. [Prior Art]
通常，在平面顯示裝置的製造程序中，在玻璃基板上 形成電路圖形的過程，可包括清洗基板的程序、在已清洗 2基板表面塗㈣光性樹脂而形成感光膜的料、通過預 疋圖案曝光所述感光膜而進行顯影（developing)的程序。 這種顯示器的製造程序中，顯影程序利用以往的顯影 液供給裝置來對基板塗敷顯影液。這種顯影程序，可採用 向盛有顯影液的腔室通過基板的方式或者採用喷射裝置向 基板喷射顯影液的方式進行4這種顯影裝置，包括用於 向腔室供給顯影液的顯影液供給裝置和用於輸送基板 ^裝置。由此，當基板輸㈣腔室時，通軸料供給裝 向基板供給顯影液，並經過一段時間之後，通過輸送裝 置向清洗裝置輸送基板。通常，安裝在所述顯影裝置的 側並將從顯影裝置中輸出的基板向清洗裝置 送裝置’爲了提高基板的處理效率，以傾斜狀態輸送基ί 2ΓΓ及乾燥。這種傳統的顯影裝置，當顯影液供給 /板時爲了顯影（developing )需搁置一段時間之 後再通過基板輸送裝置向清洗裝置輸送基板，因此基板處 5 理時間增加，峰在好漆？政μ 爲倾 厂、降低。而且’在顯影裝置的出口處， *，·' 、’：輸送基板需增設傾斜輸送裝置，s + 並增加製造費用。 …因此安農空間變大 【發明内容】 ::明係馨於上述問題而成的，“的在於提供一種 二二貝影處理過程中’能減少處理時間，並通過最小的 裝空間來減少基板製造費用的平面顯示器用基 爲達到上述㈣’本發明提供一種平板顯示器用基板 ‘】送裝置’其包括：腔室，其被提㈣於處理基板的空間； 支樓部，其被安裝在所述腔室㈣，且具有的框架結 構；多個傾斜輸送部，纟等鉸接在所述支撐部上，且安裝 有由驅動單元轉動的輸送報輪，並通過該輸送輥輪輸送基 板；導引機構，其用於引導所述支撑部移動；另一驅動單 兀，其用於驅動所述支撐部，以使之沿著所述導引機構移 動；傾斜誘導裝置，其誘導所述多個傾斜輸送部以敍接部 爲中心按預定角度傾斜。 所述多個傾斜輸送部包括，鉸接於所述支撐部的第一 傾斜輸送部和鉸接於所述支撐部在所述第一傾斜輸送部下 方位置的第二傾斜輸送部。 所述傾斜誘導裝置，可包括由致動器移動的桿體，該 桿體能夠與所述傾斜輸送部上鉸接部的相反側接觸或者解 除該接觸狀態。 本發明的輸送基板的傾斜輸送部’具有多層結構，因 此能夠減少基板顯影時的箄 傾β Μ等料間，並且由於具有能夠以 斜狀態輸出基板的結;^g Υ „ 、 得還了以減少顯影裝置的安裝空 4，並由此減少基板的製造費用。 【實施方式】 以下為參照附圖詳細說明本發明的較佳實施例。 圖1是用於說明本發明所適用的實施例的結構圖其 ，顯影裝置。本發明的顯影裝置包括；基板供給部3， ”用於供給玻璃基㈣基板；_71，其用於從 所述基板供給部3接收被處理對象基板G1 (或者叫， 並對所述基扳CH (或者G2)塗敷顯影液；顯影部i，其 用於從所述顯影液喷射部71接收基板〇1 (或者，並 將該基板掷置一段基板顯影所需時間，以進行顯影；清洗 部8卜其能夠以傾斜狀態接收來自所述顯影部i的基板⑴ (或者G2)，並對其進行清洗；乾燥部9i，其用於接收 來自所述清洗部81的基板G1 (或者G2)，並對其進行乾 無；以及基板輸出部5,其用於輸出所述乾燥部91内的基 板G1 (或者G2 )。 在所述顯影裝置中，顯影液喷射部71，包括顯影液供 給裝置7U及基板輸送裝i 71卜所述顯影液供給裝置^ 設於腔室内’且對基板G1(或G2)塗敷顯影液並可包括 顯影液喷嘴等。本發明的所述顯影液供給裝置71&可採用 任何一種能夠向基板G1(或G2)供給顯影液而進行基 叫或G2)的顯影處理的裝置，而且也可以採用通常二 置’因此省略其詳細說明。 1322789 而且，所述清洗裝置的清洗部81和乾燥部Μ，是用 於清洗和乾燥已顯影的基板，所以也可以採用通常的裝 置’因此省略其詳細說明。 圖2是用於說明本發明所涉及實施例的整體結構圖， 圖3是用於說明圖2中主要部分及動作過程的示意圖該 等圖中顯示了顯影部i。該顯影吾"用於暫時保管基板⑴ (或者G2)，並以傾斜狀態輸出基板，以使所述基板⑴ (或者G2)在顯影處理中能夠獲得必要的顯影時間。 在本發明中，通過附圖說明在所述顯影部1的一側設 有基板供、，·α。卩3，並由該基板供給部3向顯影部1供給基 板G1(或G2)的實施例。另外，通過附圖說明在所述顯影 部1的基板G1(或G2)輸出側設有能夠以傾斜狀態輸送基 板的基板輸出部5的實施例。在本發明中，亦可由顯影液 喷射部71取代向所述顯影裝置1供給基板G1(或（52)的基 板供給部3 (如圖1所示）的位置’並由清洗部81取代基 板輸出部5的位置。爲方便起見，本發明只說明在基板供 、··σ °卩3和基板輸出部5之間安裝顯影部丨的實施例。 即’在本發明中，通過基板供給部3，來說明以水平 心向顯衫部1供給基板G1 (或G2)的實施方式，而通過 所述基板輸出部5，來說明以傾斜狀態輸出基板G1 (或G2) 的實施方式》 如圖2所示’所述基板供給部3具備由通常的驅動源 即電動機 〇 恢3&轉動的多個輥輪R，並且通過這些輥輪R向水 '方向輸送基板G1 (或G2)。另外，所述基板輸出部 5 8 1322789 具備由另-通常的驅動源即電動機5a轉動的多個親輪汉， k 一輥輪R肖於接收以傾斜狀態搬入的基板⑴（戍 叫，並將其輸送到清洗裝置，而這些輥輪r被沿著傾斜 方向設置，以使基板G1 (或G2)在傾斜狀態下移動。 所述顯影部i包括：腔室u，其被提供用於處理所述 基板叫或G2)的空間；支揮部15，其被安裝在所述腔室 11内部；第-傾斜輸送部17和第二傾斜輸送部19，其等 鉸接於所述支禮部15的卜-T- # 1 15的上、下位置；導引機構21，其用 於引導所述支撐部丨5，以使其％ _ 文再，口著上下方向移動；驅動單 元23，其用於帶動所述支標 <又伢邛15移動；以及傾斜誘 置25，其用於使第一傾斜發 八別以笛卩17和第二傾斜輸送部19 “」以第-鉸接部18和第二錢接部2〇爲 一定的傾斜角度。 付切i侏符 所述腔室11提供能夠使 平面‘，、員不器用基板G1 (或G2、 滯留一段時間，以接受顯爭 ^ } 又’.肩景/( developing )處理的*門 所述腔室11包括用於接入其一“。匙理的工間。 接入基板G1(或G2)的入口〗？心— 結束顯影處理後用於輸出其此^ 掏出基板G1(或G2)的出口 14蓉。 所述支樓部1 5可y卜τ i σ上下方向移動，且具有框靼 而所述第一傾斜輸送部17 有杧架結構。 “ 和第二傾斜輸送部19分別妨垃 於所述支撐部15。這 刀別鉸接 u播 支撐部15，並不限於框羊形 結構，只要是能夠上下兹t Φ狀的 舛上下移動的結構，均可採用。s t 述支撐部15上鉸接有所 另外，所 所返第一傾斜輸送部17 傾斜輸送部19的結構，和所述第二 &夠在傾斜狀態下輸送其/ G2)。同時，所述支撐 土板G1(或 ° 被製成能夠使所述第一傾斜 9 1322789 輸送。P 17和第一傾斜輸送部19在其上上下並排的結構。 ，即，所述支撐部15的上、下位置上较接有第—傾斜輪 运部17和第二傾斜輪送部19,且具有第一鉸接部18和第 一鉸接σρ 20’而且所述第一傾斜輸送部和第二傾斜輸 送I5 1 9可保持水平或者按一定角度傾斜的狀態。換言之，’ 所述支撑部15與第—傾斜輸送部17的-側鉸接，而第二 傾斜輸送。|5 19的—侧鉸接於所述支樓部15在第 送部Π的下方位置上。 猫力丨认^ 4 輸 一 上所述第一傾斜輸送部丨7和所述第 一傾斜輸送部19，可诵讲私、+、±沐α 以固定過料支料15,以水平狀態予 按—疋的傾斜角度（能夠使基板在傾钭妝 態下移動的角度），分別以帛h *傾斜狀 爲中心轉動。#中，：：第一叙接部18和第二鉸接部2〇 、 所述第一傾斜輸送部17和第-傾钭 輸送部19可通過如下弟-傾斜 架形狀，而所述支樓部15 丨5爲框 '、所逑第一傾斜輸送部17；?筮 二傾斜輸送部19之門疋丨Η及第 主 β的錢接部及其相反側保持同一個k 平面，從而使第-傾斜輪 個水 夠放置在支撐…Si7:第二傾斜輸送部19能 的支撐部15㈣框^…、本實施例的示意圖上所顯示 疋月b夠使所述第一傾斜 要 苴鉉接、# v 軋送部17和第二傾斜輸送部19鱼 八叙接並以一定的傾斜备疮絲缸 態或上下並排的結構均二度轉動，同時能夠保持水平狀 所述第一傾斜輸送部17和 同-個驅動源或者各自 —頃斜輸送部19可通過 述第一傾斜輸送部17；π源輪送基板⑺（或叫。所 和第二傾斜輸送部19(如圖2所示） 1322789 上’連續配置有用於輸送基板G1(或G2)的多個輥輪R，這 些輕輪R通過多個框架31、33、35、37相結合。所述框 架31、35分別和驅動電動機173、19&相配合。所述電動 機17a、19a的驅動力，可通過通常的傳動帶、鍵條、鍵輪 齒等動力傳遞部件傳遞到所述輥輪R，並使之轉動。帶動 所述輥輪R轉動的結構，當然可以採用通常的動力傳遞結 構。而且，所述框架31、35鉸接於所述支撐部15上，並 可在水平或者傾斜狀態下輸送所述基板G1 (或G2)。 所述導引機構21啟動引導所述支撐部15上下移動的 作用。如圖所示，這種導引機構21，可通過單獨的導引框 架來導引所述支撐部15,也可通過與腔室π内部相結合 的結構，或者腔室11的内壁等結構來引導所述支撐部15 上下移動。即，本發明的導引機構21，並不限於圖所示的 結構或者所述實施例的說明，只要是能夠引導所述支撐部 1 5 ’以使其上升或下降的結構均可採用。 在所述支撐部15可配有驅動單元23，以使所述支撑 部15能夠沿著所述導引機構21升降。所述驅動單元23 可以使用氣缸、油壓虹或者電動機及由電動機轉動的旋轉 螺桿等。例如’所述驅動單元23可包括電動機23a和用於 傳遞所述電動機23a的驅動力以使所述支撐部丨5上下移動 的動力傳遞料。作爲所述動力傳遞部件的—例，可採用 如下結構.即在支撐部15上可轉動地配合旋轉螺桿2氕， 而通過傳動帶23b或鏈條等部件，所述電動機23&等的驅 動力傳遞到所述旋轉螺桿23e上並使之㈣，而所述旋轉 丄 螺桿23c的旋轉又可德勒+认 了帶動所述支撐部15上下移動。本 中只說明了所述驅動單“的-個實施方式，。要β 合有所述第一傾斜輸送部17及第二傾斜輸送“ 的支樓°Ρ丨5上下移動的結構均可採用。In general, in the manufacturing process of the flat display device, the process of forming a circuit pattern on the glass substrate may include a process of cleaning the substrate, coating the surface of the cleaned 2 substrate with a photo-resin to form a photosensitive film, and passing the pre-pattern. A process of developing the photosensitive film to develop it. In the manufacturing process of such a display, the developing program applies a developing solution to the substrate by a conventional developing solution supply device. Such a developing process can be carried out by passing a substrate through a substrate containing a developing solution or by ejecting a developing solution onto a substrate by a spraying device, including a developing solution for supplying a developing solution to a chamber. The device and the device for transporting the substrate. Thereby, when the substrate is fed into the (four) chamber, the through-feed material is supplied to the substrate to supply the developer, and after a lapse of time, the substrate is transported to the cleaning device by the transport device. Usually, the substrate is mounted on the side of the developing device and the substrate outputted from the developing device is supplied to the cleaning device. In order to improve the processing efficiency of the substrate, the substrate is transported in an inclined state and dried. In the conventional developing device, when the developer is supplied to the plate, it is required to be left for a period of time to be developed, and then the substrate is transported to the cleaning device through the substrate transfer device, so that the substrate is increased in time and the peak is in good paint. Politics μ is a dumping and lowering. Moreover, at the exit of the developing device, *, · ', ': the inclined substrate is required to transport the substrate, and the manufacturing cost is increased. ...therefore, the Annon space becomes larger [invention]: Ming Xin is made up of the above problems, "there is to provide a kind of two-two-beat processing process, which can reduce the processing time and reduce the substrate by the minimum loading space. The flat display for manufacturing cost is used to achieve the above (4) 'The present invention provides a substrate for a flat panel display', which comprises: a chamber which is raised (4) for processing a space of the substrate; and a branch portion which is installed at the a chamber (4) having a frame structure; a plurality of inclined conveying portions, a crucible or the like hinged on the supporting portion, and mounted with a conveying wheel rotated by the driving unit, and conveying the substrate through the conveying roller; guiding a mechanism for guiding movement of the support portion; another driving unit for driving the support portion to move along the guiding mechanism; tilt inducing means for inducing the plurality of tilts The conveying portion is inclined at a predetermined angle centering on the guiding portion. The plurality of inclined conveying portions include a first inclined conveying portion hinged to the supporting portion and hinged to the supporting portion at the first a second inclined conveying portion at a position below the oblique conveying portion. The inclination inducing device may include a rod body moved by an actuator, the rod body being capable of contacting or releasing the contact with an opposite side of the hinge portion of the inclined conveying portion In the state in which the inclined conveying portion of the conveying substrate of the present invention has a multi-layered structure, it is possible to reduce the amount of slanting of the substrate during development of the substrate, and to have a knot capable of outputting the substrate in an oblique state; In order to reduce the mounting space 4 of the developing device, and thereby reduce the manufacturing cost of the substrate. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a structural view for explaining an embodiment to which the present invention is applied, and a developing device. The developing device of the present invention includes: a substrate supply portion 3, "for supplying a glass-based (four) substrate; - 71, for receiving a substrate to be processed G1 from the substrate supply portion 3 (or calling, and pulling the substrate (or G2) coating a developing solution; a developing portion i for receiving the substrate 〇1 from the developing solution ejecting portion 71 (or, and throwing the substrate for a period of time required for development of the substrate for development; cleaning portion 8 which can receive and clean the substrate (1) (or G2) from the developing portion i in an inclined state; the drying portion 9i for receiving the substrate G1 (or G2) from the cleaning portion 81, And drying the substrate; and a substrate output portion 5 for outputting the substrate G1 (or G2) in the drying portion 91. In the developing device, the developing solution ejecting portion 71 includes a developing solution supply device 7U And the substrate transporting device 71 is disposed in the chamber and coating the substrate G1 (or G2) with a developer solution and may include a developer nozzle, etc. The developer supply device 71 & Any one can be supplied to the substrate G1 (or G2) The developing solution is subjected to a development process of the base or G2), and it is also possible to use two or more conventional ones. Therefore, the detailed description thereof is omitted. 1322789 Moreover, the cleaning portion 81 and the drying portion of the cleaning device are used for cleaning and Fig. 2 is a view showing an overall configuration of an embodiment of the present invention, and Fig. 3 is a view for explaining the main part and operation of Fig. 2, in which a conventional device is used. Schematic diagram of the process The development section i is shown in the figures. The development is used to temporarily store the substrate (1) (or G2) and output the substrate in an inclined state so that the substrate (1) (or G2) is in the development process. In the present invention, a substrate supply, an α·卩3 is provided on one side of the developing unit 1 , and a substrate is supplied from the substrate supply unit 3 to the developing unit 1 . An embodiment of G1 (or G2). An embodiment in which the substrate output portion 5 capable of transporting the substrate in an inclined state is provided on the output side of the substrate G1 (or G2) of the developing unit 1 will be described with reference to the drawings. In, also Instead of the position where the substrate G1 (or the position of the substrate supply portion 3 (shown in FIG. 1) of the (52) is supplied to the developing device 1 by the developer ejecting portion 71, the position of the substrate output portion 5 is replaced by the cleaning portion 81. For the sake of convenience, the present invention only describes an embodiment in which the developing unit 丨 is mounted between the substrate supply and the substrate output portion 5. That is, in the present invention, the substrate supply unit 3 is described as being horizontal. An embodiment in which the heart is supplied to the shirt portion 1 with the substrate G1 (or G2), and an embodiment in which the substrate G1 (or G2) is outputted in an inclined state by the substrate output portion 5 will be described. The substrate supply unit 3 includes a plurality of rollers R that are rotated by a normal drive source, that is, a motor, and the substrate G1 (or G2) is transported in the water 'direction by the rollers R. Further, the substrate output portion 5 8 1322789 includes a plurality of rotating wheels that are rotated by a motor source 5a that is another normal driving source, and the k-roller R receives the substrate (1) that is carried in an inclined state (howling and It is conveyed to the cleaning device, and these rollers r are disposed in an oblique direction to move the substrate G1 (or G2) in an inclined state. The developing portion i includes a chamber u which is provided for processing a space of the substrate called or G2); a branch portion 15 installed inside the chamber 11; a first inclined inclined portion 17 and a second inclined conveying portion 19, which are hinged to the branch portion 15 The upper and lower positions of the Bu-T-#1 15; the guiding mechanism 21 for guiding the supporting portion 丨5 so that the % _ text is moved in the up and down direction; the driving unit 23 is used for Driving the yoke <also 伢邛 15 movement; and tilting the slanting 25 for arranging the first slanting with the flute 17 and the second slanting conveying portion 19" to the first hinge portion 18 and The second money joint 2 is a certain angle of inclination. The chamber 11 provides a chamber that can enable the plane to be used, and the substrate G1 (or G2, which is held for a period of time to accept the display) and the 'management' The chamber 11 includes a chamber for accessing it. The inlet of the substrate G1 (or G2) is opened. The core is used to output the substrate G1 (or G2) after the development process is finished. The outlet portion 14 is movable in the up and down direction and has a frame and the first inclined conveying portion 17 has a truss structure. "And the second inclined conveying portion 19 respectively The support portion 15 is not limited to the frame-shaped structure, and may be used as long as it can move up and down in a z-shaped shape. In addition, the upper hinged conveying portion 17 is configured to incline the conveying portion 19, and the second & is capable of conveying the /G2) in an inclined state. At the same time, the supporting soil plate G1 (or ° is formed to enable the first inclination 9 1322789 to be transported. P 17 and the first inclined conveying portion 19 are vertically arranged side by side. That is, the support portion 15 The upper and lower positions are connected to the first tilting wheel portion 17 and the second tilting wheel portion 19, and have a first hinge portion 18 and a first hinge σρ 20' and the first inclined transport portion and the second The inclined conveyance I5 1 9 can be kept horizontal or inclined at a certain angle. In other words, the support portion 15 is hinged to the side of the first inclined conveyance portion 17, and the second oblique conveyance. The branch portion 15 is located at a position below the first conveying portion 。. The first inclined conveying portion 丨7 and the first inclined conveying portion 19 are displayed on the first and second inclined conveying portions 19. , ± Mu α to fix the over-feed material 15 and to press the tilt angle of the horizontal direction (the angle at which the substrate can be moved in the tilting state) in a horizontal state, respectively, with the 帛h* tilted shape as the center. :: first splicing portion 18 and second hinge portion 2 〇, said first inclined conveying portion 17 and first tilting The delivery portion 19 can pass through the following shape of the tilting frame, and the branch portion 15 丨 5 is the frame ', the first inclined conveying portion 17; the threshold and the main β of the inclined conveying portion 19 The money joint and its opposite side maintain the same k-plane, so that the first-tilt wheel water is placed on the support...Si7: the second inclined transport portion 19 can support portion 15 (four) frame, on the schematic diagram of the embodiment The display of the month b is sufficient for the first inclined to be spliced, the # v rolling portion 17 and the second inclined conveying portion 19 to be connected and arranged in a certain tilted state, or in a side-by-side configuration. Rotating twice, while maintaining the horizontal shape, the first inclined conveying portion 17 and the same driving source or the respective oblique conveying portions 19 can be rotated by the first inclined conveying portion 17; the π source is to feed the substrate (7) (or And the second inclined conveying portion 19 (shown in FIG. 2) 1322789 is continuously disposed with a plurality of rollers R for conveying the substrate G1 (or G2), and the light wheels R pass through the plurality of frames 31, 33, 35 And 37 are combined. The frames 31, 35 are respectively matched with drive motors 173, 19 & The driving force of 19a can be transmitted to the roller R and rotated by a power transmission member such as a normal transmission belt, a key bar, a key tooth, etc. The structure for driving the roller R to rotate can of course be adopted. a power transmission structure. Moreover, the frames 31, 35 are hinged to the support portion 15, and the substrate G1 (or G2) can be conveyed in a horizontal or inclined state. The guiding mechanism 21 initiates guiding the support. The action of the portion 15 moving up and down. As shown, the guiding mechanism 21 can guide the supporting portion 15 through a separate guiding frame, or can be combined with the interior of the chamber π, or a cavity. The inner wall of the chamber 11 or the like is configured to guide the support portion 15 to move up and down. That is, the guide mechanism 21 of the present invention is not limited to the configuration shown in the drawings or the description of the above embodiment, and any configuration that can guide the support portion 15' to be raised or lowered can be employed. The support portion 15 may be provided with a drive unit 23 to enable the support portion 15 to move up and down along the guide mechanism 21. The drive unit 23 may use a cylinder, a hydraulic pressure or a motor, a rotary screw that is rotated by a motor, or the like. For example, the drive unit 23 may include a motor 23a and a power transmission material for transmitting the driving force of the motor 23a to move the support portion 上下5 up and down. As an example of the power transmission member, a configuration may be employed in which the rotary screw 2 is rotatably fitted to the support portion 15, and the driving force of the motor 23 & etc. is transmitted to the member through the belt 23b or the chain member or the like. The rotating screw 23e is placed on the rotating screw 23e, and the rotation of the rotating boring screw 23c can be used to drive the support portion 15 to move up and down. Only one embodiment of the drive unit will be described, and a structure in which the first inclined conveying portion 17 and the second inclined conveying unit are moved up and down.
^發月的傾斜誘導裝置25，可將所述第—傾斜輸 17和第二傾斜輸送部19從水平配置狀態維持在傾斜狀離， 而所述傾斜誘導裝S 25可由致動器構成。所述致動^設 置在腔室11或支擇部15的-側上，並具有可沿水平方向 移動的掛冑25a。即’所述致動器具有可在水平方向上往 複移動-段距離的掛部25a ’並可由氣缸等來驅動。當所 述掛部…在所述致動器的作用下移到第-傾斜輸送部17 或者第二傾斜輸送部19的下方位置時，倘若所述支擇部15 下降，則所述第一傾斜輸送部17或者第二傾斜輸送部Η 鉸接部的相反側與所述掛部25a相接觸，而所述第一傾斜 輸送部17或第二傾斜輸送部19即可呈現傾斜狀態，並以The lug inducing device 25 of the lunar month can maintain the first tilting conveyance 17 and the second oblique transporting portion 19 in an inclined state from the horizontally disposed state, and the tilting inducing mount S 25 can be constituted by an actuator. The actuator is disposed on the side of the chamber 11 or the support portion 15 and has a hook 25a movable in the horizontal direction. That is, the actuator has a hanging portion 25a' which is movable in the horizontal direction by a distance of a segment and can be driven by a cylinder or the like. When the hanging portion ... moves to the lower position of the first inclined conveying portion 17 or the second inclined conveying portion 19 by the action of the actuator, if the supporting portion 15 is lowered, the first inclination The opposite side of the conveying portion 17 or the second inclined conveying portion 铰接 hinge portion is in contact with the hanging portion 25a, and the first inclined conveying portion 17 or the second inclined conveying portion 19 can be inclined, and
傾斜狀悲'輪送基板G1 (或G2)。本發明的所述傾斜誘導裝 置2 5的結構，並不限於圖中所示的結構，只要是配置在 所述支撐部15上，且能夠使所述第一傾斜輸送部17及第 二傾斜輸送部19，從水平狀態轉變成一定傾斜角度的結構 均可採用。 下面詳細說明本發明的上述實施例的動作過程。 首先通過以下實施例來進行說明。即，所述基板供給 部3被配置成能夠以水平狀態輸送基板gi的狀態，且位 於能夠以水平狀態向顯影部1的第一傾斜部17輪送基板⑴ 12 1322789 的位署 μ _ 置上’而所述基板輸出部5位於能夠以傾斜狀態接收 從所述顯衫裝置1輸出的基板G1(或G2)的位置上（如圖 4所示狀態）。 當所述基板供給部3以水平狀態向顯影部丨供給基板 G1時’所述第—傾斜輸送部17就以水平狀態接收基板gi。 此時’電動機17a的驅動力經鏈條及鏈輪齒傳遞到親輪R 上並使之轉動，而在所述輥輪R的轉動下，所述第一傾斜 輸送部17得以接收基板G1。當所述基板G1位於所述第 一傾斜輸送部17上時，可通過控制器（未圖示）控制電 動機17a以使其停止，從而，所述基板G1得以被置放在 第一傾斜輸送部17上。被輸入的所述基板Q1上也可塗敷 有顯影液，此時，所述基板G1可能需要顯影反應時間。 而在此時，驅動所述驅動單元23中的電動機23a ,並通過 傳動帶23b及旋轉旋轉螺桿23c ,提升所述支撐部15。據 此，所述支撐部15沿著導引機構21上升，以使第二傾斜 輸迗部19位於和所述基板供給部3相等高度的位置上。 匕夺所述基板供給部3，又把另一個基板G2以水平狀熊 輸送到所述第二傾斜輸送部19。所述第二傾斜輸送部Η， ’·呈由和所述第一傾斜輸送部17的基板輸送方式相同的方 式接收基板G2。而在此過程中，第一基板G1則完成顯影 (圖2所示狀態）。 此時，在控制器的控制下，所述驅動單元23的電動機 23a被驅動而使所述支撐部15下降一定距離。並且當驅動 所述傾斜誘導裝置25時，掛部25a向第一傾斜輸送胃部17 13 丄以2789 的第一鉸接部18相反側的下方位置移動。在此狀態下， 通過控制所述驅動單元23的電動機23a，使所述支樓部15 下降以使所述第一傾斜部丨7和基板輸出部5保持相同的 高度。此時，所述第一傾斜部17就能夠以第一鉸接部18 爲中心轉動而傾斜一定角度。接著，繼續驅動電動機i7a 而使輥輪R轉動時，第一基板G1則在傾斜狀態下向基板 輸出部5方向移動。Tilted sad 'wheels to the substrate G1 (or G2). The structure of the tilt inducing device 25 of the present invention is not limited to the configuration shown in the drawings, and may be disposed on the support portion 15 and enable the first inclined transport portion 17 and the second oblique transport. In the portion 19, a structure that changes from a horizontal state to a certain inclination angle can be employed. The operation of the above embodiment of the present invention will be described in detail below. First, the description will be made by the following examples. In other words, the substrate supply unit 3 is disposed in a state in which the substrate gi can be conveyed in a horizontal state, and is located on the position μ _ which can transfer the substrate (1) 12 1322789 to the first inclined portion 17 of the developing unit 1 in a horizontal state. The substrate output portion 5 is located at a position capable of receiving the substrate G1 (or G2) output from the display device 1 in an inclined state (as shown in FIG. 4). When the substrate supply unit 3 supplies the substrate G1 to the developing unit 水平 in a horizontal state, the first inclined conveying unit 17 receives the substrate gi in a horizontal state. At this time, the driving force of the motor 17a is transmitted to the rotating wheel R via the chain and the sprocket teeth, and the first inclined conveying portion 17 receives the substrate G1 under the rotation of the roller R. When the substrate G1 is located on the first inclined conveying portion 17, the motor 17a can be controlled to be stopped by a controller (not shown), so that the substrate G1 can be placed in the first inclined conveying portion. 17 on. The substrate Q1 to be input may also be coated with a developing solution, and at this time, the substrate G1 may require a development reaction time. At this time, the motor 23a in the drive unit 23 is driven, and the support portion 15 is lifted by the belt 23b and the rotary screw 23c. Accordingly, the support portion 15 is raised along the guide mechanism 21 such that the second inclined feed portion 19 is located at the same height as the substrate supply portion 3. The substrate supply unit 3 is scrambled, and the other substrate G2 is transported to the second inclined transport unit 19 as a horizontal bear. The second inclined transport unit Η, ’ receives the substrate G2 in the same manner as the substrate transport method of the first inclined transport unit 17. In the process, the first substrate G1 is developed (the state shown in Fig. 2). At this time, under the control of the controller, the motor 23a of the drive unit 23 is driven to lower the support portion 15 by a certain distance. And when the tilt inducing device 25 is driven, the hanging portion 25a moves to the lower position of the first obliquely conveyed stomach portion 17 13 相反 at the opposite side of the first hinge portion 18 of 2789. In this state, by controlling the motor 23a of the drive unit 23, the branch portion 15 is lowered to maintain the first inclined portion 丨7 and the substrate output portion 5 at the same height. At this time, the first inclined portion 17 can be rotated by a certain angle around the first hinge portion 18. Next, when the motor i7a is continuously driven to rotate the roller R, the first substrate G1 moves in the direction of the substrate output portion 5 in an inclined state.
侧 此外，當所述基板G1完全輸出到基板輸出部5… 時，驅動所述電動機23a而提升所述支撐部15，並使所述 傾斜誘導裝置25的掛部25a向水平方向移動。 此時，所述第一傾斜部17保持水平配置的狀態，而此 時再通過控制所述電動機23a，以使第—傾斜部Η下降到 和所述基板供給部3保持㈣的高度、且可接收新的基板 (未圖示）的位置上。此時’如前所述，第一傾斜部Η 又從基板供給部3接收另一基板（未圖示）^ 接著說明向基板輸出部5輸送所述第二傾斜輸送部Η 上第一基板G2的方法。 使所述傾斜誘導裝置25的掛部25a移向和所述第二傾 斜輸送部19的位置相反的方向。之後通過控制電動機23a 來使支榜部15上升。當,然，所述切部i5在移動時同樣 接觉導51機構21的導弓卜而在所述切部μ上升時 二傾斜輸送部19也隨之上升。此時，通過控制電動機23a， 使所述第二料輸送部19停止料高於基板輸出部5高 度的位置上。然後，控制所述傾 守裝置25，以使其掛 1322789 部25a的前端位於第二傾斜輸送部19的第二鉸接部相 反側的下方。然後，用控制器控制驅動單元23的電動機 23a ’使其驅使支撐部15下降。此時，所述第二傾斜輸送 部19也隨之下降，並以第二鉸接部2〇爲中心轉動而傾斜迗 然後’通過驅動電動機19a來使所述第二傾斜輸送部19的 輥輪R轉動，從而在傾斜狀態下將第二基板G2輸送到所 述基板輸出部5 (如圖3所示狀態）。 综上所述，本發明不僅可以保障基板顯影處理的充分 的時間，還可以縮短總體時間來提高生産效率。此外，還 可以在傾斜狀態下輸出基板，從而能夠大幅減少腔室或裝 置的安裝空間。 < 【圖式簡單說明】 圖1是表示本發明所適用的基板輸送裝置的結構圖。 圖2疋用於說明本發明所涉及實施例的整體結構圖。 圖3是用於說明圖2的主要部分及動作過程的示意圖。 圖4是用於說明本發明動作過程的示意圖。 【主要元件符號說明】 1 顯影部 3 基板供給部 3a 電動機 5 基板輸出部 5a 電動機 11 腔室 12 入口 15 1322789Further, when the substrate G1 is completely output to the substrate output portion 5, the motor 23a is driven to lift the support portion 15, and the hanging portion 25a of the tilt inducing device 25 is moved in the horizontal direction. At this time, the first inclined portion 17 is maintained in a horizontally disposed state, and at this time, the motor 23a is controlled to lower the first inclined portion 到 to a height of (4) with the substrate supply portion 3, and Receive a new substrate (not shown) at the location. At this time, as described above, the first inclined portion 接收 receives another substrate (not shown) from the substrate supply unit 3, and then the first substrate G2 on the second inclined transport portion 输送 is transported to the substrate output portion 5. Methods. The hanging portion 25a of the inclination inducing device 25 is moved in a direction opposite to the position of the second inclined conveying portion 19. Thereafter, the support unit 15 is raised by controlling the motor 23a. When the cutting portion i5 is also moved, the guiding mechanism of the guiding mechanism 51 is also sensed, and when the cutting portion μ is raised, the two inclined conveying portions 19 are also raised. At this time, by controlling the motor 23a, the second material conveying portion 19 is stopped at a position higher than the height of the substrate output portion 5. Then, the tilting device 25 is controlled such that the front end of the hanging portion 1322789 portion 25a is located below the opposite side of the second hinge portion of the second inclined conveying portion 19. Then, the motor 23a' of the drive unit 23 is controlled by the controller to drive the support portion 15 down. At this time, the second inclined conveying portion 19 is also lowered, and is tilted about the second hinge portion 2A, and then the roller R of the second inclined conveying portion 19 is made by the driving motor 19a. The rotation is performed to convey the second substrate G2 to the substrate output portion 5 in a tilted state (as shown in Fig. 3). As described above, the present invention can not only ensure sufficient time for substrate development processing, but also shorten overall time to improve production efficiency. In addition, the substrate can be outputted in an inclined state, so that the installation space of the chamber or the device can be greatly reduced. <Brief Description of the Drawings> Fig. 1 is a configuration diagram showing a substrate transfer apparatus to which the present invention is applied. Figure 2A is a view showing the entire configuration of an embodiment of the present invention. Fig. 3 is a schematic view for explaining a main part and an operation process of Fig. 2; Fig. 4 is a schematic view for explaining the operation of the present invention. [Description of main component symbols] 1 Developing section 3 Substrate supply section 3a Motor 5 Substrate output section 5a Motor 11 Chamber 12 Entrance 15 1322789
14 出口 15 支撐部 17 第一傾斜輸送部 17a 電動機 18 第一鉸接部 19 第二傾斜輸送部 19a 電動機 20 第二鉸接部 21 導引機構 23 驅動單元 23a 電動機 23b 傳動帶 23c 旋轉螺桿 25 傾斜誘導裝置 25a 掛部 31 框架 33 框架 35 框架 37 框架 71 顯影液喷射部 71a 顯影液供給裝置 71b 基板輸送裝置 81 清洗部 91 乾燥部 16 1322789 G1 基板 G2 基板 R 輥輪14 outlet 15 support portion 17 first inclined conveying portion 17a motor 18 first hinge portion 19 second inclined conveying portion 19a motor 20 second hinge portion 21 guiding mechanism 23 drive unit 23a motor 23b transmission belt 23c rotary screw 25 tilt inducing device 25a Hanging portion 31 Frame 33 Frame 35 Frame 37 Frame 71 Developing solution ejecting portion 71a Developing solution supply device 71b Substrate conveying device 81 Cleaning portion 91 Drying portion 16 1322789 G1 Substrate G2 Substrate R Roller